高精度深孔表面粗糙度检测仪

针对测量领域深孔表面粗糙度测量存在的问题，研制了一种便携式微控表面粗糙度检测仪。主要用于孔径Φ38以上深孔管件内孔表面粗糙度的测量，测孔深度可达18m．既可应用于石油泵管内孔表面粗糙度测量，也可应用于其他深孔管件的内孔表面粗糙度测量。仪器质量轻，操作简便，便于携带，是深孔加工行业质量检测部门的实用计量、检测仪器。     

基于光学色差传感器的表面粗糙度测量

随着机械加工自动化程度的提高，对表面粗糙度的测量提出了越来越高的要求。表面粗糙度的测量一直面临着提高测量精度和抗干扰能力的挑战，提出了一种新的利用光学色差来测量表面粗糙度的非接触测量方法，这一方法不但具有一般非接触测量所具有的快速、对工件表面无损伤等特点，而且在提高精度和抗干扰能力两方面都有很强的优势。重点介绍了利用光学色差法测量表面粗糙度的理论依据以及基于光学色差原理的光学色差传感器，分析了应用光学色差传感器测量表面粗糙度的工作原理。通过实验证明了理论分析与实验结果相符。     

高速铣削工件表面粗糙度的预测

表面粗糙度是衡量工件表面质量的重要指标。采用正交试验方法,利用圆环面铣刀对模具钢NAK80进行了高速铣削试验,测量了不同工艺参数下的工件表面粗糙度。将试验结果与人工智能中的BP神经网络结合,建立了表面粗糙度预测模型,用于预测不同主轴转速、进给速度、切削深度、切削行距、刀具倾角时被加工工件的表面粗糙度,并通过MATLAB图形用户界面设计了表面粗糙度预测软件。结果表明,该预测模型及其封装后的软件可用于加工前工件表面粗糙度的预测。     

超精表面粗糙度的原子力显微镜测量

介绍了表面粗糙度的形成及原子力显微镜的工作原理，实验结果表明，采用原子力显微镜测量超精加工表面粗糙度可使测量精度达到了纳米级，通过对表面粗糙度测量结果的分析，验证了方法的可靠性。     

用激光散射测量亚微米级表面粗糙度

一种亚微米级表面粗糙度测量技术已经研制出来，其原理是基于物体粗造表面的激光散射。它是用激光二极管作为光源，用这种光电装置来记录从粗糙表面散射回来的光磁场变化。与表面粗糙度相对应的这种散射波段的光强分布是由二极管组成的线阵来记录的，并由一个单芯片微处理器来分析结果。通过测量几套不同加工过程的测试表面，文章提出了评价表面粗糙度的方法。     

表面微粗糙度椭偏法的测定

叙述了一种用椭偏技术快速测量表面微粗糙度的方法，推导了在单层膜模型下微粗糙表面的反射特性，给出了根据椭偏测量所得位相差△值估算均根粗糙度的公式以及对两种不同的微粗糙度表面测量的结果。     

原子力显微镜在纳米粗糙度测量中的应用

介绍了用于纳米量级表面粗糙度测量的原子力显微系统。着重讨论了实现这种测量的软件实现方法。实验结果表明 ,该系统可以测量任意横向或纵向截面的线粗糙度 ,同时还可以测量任一区域的面粗糙度 ,并且在 X、Y、Z三个方向上的表面粗糙度测量精度均已达到纳米量级 ,完全满足纳米尺度形貌研究要求     

表面微粗糙度椭偏法的测定

叙述了一种用椭偏技术快速测量表面微粗糙度的方法，推导了在单层膜模型下微粗糙表面的反射特性，给出了根据椭偏测量所得位相差△值估算均方根粗糙度的公式以及对两种不同微粗糙度表面测量的结果。     

基于多波长散射光特性的铝合金超精密车削表面粗糙度测量方法研究

针对超精密车削表面，提出一种基于多波长散射光特性的表面粗糙度测量方法，以铝合金为例对该方法进行验证。首先建立超精密车削表面形貌—散射光模型并开展验证实验，定量实验结果证明建立的散射光模型平均误差仅为1%。基于散射光模型研究刀痕纹理方向、刀痕宽度(每转进给量)和刀痕高度(表面粗糙度峰谷值)对镜像光反射率的影响，研究结果证明表面粗糙度是影响镜像光反射率的关键因素。在此基础上进一步建立300～700 nm波长范围内镜像光反射率平均值和表面粗糙度之间的定量关系，基于超精密车削表面的测量结果对该定量关系进行验证。所提出新方法获得的粗糙度测量结果与原子力显微镜测量结果吻合，最大相对误差仅为7.5%。     

激光加工微小孔内表面粗糙度的测量

采用激光打孔方法分别加工出直径为 0 2mm、0 2 5mm和 0 3mm的微小孔 ,应用剖分法直接接触式测量得到所加工微小孔的内表面粗糙度 ,并使用反射式显微镜进一步直接观察验证。该测量结果可用于熔融快速原型机喷头的微小孔内表面粗糙度的确定 ,也可用于研究纺丝机、喷墨打印机等类似微小孔时参考     

Surface roughness measurement based on fiber optic sensor

The multi-wavelength fiber sensor for measuring surface roughness and surface scattering characteristics were investigated. In this paper, specimens with different surface roughness were analyzed by using 650 nm, 1310 nm and 1550 nm laser as the light source, respectively. The working distance of 2 mm was chosen as the optimum measurement distance. The experimental results indicate that multi-wavelength fiber sensor can accurately measure surface roughness, and can effectively reduce the unsystematic error. The light scattering intensity ratio has a good linear relationship with the surface roughness. The minimum relative error of the surface roughness is 2.92%, the maximum relative error is 13.4%, and the average relative error is about 7.48%. The accuracy for measuring surface roughness by multi-wavelength fiber sensor is about twice as large as that by single-wavelength fiber sensor.     

Fiber optic surface topography measurement sensor and its design study

This paper presents some aspects of design approach, modeling, and experimental measurement results of a fiber optic-based surface topography measurement sensor that can measure surface roughness as well as the distance between the sensor tip and a surface and surface inclination angles. The working principle of the sensor is based on the detection of light intensity reflecting from the surface being measured. The sensor is very small and easy to operate. It can be attached to a coordinate measuring machine (CMM) to measure surface position coordinates, inclination angles, and surface roughness in a noncontact manner at one measurement setup. A theoretical model of intensity distribution and intensity detection has been established for the sensor. A three-factor and three-level experiment was designed to investigate the relationship between sensor performance and sensor design parameters. Two second-order regression models have been generated, which show that the central distance between the emitting and receiving fibers of a sensor has the strongest influence on the effective range of the sensor; whereas, the critical angle of a receiving fiber influences the sensitivity of the sensor most.     

一种反射式光纤传感器的研究

为了解决传统的单端输出Y型分支结构的反射式光纤传感器易受入射光强变化、被测表面形貌不同等因素影响的问题,作者研制了一种具有两个输出端的新结构光纤传感器,并对该光纤传感器在精加工表面上的光反射特性进行了理论分析和实验研究。研究结果表明,光纤测头两输出信号之比与测量距离的变化有较好的线性关系,并能显著减少光源发光强度波动及被测表面粗糙度对位移测量结果的影响,从而有利于提高抗干扰能力和测量精度。因此,这是一种性能比较优越的非接触式微位移传感器。     

Fiber optic displacement sensor for imaging of tooth surface roughness

A simple and inexpensive method using fiber optic displacement sensor is proposed for measurements of tooth surface roughness based on the intensity modulation technique. A light beam was launched onto a tooth surface via a bundled fiber. The reflected light from the surface was collected and measured as a function of lateral distance to estimate the roughness of the surface. The system’s roughness measurement capability was successfully tested on teeth surfaces of varying surface texture. In the measurement, the average surface roughness, R_a for the canine, molar, hybrid composite resin and artificial teeth surfaces were estimated to be approximately 121, 62.6, 39 and 37.6 μm, respectively. The experimental results indicated the capability of implementation of the displacement sensor for the imaging of the tooth surface profile as well as a micron-size roughness estimator with a measurement error of less than 2.35%.     

一种新型的表面粗糙度测量仪

】介绍了一种利用单片机为核心、以光纤为传感器的新型便携式表面粗糙度测量仪的测量原理,硬件电路及软件设计。该仪器具有工作效率高、体积小、测量可靠、操作方便、成本低等特点,特别适用于生产现场的成批零件检验或抽检。     

Automated Surface Roughness Measurement

A non-contact roughness sensor is described that is suited for integration with a computer-controlled coordinate measuring machine (CMM). The sensor employs a fibre optic interferometer, electronic control system and data-processing software. The combination of the sensor and computer controlled CMM allows surface texture assessment to be made during scheduled dimensional inspections of complex curved surface components, such as turbine blades. The sensor system will measure surface roughness parameters, for example Ra, using a method that reflects standard procedures. The lightweight sensor head can be mounted on a touch probe arm and the associated articulated mounting head; this combination gives quasi 5-axis positioning ability to the overall sensor. This is suitable for automated surface finish inspection of compound curved surface blades. The sensor and its control unit are integrated with the CMM controller and its operation can be controlled through standard part-program commands used by the CMM.     

Laser optical roughness measurement

A method for non-contacting profile assessment and roughness measurements of engineering surfaces is presented. The well known effect of focusing a light beam on the surface is used, at the same time compensating for the effect on the measuring results of varying material colours by appropriately processing the measuring signal. The sensor and the transducer are connected with the data-processing unit of a stylus instrument, which provides for a simple procedure of recording the roughness profile and calculating standard roughness parameters from it. The measuring results thus obtained agree well with the results of traditional stylus instruments.     

表面粗糙度测量仪的改进及其应用

工件表面粗糙度测量技术在许多领域具有广泛的应用前景,传统的表面粗糙度测量仪已经不能满足工件测量精度的要求。利用计算机强大的信号处理能力对传统表面粗糙度测量仪进行改进,通过数字滤波技术从传感器采集的信号中分离出粗糙度信号,经数据模拟测试获得了较精确的粗糙度信号。     

In situ non-contact measurements of surface roughness

Surface roughness measurements are often required to validate a machining process. However, when using a 3D surface roughness measuring instruments it is usually necessary to remove the part from the machine tool between two operations, potentially introducing systematic errors. Furthermore, surface roughness measuring instruments are not suited for measuring heavy and large parts such as stamping dies. This paper presents a method to measure the surface topography of a part in situ, i.e. directly on the machine tool without removing the part. After introducing the sensor technology and the data acquisition chain, the effects of geometric imperfections of the machine tool and compensation for thermal effects on the measurement results are discussed. An application of the method is then presented to assess a finishing process on a five-axis machining centre including milling and polishing operations.