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硅深槽ICP刻蚀中刻蚀条件对形貌的影响 总被引:2,自引:0,他引:2
以SF6/C2 H4为刻蚀气体,使用Corial200IL感应耦合等离子体(ICP)刻蚀系统,进行Si等离子刻蚀技术研究.通过调节刻蚀气体SF6与侧壁钝化保护气体C2H4的流量比和绝对值等工艺参数,对深Si刻蚀的形貌以及侧壁钻蚀情况进行改善,使该设备能够满足深硅刻蚀的基本要求,解决MEMS工艺及TSV工艺中的深硅刻蚀问题.实验结果表明,Corial200IL系统用SF6作等离子体刻蚀气体,对Si的刻蚀具有各向同性;C2H4作钝化气体,能够对刻蚀侧壁进行有效的保护,但由于C2H4的含量直接影响刻蚀速率和选择比,需对其含量及配比严格控制.研究结果为:SF6含量为40 sccm、C2H4含量为15 sccm时能够有效控制侧壁钻蚀,且具有较大的选择比,初步满足深硅槽刻蚀的条件. 相似文献
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以SF6/O2为刻蚀气体,采用电子回旋共振等离子体反应离子刻蚀(ECR-RIE)方法进行了氟化非晶碳(a-C∶F)低介电常数薄膜的等离子体刻蚀技术研究,结果表明,a-C∶F薄膜的刻蚀速率取决于薄膜中C—CFx与CFx两类基团刻蚀过程,富C—CFx结构的a-C∶F薄膜刻蚀速率在O2含量约20%时达到最大,而富CFx结构的a-C∶F薄膜刻蚀速率随O2的增大而减小。AFM分析表明,SF6气体刻蚀a-C∶F薄膜可以有效消除薄膜表面的团聚结构。XPS能谱分析表明,SF6气体刻蚀a-C∶F薄膜样品化学组分未发生变化,而O2气体刻蚀后在样品表面形成富C的a-C∶F层。该研究结果为a-C∶F应用于超大规模集成电路层间介质工艺奠定了必要的实验基础。 相似文献
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采用SF6/O2作为刻蚀气体,对单晶6H-SiC材料的感应耦合等离子体(ICP)刻蚀工艺进行了研究。分析了ICP功率、偏置电压、气体混合比等工艺参数对刻蚀速率和刻蚀质量的影响。结果表明,刻蚀速率随着ICP功率及偏置电压的增大而提高,刻蚀表面质量随偏置电压及O2的含量的增大而降低,而ICP功率的变化对刻蚀质量影响不大。混合气体中O2含量为20%时刻蚀速率达到最大值,同时加入氧气后形成易于充电的SiFxOy中间层,从而促进了微沟槽的形成。 相似文献
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以SF6/O2作为刻蚀气体,用磁增强反应离子刻蚀(MERIE)技术,对磁控溅射法制备的Pt电极进行了刻蚀。结果表明:Pt的刻蚀速率与刻蚀气体的混合比率以及刻蚀功率都有一定关系。在相同功率下,R[O2∶(SF6+O2)]=2/6,刻蚀速率达到极大值,功率为120W时,刻蚀速率极大值为12.4nm/min。AFM分析表明,薄膜表面的粗糙度随刻蚀功率增加而变大,均方根粗糙度从120W时的0.164nm增加到160W时的0.285nm。经优化工艺参数刻蚀后的Pt电极图形结构平整,边缘整齐。 相似文献
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p-GaN栅沟槽侧壁与AlGaN表面特性直接影响栅注入(GIT)型AlGaN/GaN HEMT器件的输出特性及击穿特性.对比研究了两种刻蚀气体(SF6/BCl3和Cl2/N2/O2)及不同的刻蚀掩膜层(SiO2,Si3N4和光刻胶)对AlGaN上p-GaN的选择性刻蚀结果,利用原子力显微镜(AFM)对刻蚀沟槽的表面形貌进行表征,并通过I-V测试其电学性能.结果显示,以Cl2/N2/O2为刻蚀气体,且体积流量为18,10和2 cm3/min时,p-GaN刻蚀速率稳定且与AlGaN的刻蚀选择比较高(约30),并且可使p-GaN刻蚀自动停止在AlGaN界面处.此外,以Si3N4作为刻蚀掩膜,可以获得表面光滑、无微沟槽且侧壁垂直度较好的沟槽结构.采用上述刻蚀工艺制备的GIT结构器件的漏端关态电流相比肖特基栅降低约2个量级,阈值电压约为0.61 V,峰值跨导为36 mS/mm. 相似文献
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《固体电子学研究与进展》2015,(1)
基于感应离子耦合等离子体(ICP)刻蚀技术,采用SF6和O2作为刻蚀气体,以金属铝和SiO2作为刻蚀掩膜,系统地研究了3C-SiC悬臂结构的加工方法以及掩膜材料对刻蚀悬臂结构的影响。首先采用SF6和O2作为刻蚀气体刻蚀出SiC结构,其次采用SF6气体各向同性刻蚀Si衬底,释放已刻好的SiC悬臂梁结构。铝作为掩膜时,刻蚀最小结构尺寸为6μm,SiC表面几乎无损伤;SiO2作为掩膜时,刻蚀最小结构尺寸为4μm,但SiC表面损伤较大。上述研究结果为3C-SiC MEMS器件的制备提供了工艺基础。 相似文献
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The article describes a model representation of radar probing data in form of a mixture of background and target samples, which is the sum of two random variables with very different parameters. For model development we research the behavior of the central moments of the distribution mix without assuming the distribution law form. An example it is described the detection of the signal at the output of compression system of chirp ionosonde. 相似文献
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解决IP网QoS问题是目前通信领域的研究热点之一.虽然研究已经取得了一定的进展,但人们对于IP 网QoS本身的含义及相关的问题还有着不同的理解.本文将从IP网QoS的定义入手讨论相关的一些问题以及解决IP网QoS问题所做的各种努力. 相似文献
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《Proceedings of the IEEE. Institute of Electrical and Electronics Engineers》1968,56(6):1024-1032
Assuming that visual responses are due to the action of particles on the membrane of the visual cells, the stochastic variability of the response should be a function of the number of particles producing it. Quantitative predictions can be made with the aid of a model proposed in previous articles. It is found that responses produced in visual cells of Limulus by absorption of a single photon have the stochastic properties which would be expected if the response to one photon were brought about by 25 particles. It is concluded from this that the processes leading to visual responses produce multiplication of particles. The effects of temperature and of metabolic poisons suggest that these processes are of chemical nature. 相似文献
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By means of exact conformal mapping method we have defined character of dependence of squares amounts of angular part of film
element on angled part dimension. We propose relations, approximating obtained dependence. Calculation results and experimental
researches of large-scale models are represented. 相似文献
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Moshrefzadeh R.S. Radcliffe M.D. Lee T.C. Mohapatra S.K. 《Lightwave Technology, Journal of》1992,10(4):420-425
The temperature dependence of refractive index of polymer films was determined for a number of slab waveguides by a grating coupling method. This dependence was examined as a function of parameters such as molecular weight and glass transition temperature of the polymer. Temperature-induced changes in N TE-N TM , N being the effective index, were studied systematically for different slab waveguide compositions. It is shown that with proper device design and choice of polymeric materials, thermal effects can be reduced 相似文献
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罗晓羽 《信息技术与标准化》2008,(6):37-39
论述了推进电子行业标准制修订项目计划管理信息化的必要性.并提出了具体措施;详细介绍了电子行业标准制修订项目计划管理数据库的设计思路和实现方法.阐述了对后续工作的几点思考. 相似文献
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对影响镍镀层内应力的因素做了介绍和分析,提出了对收缩应力的一种解释,提供了排除这些因素影响的方法,指出重视镀液的管理是减少各种影响内应力因素的主要办法。 相似文献
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A. M. Emel’yanov 《Semiconductors》2010,44(9):1134-1139
A method for analyzing the luminescence spectra of semiconductors is suggested. The method is based on differentiation of
the spectra. The potentialities of the method are demonstrated for luminescence in the region of the fundamental absorption
edge of Si and SiGe alloy single crystals. The method is superior in accuracy to previously known luminescence methods of
determining the band gap of indirect-gap semiconductors and practically insensitive to different conditions of outputting
radiation from the sample. 相似文献