A monolithically integrated HEMT-HBT low noise high linearityvariable gain amplifier

We report on a 1-6 GHz HEMT-HBT three-stage variable gain amplifier (VGA), which is realized using selective molecular beam epitaxy (MBE). The VGA integrates an HEMT low noise amplifier with an HBT analog current-steer variable gain cell and output driver stage to achieve a combination of low noise figure, wide gain control, and high linearity. The HEMT-HBT VGA MMIC obtains a maximum gain of 21 dB with a gain control range >30 dB, a minimum noise figure of 4.3 dB, and an input IP3 (IIP3) greater than -4 dBm over 25 dB of gain central range. By integrating an HEMT instead of on HBT preamplifier stage, the VGA noise figure is improved by as much as 2 dB compared to an all-HBT single-technology design. The HEMT-HBT MMIC demonstrates the functional utility and RF performance advantage of monolithically integrating both HEMT and HBT devices on a single substrate     

（英）D波段InP基高增益、低噪声放大芯片的设计与实现

利用90-nm InAlAs/InGaAs/InP HEMT工艺设计实现了两款D波段（110~170 GHz）单片微波集成电路放大器。两款放大器均采用共源结构,布线选取微带线。基于器件A设计的三级放大器A在片测试结果表明：最大小信号增益为11.2 dB@140 GHz,3 dB带宽为16 GHz,芯片面积2.6×1.2 mm2。基于器件B设计的两级放大器B在片测试结果表明：最大小信号增益为15.8 dB@139 GHz,3dB带宽12 GHz,在130~150 GHz频带范围内增益大于10 dB,芯片面积1.7×0.8 mm2,带内最小噪声为4.4 dB、相关增益15 dB@141 GHz,平均噪声系数约为5.2 dB。放大器B具有高的单级增益、相对高的增益面积比以及较好的噪声系数。该放大器芯片的设计实现对于构建D波段接收前端具有借鉴意义。     

A 5-10 GHz octave-band AlGaAs/GaAs HBT-Schottky diodedown-converter MMIC

The authors describe an AlGaAs/GaAs heterojunction bipolar transistor (HBT) X-band down-converter monolithic microwave integrated circuit (MMIC) which integrates a double double-balanced Schottky mixer and five stages of HBT amplification to achieve greater than 30 dB conversion gain over an RF bandwidth from 5 to 10 GHz. In addition, an output IP3 as high as +15 dBm has been achieved. The Schottky diodes are constructed from the existing N^$collector and N⁺ subcollector layers of the HBT molecular beam epitaxy (MBE) device structure. A novel HBT amplifier topology employing active feedback which provides wide bandwidth in a compact area is used for the RF, LO, and IF amplifier stages. The complete down-converter MMIC is realized in a 3.6×3.4 mm² area, is self-biased through a 6 V supply, and consumes 530 mW. This MMIC represents the highest complexity X-band down-converter MMIC demonstrated using GaAs HBT-Schottky diode technology     

A 44-GHz-high IP3 InP HBT MMIC amplifier for low DC powermillimeter-wave receiver applications

This paper reports on what is believed to be the highest IP3/P_dc power linearity figure of merit achieved from a monolithic microwave integrated circuit (MMIC) amplifier at millimeter-wave frequencies. The 44 GHz amplifier is based on an InP heterojunction bipolar transistor (HBT) technology with f_T's and f_max's of 70 and 200 GHz, respectively. The 44-GHz amplifier design consists of four prematched 1×l0μm² four-finger (40-μm²) heterojunction bipolar transistor (HBT) cells combined in parallel using a compact λ/8 four-way microstrip combiner. Over a 44-50-GHz frequency band, the amplifier obtains a gain of 5.5-6 dB and a peak gain of 6.8-7.6 dB under optimum gain bias. At a low bias current of 48 mA and a total dc power of 120 mW, the amplifier obtains a peak IP3 of 34 dBm, which corresponds to an IP3/P_dc power ratio of 21:1, a factor of two better than previous state-of-the-art MMIC's reported in this frequency range. By employing a thin, lightly doped HBT collector epitaxy design tailored for lower voltage and higher IP3, a record IP3/P_dc, power ratio of 42.4:1 was also obtained and is believed to be the highest reported for an MMIC amplifier of any technology. The new high-linearity HBT's have strong implications for millimeter-wave receiver as well as low-voltage wireless applications     

A novel self-oscillating HEMT-HBT cascode VCO-mixer using an activetunable inductor

Here we describe a unique Ka-band self-oscillating HEMT-HBT cascode mixer design which integrates an active tunable resonator circuit. The VCO-mixer MMIC integrates GaAs HEMT's and HBT's using selective molecular beam epitaxy (MBE) technology. The HEMT-HBT cascode active mixer operates similarly to a dual-gate mixer. The HBT of the cascode is used to construct a VCO by presenting the base with an HEMT tunable active inductor. The VCO can be tuned from 28.5 to 29.3 GHz while providing ≈0 dBm of output power. Operated as an upconverter, the MMIC achieves 6-9 dB conversion loss over a 31-39 GHz output frequency band. Using these active approaches, both VCO and mixer functions were integrated into a compact 1.44×0.76 mm² chip area. The active RF integrated circuit (IC) techniques presented here have direct implications to future high complexity millimeter-wave monolithic integrated circuits (MIMICs) for ultrahigh-speed clock recovery and digital radio applications     

7.1 GHz bandwidth monolithically integratedIn0.53Ga0.47As/In0.52Al0.48As PIN-HBT transimpedance photoreceiver

A monolithically integrated photoreceiver using an InAlAs/InGaAs HBT-based transimpedance amplifier has been fabricated and characterized. The p-i-n photodiode is implemented using the base-collector junction of the HBT. The 5 μm×5 μm emitter area transistors have self-aligned base metal and non-alloyed Ti/Pt/Au contacts. Discrete transistors demonstrated f_T and f_max of 54 GHz and 51 GHz, respectively. The amplifier demonstrated a -3 dB transimpedance bandwidth of 10 GHz and a gain of 40 dBΩ. The integrated photoreceiver with a 10 μm×10 μm p-i-n photodiode showed a -3 dB bandwidth of 7.1 GHz     

Pseudomorphic HEMT manufacturing technology for multifunctionalKa-band MMIC applications

We have demonstrated very good performance, high yield Ka-band multifunctional MMIC results using our recently developed 0.25-μm gate length pseudomorphic HEMT (PHEMT) manufacturing technology. Four types of MMIC transceiver components-low noise amplifiers, power amplifiers, mixers, and voltage controlled oscillators-were processed on the same PHEMT wafer, and all were fabricated using a common gate recess process. High performance and high producibility for all four MMIC components was achieved through the optimization of the device epitaxial structure, a process with wide margins for critical process steps and circuit designs that allow for anticipated process variations, resulting in significant performance margins. We obtained excellent results for the Ka-band power amplifier: greater than 26 dBm output power at center frequency with 4.0% standard deviation over the 3-in. wafer, 2-GHz bandwidth, greater than 20 pet-cent power-added efficiency, over 8 dB associated gain, and over 10 dB linear gain. The best performance for the Ka-band LNA was over 17 dB gain and 3.5 dB noise figure at Ka-band. In this paper, we report our device, process, and circuit approach to achieve the state-of-the-art performance and producibility of our MMIC chips     

Wideband HEMT MMIC low-noise amplifier with temperaturecompensation

A wideband low-noise pseudomorphic HEMT MMIC variable-gain amplifier has been designed and fabricated. The amplifier has a nominal gain of 13 dB across the band 2-20 GHz, with gain flatness better than ±0.4 dB. The noise figure is less than 3 dB across the band 6-16 GHz. An on-chip temperature-sensing diode is used to provide a linear temperature correction which has been used to reduce the gain variation of the amplifier by a factor of 2 across the temperature range -50°C to +95°C     

110-120-GHz monolithic low-noise amplifiers

The authors discuss the development of 110-120-GHz monolithic low-noise amplifiers (LNAs) using 0.1-mm pseudomorphic AlGaAs/InGaAs/GaAs low-noise HEMT technology. Two 2-stage LNAs have been designed, fabricated, and tested. The first amplifier demonstrates a gain of 12 dB at 112 to 115 GHz with a noise figure of 6.3 dB when biased for high gain, and a noise figure of 5.5 dB is achieved with an associated gain of 10 dB at 113 GHz when biased for low-noise figure. The other amplifier has a measured small-signal gain of 19.6 dB at 110 GHz with a noise figure of 3.9 dB. A noise figure of 3.4 dB with 15.6-dB associated gain was obtained at 113 GHz. The authors state that the small-signal gain and noise figure performance for the second LNA are the best results ever achieved for a two-stage HEMT amplifier at this frequency band     

Design, fabrication, and performance of high-speed monolithicallyintegrated InAlAs/InGaAs/InP MSM/HEMT photoreceivers

A detailed study of the performance of monolithically integrated photoreceivers based on metal-semiconductor-metal (MSM) photodetectors (PD's) and HEMT's is undertaken. Two different stacked-layer approaches to integrating MSM-PD's with HEMT's are investigated, and the performance of detectors and HEMT's for each approach is compared. The structure with the MSM layers grown on top of the HEMT layers exhibited the best overall performance. A physics-based MSM model is developed and incorporated into microwave circuit design software; excellent agreement between circuit simulations and measured frequency responses is demonstrated. To evaluate the effects of MSM electrode geometry and detector area on photoreceiver performance, photoreceivers with MSM interelectrode spacings of 1, 1.5, and 2 μm were fabricated and characterized. The electrical amplifier used in the photoreceivers is a two-stage, variable-transimpedance amplifier with a common-gate HEMT as the feedback path. By adjusting the DC voltage applied to the gate of this feedback HEMT, transimpedances ranging from 55.8 to 38.1 dBΩ, with corresponding -3 dB cutoff frequencies from 6.3 to 18.5 GHz, were measured experimentally. Excellent noise performance has been measured, with average input noise current spectral densities of 7.5, 8, and 12 pA/Hz^1/2 obtained for bandwidths of 6.3, 8, and 13.7 GHz, respectively. A packaged receiver has been tested at 5 Gb/s and an open eye pattern obtained     

Monolithic HEMT-HBT integration by selective MBE

We have achieved successful monolithic integration of high electron mobility transistors and heterojunction bipolar transistors in the same microwave circuit. We have used selective molecular beam epitaxy and a novel merged processing technology to fabricate monolithic microwave integrated circuits that incorporate both 0.2 μm gate-length pseudomorphic InGaAs-GaAs HEMTs and 2 μm emitter-width GaAs-AlGaAs HBTs. The HEMT and HBT devices produced by selective MBE and fabricated using our merged HEMT-HBT process exhibited performance equivalent to devices fabricated using normal MBE and our baseline single-technology processes. The selective MBE process yielded 0.2 μm HEMT devices with g_m=600 mS/mm and f_T=70 GHz, while 2×10 μm² HBT devices achieved β>50 and f_T=21.4 GHz at J_c=2×10⁴ A/cm². The performance of both a 5-10 GHz HEMT LNA with active on-chip HBT regulation and a 20 GHz Darlington HBT amplifier are shown to be equivalent whether fabricated using normal or selective MBE     

5-60-GHz high-gain distributed amplifier utilizing InP cascodeHEMTs

A high-gain InP MMIC cascode distributed amplifier was developed which has 12 dB of gain from 5 to 60 GHz with over 20-dB gain control capability and a noise figure of 2.5-4 dB in the Ka band. Lattice-matched InAlAs/InGaAs cascode HEMTs on InP substrate with 0.25-μm gate length were the active devices. Microstrip was the transmission medium for this MMIC with an overall chip dimension of 2.3 mm×0.9 mm. The gain/noise figure advantages of the InP HEMT over the AlGaAs HEMT and the superior gain performance of the cascode HEMT over the common-source HEMT are demonstrated     

Millimeter-wave wide-band amplifiers using multilayer MMICtechnology

This paper describes millimeter-wave wide-band single-ended and balanced amplifiers using novel multilayer monolithic microwave/millimeter-wave integrated circuit (MMIC) technology. The fundamental characteristics of thin-film transmission lines and a 50-GHz-band multilayer MMIC directional coupler are described through measurements up to 60 GHz. A single-ended amplifier fabricated in a 1.1 mm×0.8 mm area, shows a gain of about 12 dB with a noise figure of better than 5 dB around 50 GHz. A balanced amplifier fabricated using the multilayer MMIC directional couplers and single-ended amplifiers, shows a gain of 10-17 dB with input and output return losses of better than 14 dB from 33 to 53 GHz. The transmission lines and directional couplers can be effectively combined with millimeter-wave active circuits without degrading the circuit performance or increasing the circuit area. To our knowledge, these are the first millimeter-wave active circuits employing multilayer MMIC technology     

High-speed, low-noise InGaP/GaAs heterojunction bipolar transistors

We have demonstrated self-aligned InGaP/GaAs heterojunction bipolar transistors (HBT's) with excellent dc, microwave, and noise performance. A 3×10 μm² emitter finger device achieved a cutoff frequency of f_T=66 GHz and a maximum frequency of oscillation of f_max=109 GHz. A minimum noise figure of 1.12 dB and an associated gain of 11 dB were measured at 4 GHz. These results are the highest combined f_T+f_max and the lowest noise figure reported for an InGaP/GaAs HBT and are attributed to material quality and the use of self-aligned base contacts. These data clearly demonstrate the viability of InGaP/GaAs HBT's for high-speed, low-noise circuit applications     

X波段GaN单片电路低噪声放大器

采用0.25μm GaN HEMT制备工艺在AlGaN/GaN异质结材料上研制了高性能X波段GaN单片电路低噪声放大器.GaN低噪声单片电路采取两级微带线结构,10V偏压下芯片在X波段范围内获得了低于2.2 dB的噪声系数,增益达到18 dB以上,耐受功率达到了27 dBm.在耐受功率测试中发现GaN低噪声HEMT器件...     

Ultra-wideband monolithic photoreceivers using HBT-compatible HPTswith novel base circuits, and simultaneously integrated with an HBTamplifier

This paper presents two kinds of monolithically integrated ultra-wideband photoreceivers that use HBT-compatible HPTs with novel base circuits. The HPT photoreceiver, which consists of an HPT with an inductor and series resistor base circuit, yields ultra-broadband operation with 3 dB bandwidth from 0.43-12.1 GHz and over 11 dB gain compared to a photodiode with identical quantum efficiency. The HPT/HBT photoreceiver, which consists of an HPT with an inductor at the base terminal followed by an HBT amplifier circuit, yields ultra-wideband operation from 8.5-20.5 GHz (bandwidth of 12 GHz) with over 20 dB gain. The bandwidths of these photoreceivers are state-of-the art for monolithically integrated photoreceivers using HPT/HBT structures. The proposed photoreceivers, which are based on mature MMIC technologies, offer several other remarkable features such as good design accuracy and extremely small chip size     

一种新颖的具有HEMT和GaAs MMIC的Ku波段低噪声放大器

本文介绍了一种具有高电子迁移率晶体管(HEMT)和砷化镓单片微波集成电路(GaAs MMIC)的Ku波段低噪声放大器。在11.7～12.2GHz频率范围内,该放大器的噪声系数小于1.9dB,相关增益大于27dB,输入和输出驻波比小于1.4。放大器第一级采用了HEMT和微波串联电感反馈技术,放大器未级采用了Ku波段GsAs MMIC。设计的关键是采用微波串联电感反馈方法同时获得最佳噪声和最小输入驻波匹配。放大器的输入端和输出端均为BJ-120波导。     

A NOVEL Ku-BAND LOW NOISE AMPLIFIER WITH HEMT AND GaAs MMIC

A novel Ku-band low noise amplifier with a high electron mobility transistor (HEMT)and a GaAs monolithic microwave integrated circuit (MMIC) has been demonstrated. Its noisefigure is less-than 1.9dB with an associated gain larger than 27dB and an input/output VSWRless than 1.4 in the frequency range of 11.7-12.2GHz. The HEMT and the microwave series in-ductance feedback technique are used in the first stage of the amplifier, and a Ku-band MMIC isemployed in the last stage. The key to this design is to achieve an optimum noise match and a min-imum input VSWR matching simultaneously by using the microwave series inductance feedbackmethod. The B J-120 waveguides are used in both input and output of the amplifier.     

An indium phosphide MMIC amplifier for 180-205 GHz

This paper describes a high-performance indium phosphide (InP) monolithic microwave integrated circuit (MMIC) amplifier, which has been developed for application in radioastronomy and imaging-array receivers. Implemented using coplanar waveguide, the six-stage amplifier exhibits 15 db gain, 10 dB input and output return loss, and low noise figure over the 180-205 GHz frequency range. Only one design pass was needed to obtain excellent agreement between the predicted and measured characteristics of the circuit, a unique achievement in this frequency band. The circuit is also the first 180-205 GHz amplifier designed for and successfully fabricated using TRW's standard 0.1-μm InP HEMT process     

90 GHz basedband lumped amplifier

A broadband amplifier using InP-InGaAs single heterojunction bipolar transistors (HBTs) is presented. This modified Darlington amplifier exhibits a low-frequency gain of 6.2 dB with -3 dB bandwidth of 90 GHz. This wide bandwidth performance is compatible, or superior to, other lumped or distributed amplifiers based on HEMT and HBT technologies reported in the literature