军用技术转民用推广目录(续)

正8数字微纳加工设备【技术领域】高端装备【技术开发单位】中国科学院光电技术研究所【技术概述】数字微纳加工设备是通过数字化控制空间光调制器实现像素级光场自由操控,利用高数值孔径投影物镜生成高分辨力图形,结合高速扫描工件台同步运动,实现大面积、高分辨力,任意微纳图形结构加工。设备包括高均匀性照明系统、空间光调制器、高数值孔径物镜、检焦系统、精密扫描工件台以及高速     

飞秒激光全息并行加工中的多焦点均一性

为了提高飞秒激光加工的效率和灵活性,设计了一套飞秒激光全息并行加工系统,并对该系统中加载计算全息图(CGH)生成的多焦点均一性和空间位置分布的关系进行了研究.首先,将空间光调制器(SLM)引入飞秒激光加工光路;然后,采用GS(Gerchberg-Saxton)算法设计了直线型和三角型分布的三焦点阵列.最后,通过数值仿真和实验研究比较了用两种不同空间分布的焦点列阵设计的全息图对均一性的影响.结果表明,在焦点阵列间距较小的情况下,直线型分布设计的焦点阵列不易获得好的均一性,三焦点U仅有79％;而用三角型分布焦点阵列设计时,可以获得很好的均一性,三焦点U约等于100％.实验数据表明,三角形分布的三焦点可以实现高质量的并行加工,加工的半球状微结构阵列具有微透镜阵列的功能.     

激光直接写入系统中的光功率稳定控制

激光光功率控制对激光加工技术极为重要,本文介绍了在激光直写系统中用于光功率控制的声光调制器件并根据光强稳定度要求分析给出了调制器的结构参数和相关的控制电路。按控制原理及调制器参数设计并实现声光调制系统获得了好的光强控制效果。受控前Ｈｅ－Ｃｄ激光器输出光强稳定度的１５％,控制后一级衍射光光强稳定度达０．２％。     

采用FDTD法计算复杂微转子所受光力和光力矩

微转子是微机电系统(MEMS)的一个重要组成部分.为了能够设计、驱动具有复杂形貌的微转子,对其所受的光驱动力矩的光波动模型计算方法进行了研究.使用时域有限差分法分析微转子在光阱中散射光场的电磁场量,根据麦克斯韦尔力学张量方程得到微转子表面所受的力.最后,应用牛顿方程计算出其相应的旋转力矩和转速等信息.用基于此方法编写的模块化Matlab程序分析计算了一个本文设计制造的微转子,并与实验进行了比较,结果与200 r/min相符,表明此方法基本满足复杂形貌微转子驱动力计算要求,对设计微转子有着很好的应用前景.     

飞秒激光加工最新研究进展

飞秒激光作为一种先进的加工技术,以其"冷加工"、多光子非线性效应、突破衍射极限等特质可实现对任意材料由微纳到宏观尺度复杂三维零件的精密加工,在微纳和精密机械、微纳电子、微纳光学、表面工程、生物医学等领域展露了巨大的市场应用前景。文章重点针对近三年来飞秒激光刻蚀、切割、制孔、功能表面制备、体内加工和聚合加工的研究进展进行综述,并探讨了飞秒激光在与材料相互作用机制、加工精度、加工方式、加工对象等方面面临的机遇和挑战。     

光镊驱动微转子

光镊技术已经成功应用于光学和微功能器件,但是,对光镊驱动复杂微转子所建模型尚不成熟。为了分析光镊的光驱动力和力矩,基于矩量法建立了一种新模型。基于此种模型的分析结果表明改变环境参量是提高光镊工作效率的方法之一,如微转子转动速率与光镊的激光功率成正比,与束腰半径成非线性关系。另一种可以大幅度提高光镊工作效率的方法是改变微转子的形状,数据表明"万字"形微转子的转动效率是相同尺寸的"十字"形转子转动效率的10^-7倍。此外,通过解析力场的分布状态,可得到光压力的主要作用面,为今后的微转子设计提供依据。新模型的另一个优点是耗费时间较少,对于模拟光镊驱动微功能器件具有通用性和柔性。     

科学家利用飞秒激光刻蚀技术实现了金属表面特性的精确控制

美国纽约罗彻斯特大学光学研究所的郭春雷教授联合穆罕默德·埃尔卡巴什教授,在等离激元杂交模型的指导下,利用飞秒激光加工技术控制表面纳米结构的形态,从而实现对光谱吸收的更多控制,并首次证明了可以将飞秒激光诱导的金属表面用于高温选择性太阳能吸收器(SSA)。     

交叉效应对光栅光调制器阵列的影响

为了讨论交叉效应对无源矩阵驱动的光栅光调制器的影响,建立了无源矩阵驱动光栅光调制器的电学模型.介绍了光栅光调制器的工作原理和驱动电压.利用基尔霍夫的电流定理和电压定理,对该无源矩阵驱动阵列的电学模型进行化简分析,得到了交叉效应中半选点像素、非选点像素与全选点像素之间的电压关系.实验测得器件的驱动电压,并对加工的阵列器件进行交叉效应验证,得到这3种像素的±1级衍射光强与全选点像素驱动电压的关系.最后,提出两种抑制交叉效应的方法.实验结果显示:光栅光调制器的工作电压为8 V,吸合电压约8.5 V时;对于加工的16×16阵列,半选点像素电压约为全选点像素电压的1/2,且远大于非选点像素电压,结论与交叉效应理论分析一致.结果表明:交叉效应会降低阵列的光学对比度和光利用率,而器件较低的驱动电压有利于与有源矩阵电路实现单片集成,消除器件的交叉效应.     

一种三维形貌测量系统的研究与实现

针对目前结构光和共焦显微术相结合实现的三维形貌测量系统存在的移相和调焦均需要复杂的运动机构的不足,设计了一套采用空间光调制器取代传统压电陶瓷驱动光栅移动实现结构光投影及移相,采用电控液态透镜调焦取代传统精密电机驱动被测物体或投影系统移动实现纵向扫描,并以调制度测量轮廓术实现的三维形貌测量系统.该系统有效简化了结构,易于...     

水凝胶支架的飞秒激光全息加工

为了实现以水凝胶为材料的细胞支架快速加工,将计算全息法引入传统的飞秒激光双光子加工中,并对全息图的生成方法和全息图对加工结构的影响进行了研究。首先,根据贝塞尔光波动方程和其透射函数生成贝塞尔光束全息图,分析两种参数对环形结构大小和质量的影响。然后利用生成的全息图加工得到壁厚800nm、直径为8~15μm不等的水凝胶(PEGDA)圆管结构。最后,实现了基于圆管道的水凝胶细胞支架高效快速加工,支架中圆管道壁厚800nm、直径为8μm。本文首次将飞秒激光全息加工技术应用于水凝胶三维支架加工,解决了飞秒激光单点加工效率的问题。该技术在生物医学中具有广阔的应用前景。     

采用FDTD法计算复杂微转子所受的光力和光力矩

微转子是MEMS中的一个重要组成部分。用光驱动微转子有很多的优点,例如非接触、无需导线和无摩擦等等。因此寻找有效设计、估计具有复杂形貌的微转子所受的光驱动力矩的方法显得十分重要。随着计算机计算能力的提高,使用光波动模型来计算复杂的转子受力情况已经成为可能。使用Matlab编写模块的化计算程序。其中时域有限差分法被用来分析微转子在光阱中散射光场的电磁场量,而麦克斯韦尔力学张量来计算微转子表面所受的力,进而的到旋转力矩。这一程序已经被用来分析计算了一个我们设计制造的一个微转子,并与实验进行了比较。     

Optical sectioning microscope with a binary hologram based beam scanning

We describe the development of a beam scanning microscope that can perform optical sectioning based on the principle of confocal microscopy. The scanning is performed by a laser beam diffracted from a dynamic binary hologram implemented using a liquid crystal spatial light modulator. Using the proposed scanning mechanism, unlike the conventional confocal microscopes, scanning over a two-dimensional area of the sample can be obtained without the use of a pair of galvo mirror scanners. The proposed microscope has a number of advantages, such as superior frame to frame repeatability, simpler optical arrangement, increased pixel dwell time relative to the time between two pixels, illumination of only the sample points without pulsing the laser, and absolute control over the amplitude and phase of the illumination beam on a pixel to pixel basis. The proposed microscope can be particularly useful for applications requiring very long exposure time or very large working distance objective lenses. In this paper we present experimental implementation of the setup using a nematic liquid crystal spatial light modulator and proof-of-concept experimental results.     

Quantitative optical microscope with enhanced resolution using a pixelated liquid crystal spatial light modulator

This paper presents a brief account of a novel optical microscope, which combines the advantages of two well‐known techniques, namely phase contrast and phase stepping, to provide high contrast imaging and precision measurements. The inclusion of a programmable liquid crystal spatial light modulator provides for the phase stepping required, while also allowing flexibility for future improvements. The results shown reveal an important aspect of the system to facilitate quantitative sample measurements, with an enhancement of optical resolution compared with conventional optical imaging systems.     

光学综合孔径干涉成像技术

闭合相位技术、U-V覆盖技术和像重构技术是光学综合孔径干涉成像的三个关键技术.文中详细介绍了闭合相位技术的原理、U-V覆盖技术(包括即时覆盖和通过孔径旋转的非即时覆盖两种方法)和用于图像重构的常用方法以及用于光学综合孔径像重构的混合迭代方法,最后讨论了光学综合孔径干涉成像技术的应用.     

Microscopy of biological sample through advanced diffractive optics from visible to X-ray wavelength regime

The aim of this report is to demonstrate a unified version of microscopy through the use of advanced diffractive optics. The unified scheme derives from the technical possibility of realizing front wave engineering in a wide range of electromagnetic spectrum. The unified treatment is realized through the design and nanofabrication of phase diffractive elements (PDE) through which wave front beam shaping is obtained. In particular, we will show applications, by using biological samples, ranging from micromanipulation using optical tweezers to X-ray differential interference contrast (DIC) microscopy combined with X-ray fluorescence. We report some details on the design and physical implementation of diffractive elements that besides focusing also perform other optical functions: beam splitting, beam intensity, and phase redistribution or mode conversion. Laser beam splitting is used for multiple trapping and independent manipulation of micro-beads surrounding a cell as an array of tweezers and for arraying and sorting microscopic size biological samples. Another application is the Gauss to Laguerre-Gauss mode conversion, which allows for trapping and transfering orbital angular momentum of light to micro-particles immersed in a fluid. These experiments are performed in an inverted optical microscope coupled with an infrared laser beam and a spatial light modulator for diffractive optics implementation. High-resolution optics, fabricated by means of e-beam lithography, are demonstrated to control the intensity and the phase of the sheared beams in x-ray DIC microscopy. DIC experiments with phase objects reveal a dramatic increase in image contrast compared to bright-field x-ray microscopy. Besides the topographic information, fluorescence allows detection of certain chemical elements (Cl, P, Sc, K) in the same setup, by changing the photon energy of the x-ray beam.     

Research and development of VUV optical coatings for micro mirror applications

1Introduction Duringthelastthreedecades,thedevelop mentofpowerfulUVlightsourcessuchasexci merlasers,frequencymultipliedsolidstatela sersorstoragefreeelectronlasershavegathered increasingresearcheffortsinthefieldsofUV photoninteractionwithmatteraswellasrising industrialapplicationssuchasintegratedcircuit manufacturing,microandnano materialpro cessingormedicine.Adominantdrivingforce downtotheshortestwavelengthsinthevacuum ultraviolet(VUV)spectralregionisthesemi conductormanufacturingwiththeopt…     

Sagnac-loop phase shifter with polarization-independent operation

A bulk-optics, polarization-independent phase shifter for photonic quantum information applications is demonstrated. The device is based on a transverse electro-optic modulator in a Sagnac-type loop containing Faraday rotators. This direction-dependent polarization rotation in the loop is combined with a Mach-Zehnder interferometer to form an optical switch with an on/off contrast of 96% and a switching time of 1.6 ns. We demonstrate that the device's operation maintains any arbitrary polarization state.     

LED器件光强分布测试方法进展

针对LED器件光强分布的测试方法,在传统光源配光曲线的测试原理的基础上,阐述了旋转法、多探测器法测试LED光强分布的方法。由于这些方法存在测试时间长、测量准确度低以及定标繁琐的缺陷,进而介绍了一种新型测试方法及装置,即通过CCD光度探测器接收光强度,经过CCD的光电转换功能将光强度信号转换为电信号,再通过成像系统软件便可得到整个半球面空间内壁的光强图。新的测试方法具有测试速度快、精度高、信息量丰富和直观性的显著优点。     

A wavefront generator for complex pupil function synthesis and point spread function engineering

We describe a simple method to produce an arbitrary complex optical field using a ferroelectric liquid crystal spatial light modulator. The system is configured so as to act as a pupil plane filter in a confocal microscope. The ability to tune the complex pupil function permits the system to be used both to modify the imaging performance by effectively engineering the point spread function as well as to remove optical aberrations present in the optical system.