共查询到19条相似文献,搜索用时 140 毫秒
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针对金属衬底上的绝缘层,研究基于边缘电场传感器的厚度测量方法。位于同一平面的传感电极形成边缘场电容,边缘电场将穿透绝缘层,在衬底表面发生突变。本文用三电容模型分析了传感器的测量原理,衬底作为一个浮动电极分别与两个传感器电极构成平行极板电容,与边缘场电容共同构成传感电容。通过二维仿真讨论了电容结构参数对传感电容的影响。实验结果表明,边缘场电容传感器应用于金属衬底上的绝缘层测量时,表现出边缘场电容与平行板电容复合的特性,传感器灵敏度高。当绝缘层厚度相比电极长度较小时,电极的间距对传感器电容输出影响小。 相似文献
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为实现喷雾机喷雾臂水平检测与水平自动调整,应用固体摆和差分电容原理设计倾角传感器探头,该装置包括圆柱面、扇形摆、动电极和两个固定电极;动电极和两个固定电极构成一对差分电容,该差分电容值与传感器探头的倾角成线性关系;通过实验测试,实验数据与理论计算一致,实验数据相关系数R2为1,该传感器探头可以用于喷雾臂检测水平与倾角。 相似文献
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设计了基于平面阵列电极传感器的电容层析成像(ECT)系统.由平面阵列电极传感器ECT系统和计算机成像界面组成,采用电容的边缘效应测量原理,对复合材料的损伤、缺陷进行检测.结果表明:在介电常数ε=3.5的玻璃块材料为被测对象的条件下,得到的ECT图像分辨率高、伪影少.由此表明:该系统是一种简单有效、图像重建效果优良的无损检测(NDT)系统. 相似文献
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A three-electrode capacitive pressure sensor for touch-mode operation with sensitivity of 0.030 pF/kPa (or 10.4 mV/kPa using
CP-10 C/V converter circuit) in the pressure range of 170–280 kPa is presented with theoretical explanation of experimental
results. A special ring structure is designed to integrate a sensing capacitor and a reference capacitor into the same cavity
to partially cancel out the temperature effect. A third electrode is included to eliminate two-level connections without reducing
its pressure sensitivity. The sensor offers the advantages of simple fabrication processes, planar connections, as well as
high sensitivity, near-linear output, and large over-range pressure. 相似文献
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Bahoumina Prince Hallil Hamida Lachaud Jean-Luc Rebière Dominique Dejous Corinne Abdelghani Aymen Frigui Kamel Bila Stephane Baillargeat Dominique Zhang Qing Coquet Phillipe Paragua Carlos Pichonat Emmanuelle Happy Henri 《Microsystem Technologies》2022,28(6):1365-1378
Microsystem Technologies - This study presents the results on the feasibility of a resonant planar chemical capacitive sensor in the microwave frequency range suitable for gas detection and... 相似文献
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非金属复合材料在制造或使用过程中会产生不同形状内部损伤,采用平面电极传感器可对损伤进行无损化检测。针对现有单平面电极传感器检测信号强度弱、检测数据量少等问题,提出一种双平面电极阵传感器检测非金属复合材料的方法。将两个4×4电极传感器组成一套双平面传感器,采用单激励测量模式,利用共轭梯度算法进行图像重建。仿真与初步实验结果表明:双平面电极传感器提高了检测信号强度,使重构图像精度得到了提高。 相似文献
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T. Vu Quoc H. Nguyen Dac T. Pham Quoc D. Nguyen Dinh T. Chu Duc 《Microsystem Technologies》2015,21(4):911-918
This paper presents a three-electrode capacitive fluidic sensor for detecting an air bubble inside a fluidic channel such as blood vessels, oil or medical liquid channels. The capacitor is designed and fabricated based on a printed circuit board (PCB). The electrodes are fabricated by using copper via structure through top to bottom surface of the PCB. A plastic pipe is layout through the capacitive sensor and perpendicular to the PCB surface. Capacitance of sensor changes when an air bubble inside fluidic flow cross the sensor. The capacitance change can be monitored by using a differential capacitive amplifier, a lock-in amplifier, filter and an NI acquisition card. Signal is processed and calculated on a computer. Air bubble inside the liquid flow are detected by monitor the unbalance signal between the three electrode potential voltages. Output voltage depends on the volume of the air bubble due to dielectric change between capacitor’s electrodes. Output voltage is up to 53 mV when an 2.28 mm3 air bubble crosses the sensing channel. Air bubble velocity can be estimated based on the output pulse signal. This proposed fluidic sensor can be used for void fraction detection in medical devices and systems; fluidic characterization; and water–gas, oil–water and oil–water–gas multiphase flows in petroleum technology. That structure also can apply to the micro-size for detecting in microfluidic to monitor and control changes in microfluidic channels. 相似文献
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A readout circuit for a passive telemetric intra-ocular pressure (IOP) sensor is being developed. The intra-ocular sensor consists of a capacitive pressure sensor in parallel with a planar coil. This inductor–capacitor (LC) resonant circuit transduces the pressure into a shift of resonance frequency. A voltage controlled oscillator (VCO) is used to excite the sensor over a large frequency range (20–40 MHz), hereby detecting resonance of the internal sensor, and thus enabling the measurement of the intra-ocular pressure. This low power circuit is extremely compact, making it suitable for long-term ambulant patient monitoring. The circuit allows wireless readout of the smallest pressure transducers. Tests show promising results at mutual coil distances up to 7.5 mm. 相似文献
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本文介绍了电容型位置传感器的设计开发,通过与传统位置检测传感器以及其它相关传慼器的结构和特性的对比,突出了电容型位置传感器的优势一成本低、结构紧凑.在详细分析了电容型位置传感器的结构和检测原理的基础之上,详细介绍了如何设计关键部件PCB的开孔印制线条以及小球的选择.同时基于对该技术的扩展,又介绍了可衍生出的连续位置传感器和加速度传感器.最后结合电容检测芯片MLX90711,介绍了其在小家电领域一飞利浦智能电熨斗中的应用实例. 相似文献
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A novel capacitive pressure sensor with the island-notch structure is introduced. Its theory model is established based on the structure theory of the plate capacitive pressure sensor. The relationships between the external pressure and capacitance of the capacitive pressure sensor with the island-notch structure are studied by using the method of the finite element analysis (FEA). The results show that the linearity of the capacitive pressure sensor with island-notch structure reached up 0.9941 in the linear measurement zone, the sensitivity reached up 0.0019 pF/kPa, and the measurement range of the capacitive pressure sensor is enlarged. Thus, the contradictory among measure sensitivity, linearity and measure range is effectively relieved in the capacitive pressure sensors with island-notch. In addition, the interface circuitry of the charge transfer is designed, and the performance of the interface circuitry is analyzed. 相似文献
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基于电容检测芯片的电容检测系统设计 总被引:2,自引:0,他引:2
针对电容式传感器研发过程中缺乏有效的微小电容检测仪器的问题,设计了一种基于电容检测芯片MS3110的电容式传感器检测系统,给出了系统的硬件设计以及单片机和上位机部分的软件设计,并对系统的检测精度进行了测试。结果证明,该系统具有较高的检测精度。 相似文献