多晶硅微机械构件损伤的表面效应

利用电磁力驱动微拉伸装置，考察多晶硅微构件表面粗糙度和施加表面分子自组装膜(octadecyltrichlorosilane，简称OTS)对抗拉强度及断裂损伤的影响。结果表明，微构件的抗拉强度表现出依赖表面性质的表面效应。抗拉强度随表面粗糙度的增加而降低，并受环境气氛的影响。当构件表面施加表面分子自组装膜后，在以上两因素的作用下．多晶硅微构件的抗拉强度提高了32．46％。研究结果可用于微机械构件的材料表面改性设计。     

MEMS中薄膜热物性测试方法研究

介绍关于薄膜热物性的测试方法，分析了各种方法的适用条件，并对一些方法所得的薄膜热物性作了汇总比较，旨在促进MEMS中薄膜热物性测试工作的进一步发展。     

微电子机械系统中的残余应力问题

残余应力一直是微系统技术（MST）发展中一个令人关注的问题,它影响着MEMS器件设计、加工和封装的全过程。文中考虑薄膜中残余应力的起源,介绍测量残余应力的主要方法,并就计算薄膜中残余应力的Stoney公式及其推广形式作了详细的讨论,针对微尺度下残余应力对MEMS结构力学行为的影响,例如屈曲和粘附等进行了初步的分析。     

微型机械的摩擦学特性及其表面润滑技术的研究

综述了微型机械的摩擦学特性,阐述了微型机械中摩擦学问题研究的重要性,分析了影响微摩擦力的关键因素。基于目前国内外对微型机械表面润滑问题的研究现状,探讨了LB膜、自组装膜和分子沉积膜各自的特点及其在微型机械表面润滑领域的应用进展,对它们性能的优缺点进行了比较,并提出降低微型机械的表面能是减轻微摩擦磨损的有效措施。     

微机电系统的研究与展望

微机电系统(MEMS)是利用集成电路制造技术和微架构技术把微结构、微传感器、微执行器、控制处理电路甚至接口、通信和电源等制造在一块或多块芯片上的微型集成系统.MEMS技术是多种学科交叉融合具有战略意义的前沿技术.文中介绍了MEMS的范畴、分类、特点,综述了MEMS的发展历程和各国MEMS技术研发动态及产业现状,分析了M...     

微机械的制造技术及应用

介绍了微机械系统制造工艺技术,体微机械,表面微机械加工技术,键合技术及ＬＩＧＡ技术,并对这些技术的应用进行阐述。     

Nanotribological characterization of molecularly thick lubricant films for applications to MEMS/NEMS by AFM

Molecularly thick perfluoropolyether (PFPE) films are considered to be good protective films for micro/nanoelectromechanical systems (MEMS/NEMS) to reduce stiction, friction, and improve their durability. Understanding the nanotribological performance and mechanisms of these films are quite important for efficient lubrication for MEMS/NEMS devices. These devices are used in various operating environments and their effect on friction, adhesion and durability needs to be clarified. For this purpose, mobile and chemically bonded PFPE films were deposited by dip coating technique. The friction and adhesion properties of these films were characterized by atomic force microscopy (AFM). The effect of rest time, velocity, relative humidity, and temperature on nanotribological properties of these films was studied. Durability of these films was also measured by repeated cycling tests. The adhesion, friction mechanisms of PFPE at molecular scale, and the mechanisms of the effect of operating environment and durability are subject of this paper. This study found that adsorption of water, formation of meniscus and its change during sliding, viscosity, and surface chemistry properties play a big role on the friction, adhesion, and durability of the lubricant films.     

基于MEMS技术的通信器件及其应用

微电子机械系统是一种新兴技术,它几乎影响着每一个科学技术领域,如交通、无线通信、航天、化学以及光波系统。目前许多工业领域期待选用微电子机械系统来解决技术上的问题。以下简述了微电子机械系统技术的基础概念、所用材料、加工工艺等;重点综述了基于MEMS技术的通信器件及其应。     

微电子机械技术的研究和发展趋势

MEMS技术是一门新兴的技术,近年来,越来越受到业界各国的重视。以下主要阐述了MEMS的研制背景、加工工艺、现状和发展趋势,并对MEMS技术面临的问题进行了简要的讨论和分析。     

微桥结构Ni膜杨氏模量和残余应力研究

采用MEMS(MicroelectromechanicalSystems)技术研制了镍(Ni)膜微桥结构试样,应用陶瓷压条为承力单元,与纳米压痕仪XP系统的Berkovich三棱锥压头相结合,解决了较宽Ni膜微桥加载问题。测量了微桥载荷与位移的关系,并结合微桥力学理论模型得到了Ni膜微桥的杨氏模量及残余应力,其值分别为190.5GPa和146MPa,与应用纳米压痕仪直接测得的带有Si基底的Ni膜杨氏模量186.8±7.34GPa相吻合。     

微电子机械系统的力学特性与尺度效应

针对微电子机械系统（MEMS）材料的力学特性,工艺过程对力学特性的影响以及微执行器、微机器人的尺度效应等力学问题进行了研究。从力学角度提出了硅和常用的薄膜材料作为MEMS结构材料时应遵循的设计和加工原则,并系统地分析、归纳了静电、电磁、压电、形状记忆合金等各种微执行器的尺度效应特征。通过对机器蚂蚁、微型飞机、微型机器鱼等微机器人在微尺度下的动力学特性分析,得到微机器人在尺寸越小时越容易被驱动的结论,为设计和制作微机器人等复杂微系统提供了理论依据。     

微电子机械技术的研究和发展趋势

MEMS技术作为一门新兴的技术，越来越受到世界各国的重视。文中主要阐述了MEMS的研制背景、加工工艺、现状和发展趋势，并对MEMS技术面临的问题进行了简要分析。     

Read/write mechanisms and data storage system using atomic force microscopy and MEMS technology

Information storage system that has a potentially ultrahigh storage density based on the principles of atomic force microscopy (AFM) has been developed. Micro-electro-mechanical systems (MEMS) technology plays a major role in integration and miniaturization of the standard AFM. Its potential application for ultrahigh storage density has been demonstrated by AFM with a piezoresponse mode to write and read information bits in ferroelectric Pb(Zr(x)Ti(1 - x))O3 films. With this technique, bits as small as 40 nm in diameter have been achieved, resulting in a data storage density of simply more than 200 Gb/in2. Retention loss phenomenon has also been observed and investigated by AFM in the piezoresponse mode. Finally, local piezoelectric measurements of PZT films by different processing technologies are discussed in detail.     

微电子机械系统(MEMS)技术在军用设备中的应用现状

MEMS技术的发展开辟了一个全新的技术领域和产业,并在航空、航天、军事、汽车、生物医学、环境监控等人们所接触到的几乎所有领域中都有着十分广阔的应用前景。它是未来军用武器装备中的支撑技术和关键技术。在军事领域中迅速应用MEMS技术将是保持军队技术优势、维护国家安全的重要战略。介绍了微电子机械系统（MEMS）的基本特点,并在此基础上着重讲述了MEMS技术在军用设备中的应用现状。     

Nanotribological Behavior of Ultra-thin Al2O3 Films Prepared by Atomic Layer Deposition

Si-based nano/micro-electromechanical system (NEMS/MEMS) devices with contacting and rubbing structures cannot run reliably due to their poor tribological performance. A thin alumina (Al₂O₃) film is a promising candidate for the protective coating in the applications of NEMS/MEMS devices. In this study, nanotribological behavior of ultra-thin Al₂O₃ films prepared by atomic layer deposition on a Si (100) substrate was investigated in comparison with that of Si (100). X-ray photoelectron spectroscopy was used to determine the composition of Al₂O₃ films. Atomic force microscopy with different tips was employed to measure the scratch resistance, adhesion and friction forces of various samples. The results show that Al₂O₃ films have larger scratch resistance than that of Si (100). In addition, the adhesion and friction forces of Al₂O₃ films are smaller than that of Si (100). Thus, the Al₂O₃ films are capable of a wide application in Si-based NEMS/MEMS devices. The improved tribological performance of Al₂O₃ films is attributed to their hydrophobic properties.     

硅基PZT压电功能结构研究

PZT压电薄（厚）膜是制备MEMS传感元件和执行元件重要的功能材料,对近年PZT薄（厚）膜在MEMS领域的研究现状进行了分析,提出了一种新型的双杯PZT/Si膜片式功能结构;采用有限元方法对双杯PZT/Si膜片进行了结构优化,得到PZT和上、下硅杯的结构优化值为DPZT: D1:D2 =0.75:1.1:1;一阶模态谐振频率为13.2KHz;以氧化、双面光刻、各向异性刻蚀,以及PZT厚膜丝网印刷等工艺技术制作了双杯硅基PZT压电厚膜膜片,该膜片具有压电驱动功能。双杯PZT/Si膜片式功能结构的MEMS技术兼容性好,对芯片内其它元件或电路的影响小,适合作为MEMS片内执行元件的驱动机构。     

The charge storage characteristics of PZT nanocrystal thin film

Lead zirconate titanate (PZT) films have been extensively investigated for many applications: the nonvolatile memory devices based on their remarkable ferroelectric properties, the microelectromechanical system (MEMS) based on their piezoelectricity as well in sensors as in actuators. In this paper, we inject charges into PZT thin films, and then the charge storage and transportation through PZT thin films were observed by electric force microscopy (EFM). Results were studied and charging mechanisms were proposed.     

虚拟现实技术在微机电系统中的应用

根据VRT的内涵、主要特征和相关技术,按照MEMS的特,最和发展目标,研究MEMS对VRT技术的需求及其应用,研究VR技术与MEMS的交叉融合及互动发展,提出将VR技术应用于MEMS的研究、设计、教学、培训;提出将MEMS应用于VR系统中。     

用于微机械的形状记忆合金薄膜工艺研究

形状记忆合金薄膜以其功密度高、输出力和位移大成为微型机电系统领域最有潜力的微驱动材料之一。研究了丝材冷轧和溅射薄膜工艺 ,获得了理想的 Ti Ni薄膜 ,对于溅射工艺 ,给出了增加溅射薄膜中 Ti含量的一种新途径 ,并应用原子力显微镜对薄膜进行了微观形貌分析。