共查询到20条相似文献,搜索用时 15 毫秒
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The fabrication of AlGaN/GaN double-channel high electron mobility transistors on sapphire substrates is reported. Two carrier channels are formed in an AlGaN/GaN/AlGaN/GaN multilayer structure. The DC performance of the resulting double-channel HEMT shows a wider high transconductance region compared with single-channel HEMT. Simulations provide an explanation for the influence of the double-channel on the high transconductance region. The buffer trap is suggested to be related to the wide region of high transconductance. The RF characteristics are also studied. 相似文献
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正The fabrication of AlGaN/GaN double-channel high electron mobility transistors on sapphire substrates is reported.Two carrier channels are formed in an AlGaN/GaN/AlGaN/GaN multilayer structure.The DC performance of the resulting double-channel HEMT shows a wider high transconductance region compared with single-channel HEMT. Simulations provide an explanation for the influence of the double-channel on the high transconductance region.The buffer trap is suggested to be related to the wide region of high transconductance.The RF characteristics are also studied. 相似文献
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Computer simulation of an AlGaN/GaN HEMT is carried out using commercially available software DESSIS. Traps located at the top of the AlGaN layer have been identified as being the primary source of electrons in the AlGaN/GaN HEMT. Recent experiments have focused on their role in HEMT performance with regard to the virtual gate effect and current collapse. In this work, analysis is carried out on these devices through the development of two different models designed to describe the 2DEG formation. Simulation of these models using the hydrodynamic model, which takes into account heating of the electrons, has been carried out to provide a more detailed understanding of the role of surface traps. 相似文献
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Lan X. Wojtowicz M. Smorchkova I. Coffie R. Tsai R. Heying B. Truong M. Fong F. Kintis M. Namba C. Oki A. Wong T. 《Microwave and Wireless Components Letters, IEEE》2006,16(7):425-427
A Q-band 40-GHz GaN monolithic microwave integrated circuit voltage controlled oscillator (VCO) based on AlGaN/GaN high electron mobility transistor technology has been demonstrated. The GaN VCO delivered an output power of +25dBm with phase noise of -92dBc/Hz at 100-KHz offset, and -120dBc/Hz at 1-MHz offset. To the best of our knowledge, this represents the state-of-the-art for GaN VCOs in terms of frequency, output power, and phase noise performance. This work demonstrates the potential for the use of GaN technology for high frequency, high power, and low phase noise frequency sources for military and commercial applications. 相似文献
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Francesca Danesin Augusto Tazzoli Franco Zanon Gaudenzio Meneghesso Enrico Zanoni Antonio Cetronio Claudio Lanzieri Simone Lavanga Marco Peroni Paolo Romanini 《Microelectronics Reliability》2008,48(8-9):1361-1365
The effects of thermal storage on GaN–HEMT devices grown on SiC substrate have been investigated by DC and pulsed electrical measurements, breakdown measurements (by means of a Transmission Line Pulser, TLP), and optical and electron microscopy. After 3000 h of thermal storage testing at 300 °C, only a limited reduction of the DC drain saturation current and of the transconductance peak was observed (20% and 25% decrease, respectively). However, pulsed measurements on aged devices clearly highlight a dramatic current collapse effect that has been attributed to a creation of surface traps in the gate-to-drain and gate-to-source access region. On-state breakdown characterization carried out on aged devices did not highlight any noticeable changes with respect to the untreated devices similarly to the DC characterization. Failure analyses have demonstrated that a loss of adhesion of the passivation layer was responsible for the observed trap formation. An improved passivation deposition process was therefore developed, including a surface cleaning procedure aimed at preventing passivation detaching. The devices fabricated using this new procedure do not show any enhancement of trapping effects up to 500 h of thermal stress at 300 °C. 相似文献
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AlGaN/GaN高电子迁移率晶体管(HEMT)以其高输出功率密度、高电压工作和易于宽带匹配优势将成为下一代高频固态微波功率器件. 相似文献
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Kaper V.S. Tilak V. Hyungtak Kim Vertiatchikh A.V. Thompson R.M. Prunty T.R. Eastman L.F. Shealy J.R. 《Solid-State Circuits, IEEE Journal of》2003,38(9):1457-1461
A monolithic X-band oscillator based on an AlGaN/GaN high electron mobility transistor (HEMT) has been designed, fabricated, and characterized. A common-gate HEMT with 1.5 mm of gate width in conjunction with inductive feedback is used to generate negative resistance. A high Q resonator is implemented with a short-circuit low-loss coplanar waveguide transmission line. The oscillator delivers 1.7 W at 9.556 GHz into 50-/spl Omega/ load when biased at V/sub ds/=30 V and V/sub gs/=-5 V, with dc-to-RF efficiency of 16%. Phase noise was estimated to be -87 dBc/Hz at 100-kHz offset. Low-frequency noise, pushing and pulling figures, and time-domain characterization have been performed. Experimental results show great promise for AlGaN/GaN HEMT MMIC technology to be used in future high-power microwave source applications. 相似文献
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S. T. Bradley A. P. Young L. J. Brillson M. J. Murphy W. J. Schaff 《Journal of Electronic Materials》2001,30(3):123-128
We have used low energy electron-excited nanoscale luminescence spectroscopy (LEEN) to detect the defects in each layer of
AlGaN/GaN HEMT device structures to correlate their effect on two-dimensional electron gas (2DEG) confinement. Also, we have
used Auger electron spectroscopy (AES) to detect the chemical composition as a function of lateral position on a growth wafer
and to correlate chemical effects with electronic properties. We investigated several high-quality AlGaN/GaN heterostructures
of varying electrical properties using incident electron beam energies of 0.5–15 keV to probe electronic state transitions
within each of the heterostructure layers. The LEEN depth profiles reveal differences between sucessful and failed structures
and highlight the importance of acceptor deep defect levels in the near 2DEG region. Variations in the GaN and AlGaN band
edge emissions, as well as the yellow defect emission across an AlGaN/GaN heterostructure growth wafer have been observed.
AES and LEEN spectroscopy of the growth wafer suggest that variation in the cation concentration may play a role in the mechanism
responsible for the deep aceceptor level emission in the AlGaN barrier layer. 相似文献
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报道了研制的AlGaN/GaN微波功率HEMT,该器件采用以蓝宝石为衬底的非掺杂AlGaN/GaN异质结构,器件工艺采用了Ti/Al/Ni/Au欧姆接触和Ni/Au肖特基势垒接触以及SiN介质进行器件的钝化.研制的200μm栅宽T型布局AlGaN/GaN HEMT在1.8GHz,Vds=30V时输出功率为28.93dBm,输出功率密度达到3.9W/mm,功率增益为15.59dB,功率附加效率(PAE)为48.3%.在6.2GHz,Vds=25V时该器件输出功率为27.06dBm,输出功率密度为2.5W/mm,功率增益为10.24dB,PAE为35.2%. 相似文献
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非掺杂AlGaN/GaN微波功率HEMT 总被引:5,自引:4,他引:5
报道了研制的Al Ga N / Ga N微波功率HEMT,该器件采用以蓝宝石为衬底的非掺杂Al Ga N/ Ga N异质结构,器件工艺采用了Ti/ Al/ Ni/ Au欧姆接触和Ni/ Au肖特基势垒接触以及Si N介质进行器件的钝化.研制的2 0 0μm栅宽T型布局Al Ga N / Ga N HEMT在1.8GHz,Vds=30 V时输出功率为2 8.93d Bm,输出功率密度达到3.9W/mm ,功率增益为15 .5 9d B,功率附加效率(PAE)为4 8.3% .在6 .2 GHz,Vds=2 5 V时该器件输出功率为2 7.0 6 d Bm ,输出功率密度为2 .5 W/ mm ,功率增益为10 .2 4 d B,PAE为35 .2 % . 相似文献
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Ga N有较 Ga As更宽的禁带、更高的击穿场强、更高的电子饱和速度和更高的热导率 ,Al Ga N/Ga N异质结构不仅具有较 Ga As PHEMT中Al Ga As/In Ga As异质结构更大的导带偏移 ,而且在异质界面附近有很强的自发极化和压电极化 ,极化电场在电子势阱中形成高密度的二维电子气 ,这种二维电子气可以由不掺杂势垒层中的电子转移来产生。理论上 Al Ga N/Ga N HEMT单位毫米栅宽输出功率可达到几十瓦 ,而且其宽禁带特点决定它可以承受更高的工作结温 ,作为新一代的微波功率器件 ,Al Ga N/Ga N HEMT将成为微波大功率器件发展的方向。采… 相似文献
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AlGaN/GaN高电子迁移率晶体管(HEMT)以其高输出功率密度、高电压工作和易于宽带匹配等优势将成为下一代高频固态微波功率器件.微波功率器件主要有内匹配功率管和功率单片微波集成电路(MMIC)两种结构形式,功率MMIC尽管其研制成本相对较高,但功率MMIC可实现宽带匹配,同时功率MMIC的体积较内匹配功率管小得多,是满足诸如X波段TlR组件应用不可或缺的结构形式.功率MMIC的结构形式主要有微带和共面波导(CPW)两种,相比于CPW结构,微带结构的MMIC芯片面积更小,特别是对于大栅宽器件,微带结构的通孔接地更有利于寄生参量的减小,有利于提高MMIC的性能,因此微带结构也是应用更为广泛的MMIC结构形式. 相似文献
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An enhancement-mode AlGaN/GaN HEMT with a threshold voltage of 0.35 V was fabricated by fluorine plasma treatment.The enhancement-mode device demonstrates high-performance DC characteristics with a saturation current density of 667 mA/mm at a gate bias of 4 V and a peak transconductance of 201 mS/mm at a gate bias of 0.8 V.The current-gain cut-off frequency and the maximum oscillation frequency of the enhancement-mode device with a gate length of μm are 10.3 GHz and 12.5 GHz,respectively,which is comparable with the depletion-mode device.A numerical simulation supported by SIMS results was employed to give a reasonable explanation that the fluorine ions act as an acceptor trap center in the barrier layer. 相似文献
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AlGaN/AlN/GaN high-power microwave HEMT 总被引:2,自引:0,他引:2
Shen L. Heikman S. Moran B. Coffie R. Zhang N.-Q. Buttari D. Smorchkova I.P. Keller S. DenBaars S.P. Mishra U.K. 《Electron Device Letters, IEEE》2001,22(10):457-459
In this letter, a novel heterojunction AlGaN/AlN/GaN high-electron mobility transistor (HEMT) is discussed. Contrary to normal HEMTs, the insertion of the very thin AlN interfacial layer (~1 nm) maintains high mobility at high sheet charge densities by increasing the effective ΔEC and decreasing alloy scattering. Devices based on this structure exhibited good DC and RF performance. A high peak current 1 A/mm at VGS=2 V was obtained and an output power density of 8.4 W/mm with a power added efficiency of 28% at 8 GHz was achieved 相似文献
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利用范德堡Hall方法和汞探针C-V方法,研究了不同Si调制掺杂浓度对AlGaN/GaN HEMT材料电学性质的影响.发现si掺杂可以改善材料电学性能,二维电子气(2DEG)面密度和方块电阻(ns×μ)可以通过si调制掺杂精确控制.当Si掺杂浓度为3×10(18)cm-3时,得到了最低的方块电阻360Ω/□.尽管受到高浓度电子和离化杂质对二维电子气的散射影响,迁移率仍可达1220cm2/(V·s).分析了范德堡Hall方法和汞探针C-V方法的差别,同时测得材料的阈值电压也在合理范围. 相似文献
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<正>南京电子器件研究所采用含有双AlGaN过渡层的材料结构在76.2 mm(3英寸)Si衬底上外延生长了厚度超过2μm的AlGaN/GaN HEMT材料(图1),材料表面光滑、无裂纹。通过外延材料结构和生长条 相似文献