超精密抛光材料的非连续去除机理

通过对表面原子／分子氧化去除动态平衡模型的分析，应用概率统计方法推导了单个磨粒的多分子层薄膜的非连续去除模型，该模型考虑了化学机械抛光（CMP）中化学作用与机械作用的协调性，同时考虑了芯片新鲜表面的直接去除和多层氧化薄膜的去除。在特定条件下，应用图形分析法找到了化学作用与机械作用协调的半经验公式。研究结果表明：材料去除率与去除层数呈指数关系；一直增加化学作用并不能增大材料去除率；机械化学协调作用时，去除率始终保持极值去除。模型预测结果和试验结果相吻合。     

CMP过程芯片表面氧化膜生成速度影响因素的分析

根据理论和试验分析,将机械化学抛光(CMP)过程分成两个阶段:化学作用主导阶段和机械作用主导阶段,并从机械作用角度导出CMP过程两个阶段芯片表面材料去除率的数学模型,模型全面地考虑了抛光盘特性参数(弹性模量、硬度、表面粗糙度峰的尺寸分布)、CMP工作参数(压力和抛光速度)、抛光液中磨粒的机械作用和氧化剂种类、氧化剂浓度等化学作用的影响。然后根据这两个阶段的平衡点导出定量描述芯片表面氧化膜生成速度的数学模型。详细分析机械作用因素(磨粒的浓度、磨粒的粒度分布特性)、化学作用因素(抛光液中氧化剂种类、浓度)以及磨粒/芯片/抛光盘的材料特性参数对芯片表面氧化膜生成速度的影响规律。该CMP过程芯片表面氧化膜生成速度定量模型的导出,对进一步深入研究CMP材料去除机理和更加准确地控制CMP过程,具有一定的指导作用。     

一种基于非晶层粘性流动的机械化学抛光模型

通过分析单个微纳米磨粒滑动接触的分子动力学模拟的研究结果，提出了在典型的机械化学抛光（CMP）过程中芯片表面材料的去除应为表面非晶层物质粘性流动所致的新观点。基于这种机理，应用微观接触力学和磨粒粒度分布理论建立了一种新的表征CMP过程材料去除速率的数学模型。模型中引入了一个表征单个磨粒去除芯片表面非晶层能力的比例系数k，k综合反映了磨粒的机械作用、抛光液对芯片表面的化学作用和芯片的材料特性。通过实验验证发现该模型的理论预测值与实验测定值十分吻合。     

考虑摩擦切向力的弹塑性粗糙表面接触模型

基于接触微凸体由弹性变形向弹塑性变形及最终向完全塑性变形的转化皆是连续和光滑的假设,提出一种综合考虑弹塑性变形以及摩擦切向力等因素的新型粗糙表面接触模型。通过分析不同塑性指数以及载荷条件下该模型与ZMC模型以及GW模型预测。结果发现:在低塑性指数、小法向接触载荷情况下,该模型预测的真实接触面积相比ZMC模型偏小,甚至比GW模型预测的真实接触面积偏小,但是随着法向接触载荷的增加,该模型预测的真实接触面积逐渐增大,并超过ZMC模型以及GW模型预测结果;在高塑性指数下,该模型预测的真实接触面积即使在小法向接触载荷情况下也相比ZMC模型以及GW模型预测的真实接触面积大,且随着载荷的增加,真实面积之间的差距也逐渐增大;随着塑性指数的增加,该模型预测的真实面积超过GW模型以及ZMC模型预测值的临界载荷逐渐减小。     

基于弹性赫兹接触的钢轨砂带打磨材料去除建模研究

为揭示钢轨砂带打磨材料去除机理,针对接触轮-钢轨曲面接触和砂带表面磨粒尺寸、位置随机特点,基于弹性赫兹接触理论,分析接触轮-钢轨宏观接触区域状态,获得接触面积和名义接触压力分布;结合砂带表面磨粒出刃高度分布统计学模型与单颗磨粒微观受力分析,获得单位面积打磨压力与磨粒最大切入深度关系;综合考虑磨粒出刃高度、磨粒外形、磨粒密度、砂带旋转速度、行车作业速度、打磨压力、接触轮硬度以及接触轮与钢轨之间的相对主曲率等多项参数,最终建立钢轨砂带打磨材料去除深度数学模型和材料去除量数学模型。试验结果表明,材料去除深度与材料去除量预测值同试验结果的最大偏差分别为3.6%和11.95%,验证了上述模型的正确性和有效性。     

超声振动抛光中材料去除原理与力学分析

根据超声振动抛光原理分析了弹塑性材料抛光过程中的材料去除方式;建立了弹塑性材料的材料去除模型,给出了磨粒速度、冲击载荷和工件表面受力变形的数学表达式;分析讨论了抛光过程和抛光参数的影响并用已有实验验证了该模型的合理性。     

新的粗糙表面弹塑性接触模型

提出一种新型的粗糙表面弹塑性微观接触模型.该模型的建立基于接触力学理论和接触微凸体由弹性变形向弹塑性变形及最终向完全塑性变形的转化皆是连续和光滑的假设.研究单个微凸体在载荷逐渐增加时的变形规律,并重点推出弹塑性变形区间的接触方程.在此基础上应用概率统计理论导出了粗糙表面的接触载荷、平均分离和实际接触面积之间的数学关系式.在不同的塑性指数和载荷条件下,该模型与GW弹性模型和CEB弹塑性模型就实际接触面积和法向距离的预测结果进行了对比.结果表明,在同样塑性指数和载荷条件下比GW模型预测的实际接触面积大但法向距离小,且两者的差距随塑性指数和载荷的增加而增大.因此该模型的预测结果更加符合人们的试验观察和直觉,能够更加科学和合理地描述两个粗糙表面的微观和宏观接触状态.     

考虑棘轮效应的高速轮轨粗糙表面法向接触刚度研究

轮轨接触表面状态直接影响轮轨接触刚度,而高速列车轮轨滚动接触过程中,轮轨表层材料产生弹塑性变形,且轮轨接触表面在循环接触载荷作用下,轮轨表层材料塑性变形累积产生棘轮效应,因此,研究高速轮轨法向接触刚度时要考虑棘轮效应。基于Weierstrass-Mandelbrot函数分形理论建立高速轮轨滚动接触粗糙度数值模型,考虑轮轨滚动接触棘轮效应,采用非线性有限元软件ABAQUS建立高速轮轨滚动接触微观有限元模型。数值计算结果表明:接触载荷作用下考虑轮轨弹塑性变形可更为准确分析高速轮轨法向接触刚度;循环接触载荷作用下,钢轨表层材料等效塑性应变随接触载荷循环次数增加先增加后趋于稳定,从而导致轮轨接触刚度也先下降然后趋于稳定;在相同接触载荷循环次数作用下,法向载荷对高速轮轨接触刚度影响明显,而摩擦因数对轮轨法向接触刚度影响较小。     

粗糙表面微凸体对液黏传动的影响

为研究液黏传动过程中粗糙表面的承载特性,将分形理论引入到两粗糙表面摩擦过程之中,分析传动过程中混合摩擦和边界摩擦两阶段的微凸体承载过程,考虑微凸体弹塑性变形,对M-B模型进行修正,建立修正的微凸体承载模型。建立基于修正M-B模型的微凸体承载模型。通过数值仿真得到有效面积系数、分形参数对液黏调速离合器传动过程的影响规律;对修正的微凸体承载模型的计算结果与M-B模型的计算结果进行对比分析。结果表明:微凸体接触载荷和传递转矩随着面积比的增大而增大,当有效面积系数与尺度系数增大时,接触载荷与传递转矩均有所增大;分形维数为1.5时,微凸体接触载荷与传递转矩最小且随面积比的变化最为缓慢;在整个接触区域内,弹性变形区域的面积、接触载荷以及传递转矩最大,其次是弹塑性变形区域,塑性变形区域最小;考虑弹塑性变形时,微凸体接触载荷与传递转矩均有所下降;修正M-B模型和M-B模型间的修正系数范围在25%以内,修正系数随着有效面积系数、尺度系数的增大而增大,随着分形维数的增大而减小。     

结合面静摩擦因数尺度关联三维分形模型

针对现有结合面静摩擦因数分形模型的静摩擦因数随结合面法向接触载荷增大而增大,与试验研究结论及统计模型不一致的问题,基于尺度等级定义微凸体的大小,严格区分微凸体高度与变形,构建各尺度等级微凸体的法向接触载荷与接触面积之间关系及其发生弹性和弹塑性第一变形时所能承受的最大切向载荷即最大静摩擦力计算模型,进而建立结合面法向接触载荷与最大静摩擦力计算模型,在此基础上,依据结合面静摩擦因数定义,提出与微凸体尺度等级关联的考虑微凸体完全弹性、弹塑性和完全塑性三种变形机制的结合面静摩擦因数三维分形模型,数值仿真分析了结合面静摩擦因数与法向接触载荷和分形维数D等的关系,结果表明结合面静摩擦因数随着结合面法向接触载荷的增大而减小,随着分形维数的增大而增大,并试验实例验证了所建模型的正确性,解决了现有结合面静摩擦因数分形模型与统计模型和试验结果之间的不一致性.     

Minimal Realization of Linear Graph Models for Multi-physics Systems

An engineering system may consist of several different types of components,belonging to such physical"domains"as mechanical,electrical,fluid,and thermal.It is t...     

INTEGRAL EQUATION METHOD＇S APPLICATION IN HOLE-EDGE STRESS OF COMPOSITE MATERIAL PLATE WITH DIFFERENT SHAPED HOLES

The strength of composite plate with different hole-shapes is always one of the most important but complicated issues in the application of the composite material. The holes will lead to mutations and discontinuity to the structure. So the hole-edge stress concentration is always a serious phenomenon. And the phenomenon makes the structure strength decrease very quickly to form dangerous weak points. Most partial damage begins from these weak points. According to the complex variable functions theory, the accurate boundary condition of composite plate with different hole-shapes is founded by conformal mapping method to settle the boundary condition problem of complex hole-shapes. Composite plate with commonly hole-shapes in engineering is studied by several complex variable stress fimction. The boundary integral equations are founded based on exact boundary conditions. Then the exact hole-edge stress analytic solution of composite plate with rectangle holes and wing manholes is resolved. Both of offset axis loadings and its influences on the stress concentration coefficient of the hole-edge are discussed. And comparisons of different loads along various offset axis on the hole-edge stress distribution of orthotropic plate with rectangle hole or wing manhole are made. It can be concluded that hole-edge with continuous variable curvatures might help to decrease the stress concentration coefficient; and smaller angle of outer load and fiber can decrease the stress peak value.     

Non-monotonic material contrast in scanning ion and scanning electron images

30 keV Ga⁺ focused ion beam induced secondary electron (iSE) imaging was used to determine the relative contrast between several materials. The iSE signal compared from C, Si, Al, Ti, Cr, Ni, Cu, Mo, Ag, and W metal layers does not decrease with an increase in target atomic number Z₂, and shows a non-monotonic relationship between contrast and Z₂. The non-monotonic relationship is attributed to periodic fluctuations of the stopping power and sputter yield inherent to the ion–solid interactions. In addition, material contrast from electron-induced secondary electron (eSE) and backscattered electron (BSE) images using scanning electron microscopy (SEM) also shows non-monotonic contrast as a function of Z₂, following the periodic behavior of the stopping power for electron–solid interactions. A comparison of the iSE and eSE results shows similar relative contrast between the metal layers, and not complementary contrast as conventionally understood. These similarities in the contrast behavior can be attributed to similarities in the periodic and non-monotonic function defined by incident particle–solid interaction theory.     

Application of Feature Extraction through Convolution Neural Networks and SVM Classifier for Robust Grading of Apples

This paper proposes a novel grading method of apples,in an automated grading device that uses convolutional neural networks to extract the size,color,texture,an...     

分布动态载荷识别的抗噪处理

针对正交多项式频域法在用多种响应对矩形薄板进行载荷识别中抗噪性较差的问题,综合运用平均法、矩阵预处理和奇异值截断法等方法对之进行改善,并引入空间映射的思想,将该方法的应用范围拓展为复杂的模型.利用仿真算例,证实了该方法具有较好的抗噪性.     

基于MELTAC-N平台的核电厂安全级DCS环网研究与测试

针对工程实践中环网通讯相关问题的处理缺乏理论基础及国产化安全级DCS平台的开发缺乏成熟经验借鉴问题,对基于MELTAC-N平台核电厂安全级DCS环网的软硬件实现进行了研究。提出了安全级DCS环网双环网冗余设计、光切换开关设计等硬件设计方法,以及以RPR协议为基础,采用全数据收发策略的软件设计方法。在CPR1000安全级DCS平台上对安全级DCS环网的可靠性及实时性进行了评价,并进行了容错能力、响应时间及响应时间稳定性测试验证实验。结果表明,基于MELTAC-N平台安全级DCS环网软硬件设计具有较好的容错能力及响应时间稳定性。     

Short-Term Relay Quality Prediction Algorithm Based on Long and Short-Term Memory

The fraction defective of semi-finished products is predicted to optimize the process of relay production lines, by which production quality and productivity ar...     

End-to-End Multiview Gesture Recognition for Autonomous Car Parking System

The use of hand gestures can be the most intuitive human-machine interaction medium.The early approaches for hand gesture recognition used device-based methods....     

The laboratory simulation of abrasive wear

Abrasive wear has long been recognised as one of the most potentially serious tribological problems facing the operators of many types of plant and machinery; several industrial surveys have indicated that wear by abrasion can be responsible for more than 50% of unscheduled machine and plant stoppages. Locating the operating point of a tribological contact in an appropriate operational ‚map’︁ can provide a useful guide to the likely nature and origins of the surface degradation experienced in use, though care must be exercised in choosing the most suitable parameters for the axes of the plot. Laboratory testing of materials and simulations of machine contacts are carried out for a number of purposes; at one level for the very practical aims of ranking candidate materials or surface hardening treatments in order of their wear resistance, or in an attempt to predict wear lives under field conditions. More fundamentally, tests may be aimed at elucidating the essential physical mechanisms of surface damage and loss, with the longer term aim of building an analytical and predictive model of the wear process itself. In many cases, component surface damage is brought about by the ingress of hard, particulate matter into machine bearing or sealing clearances. These may be running dry although, more usually, a lubricant or service fluid is present at the interface. A number of standardised wear test geometries and procedures have been established for both two- and three-body wear situations, and these are briefly described. Although abrasive wear is often modelled as following an ‚Archard’︁ equation (i.e. a linear increase in material loss with both load and time, and an inverse dependence on specimen hardness) both industrial experience and laboratory tests of particularly lubricated contacts show that this is not always the case: increasing the hardness differential in an abrasively contaminated lubricated pair may not always reduce the rate of damage to the harder surface.     

Limits of topographic measurement by the scanning tunnelling and atomic force microscopes

Parameters describing the topographic character of a surface (height, surface wavelength, slope and curvature) can be derived from equivalent sinusoidal profiles. The response of a surface-measuring instrument may be modelled in terms of instrument parameters such as stylus radius, and scanning range and resolution. The performance of the instrument may then be mapped as a zone in amplitude-wavelength (AW) space to show the sinusoidal profiles it is capable of measuring. In a first-order analysis the STM and AFM are considered as equivalent to contact-stylus instruments with a notional stylus radius equal to the tip radius plus the gap. Comparisons between different instruments and types of instrument are readily made by mapping in AW space. The error arising from convolution of the sinusoidal profile with that of the finite tip may be quantified and plotted as contours in AW space.