磁控溅射TiAlSiN膜的抗氧化性能

目前,针对TiAlN和TiAlSiN薄膜在800~1 000℃高温氧化时的硬度及抗氧化性能研究较少。利用磁控溅射技术,在高速钢W18Cr4V表面制备了TiAlN和TiAlSiN薄膜,当Al靶功率为100 W、Si靶溅射电流为0.20 A时,TiAlSiN薄膜硬度及弹性模量达到最大值,对此条件下的膜层进行了大气高温氧化试验。采用激光共聚焦显微镜、扫描电子显微镜(SEM)和能谱仪(EDS)、X射线衍射仪(XRD)等检测手段,研究了800,900,1 000℃下2种薄膜的抗氧化性。结果表明:经相同温度氧化处理后,TiAlSiN薄膜的表面粗糙度明显小于TiAlN薄膜的;在TiAlN中引入Si元素形成Si3N4包裹TiN纳米晶的复合结构,抑制了膜层中裂纹的形成,使TiAlSiN薄膜在相同氧化温度下的抗氧化性能比TiAlN薄膜更加优异。     

Microstructure and properties of TiAlSiN coatings prepared by hybrid PVD technology

TiAlSiN coatings with different Si content were prepared by hollow cathode discharge (HCD) and mid-frequency magnetron sputtering (MFMS) hybrid coating deposition technology. The chemical composition, microstructure, mechanical properties of these coatings were systematically investigated by means of energy dispersive spectrometry (EDS), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), nanoindentation measurement, scratch and high speed milling hardened steel tests. The coatings prepared by this method showed the structure of crystalline phase was corresponding to that of TiAlN, however, different preferred orientation with addition of Si. Proper content of Si into TiAlN led to increase of microhardness and adhesion. TiAlSiN coated end mill with Si content of 4.78 at.% had the least flank wear, which was improved about 20% milling distance than TiAlN coated end mill.     

TiAlSiN-Ti(Mo)N/MoS2复合涂层微观结构及摩擦学性能的研究

采用磁控溅射技术在AISI-304不锈钢上制备了TiAlSiN-Ti(Mo)N/MoS2复合涂层。采用电子显微镜(SEM)、X射线衍射仪(XRD)、显微硬度计、球盘摩擦磨损试验机、表面形貌仪等对涂层的表面形貌、显微组织、硬度和摩擦学性能进行了系统的研究。结果表明TiAlSiN-Ti(Mo)N/MoS2复合涂层的硬度为27.56 GPa,相比于TiAlSiN涂层的硬度(29.1 GPa)有所下降,但是涂层的耐磨性能得到明显提高。在室温至600℃条件下TiAlSiN-Ti(Mo)N/MoS2复合涂层的主要磨损机理为黏着磨损,200和400℃时的磨损率分别为0.0339×10^-3和0.1122×10^-3mm^3/(Nm),相较于TiAlSiN涂层分别降低了38%和57%,600℃时的磨损率接近TiAlSiN涂层。总体来说TiAlSiN-Ti(Mo)N/MoS2复合涂层的性能高于单一的TiAlSiN涂层。     

高功率调制脉冲磁控溅射沉积TiAlSiN纳米复合涂层结构调控与性能研究

采用高功率调制脉冲磁控溅射Al/(Al+Ti)原子比(x)分别为0.25、0.5和0.67的TiAlSi合金靶, 溅射功率1~4 kW, 氮气分压25%, 工作气压0.3 Pa, 在Si(100)和AISI 304奥氏体不锈钢基片上沉积了TiAlSiN纳米复合涂层。TiAlSiN涂层中氮含量保持在52.0at%~56.7at%之间, 均形成了nc-TiAlN/a-Si₃N₄/AlN纳米晶/非晶复合结构。随着原子比x增加, 非晶含量增加, 涂层硬度先升高而后降低。当x=0.5时, 硬度最高可达28.7 GPa。溅射功率升高可提高溅射等离子体中金属离化程度, 促进涂层调幅分解的进行, 形成了界面清晰的非晶包裹纳米晶结构, 且晶粒尺寸基本保持不变。当x=0.67时, 溅射功率由1 kW上升到4 kW时, 硬度由16.4 GPa升至21.3 GPa。不同靶材成分和溅射功率条件下沉积的TiAlSiN涂层的磨损率为(0.13~6.25)×10^-5 mm³/(N·m), 具有优良的耐磨性能。当x=0.67, 溅射功率2 kW时, nc-TiAlN/a-Si₃N₄纳米复合涂层具有最优的耐磨性能。     

碳靶电流对CrCN镀层摩擦系数的影响

采用闭合场非平衡磁控溅射离子镀技术于单晶硅和M2高速钢基片上制备CrCN镀层以研究C靶电流对CrCN镀层摩擦系数的影响,并通过能谱、原子力显微镜、X射线衍射、X射线光电子能谱分析了C元素的存在状态及其对CrCN镀层组织结构的影响规律.结果表明,当碳靶电流Ic从0A增大到1-5A时,镀层摩擦系数从0.75降至0.3,镀层...     

Study on tribological property of CrCN coating based on magnetron sputtering plating technique

The influence of carbon doping on tribological properties of CrCN coating was studied through preparation of coatings deposited on single crystal silicon and M2 high-speed steel (HSS) substrate using closed-field unbalanced magnetron sputtering ion plating technique. The friction coefficients were measured by pin-on-disc set-up and the wear traces of the coatings were observed by optical microscope. The microstructure and bond states of the coatings were characterized by atomic force microscope (AFM), transmission electron microscopy (TEM), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). The results show that the friction coefficient of coating decreases from 0.75 to 0.38, the micro-hardness increases from 1930 HV to 2300 HV, and the specific wear ratio of the coatings decreases from 8.351 × 10⁻¹⁵ m³/Nm to 3.859 × 10⁻¹⁵ m³/Nm with the increasing of carbon target current (I_C) from 0 A to 1.5 A. The grain size and the roughness of the coatings both decrease with the increasing of carbon target current, at the same time the coatings transform from crystalline state to amorphous state.     

硅钢绝缘涂层的研究进展

本文系统介绍了取向硅钢与无取向硅钢表面绝缘涂层，包括有机涂层、无机涂层和半无机涂层三大类。无机涂层具有良好的耐热和焊接性能，但其冲制性和粘结性不佳。半无机涂层具有良好的冲制性和粘结性，但其耐热性和焊接性不及无机涂层。另外，最新研究的取向硅钢表面物理气相沉积ＴｉＮ、ＣｒＮ和ＴｉＣ绝缘涂层可使硅钢获得极低的铁损，大大提高了硅钢的磁通量密度，并具有优异的耐热、焊接、冲制和粘结性。     

界面梯度对TiN／不锈钢涂层应力的影响

气相沉积表面涂层在科学技术各领域得到广泛应用，然而，由于涂层与基体在化学和物理性质上的差异，使得涂层与基体在界面两侧产生结构和性能上的突变，影响了涂层功能的充分发挥。为此，采用多靶磁控溅射技术制备了具有梯度过渡层的ＴｉＮ／不多靶磁控溅射技术制备了具有梯度过渡层的ＴｉＮ／不锈钢涂层，并研究了梯度层对涂层内应力的影响。研究结果表明：采用多靶磁控溅射技术，分别控制各靶的功率，能够精确控制梯度层的成份变化     

Mikrostrukturieren von thermisch gespritzten Mo‐Schichten für Anwendungen im Bereich hoher Reib‐ und Verschleißbeanspruchungen

The properties of thermally sprayed coatings are dependent on many parameters such as the spraying material, substrate properties, and the injection parameters. In this study, the influence of two variable spray parameters (spraying distance and current) were investigated on molybdenum‐containing thermal spray coatings. Particularly, materials and surface characterizing properties were analyzed, and the dependence on each other was examined. The important surface parameters studied in this case are the porosity and the pore depth of the coatings. Following the correlation between spray parameters and coating properties, the influence of surface properties on the tribological behavior will be discussed, in comparison to an uncoated steel surface.     

Nitridische und oxinitridische HPPMS‐Beschichtungen für den Einsatz in der Kunststoffverarbeitung (Teil 1)

Nitride and oxy‐nitride HPPMS coatings for the application in the plastics processing (Part 1) In plastics processing adhesive and abrasive wear are some of the main damage mechanisms. For the wear protection and in order to increase the tool life time as well as to improve the quality of the plastic products, binary or ternary chrome‐based coatings like CrN and (Cr,Al)N deposited by physical vapor deposition (PVD) are used. As the chemical composition of the coating has a significant impact on the surface oxide layer formed after deposition and therefore on the wetting behavior of the plastic melt on the tool surface, the aim on this work was to synthesize different coatings from the system Cr‐Al‐O‐N. Therefore, a nitride coating (Cr,Al)N and two quaternary oxy‐nitride coatings (Cr,Al)ON were deposited by using a dcMS/HPPMS (direct current magnetron sputtering/high power pulse magnetron sputtering) hybrid process by varying the oxygen flux. This articles emphasis is on explaining the influence of varying the oxygen flux during the coating process on the coating properties as well as the composite properties towards the plastic mould steel. On this basis a follow up article in the next issue will concentrated on the more application oriented system properties of the three coating systems towards a polycarbonate melt.     

Influence of Ni content on the structure and properties of Cr-Ni-N coatings prepared by direct current magnetron sputtering

Cr-Ni-N coatings were deposited on 304 stainless steel substrates using a conventional direct current magnetron reactive sputtering system in nitrogen-argon reactive gas mixtures. The influence of Ni content (0 ≦ x ≦ 20 at.%) on the coating composition, microstructure, and tribological properties was investigated by glow discharge optical spectroscopy, X-ray diffraction and transmission electron microscopy, scanning electron microscopy (SEM), nano-indentation, and pin-on-disk tests. The results showed that microstructure and properties of coatings changed due to the introduction of Ni. The ternary Cr-Ni-N coatings exhibited solid solution structures in spite of the different compositions. The addition of Ni strongly favoured preferred orientation growth of <200>. This preferred orientation resulted from the formed nano-columns being composed of grains with the same crystallographic orientation, as confirmed by SEM cross-sectional observations. The mechanical properties including the nano-hardness and reduced Young's modulus decreased with increasing Ni content. Pin-on-disk tests showed that low Ni content coatings presented higher abrasion resistance than high Ni content coatings.     

Effect of Thickness on the Structure and Tribological Properties of MoSx Coating

MoSx coatings were prepared by bipolar-pulse DC unbalanced magnetron-sputtering system with the variation of coating thickness at different Ar pressures.The composition and surface morphology were determined by using energy dispersive X-ray and scanning electron microscopy;the structural characterization was analyzed by X-ray diffraction.The friction and wear properties were investigated by fretting tests in air with less than 10% and 50% relative humidity.At 0.40 Pa pressure,(002) basal plane orientation was formed throughout the coatings.At 0.88 Pa and 1.60 Pa pressures,(002) basal plane orientation was only noticed in the first stage of coating growth(around 0.20 μm in thickness), and then edge orientations with their basal planes perpendicular to the surface would be evolved in the coatings.Humidity has a minor influence on the coatings that have(002) basal plane orientation,whereas the tribological properties of MoSx coatings with edge orientations are greatly affected by humidity.The mechanisms of coating growth and friction and wear processes are discussed.     

射频反应溅射(Al,Ti)N涂层的微结构与力学性能

采用Al-Ti镶嵌复合靶在不同氮分压下制备了一系列(Al,Ti)N涂层,并采用EDS,AFM,XRD,TEM和微力学探针表征了涂层的沉积速率、化学成分、微结构和力学性能,研究了氮分压对涂层的影响.结果表明,氮分压对(Al,Ti)N涂层影响显著:合适的氮分压可以得到化学计量比的(Al,Ti)N涂层,涂层为单相组织,并呈现(111)择优取向,最高硬度和弹性模量分别达到36.9GPa和476GPa.过低的氮分压不但会造成涂层贫氮,而且涂层中的Al含量偏低,硬度不高.氮分压过高,由于存在"靶中毒"现象,尽管涂层的成分无明显变化,但会大大降低其沉积速率,并使涂层形成纳米晶或非晶态结构,涂层的硬度也较低.     

Nitridische und oxinitridische HPPMS‐Beschichtungen für den Einsatz in der Kunststoffverarbeitung (Teil 2)

Nitride and oxy‐nitride HPPMS coatings for the application in the plastics processing (Part 2) In the previous issue three oxy‐nitridic hard coatings on CrAl‐basis were investigated. These coatings were deposited by physical vapour deposition (PVD) as protective coatings against adhesive and abrasive wear in polymer extrusion. The coatings were developed using a variation of the oxygen content to investigate the influence of the chemical composition on the coating properties as well as composite properties between the coating and the coated tool. Following up on these findings this article will focus on the application oriented system properties of the three investigated coating systems towards the polycarbonate melt.     

Tribologische Untersuchung bionischer und mikrostrukturierter Funktionsflächen

An established concept adjusting tribological properties and for increasing the wear resistance is presented by coatings. In addition to the material adaption of surfaces, there are efforts of applying structures on tool active parts in order to allow a further adjustment on the property profile. For this reason, the presented article investigates the influence of bionic and technologically textured surfaces on the friction and wear behavior with and without near‐net shaped wear‐resistant PVD coatings. Based on the example of nature, a honeycombed surface structure discovered on the head of scarab beetles as well as a dimple structure optimized for the manufacturing time were transferred on HSS steel by means of micro‐milling. The analyses focus on the influence of the surface structures, the effects of PVD coatings and their interactions on the friction and wear behavior. The investigations show that the tribological properties depend on each surface structure and the material pairing. Both the technological and the bionic structures show a reduction of the friction coefficient in combination with the material pairing 100Cr6 and WCCo compared to polished samples. Furthermore, it is shown that the CrAlN coating has no influence on the friction behavior, but rather leads to the desired increase in the wear resistance.     

Cathodic arc plasma deposited TiAlSiN thin films using an Al-15 at.% Si cathode

Thin films of TiAlSiN were deposited on SKD 11 tool steel substrates using two cathodes, of Ti and Al-15 at.% Si, in a cathodic arc plasma deposition system. The influence of AlSi cathode arc current and substrate bias voltage on the mechanical and structural properties of the films was investigated. The TiAlSiN films had a multilayered structure in which nanocrystalline cubic TiN layers alternated with nanocrystalline hexagonal AlSiN layers. The hardness of the films decreased with the increase of the AlSi cathode arc current. The hardness of the films also decreased as the bias voltage was raised from − 50 V to − 200 V. The maximum hardness of 43 GPa was observed at the films deposited at the pressure 0.4 Pa, Ti cathode arc current 55 A, Al cathode arc current 35 A, temperature 250 °C and bias voltage of − 50 V.     

Corrosion behavior of nanolayered TiN/NbN multilayer coatings prepared by reactive direct current magnetron sputtering process

TiN, NbN and TiN/NbN multilayer coatings were deposited on tool steel substrates using a reactive DC magnetron sputtering process. The coatings were characterized using X-ray diffraction, nanoindentation, atomic force microscopy, scanning electron microscopy (SEM) and energy-dispersive X-ray analysis. The corrosion behavior of TiN/NbN multilayer coatings was studied in 0.5 M HCl and 0.5 M NaCl solutions using potentiodynamic polarization and compared with single layered TiN and NbN coatings. Approximately 1.5 μm thick coatings of TiN, NbN and TiN/NbN multilayers showed good corrosion protection of the tool steel substrate and multilayer coatings performed better than single layered coatings. The corrosion behavior of the multilayers improved with total number of interfaces in the coatings. In order to conclusively demonstrate the positive effect of layering, corrosion behavior of 40-layer TiN/NbN multilayers was studied at lower coating thicknesses (32–200 nm) and compared with single layer TiN coatings of similar thicknesses. The polarization data and SEM studies of these coatings indicated that the corrosion behavior improved with coating thickness and multilayers showed better corrosion resistance as compared to the single layer coatings. Other studies such as intrinsic corrosion, effects of Ti interlayer and post-deposition annealing on the corrosion behavior of the multilayer coatings are also presented in this paper. The results of this study demonstrate that nanolayered multilayers can effectively improve the corrosion behavior of transition metal nitride hard coatings.     

Structure, mechanical properties and corrosion resistance of nanocomposite coatings deposited by PVD technology onto the X6CrNiMoTi17-12-2 and X40CrMoV5-1 steel substrates

This article presents the research results on the structure and mechanical properties of nanocomposite coatings deposited by PVD methods on the X6CrNiMoTi17-12-2 austenitic steel and X40CrMoV5-1 hot work tool steel substrates. The tests were carried out on TiAlSiN, CrAlSiN and AlTiCrN coatings. It was found that the structure of the PVD coatings consisted of fine crystallites, while their average size fitted within the range 11–25 nm, depending on the coating type. The coatings demonstrated columnar structure and dense cross-sectional morphology as well as good adhesion to the substrate, the latter not only being the effect of adhesion but also by the transition zone between the coating and the substrate, developed as a result of diffusion and high-energy ion action that caused mixing of the elements in the interface zone. The critical load L _C2 lies within the range 27–54 N, depending on the coating and substrate type. The coatings demonstrate a high hardness (~40 GPa) and corrosion resistance.     

TiAlN涂层材料的制备及性能研究

采用独立靶材在YG6硬质合金上以电弧离子镀工艺制备了TiAlN涂层,研究了钛靶弧流对涂层的微观形貌、成分和性能的影响,对TiAlN涂层的膜基结合强度及高温抗氧化性能进行了测试分析,并将TiAlN涂层的YG6硬质合金刀具与未涂层的YG6硬质合金刀具对T12工模具钢(50HRC)进行对比切削试验。结果表明:钛靶弧流为60～70A时,涂层具有较理想的表面结构,膜基结合力较好,可达44N;钛靶电流对涂层中N含量的影响不大,对Al及Ti含量有较明显的影响。在干式切削条件下,TiAlN涂层刀具的使用寿命是未涂层刀具的3倍。     

V含量对磁控溅射CrAlVN涂层微观结构及力学和摩擦学性能的影响

采用磁控共溅射工艺在火炮身管PCrNi3Mo钢材料表面沉积了(Cr0.5Al0.5)1-xVxN(x=0%~10.6%,原子分数)涂层。利用电子探针显微分析仪(EPMA)、X射线衍射仪(XRD)、扫描电镜(SEM)对涂层的组成、微观形貌与相结构进行了表征,研究了V含量对涂层微观结构和形貌的影响。结果表明V的加入使得涂层中出现了CrVN新晶相,且随着V含量的增加CrVN特征峰越来越明显,晶粒簇尺寸减小,V元素起到了一定的细化晶粒簇作用。利用纳米压痕仪及摩擦试验机对涂层的硬度、弹性模量和摩擦系数进行了测试,研究了V含量对(Cr0.5Al0.5)1-xVxN涂层性能的影响。结果表明V含量在7.2%时涂层硬度和弹性模量达到最大值,分别为21.36GPa和297.8GPa;随着V含量的增加,涂层的摩擦系数逐渐减小,当V含量在10.6%时,涂层摩擦系数平均值为0.094,表现出良好的摩擦磨损性能。