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1.
直流磁控反应溅射制备IrO2薄膜   总被引:3,自引:0,他引:3  
为研究氧化铱(IrO2)对PZT铁电薄膜疲性能的影响。利用直流(DC)磁控反应溅射(sputtering)工艺成功地在SiO2/Si(100)衬底上制得了高度取向的IrO2薄膜,并在其上制成PZT铁电薄膜,讨论了溅射参数(溅射功率、Ar/O2比、衬底温度)以及退火条件对氧化铱薄膜的结晶,取向和形态的影响。  相似文献   

2.
直流磁控反应溅射制备IrO2薄膜   总被引:1,自引:0,他引:1  
为研究氧化依(IrO)对PZT铁电薄膜疲劳性能的影响,利用直流(DC)磁控反应溅射(sputtering)工艺成功地在SiO/Si(100)衬底上制得了高度取向的IrO薄膜.并在其上制成PZT铁电薄膜.讨论了溅射参数(溅射功率、 Ar/O比、衬底温度)以及退火条件对氧化铱薄膜的结晶、取向和形态的影响.  相似文献   

3.
常压MOCVD制备MgO薄膜的研究   总被引:1,自引:0,他引:1  
曾建明  王弘 《功能材料》1996,27(4):342-346
本文首次报道用常压金属有机化学气相沉积(AP-MOCVD)在Si(100),SiO2/Si(100)和Pt/Si(100)衬底上外延高质量的MgO薄膜。研究了衬底温度与薄膜的取向性关系和MgO薄膜的潮解特性。高纯magnesiumacetylacetonate[bis(2,4-pentanetane-diono)magnesium][Mg(CH2COCH2COCH3)2]作为金属有机源,扫描电镜(SEM),透射电镜(TEM)和X-RAY衍射实验显示,在较低的衬底温度(~480℃)下一次淀积成单晶膜。薄膜均匀,致密,结晶性和取向性很好,衬底温度(Ts)在400℃到680℃之间,在Si(100)衬底上生长的MgO薄膜都具有[100]取向,在Si(100)、SiO2/Si(100)和Pt/Si(100)衬底上生长的MgO薄膜也都具有[100]取向。  相似文献   

4.
研究用溶胶-凝胶方法制备PMNT(铌镁酸铅)薄膜的工艺过程.通过XRD和SPM系统地分析了热处理条件(热解温度和退火条件)与PMNT薄膜的形态.结晶和取向的对应关系,已建立起制备高度取向 PMNT薄膜的工艺.并成功地在Pt/Ti/SIO/Si衬底上制备成(111)取向的PMNT薄膜.  相似文献   

5.
高取向锐钛矿TiO2薄膜的MOCVD法制备与表征   总被引:3,自引:0,他引:3  
采用热壁低压MOCVD方法,以Ti(OC4H9)4为源在SiO2/Si衬底上制备出高取向锐钛矿TiO2薄膜。用X射线衍射技术研究了沉积温度和衬底对薄膜的结构和相组成的影响规律,采用XPS和SEM分别研究了薄膜的组成和形貌,结果表明,当沉积温度为500^0C和600^0C时,薄膜为锐钛矿结构,300^0C和400^0C地,薄膜以无定形结构为主,薄膜的组成为TiO2,衬底影响薄膜的相组成,不同沉积温度  相似文献   

6.
采用RF反应溅射法在Si(111)、玻璃衬底上制备了具有良好C轴承向的多晶ZnO薄膜。用XRD分析了沉积条件(衬底温度、工作气体中的氧与氩气压比和衬底种类)对样品结构的影响,发现(1)薄膜的取向性随着衬底温或高而增强,超过400℃后薄膜质量开始变差;(2)工作气体中氧与氩气压比(Po2/PAr)为2:3时,薄膜取向性最好;(3)薄膜晶粒尺寸11-34nm,相同沉积条件下,单晶硅衬底样品(002)衍  相似文献   

7.
采用改进的溶胶凝胶法在Pt/Ti/SiO2/Si衬底上制备了PZT50/50铁电薄膜,用X射线衍射表征了薄膜的物相,用原子力显微镜(AFM)表征薄膜的微观形貌,用RT66A测量了薄膜的铁电特性,获得了具有优良的铁电性能的晶粒尺寸为100nm的PZT50/50铁电薄膜,在20V电压下,Pr=31.83μC/cm2。  相似文献   

8.
溅射工艺参数对PZT铁电薄膜相变过程的影响   总被引:3,自引:0,他引:3  
采用射频磁控溅射工艺,在(111)Pt/Ti/SiO2/Si衬底上用PZT(53/47)陶瓷靶制备铁电薄膜。用快速光热退火炉对原位沉积的薄膜进行RTA处理。  相似文献   

9.
用喷雾热分解法制备MgO薄膜   总被引:3,自引:0,他引:3  
用压缩空气式喷雾热分解法在Si(100)衬底上制备了(100)取向MgO薄膜。结果表明:衬底温度和喷雾速率是制备(100)取向MgO薄膜的关键因素。在600℃得到了(100)取向的MgO薄膜,用X射线衍射(XRD),原子力显微镜(AFM)和透射电镜(TEM)分析了薄膜的微观结构。  相似文献   

10.
采用脉冲准分子激光沉积(PLD)技术,分别在Si(111)单晶及玻璃基片上外延沉积了具有高a轴(200)取向的CuO掺杂的SnO2薄膜。X射线衍射(XRD)及透射电镜(TEM扫描附件)分析表明:在Si(111)片上沉积,400~500℃退火温度处理的薄膜,只有(200)峰存在;当退火温度升高到600~700℃时,SnO2的其余诸峰相应出现,薄膜呈多晶态,取向度降低,晶粒尺寸变大,晶粒分界明显.在玻璃基片上沉积的薄膜,经400℃低温处理后,(200)取向度很小;随着退火温度的升高,达到500℃时薄膜呈高a轴(200)取向生长,结晶度较好,晶粒分布均匀.  相似文献   

11.
In this paper, we present a new method for inserting several triangulated surfaces into an existing tetrahedral mesh generated by the meccano method. The result is a conformal mesh where each inserted surface is approximated by a set of faces of the final tetrahedral mesh. First, the tetrahedral mesh is refined around the inserted surfaces to capture their geometric features. Second, each immersed surface is approximated by a set of faces from the tetrahedral mesh. Third, following a novel approach, the nodes of the approximated surfaces are mapped to the corresponding immersed surface. Fourth, we untangle and smooth the mesh by optimizing a regularized shape distortion measure for tetrahedral elements in which we move all the nodes of the mesh, restricting the movement of the edge and surface nodes along the corresponding entity they belong to. The refining process allows approximating the immersed surface for any initial meccano tetrahedral mesh. Moreover, the proposed projection method avoids computational expensive geometric projections. Finally, the applied simultaneous untangling and smoothing process delivers a high‐quality mesh and ensures that the immersed surfaces are interpolated. Several examples are presented to assess the properties of the proposed method.  相似文献   

12.
Standards are the basis for production enterprises to organize production, ex-factory inspection, trade (delivery) and technical exchanges, product certification, quality arbitration and supervision.……  相似文献   

13.
14.
We associate a variety of innovations with the term "Industry 4.0". The pioneer of many 4.0 modifications forms the basisfor the trend towards the integrated di...  相似文献   

15.
A flow calorimeter for enthalpy increment measurements on condensed gases is presented. A better knowledge of the properties of the liquefied natural gas is needed, and therefore a liquid loop has been designed for our flow calorimeter. The fluid loop in the calorimeter is designed in order to avoid the two-phase region, since two phases would give compositional disturbances in the measurements. The avoidance of the two-phase region is made possible by increasing the pressure of the test fluid after the measurement section, then heating the fluid at super-critical pressure past the critical point. Finally, the fluid is throttled to the low-pressure gas state at the inlet condition of the compressor that circulates the fluid. To perform the pressure increase, a new cryogenic pump has been designed. To evaluate the new equipment, measurements were taken on liquid ethane over the temperature range 146–256 K at pressure between 0.9 and 5.1 MPa.  相似文献   

16.
On November 30, 2007, the China Association for Standardization (CAS) held a press conference at Beijing Diaoyutai State Guest House. Leaders from the China Household Electric Appliance Research Institute, the China Household Electric Appliance Association, and the China Consumers' Association attended and made speeches.……  相似文献   

17.
ABSTRACT

The production of ferrous metal increased during the Roman Late Republican period, Principate and Empire. The direct bloomery process was used to extract the metal from its ores using slag-tapping and slag-pit furnaces. The fuel was charcoal and an air blast was introduced by bellows-operated tuyères. Iron formed as a bloom, often as a spongy mass of metal, which contained impurities from the smelting process, including unreacted ore, fuel, slag and fragments from the furnace walls, while the metal was often inhomogeneous with varied carbon contents. Blooms were either smithed directly into bars or ingots or they were broken up, which also allowed the removal of gross impurities and a selection of pieces with similar properties to be made. These could then be forge-welded together and formed into characteristically shaped ingots. Making steel in the furnace seems to have been achieved: it depended on the ore and the furnace and conditions within it. Surface carburization was also carried out. Iron and steel were used extensively in construction and for tools and weapons. Fire welding was often used to add pieces of steel to make the edges of tools and weapons, which could be heat-treated by quenching to harden them.  相似文献   

18.
Zusammenfassung Bei der Gestaltung von Ernteprozessen — beispielsweise des Prozesses Mähdrusch, Körnertransport und -abnahme — als transportverbundene Fließarbeitsverfahren mit mindestens zwei verschiedenen Arbeitsmitteln gibt es einen großen Optimierungsspielraum. Solche Prozesse sind mehrstufige Bedienungsprozesse mit gemischter Anordnung der Bedienungseinrichtungen. Außerdem besitzen sie stark ausgeprägte räumliche Aspekte. Es wird vor allem gezeigt, welche Merkmale solcher Prozesse in Simulationsmodellen abgebildet sein müssen, welche Zielgrößen in Abhängigkeit von welchen Einflußgrößen unter Berücksichtigung welcher Prozeßbedingungen ermittelt werden sollten und wie der Bewertungsprozeß zur Ermittlung der gewünschten Informationen gestaltet werden muß.  相似文献   

19.
In the present study a high‐boron high speed steel (HSS) roll material was designed. Many expensive alloy elements have been substituted by cheap boron alloy, and high‐boron high speed steel roll has been manufactured by centrifugal casting method. The microstructures, mechanical properties and wear resistance of centrifugal casting high‐boron high speed steel roll have been investigated by optical microscopy (OM), scanning electron microscopy (SEM), and X‐ray diffraction (XRD) analysis, hardness test, impact test and wear test. The results indicated that the solidification microstructures of high‐boron high speed steel roll consisted of M2(B,C), (W,Mo)2(B,C), M3(B,C), M23(B,C)6 type borocarbides and martensite, a small amount of retained austenite. Borocarbides were continuously distributed over the grain boundary. After quenching from 1050 °C, local broken network appeared in partial borocarbides, and fine secondary borocarbide precipitated from the matrix. After tempering from 525 °C, the amount of precipitated borocarbide increased significantly. After heat treatment, the hardness of high‐boron high speed steel roll excelled 60 HRC, and its impact toughness excelled 8.0 J/cm2. The single groove steel rolling amount of high‐boron high speed steel rolls increases by 500% than that of bainite cast iron roll, when the rolls are used in K1 mill housing of bar mill.  相似文献   

20.
The definition of the thixotropy is a decrease in viscosity with time in shear and a subsequent recovery of viscosity after the shear deformation is removed.We ...  相似文献   

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