改善晶圆表面平坦度的方法

本发明揭示一种改善晶圆表面平坦度的方法,适用在一晶圆上以化学气相沉积法（chemical vapor deposition,CVD）沉积复数层的薄膜,包括：一晶圆;将晶圆置入一第一薄膜沉积设备中,以化学气相沉积法沉积一第一层薄膜,其中第一薄膜沉积设备具有至少一第一反应气体注入口（injector）,且晶圆相对第一反应气体注入口具有第一第一方向;将晶圆置入一第二薄膜沉积设备中,以化学气相沉积法沉积一第二层薄膜,其中第二薄膜沉积设备具有至少一第二反应气体注入口（iniector）．     

Influence of intermittently etching on quality of CVD diamond thin films

A new method, called growing-etching repetitional process based on hot filament chemical vapor deposition, was proposed to improve the quality of diamond film. During the deposition carbon source was intermittently closed letting hydrogen etch the surface of the diamond film fi＇om time to time. In order to find whether it is helpful to the films＇ quality, a series of experiments were done. The results show that the new method can enhance the orientation of the chemical vapor deposition diamond films, reduce the graphite phase and increase the film＇s surface resistivity.     

气相沉积法金刚石薄膜的性能和应用

本文就气相沉积法金刚石膜的性能和应用研究进行论述、指出了当前金刚石薄膜研究中存在的问题和未来发展方向。     

热丝CVD金刚石涂层温度场补偿优化研究

采用热丝化学气相沉积法（chemical vapor deposition,CVD）制备金刚石薄膜时,对反应室温度场尤其是衬底温度的精确控制是沉积高质量CVD金刚石膜的主要难点之一。在现有HF-650热丝CVD设备的基础上进行优化研究,基于热反射原理,采用Fluent软件进行模拟仿真计算,据此提出了反应室温度场补偿装置,即:在热丝CVD设备基台表面与四周布置反射板。对改进后的设备进行试验对比分析。研究结果表明:利用温度场补偿装置使衬底温度波动从原本的9.3%缩小到3.0%,有效改善热丝CVD系统衬底温度场的均匀性,并通过试验测试得到验证。用该装置制备的金刚石薄膜中金刚石与石墨的拉曼峰强度比值I_D/I_G=4.33,说明金刚石成膜质量得到提高。      

孔隙密度对化学气相沉积泡沫金刚石导热性能的影响

选择不同孔隙密度的泡沫铜为沉积衬底,通过化学气相沉积(chemical vapor deposition, CVD)技术在其表面沉积连续金刚石膜,借助有限元模拟阐释泡沫骨架的孔隙密度对金刚石膜整体传热效果的影响,并通过扫描电镜、拉曼光谱及红外热成像仪等对不同孔隙密度的泡沫金刚石微观形貌、膜层成分以及热扩散性能进行对比与分析。结果表明:高孔隙密度泡沫衬底更有利于热量传递,但其极小的泡沫孔径会限制自由基在孔隙内部流动,CVD沉积的金刚石晶粒尺寸明显减小,仅有2～3 μm,晶粒质量也略逊于中、低孔隙密度样品的。在相同加热时间内的红外热成像中,中孔隙密度泡沫金刚石的表面升温速率相比低、高孔隙密度样品的升温速率分别提升43.4%与12.7%。综上所述,兼具良好三维连通特性与优异金刚石质量的中孔隙密度泡沫金刚石表现出更为优异的导热性能,是更理想的导热增强体选择。      

金刚石薄膜的低压气相沉积工艺及发展

低压气相沉积金刚石薄膜的工艺,按基本原理可分为化学气相沉积、离子束沉积、等离子化学沉积和化学转化方法。文中详细介绍了各类方法的特点及沉积机理,指出存在的问题,并对今后的发展提出了看法。     

脉冲偏压对316L不锈钢表面类金刚石薄膜腐蚀行为影响EI北大核心CSCD

为了提高不锈钢的耐局部腐蚀性能,采用等离子体增强化学气相沉积(Plasma-enhanced chemical vapor deposition,PECVD)技术,在316L不锈钢表面制备含氢类金刚石(Diamond-like carbon,DLC)薄膜,研究不同脉冲偏压对薄膜的杂化结构及腐蚀行为的影响,并对相关影响机制进行讨论。结果表明,脉冲偏压主要影响316L不锈钢表面DLC薄膜的杂化结构及微观形貌,并最终影响其腐蚀行为。随着脉冲偏压的增加,等离子体电离程度增大,沉积过程中的热峰效应和溅射效应增强,DLC薄膜中的氢含量减少,降低了薄膜局部腐蚀敏感性,薄膜点蚀坑数量减少。但同时薄膜中sp^(2)杂化结构的相对含量会随脉冲偏压升高而增加,导致薄膜腐蚀速率加快,点蚀坑半径增大。随着偏压从1.4 kV增加到2.6 kV,316L不锈钢的年腐蚀速率由9.33 nm/y增大到62.4 nm/y。脉冲偏压为1.4 kV时,虽然年腐蚀速率最低,但薄膜最易发生点蚀,其长期服役寿命较差;而偏压为2.6 kV时,等离子体能量过高,薄膜被过度刻蚀,导致其缺陷增多,耐蚀性变差。在研究范围内,脉冲偏压为2200 V时,DLC薄膜具有较高的耐点蚀能力和较低的年腐蚀速率,表现出最佳的综合耐蚀性能。     

沉积气压对金刚石膜微米纳米结构转变的影响

利用热丝化学气相沉积(HFCVD)装置研究不同气压下氩气体积分数对金刚石膜晶粒尺寸的影响,并对不同气压下其微米纳米尺寸转变的临界值进行分析,同时用SEM以及拉曼光谱对沉积的金刚石膜进行分析.结果表明:随着氩气体积分数的增大,金刚石膜的晶粒会越来越小,但不同气压下金刚石膜从微米转变成纳米级别所需要的氩气体积分数不一样;在...     

CVD金刚石膜将成为金刚石材料未来发展的主流

1．引言 化学气相沉积CVD金刚石薄膜是继动态与静态法合成金刚石后,出现的一种与前两种方法完全不同的方法。按照传统的金刚石合成机制,用这种方法也能合成金刚石,简直让人不可思议。可是用这种方法合成出了金刚石已是不争的事实。     

铝合金表面沉积类金刚石薄膜的研究进展

类金刚石(Diamond-like Carbon,DLC)薄膜因其高硬度、良好的化学惰性以及优异的摩擦性能等优势,有望成为一种理想的铝合金表面防护涂层。对比了物理气相沉积(Physical vapor deposition,PVD)技术制备DLC改性材料与传统铝合金表面改性技术的优劣,概述了DLC薄膜在提升铝合金表面力学性能、减摩抗磨方面取得的最新成果,以及在复杂服役工况下面临的抗塑性变形差、易发生结合失效等瓶颈性问题。通过分析铝合金基体上生长高性能DLC薄膜的不利因素,指出界面化学结合强度低、薄膜残余应力大以及软基体/硬质薄膜的结构体系限制是导致上述问题产生的主要原因。在此基础上,重点综述了国内外研究学者为提高铝合金表面沉积DLC薄膜的膜基结合力所采取的有效措施及结果,包括:通过基体前处理增强基体力学性能与改善宏观表面缺陷;采用PVD或其他表面处理方法制备一层或多层的中间过渡层,缓解DLC薄膜与铝合金基体结构、性能之间的差异;调控DLC薄膜组分与结构以降低残余应力。最后展望了在铝合金基体表面制备DLC防护薄膜的发展趋势。     

HFCVD聚晶金刚石薄膜与TC1对磨摩擦磨损性能研究

目前,金刚石被认为是制备加工钛合金涂层刀具的理想材料,但是关于金刚石涂层与钛合金间磨损机制的研究甚少。为此,本实验利用热丝化学气相沉积(HFCVD)在硬质合金(WC-Co)基体上制备聚晶金刚石(PCD)薄膜并研究其与Ti-2Al-1.5Mn(TC1)对磨时的磨损机制。销盘磨损实验结果显示:PCD薄膜相比于WC-Co具有较低的摩擦系数及较高的耐磨性。WC-Co在与TC1对磨时,磨损机制主要为磨料磨损。PCD薄膜与TC1对磨过程中,一直存在有金刚石晶粒与对磨副TC1的切削作用;而在磨损后期,磨屑堆积产生的致密氧化TC1相对磨损过程也有着直接的影响。     

CVD diamond coatings on geometrically complex cutting tools

The manufacturing of chemical vapour deposition (CVD) diamond coated shaft type cutting tools is demanding due to the complex design of the cutting edges and the cobalt content of the cemented carbide. The influencing parameters of substrate, pre-treatment and diamond film on the tool cutting performance are discussed. The optimised manufacturing route of CVD diamond coated thread milling drills is identified with the use of material and tribological tests. Following the optimised production of the tools, the thread milling drills are then applied in the machining of AlSi17Cu4Mg, whereby the tool performance is characterised with respect to their wear behaviour, the process forces and temperatures as well as the workpiece quality.     

CVD金刚石涂层煤液化减压阀关键部件的制备

煤液化减压阀的工作条件非常苛刻,对其阀座、阀芯等关键部件在高温、高压差、高固态浓度流体冲蚀条件下的抗冲蚀磨损性能及使用稳定性提出了极高的要求.CVD金刚石涂层具有接近天然金刚石的优异性能,非常适合用于煤液化减压阀关键部件的表面强化.采用热丝CVD法在硬质合金阀座及阀芯主要的受冲蚀表面沉积获得了金刚石涂层,为保证沉积过程...     

Diamond-coated cutting tools for biomedical applications

Diamond coatings are attractive for cutting processes due to their high-hardness, low-friction coefficient; excellent wear resistance, and chemical inertness. The application of diamond coatings on cemented, tungsten carbide (WC-Co) burs has been the subject of much attention in recent years as a method to improve cutting performance and tool life. WC-Co burs containing 6% Co and 94% WC substrate, with an average grain size of 1–3 μm, were used in this study. To improve the adhesion between diamond and WC substrates, it is necessary to etch away the surface Co and prepare the surface for subsequent diamond growth. Hot filament chemical vapor deposition (HFCVD), with a modified vertical filament arrangement, has been used for the deposition of diamond films. Diamond film quality and purity has been characterized using scanning electron microscopy (SEM) and micro-Raman spectroscopy. The performance of diamond-coated WC-Co burs, uncoated WC-Co burs, and diamond-embedded (sintered) burs have been compared by drilling a series of holes into various materials such as human teeth, borosilicate glass, and acrylic teeth. Flank wear has been used to assess the wear rates of the burs when machining biomedical materials such as those just described. This paper was presented at the 2nd International Surface Engineering Congress sponsored by ASM International, on September 15–17, 2003, in Indianapolis, Indiana, and appears on pp. 273–82 of the Proceedings.     

Comparative investigation of smooth polycrystalline diamond films on dental burs by chemical vapor deposition

Depositions of hot filament chemical vapor-deposited diamond on cobalt-cemented tungsten carbide (WC-Co) rotary cutting dental burs are presented. Conventional dental tools made of sintered polycrystalline diamond have a number of problems associated with the heterogeneity of the crystallite, decreased cutting efficiency, and short life. A preferential (111) faceted diamond was obtained after 15 h of deposition at a growth rate of 1.1 μm/h. Diamond-coated WC-Co dental burs and conventional sintered burs are mainly used in turning, milling, and drilling operations for machining metal ceramic hard alloys such as CoCr, composite teeth, and aluminum alloy in the dental laboratory. The influence of structure, the mechanical characteristics of both diamond grains and hard alloys on the wear behavior, as well as the regimen of grinding on diamond wear are considered. Erosion wear properties are also investigated under air-sand erosion testing. After machining with excessive cutting performance, calculations can be made on flank and crater wear areas. Diamond-coated WC-Co dental burs offered significantly better erosion and wear resistance compared with uncoated WC-Co tools and sintered burs. This paper was presented at the fourth International Surface Engineering Congress and Exposition held August 1–3, 2005 in St. Paul, MN.     

金刚石薄膜涂层刀具的研究进展与应用现状

CVD金刚石是采用化学气相沉积的方法制备出来的一种全晶质多晶纯金刚石材料,它可以呈膜状附着于刀（基）体表面,亦可以是脱离基体的纯金刚石厚片。CVD金刚石的物理性能和天然金刚石非常接近,化学性质则完全相同。本文重点对金刚石薄膜涂层刀具的研究进展、切削试验结果及应用前景进行简要的综述。     

CVD金刚石厚膜刀具及应用研究

热丝CVD法沉积金刚石厚膜为全晶质纯多晶金刚石材料,是制造切削刀具的理想材料。本文针对国内外CVD金刚石厚膜焊接刀具研究与应用中存在的关键技术问题,结合我所近期相关技术研究进展,重点介绍了其制造工艺及关键技术。     

Nanocrystalline diamond coating tools for machining high-strength Al alloys

Diamond coating tools have been increasingly used for machining advanced materials. Recently, a microwave plasma-assisted chemical vapor deposition (CVD) technology was developed to produce diamond coatings which consist of nano-diamond crystals embedded into a hard amorphous diamond-like carbon matrix. In this study, the nanocrystalline diamond (NCD) coating tools were evaluated in machining high-strength aluminum (Al) alloy. The conventional CVD microcrystalline diamond coating (MCD) tools and PCD tools were also tested for performance comparisons. In addition, stress distributions in diamond coating tools, after deposition and during machining, were analyzed using a 2D finite element (FE) thermomechanical model.

The results show that catastrophic failures, reached in all except one machining conditions, limit the NCD tool life, which is primarily affected by the cutting speed. In addition, coating delamination in the worn NCD tools is clearly evident from scanning electron microscopy (SEM) and force monitoring in machining can capture the delamination incident. At a high feed, coating delamination may extend to the rake face. Furthermore, SEM observations of coating failure boundaries show intimate coating-substrate contact. Though the NCD tools are inferior to the PCD tools, they substantially outperform the MCD tools, which failed by premature delamination. The diamond coating tools can have high residual stresses from the deposition and stresses at the cutting edge are highly augmented. Further machining loading causes the stress reversal pattern which seems to correlate with the tool wear severity.     

Analysis of the manufacturing chain of CVD diamond coated shaft type cutting tools

Hypereutectic aluminium silicon alloys, e.g. casted AlSi17Cu4Mg, are commonly used in the automotive and aeronautical industries. These alloys consist of hard, abrasive silicon particles in a soft aluminium matrix and thus place high mechanical loads on the tool during machining processes. Polycrystalline Diamond or CVD (chemical vapour deposition) diamond based cutting tools can be used for the high speed machining of these alloys due to their high hardness and wear resistance. Diamond thin film coatings of different film morphologies are commonly applied on cemented carbide tools using Hot Filament CVD. The distinguishing characteristic to other coatings is utmost hardness resulting in high resistance to abrasion, low tendency to adhesion and low friction coefficient. The manufacturing of CVD diamond coated shaft type cutting tools is challenging due to the complex design of the cutting edges and the demanding stress behaviour during tool application. The influencing parameters of substrate type, chemical and mechanical substrate pre-treatment as well as diamond film modification on the tool cutting performance are discussed. The manufacturing route of CVD diamond coated thread milling drills is analysed with the use of material and tribological tests. The complex thread manufacturing tools are then applied in the machining of AlSi17Cu4Mg, whereby the tool performance is characterised with respect to their wear behaviour, the process forces and temperatures as well as the workpiece quality.     

Adhesion analysis and dry machining performance of CVD diamond coatings deposited on surface modified WC-Co turning inserts

This paper investigates the effects of different surface pretreatments on the adhesion and performance of CVD diamond coated WC-Co turning inserts for the dry machining of high silicon aluminum alloys. Different interfacial characteristics between the diamond coatings and the modified WC-Co substrate were obtained by the use of two different chemical etchings and a CrN/Cr interlayer, with the aim to produce an adherent diamond coating by increasing the interlocking effect of the diamond film, and halting the catalytic effect of the cobalt present on the cemented carbide tool. A systematic study is analyzed in terms of the initial cutting tool surface modifications, the deposition and characterization of microcrystalline diamond coatings deposited by HFCVD synthesis, the estimation of the resulting diamond adhesion by Rockwell indentations and Raman spectroscopy, and finally, the evaluation of the dry machining performance of the diamond coated tools on A390 aluminum alloys. The experiments show that chemical etching methods exceed the effect of the CrN/Cr interlayer in increasing the diamond coating adhesion under dry cutting operations. This work provided new insights about optimizing the surface characteristics of cemented carbides to produce adherent diamond coatings in the dry cutting manufacturing chain of high silicon aluminum alloys.