不同粒径金刚石固结磨料抛光硫化锌晶体研究

磨粒粒径是影响抛光最重要的参数之一,是决定加工效率和工件表面质量的关键要素。采用1~3μm、2~4μm、3~5μm 3种粒径的金刚石固结磨料抛光垫加工硫化锌晶体,分析磨粒粒径对工件表面质量和材料去除率的影响。实验结果表明,磨粒粒径对硫化锌晶体的固结磨料抛光影响显著,随着磨粒粒径的增大,固结磨料抛光硫化锌晶体的材料去除率增大,而表面质量变差。2~4μm金刚石固结磨料抛光垫加工硫化锌晶体可同时获得高材料去除率和优表面质量,材料去除率达到100 nm/min,表面粗糙度为4.37 nm。     

固结磨料研磨K9玻璃表面粗糙度模型

表面粗糙度模型是研磨过程设计和工艺参数选择的重要依据,K9玻璃是应用最广泛的光学材料之一。建立研磨K9玻璃表面粗糙度模型有利于提高加工效率、节约生产成本。简化固结磨料研磨过程,基于研磨垫表面微结构,计算研磨过程中参与研磨的有效磨粒数和单颗磨粒切入工件深度,利用研磨过程中受力平衡,建立固结磨料研磨K9玻璃表面粗糙度模型。采用不同磨粒粒径和不同磨料浓度的固结磨料研磨垫以及不同压力研磨K9玻璃验证表面粗糙度模型。结果表明：固结磨料研磨K9玻璃的表面粗糙度与磨粒粒径、研磨压力1/3次方成正比,与研磨垫浓度2/9次方成反比。表面粗糙度理论值与试验值随研磨压力、磨粒粒径和研磨垫浓度的变化趋势吻合。利用该模型能够成功预测固结磨料研磨K9玻璃表面粗糙度,指导研磨过程设计及加工过程中研磨垫和工艺参数的选择,可靠性高。     

抛物面研磨的材料去除率及表面粗糙度研究

固着磨料抛物面研磨是一种新型的抛物面加工方法,文中从单个磨粒的角度出发,讨论了研磨工艺参数对材料去除率和表面粗糙度的影响,建立了理论预测模型,然后利用计算机辅助软件对不同硬度工件材料的材料去除率和表面粗糙度进行了数值模拟仿真,最后用实验验证了模型的正确性,并得出结论:理论预测模型仅能预测材料去除率和表面粗糙度的变化趋势,并不能代替实验得出具体的实验数值,即固着磨料抛物面研磨的材料去除率与主轴转速、研磨压力的5/4次方成正比,与磨粒浓度的1/4次方成反比;表面粗糙度随磨粒尺寸和研磨压力的增加而增加,随磨粒浓度的增加而减小。     

硬脆性材料用柔性磨具研磨的加工表面粗糙度建模

通过分析磨粒与工件表面的作用过程,建立了硬脆性材料柔性磨具加工表面粗糙度的理论预测模型.以橡胶结合剂金刚石研磨盘为柔性磨具、蓝宝石衬底为工件,在不同弹性模量、磨粒浓度、磨粒粒度和研磨压力下开展研磨试验,将不同研磨条件下的表面粗糙度试验值与理论预测值进行比较,发现试验结果与理论模型预测结果的趋势一致,且预测误差为7.71...     

研磨硬脆材料的金刚石磁性磨料制备

运用化学复合镀法制备了用于硬脆材料研磨的金刚石磁性磨料。采用单因素实验方法研究了铁粉的装载量、金刚石磨粒的浓度以及机械搅拌的速度对金刚石相对含量的影响。通过石英玻璃的平面磁控研磨加工实验测试了制备的金刚石磁性磨料的研磨性能。结果表明,当铁粉的装载量为6 g/L,金刚石磨粒浓度为6 g/L,搅拌速度为300 r/min时,金刚石相对含量较高。金刚石磨粒在Ni-P合金镀层中粘结牢固,分散均匀。通过磁控研磨加工,石英玻璃的表面粗糙度快速地从0.709μm降低到0.138μm,证明了制备的金刚石磁性磨料具有较好的研磨性能。     

乙醇浓度对亲水性固结磨料垫自修整特性的影响

自修整能力是评价亲水性固结磨料研磨垫加工性能的重要指标。本文选择不同浓度的乙醇水溶液作为研磨介质,表征了亲水性固结磨料垫基体在研磨介质中的溶胀率与砂浆磨损速率,探索了亲水性固结磨料垫在不同研磨介质条件下研磨石英玻璃的加工性能,采用亲水性固结磨料垫在不同阶段的材料去除速率变化(Material Removal Rate Variation,MRRV)衡量固结磨料垫的自修整能力。结果表明:随着研磨介质中乙醇浓度的增加,溶胀率与砂浆磨损速率均增大,分别达到了1.05%与5.5mg/h,不仅研磨垫的材料去除率与表面质量得到了提高,同时,不同阶段的MRRV大幅减小,体现了更优的自修整能力。当乙醇浓度为25%时,平均材料去除率达到11.82μm/min,表面粗糙度Ra为75nm,磨料垫具备了良好的加工性能。研磨介质中引入乙醇能有效提高固结磨料垫的加工性能。     

固结磨料研磨的材料去除率建模及仿真研究

通过对固结磨料研磨过程作适当简化和假设,在磨粒尺度下,依据磨粒的受力平衡条件,建立工件的材料去除率模型,并用MATLAB软件进行数值模拟,分析影响固结磨料研磨材料去除率的因素,得出结论:固结磨料研磨的材料去除率分别与磨料粒度、研磨外加载荷的二分之三次方及工件与研磨盘的相对速度呈正比,与磨料的体积分数成反比,因此可以通过增加磨料粒度、外加载荷和研磨盘的转速来提高材料去除率。     

外圆超声振动研磨Al2O3陶瓷的去除率研究

研究了Al2 O3 陶瓷试件的超声振动研磨特征 ,分析超声研磨中加工参数与试件材料去除率的关系。经研究得出 :在相同的加工条件下 ,超声振动研磨加工比普通研磨加工 ,材料去除效率高 ,去除率随工件转速的增加而增加 ,随着转速的增加 ,去除率的斜率有所下降 ;保证材料去除率达到最大的研磨压力存在一个最佳值 ;粗粒度油石研磨加工去除效率较细粒度的高 ;细磨粒油石超声研磨工件表面粗糙度值小于粗磨粒研磨工件。同时与普通研磨相比较 ,超声研磨加工不仅效率高、且加工工件表面粗糙度值较小。     

SrTiO3陶瓷基片集群磁流变研磨加工表面特性研究

采用集群磁流变效应研磨加工工艺进行SrTiO3陶瓷基片研磨加工,分析了研磨盘材料、磨粒种类、研磨压力和磨粒团聚等因素对SrTiO3陶瓷基片表面粗糙度和表面完整性的影响。 结果表明:磁流变效应研磨工作液中的SiC、Al2O3和CeO2等磨料的大尺寸磨粒在SrTiO3陶瓷基片研磨加工表面产生的局部大尺寸划痕破坏了加工表面的完整性;采用铸铁研磨盘和SiO2磨料的磁流变研磨工作液研磨加工后,原始表面粗糙度Ra从约1.7854μm下降到0.6282μm,并且表面完整,SrTiO3材料与SiO2磨料之间存在的化学机械研磨过程促进了研磨加工表面性能的改善;研磨压力也是影响研磨加工表面粗糙度和大尺寸划痕的主要因素之一,研磨压力取较小值(1.875kPa）为宜。      

不锈钢半固着磨具加工的工艺研究

为获得SUS440不锈钢的低／无损伤加工表面,实现高效加工,本文采用了一种半固着磨具。该磨具能够有效地阻止加工过程中大颗粒磨料对工件表面造成的异常深划痕,实现效率与加工质量平衡。本文使用了800。碳化硅磨料的半固着磨具对SUS440不锈钢进行研磨试验,研究了不同的加工参数对工件表面粗糙度和材料去除率的影响。试验结果显示在27kPa压力、60r／min转速下加工12min后,工件表面粗糙度Rn从250nm下降到50nm,材料去除率保持在1μm／min,实现了高精、高效的加工性能。     

A review on the progress towards improvement in surface integrity of Inconel 718 under high pressure and flood cooling conditions

Self-conditioning performance of polishing pad is an important characteristic to influence processing efficiency and service life in chemical mechanical polishing (CMP). The slurry can react with the pad surface, which affects its self-conditioning performance in fixed abrasive polishing process. Wear ratio of wafer material removal rate (MRR) and pad wear rate is introduced to evaluate self-conditioning performance of fixed abrasive pad (FAP). To clear the effect of chemical additive on FAP self-conditioning, wear ratio, FAP surface topography, friction coefficient, and acoustic emission signal of polishing process were investigated in fixed abrasive polishing of quartz glass with ferric nitrate, ethylenediamine (EDA), and triethanolamine (TEA) slurry, respectively. Results indicate that TEA slurry can provide excellent self-conditioning of FAP in fixed abrasive polishing of quartz glass. MRR and wear ratio maintain high levels during the whole polishing process. Friction coefficient and acoustic emission signal are more stable than that of the other two chemical additives. An appropriate amount of TEA, which is beneficial to enhance MRR and extends service life of FAP, is added in the polishing slurry to improve FAP self-conditioning in fixed abrasive polishing process.     

Self-dressing effect using a fixed abrasive platen for single-sided lapping of sapphire substrate

Single-sided lapping is crucial in sapphire wafering processes for improving flatness and achieving the target wafer thickness using loose abrasives. In single-sided lapping process, the Material removal rate (MRR) is a key factor for reducing process time and cost. However, the MRR is limited when using loose abrasives because abrasives mostly act by rolling and sliding. Many researchers have studied fixed abrasives to increase the MRR, but the MRR decreases with time. To solve this problem, the self-dressing effect was studied with various pressures, velocities, cutting fluids and wafers. The MRR decreased due to the wear of abrasives, and the pressure and velocity have little effect on the self-dressing. Lapping experiments were done using cutting fluid with a lapped wafer and sawed wafer. The MRR, plate roughness and thickness were measured to study the wear of the abrasive and the self-dressing effect. The cutting fluid delayed the wear of the abrasives and thus improved the decrease in MRR, but it had little effect on the self-dressing effect, like in the case when water was used. When using cutting fluid and a sawed wafer, the MRR was high and did not decrease. A concentrated load on the plate caused by shape error and saw marks on the sawed wafer could produce the self-dressing effect. We verified that a sawed wafer could produce the self-dressing effect on even a worn plate.     

光学硬脆材料固结磨料研磨中的亚表面损伤预测

研磨过程中亚表面损伤层深度的正确预测是研磨工艺参数制定的重要依据。针对固结磨料的研磨特点,选择两种典型光学硬脆材料(镁铝尖晶石和石英玻璃),采用离散元仿真技术,分别建立了两种材料的二维离散元模型,分析了工艺参数对光学硬脆材料亚表面损伤(裂纹)层深度的影响。而后,采用角度抛光法测量了镁铝尖晶石和石英玻璃的亚表面损伤层深度,进行了实验验证。结果表明:采用固结磨料研磨时,磨粒粒径对光学硬脆材料亚表面损伤的影响相当显著,在相同研磨工艺条件下,随着磨粒粒径的增大,亚表面损伤层深度和微裂纹密集程度明显增加。离散元仿真结果与实验结果的对比表明:采用离散元技术可以对光学硬脆材料的亚表面损伤深度进行快速有效的预测,从而为后续的研磨抛光工艺提供参考与指导。     

碳化硼研磨后蓝宝石晶体的亚表面损伤

介绍了蓝宝石材料的亚表面损伤形成机制。考虑碳化硼磨料可产生较小亚表面损伤的优点,本文基于游离磨料研磨方式,研究了不同粒度碳化硼磨料研磨后蓝宝石晶体的亚表面损伤。利用KOH化学腐蚀处理技术,对研磨后的样品进行了刻蚀;通过特定的腐蚀坑图像间接反映了蓝宝石晶体的亚表面损伤形貌特征,获得了W20、W10和W5碳化硼磨料产生的亚表面损伤深度,得到了在不同刻蚀时间下蓝宝石亚表面损伤形貌、表面粗糙度和刻蚀速率。研究结果显示:游离碳化硼磨料研磨造成的蓝宝石晶体的亚表面损伤密度相当显著,但损伤深度并不大,其随磨料粒度的增大而增大,W20、W10和W5粒度的磨料研磨后产生的亚表面损伤深度分别为7.4,4.1和2.9μm,约为磨料粒度的1/2。得到的结果表明采用碳化硼磨料研磨有利于获得低亚表面损伤的蓝宝石晶片,而采用由大到小的磨料逐次研磨可以快速获得低亚表面损伤的蓝宝石晶片。     

氮化硅陶瓷球精加工表面缺陷的研究

将3种不同直径的氮化硅球坯采用循环加工方法研磨成G5级轴承用陶瓷球。研究了研磨过程中陶瓷球的磨损行为并将磨损缺陷按光学显微镜下的形貌分成5类。采用扫描电子显微镜观察分析各种缺陷并用陶瓷材料断裂力学解释凹坑与裂纹缺陷的形成。研究结果表明，异常的磨粒作为尖锐压头产生凹坑。各种裂纹主要是由起钝压头作用的上研磨盘产生的。材料的晶体结构变化产生雪花缺陷，雪花缺陷抵抗磨粒磨损的能力较差。精研过程中不正确的加工压力和没有破碎的硬磨粒产生擦伤和划痕缺陷。提高球坯圆度，降低粗研加工的载荷和速度可以减少裂纹缺陷。提高磨粒质量可以减少精研中各种机械加工缺陷。     

单晶蓝宝石的延性研磨加工

为实现单晶蓝宝石的延性研磨加工,采用纳米压痕和划痕法测试并分析了单晶蓝宝石(0001)面的微纳力学特性,建立了单颗圆锥状磨粒的压入模型并计算了延性研磨加工的受力临界条件,分析了金刚石磨粒嵌入合成锡研磨盘表面的效果.对单晶蓝宝石进行了延性研磨加工试验,采用NT9800白光干涉仪、扫描电子显微镜(SEM)和透射电子显微镜(TEM)等方法分析了单晶蓝宝石的延性研磨表面特征.试验结果表明:采用纳米压痕和划痕法可以为单晶蓝宝石的延性研磨加工提供工艺参数,单晶蓝宝石的延性堆积的极限深度为100 nm,金刚石磨粒的嵌入及在适当载荷下可以实现蓝宝石的延性研磨加工,实验条件下的最佳载荷为21 kPa,延性研磨后单晶蓝宝石表面划痕深度的分布情况较好,分散性小,研磨后的表面发生了位错滑移变形.     

Basic observations in the flat lapping of aluminum and steels using standard abrasives

This research studies the characteristics of aluminum 2024, 304 stainless steel, and 1018 steel during lapping with three different types of abrasives, namely, garnet, silicon carbide, and white aluminum oxide, through detailed experimental analysis. Specifically, the effects of different abrasives on material removal rate and surface finish were evaluated. It was found that silicon carbide and white aluminum oxide abrasives removed more material per minute than garnet. A higher mean frictional force and mean coefficient of friction were obtained in aluminum lapped with SiC and white Al₂O₃ abrasives, and a lower mean frictional force was obtained in 304 stainless steel lapped with SiC. From geometric and energy-dispersive spectroscopy analysis obtained using scanning electron microscopy, it was confirmed that some abrasives became embedded into the lapped metal substrates. No burn was observed on the lapped samples, and scratches and unfinished lapped parts were observed mainly in 304 stainless steel. In order to determine the quantitative influence of each variable, an analysis of variance was performed. It was found that the main effects of abrasive types, size of abrasives, and type of work material had statistically significant influence on material rate and surface finish. In addition, there was a highly significant two-way interaction between abrasives and workpiece.     

化学机械干式研磨的转化率建模及优化试验

化学机械干式研磨的最大去除率产生于化学固相反应与机械作用达到平衡时。建立了固相反应转化率的数学模型,以全面分析其影响因素。从影响因素中选择4个主要参数,展开固结SiO2磨料磨具研磨蓝宝石的试验研究。试验结果表明,按影响显著程度由高到低排列的4个参数分别为磨具转速、载荷、磨料粒径、磨料与结合剂的质量百分比,所研究范围内的化学机械作用最优参数组合是：粒径45 μm,百分比30%,载荷0.6 MPa,转速150 r/min。