Single‐Step Deposition of Au‐ and Pt‐Nanoparticle‐Functionalized Tungsten Oxide Nanoneedles Synthesized Via Aerosol‐Assisted CVD,and Used for Fabrication of Selective Gas Microsensor Arrays

Tungsten oxide nanostructures functionalized with gold or platinum NPs are synthesized and integrated, using a single‐step method via aerosol‐assisted chemical vapour deposition, onto micro‐electromechanical system (MEMS)‐based gas‐sensor platforms. This co‐deposition method is demonstrated to be an effective route to incorporate metal nanoparticles (NP) or combinations of metal NPs into nanostructured materials, resulting in an attractive way of tuning functionality in metal oxides (MOX). The results show variations in electronic and sensing properties of tungsten oxide according to the metal NPs introduced, which are used to discriminate effectively analytes (C₂H₅OH, H₂, and CO) that are present in proton‐exchange fuel cells. Improved sensing characteristics, in particular to H₂, are observed at 250 °C with Pt‐functionalized tungsten oxide films, whereas non‐functionalized tungsten oxide films show responses to low concentrations of CO at low temperatures. Differences in the sensing characteristics of these films are attributed to the different reactivities of metal NPs (Au and Pt), and to the degree of electronic interaction at the MOX/metal NP interface. The method presented in this work has advantages over other methods of integrating nanomaterials and devices, of having fewer processing steps, relatively low processing temperature, and no requirement for substrate pre‐treatment.     

High Performance Three‐Dimensional Chemical Sensor Platform Using Reduced Graphene Oxide Formed on High Aspect‐Ratio Micro‐Pillars

The sensing performance of chemical sensors can be achieved not only by modification or hybridization of sensing materials but also through new design in device geometry. The performance of a chemical sensing device can be enhenced from a simple three‐dimensional (3D) chemiresistor‐based gas sensor platform with an increased surface area by forming networked, self‐assembled reduced graphene oxide (R‐GO) nanosheets on 3D SU8 micro‐pillar arrays. The 3D R‐GO sensor is highly responsive to low concentration of ammonia (NH₃) and nitrogen dioxide (NO₂) diluted in dry air at room temperature. Compared to the two‐dimensional planar R‐GO sensor structure, as the result of the increase in sensing area and interaction cross‐section of R‐GO on the same device area, the 3D R‐GO gas sensors show improved sensing performance with faster response (about 2%/s exposure), higher sensitivity, and even a possibly lower limit of detection towards NH₃ at room temperature.     

Platinum Nanoparticle Loading of Boron Nitride Aerogel and Its Use as a Novel Material for Low‐Power Catalytic Gas Sensing

A high‐surface‐area, highly crystalline boron nitride aerogel synthesized with nonhazardous reactants has been loaded with crystalline platinum nanoparticles to form a novel nanomaterial that exhibits many advantages for use in a catalytic gas sensing application. The platinum nanoparticle‐loaded boron nitride aerogel integrated onto a microheater platform allows for calorimetric propane detection. The boron nitride aerogel exhibits thermal stability up to 900 °C and supports disperse platinum nanoparticles, with no sintering observed after 24 h of high‐temperature testing. The high thermal conductivity and low density of the boron nitride aerogel result in an order of magnitude faster response and recovery times (<2 s) than reported on alumina support and allow for 10% duty cycling of the microheater with no loss in sensitivity. The resulting 1.5 mW sensor power consumption is two orders of magnitude less than commercially available catalytic gas sensors and unlocks the potential for wireless, battery‐powered catalytic gas sensing.     

Optically Sintered 2D RuO2 Nanosheets: Temperature‐Controlled NO2 Reaction

2D Ru oxide nanosheets (NSs) with optically punched nanoholes are synthesized and integrated on a flexible heating substrate, i.e., silver nanowire (Ag NW)‐embedded colorless polyimide (cPI) film, for application in wearable chemical sensors. Multiple discrete pores on the sub‐5‐nm scale are formed on the basal planes of Ru oxide NSs by irradiation of intense pulsed light. The chemical sensing characteristic of the porous Ru oxide NSs toward nitrogen dioxide (NO₂) is investigated under controlled temperatures by applying DC voltage to the Ag NW‐embedded cPI film. The improved NO₂ responding and recovery kinetics are achieved using the porous Ru oxide NSs with sensitivity of 1.124% at 20 ppm at a film temperature of 80.3 °C. A wireless patch‐type sensor module is developed to demonstrate wearable sensing of NO₂ using the Ru oxide NSs on Ag NW‐embedded cPI heating film. This work paved the new way for application of atomically thin and porous Ru oxide NSs in chemical sensors, which can detect hazardous species in real time.     

A High‐Performance Nitro‐Explosives Schottky Sensor Boosted by Interface Modulation

A high‐performance Schottky sensor boosted by interface modulation is fabricated for the detection of trace nitro‐explosives vapors. The interface modulation strategy results in a silicon nanowires (SiNWs) array/TiO₂/reduced graphene oxide (rGO) sensor with sensitive and selective response toward nitro‐explosives vapors. The response of the SiNWs array/TiO₂/rGO sensor toward nitro‐explosives vapors, such as 9 ppb 2,4,6‐trinitrotoluene, 4.9 ppt hexogen, and 0.25 ppq octagon, is boosted by 2.4, 7.5, and 5 times with the insertion of TiO₂. Superior selectivity is shown even compared with interfering gases of 10 ppm. Such good sensing performance can be attributed to the good sensing performance of the Schottky heterojunction‐based sensor, the Schottky barrier height modulation with the insertion of TiO₂, SiNWs array structure enhanced diffusion, and TiO₂ nanoparticles enhanced adsorption. This is believed to be the first Schottky heterojunction‐based sensor for nitro‐explosives vapors detection. This work would open a new way to develop highly sensitive and selective sensors.     

Ultrasensitive Detection of VOCs Using a High‐Resolution CuO/Cu2O/Ag Nanopattern Sensor

The p‐type semiconducting copper oxides (CuO and Cu₂O) are promising materials for gas sensors, owing to their characteristic oxygen adsorption properties and low operation temperature. In this study, the sensing performance of a CuO‐based chemiresistor is significantly enhanced by incorporating Ag nanoparticles on high‐resolution p‐type CuO/Cu₂O nanopattern channels. The high‐resolution CuO/Cu₂O/Ag nanochannel is fabricated using a unique top‐down nanolithographic approach. The gas response (ΔR/R_a) of the CuO/Cu₂O/Ag gas sensor increases by a maximum factor of 7.3 for various volatile organic compounds compared with a pristine CuO/Cu₂O gas sensor. The sensors exhibit remarkable sensitivity (ΔR/R_a = 8.04) at 125 parts per billion (ppb) for acetone analytes. As far as it is known, this is the highest sensitivity achieved for p‐type metal oxide semiconductor (MOS)‐based gas sensors compared to previous studies. Furthermore, the outstanding gas responses observed in this study are superior to the most of n‐type MOS‐based gas sensors. The high sensitivity of the sensor is attributed to i) the high resolution (≈30 nm), high aspect ratio (≈12), and ultrasmall grain boundaries (≈10 nm) of the CuO/Cu₂O nanopatterns and ii) the electronic sensitization and chemical sensitization effects induced by incorporating Ag nanoparticles on the CuO/Cu₂O channels.     

低功耗电阻型MEMS半导体气体传感器研究进展北大核心

电阻型MEMS半导体气体传感器在环境空气质量监测和有毒有害气体检测等领域得到了广泛应用，但是受限于功耗较高的原因，这类传感器难以广泛应用于便携式气体检测系统。文章综述了近年来低功耗电阻型MEMS半导体气体传感器的研究进展，分别从气敏材料、传感器结构和传感器模组的集成电路等方面探讨如何实现低功耗的电阻型MEMS半导体气体传感器的制备，并展望低功耗的电阻型MEMS半导体气体传感器未来的发展方向。     

Facile Synthesis of 3D Graphene Flowers for Ultrasensitive and Highly Reversible Gas Sensing

Fabrication of nanostructured graphene (Gr) for gas sensing applications has become increasingly attractive. For the first time, 3D graphene flowers (GF) cluster patterns are grown directly on an Ni foam substrate by inexpensive homebuilt microwave plasma‐enhanced chemical vapor deposition (MPCVD) using the gas mixture H₂/C₂H₄O₂@Ar as a precursor. The interim morphologies of the synthesized GF are investigated and the growth mechanism of the GF film is proposed. The GF are decomposed to few‐layer Gr sheets by ultrasonication in ethanol. For the first time, MPCVD‐synthesized Gr is exploited to fabricate a gas sensor that exhibits an ultrahigh sensitivity of 133.2 ppm^?1 to NO₂. Outstanding sensor responses of 1411% and 101% to 10 ppm and 200 ppb NO₂, respectively, are achieved. Furthermore, a low theoretical detection limit of 785 ppt NO₂ is achieved. An ultrafast (within 2 s) recovery is observed at room temperature, and an imbedded microheater is employed to improve the selectivity of NO₂ detection relative to humidity. This work represents a simple, clean, and efficient route to synthesize large‐area cauliflower Gr for gas detection with high performance, including ultrahigh sensitivity, good selectivity, fast recovery, and reversibility.     

SOI CMOS‐Based Smart Gas Sensor System for Ubiquitous Sensor Networks

This paper proposes a compact, energy‐efficient, and smart gas sensor platform technology for ubiquitous sensor network (USN) applications. The compact design of the platform is realized by employing silicon‐on‐insulator (SOI) technology. The sensing element is fully integrated with SOI CMOS circuits for signal processing and communication. Also, the micro‐hotplate operates at high temperatures with extremely low power consumption, which is important for USN applications. ZnO nanowires are synthesized onto the micro‐hotplate by a simple hydrothermal process and are patterned by a lift‐off to form the gas sensor. The sensor was operated at 200°C and showed a good response to 100 ppb NO₂ gas.     

Flexible Transparent Reduced Graphene Oxide Sensor Coupled with Organic Dye Molecules for Rapid Dual‐Mode Ammonia Gas Detection

Flexible chemical sensors utilizing chemically sensitive nanomaterials are of great interest for wearable sensing applications. However, obtaining high performance flexible chemical sensors with high sensitivity, fast response, transparency, stability, and workability at ambient conditions is still challenging. Herein, a newly designed flexible and transparent chemical sensor of reduced graphene oxide (R‐GO) coupled with organic dye molecules (bromophenol blue) is introduced. This device has promising properties such as high mechanical flexibility (>5000 bending cycles with a bending radius of 0.95 cm) and optical transparency (>60% in the visible region). Furthermore, stacking the water‐trapping dye layer on R‐GO enables a higher response as well as workability in a large relative humidity range (up to 80%), and dual‐mode detection capabilities of colorimetric and electrical sensing for NH₃ gas (5–40 ppm). These advantageous attributes of the flexible and transparent R‐GO sensor coupled with organic dye molecules provide great potential for real‐time monitoring of toxic gas/vapor in future practical chemical sensing at room conditions in wearable electronics.     

A Fully Synthesizable Bluetooth Baseband Module for a System‐on‐a‐Chip

Bluetooth is a specification for short‐range wireless communication using the 2.4 GHz ISM band. It emphasizes low complexity, low power, and low cost. This paper describes an area‐efficient digital baseband module for wireless technology. For area‐efficiency, we carefully consider hardware and software partitioning. We implement complex control tasks of the Bluetooth baseband layer protocols in software running on an embedded microcontroller. Hardware‐efficient functions, such as low‐level bitstream link control; host controller interfaces (HCIs), such as universal asynchronous receiver transmitter (UART) and universal serial bus (USB) interfaces; and audio Codec are performed by dedicated hardware blocks. Furthermore, we eliminate FIFOs for data buffering between hardware functional units. The design is done using fully synthesizable Verilog HDL to enhance the portability between process technologies so that our module can be easily integrated as an intellectual property core on system‐on‐a‐chip (SoC) ASICs. A field programmable gate array (FPGA) prototype of this module was tested for functional verification and realtime operation of file and bitstream transfers between PCs. The module was fabricated in a 0.25‐µm CMOS technology, the core size of which was only 2.79 mm×2.80 mm.     

Low‐Temperature Growth of SnO2 Nanorod Arrays and Tunable n–p–n Sensing Response of a ZnO/SnO2 Heterojunction for Exclusive Hydrogen Sensors

Uniform SnO₂ nanorod arrays have been deposited at low temperature by plasma‐enhanced chemical vapor deposition (PECVD). ZnO surface modification is used to improve the selectivity of the SnO₂ nanorod sensor to H₂ gas. The ZnO‐modified SnO₂ nanorod sensor shows a normal n‐type response to 100 ppm CO, NH₃, and CH₄ reducing gas whereas it exhibits concentration‐dependent n–p–n transitions for its sensing response to H₂ gas. This abnormal sensing behavior can be explained by the formation of n‐ZnO/p‐Zn‐O‐Sn/n‐SnO₂ heterojunction structures. The gas sensors can be used in highly selective H₂ sensing and this study also opens up a general approach for tailoring the selectivity of gas sensors by surface modification.     

Multiarray Nanopattern Electronic Nose (E‐Nose) by High‐Resolution Top‐Down Nanolithography

An electronic nose (E‐nose) is an artificial sensing device that mimics the human olfactory system using a multiarray sensor system. However, since the design and fabrication of multiarray sensing channels are significantly limited because of the requirement of time‐consuming and nonuniversal processes, the development of commercializable and high‐throughput fabrication approaches are critically required. Herein, high‐resolution top‐down lithography is developed for E‐nose fabrication for the first time. Five different metal oxide semiconductor (MOS) nanopattern channels (NiO, CuO, Cr₂O₃, SnO₂, and WO₃) are fabricated into multiarray sensors with high‐throughput using a unique lithographic approach that utilizes the sputtering of grains of the metals via low‐energy ion plasma bombardment. The nanopattern channels show i) high‐resolutions (15 nm scale), ii) high‐aspect‐ratios (11; 14 nm width and 150 nm height), and iii) ultrasmall grains (5.1 nm) with uniformity on a cm² scale, resulting in high sensitivity toward the target analytes. The E‐nose system, which is composed of five MOS nanopattern channels, can successfully distinguish seven different hazardous analytes, including volatile organic compounds and nitrogen‐containing compounds. It is expected that this unique lithography approach can provide a simple and reliable method for commercializable channel fabrication, and the E‐noses can have further applications in real‐life situations.     

Multifunctional ZnO‐Nanowire‐Based Sensor

A simple fabrication of ZnO‐nanowire‐based device and their implementation as a pH sensor, temperature sensor, and photo detector is reported. The presented multifunctional ZnO multiple‐nanowire sensor platform contains a Au finger structure, which is realized by conventional photolithography on a SiO₂ substrate. The nanowires are grown using thermal chemical vapor deposition. In order to detect the physical signals, changes in electrical signals were measured (conductance and current). For temperature sensing, the current behavior from 90 to 380 K under vacuum conditions exhibit a tunneling behavior between spaced nanowires. For photo sensing, the current response between the “on” and “off” states of light was measured when exposed to different wavelengths ranging from UV to visible light. Finally, for pH sensing the conductance was measured between a pH of 5 and 8.5. The ZnO nanowires were protected from chemical attacks by a thin layer of C₄F₈‐plasma‐based coating.     

Catalytically Doped Semiconductors for Chemical Gas Sensing: Aerogel‐Like Aluminum‐Containing Zinc Oxide Materials Prepared in the Gas Phase

Atmospheric contamination with organic compounds is undesired in industry and in society because of odor nuisance or potential toxicity. Resistive gas sensors made of semiconducting metal oxides are effective in the detection of gases even at low concentration. Major drawbacks are low selectivity and missing sensitivity toward a targeted compound. Acetaldehyde is selected due to its high relevance in chemical industry and its toxic character. Considering the similarity between gas‐sensing and heterogeneous catalysis (surface reactions, activity, selectivity), it is tempting to transfer concepts. A question of importance is how doping and the resulting change in electronic properties of a metal‐oxide support with semiconducting properties alters reactivity of the surfaces and the functionality in gas‐sensing and in heterogeneous catalysis. A gas‐phase synthesis method is employed for aerogel‐like zinc oxide materials with a defined content of aluminum (n‐doping), which were then used for the assembly of gas sensors. It is shown that only Al‐doped ZnO represents an effective sensor material that is sensitive down to very low concentrations (<350 ppb). The advance in properties relates to a catalytic effect for the doped semiconductor nanomaterial.     

Chemiresistors for the Real‐Time Wireless Detection of Anions

Reported is an electrical transduction platform for real‐time wireless anion sensing using single‐walled carbon nanotubes (SWCNTs) noncovalently functionalized with squaramide‐based anion binding selectors. Systematically studied are anion‐binding properties and efficiency of the electrical transduction of the functionalized SWCNT composites using the squaramide‐based selectors with two similar electron‐withdrawing groups, 3,5‐bis(trifluoromethyl)benzyl ( 1 ) and 3,5‐bis(trifluoromethyl)phenyl ( 2 ), which induce hydrogen‐bonding interaction with anions and deprotonation of a squaramide N–H proton upon addition of acetate (AcO^?), respectively. Charge transduction occurs with AcO^? as a result of charge transfer from the deprotonated selector 2 , whereas less sensitive transduction is observed with selector 1 via hydrogen‐bonding interaction. These results provide guidelines to efficiently transduce the chemical interaction between selectors and anions to create resistive transduction with functionalized SWCNTs. Electron‐withdrawing groups adjacent to the squaramide as well as proximate cationic pyridyl groups, enhance the anion binding affinity and also lower the selector's pK_a. The chemiresistive sensor arrays are readily integrated with a wireless sensing module and demonstrated real‐time sensing of multiple anions with a smartphone readout.     

Miniaturized Electronic Nose System Based on a Personal Digital Assistant

A small electronic nose (E‐Nose) system has been developed using an 8‐channel vapor detection array and personal digital assistant (PDA). The sensor array chip, integrated on a single microheater‐embedded polyimide substrate, was made of carbon black‐polymer composites with different kinds of polymers and plasticizers. We have successfully classified various volatile organic compounds such as methanol, ethanol, i‐propanol, benzene, toluene, n‐hexane, n‐heptane, and c‐hexane with the aid of the sensor array chip, and have evaluated the resolution factors among them, quantitatively. To achieve a PDA‐based E‐Nose system, we have also elaborated small sensor‐interrogating circuits, simple vapor delivery components, and data acquisition and processing programs. As preliminary results show, the miniaturized E‐Nose system has demonstrated the identification of essential oils extracted from mint, lavender, and eucalyptus plants.     

Colorimetric Sensor Based on Self‐Assembled Polydiacetylene/Graphene‐Stacked Composite Film for Vapor‐Phase Volatile Organic Compounds

A portable litmus‐type chemosensor is developed for the effective detection of environmentally hazardous volatile organic compounds (VOCs) using polydiacetylene (PDA) and graphene stacked within a composite film. The graphene is exploited as a transparent and efficient supporter for the highly ordered PDA monolayer. This colorimetric sensor exhibits a sensitive response to low concentrations of VOCs (～0.01%), including tetrahydrofuran (THF), chloroform (CHCl₃), methanol (CH₃OH), and dimethylformamide (DMF). The color change that is caused by relatively high concentrations of VOCs can be perceived by the naked eye, and it is noteworthy that a logarithmic relationship is observed between the chromatic response and the VOC concentration in the range of ～0.01%–10%. The structural conformation changes of the PDA molecules, caused by interactions with VOCs, are directly observed by scanning tunneling microscopy (STM), which reveals the intrinsic mechanism of the chromatic variety at the molecular level.     

Self‐Powered Sensors Enabled by Wide‐Bandgap Perovskite Indoor Photovoltaic Cells

A new approach to ubiquitous sensing for indoor applications is presented, using low‐cost indoor perovskite photovoltaic cells as external power sources for backscatter sensors. Wide‐bandgap perovskite photovoltaic cells for indoor light energy harvesting are presented with the 1.63 and 1.84 eV devices that demonstrate efficiencies of 21% and 18.5%, respectively, under indoor compact fluorescent lighting, with a champion open‐circuit voltage of 0.95 V in a 1.84 eV cell under a light intensity of 0.16 mW cm^?2. Subsequently, a wireless temperature sensor self‐powered by a perovskite indoor light‐harvesting module is demonstrated. Three perovskite photovoltaic cells are connected in series to create a module that produces 14.5 µW output power under 0.16 mW cm^?2 of compact fluorescent illumination with an efficiency of 13.2%. This module is used as an external power source for a battery‐assisted radio‐frequency identification temperature sensor and demonstrates a read range by of 5.1 m while maintaining very high frequency measurements every 1.24 s. The combined indoor perovskite photovoltaic modules and backscatter radio‐frequency sensors are further discussed as a route to ubiquitous sensing in buildings given their potential to be manufactured in an integrated manner at very low cost, their lack of a need for battery replacement, and the high frequency data collection possible.     

Synthesis,Mechanism, and Gas‐Sensing Application of Surfactant Tailored Tungsten Oxide Nanostructures

Widely applicable nonaqueous solution routes have been employed for the syntheses of crystalline nanostructured tungsten oxide particles from a tungsten hexachloride precursor. Here, a systematic study on the crystallization and assembly behavior of tungsten oxide products made by using the bioligand deferoxamine mesylate (DFOM) (product I ), the two chelating ligands hexadecyltrimethylammoniumbromide (CTAB) ( II ) and poly(alkylene oxide) block copolymer (Pluronic P123) ( III ) is presented. The mechanistic pathways for the material synthesis are also discussed in detail. The tungsten oxide nanomaterials and reaction solutions are characterized by Fourier transform IR, ¹H, and ¹³C NMR spectroscopies, powder X‐ray diffraction, scanning electron microscopy, transmission electron microscopy (TEM), high‐resolution TEM, and selected‐area electron diffraction. The indexing of the line pattern suggests WO₃ is in its monoclinic structure with a = 0.7297 nm, b = 0.7539 nm, c = 0.7688 nm, and β‐i; = 90.91 °. The nanoparticles formed have various architectures, such as chromosomal shapes (product I ) and slates ( II ), which are quite different from the mesoporous one ( III ) that has internal pores or mesopores ranging from 5 to 15 nm. The nanoparticles obtained from all the synthetic procedures are in the range of 40–60 nm. The investigation of the gas‐sensing properties of these materials indicate that all the sensors have good baseline stability and the sensors fabricated from material III present very different response kinetics and different CO detection properties. The possibility of adjusting the morphology and by that tuning the gas‐sensing properties makes the preparation strategies used interesting candidates for fabricating gas‐sensing materials.