Preparation of nanocrystalline Cu<Subscript>2</Subscript>O thin film by pulsed laser deposition

In this paper, the synthesis of nanocrystalline copper oxides Cu₂O and CuO thin films on glass substrates using a pulsed 532 nm Nd:YAG laser is presented. Deposition of films is achieved at two different substrate temperatures. The influence of substrate temperature on the structural and optical properties of copper oxide films are discussed and analyzed. The X-ray diffraction (XRD) results show that the deposited films are crystalline in nature. Films prepared at 300 °C substrate temperature were Cu₂O and has (111) and (200) diffracted peaks, while films grown at 500 °C were CuO and has (111) and (020) planes. The morphology of deposited films were characterized by scanning electron microscope (SEM) and atomic force microscope (AFM). The optical energy gap of Cu₂O and CuO films have been determined and found to be 2.04 and 1.35 eV respectively.     

Optical, electrical and structural properties of Cu2Te thin films deposited by magnetron sputtering

Thin films of Cu₂Te were deposited, at room temperature, on glass substrates by magnetron sputtering from independent Cu and Te sources. This work presents the effect of annealing temperature on the optical, structural, and electrical properties of sputtered Cu₂Te films. Annealing above 300 °C resulted in stoichiometric and near stoichiometric Cu₂Te phases, whereas temperatures above 400 °C yielded films with single Cu₂Te phase. In contrast, annealing at temperatures of 250 °C and below resulted in mixed phases of CuTe, Cu₇Te₅, Cu_1.8Te, and Cu₂Te. Analyses of transmittance and reflectance measurements for Cu₂Te indicate that photon absorption occurs via indirect band transitions for incident photons with energy above the band gap energy and free carrier absorption below the band gap energy. The determined indirect band gap was 0.90 eV and its associated phonon energy was 0.065 eV. Optical phonon scattering was identified as the mechanism through which the momentum is conserved during absorption by free carriers. Electrical measurements show p-type conductivity and highly degenerate semiconducting behavior with a hole carrier concentration p = 5.18 × 10²¹ cm^− 3.     

Electrochemical deposition and characterization of cupric oxide thin films

Polycrystalline cupric oxide (CuO) thin films are deposited using an alkaline solution bath employing cathodic electrodeposition method. Thin films are electroplated at various bath temperatures onto conducting indium tin oxide coated glass substrates. The bath temperature effects on the structural, optical and morphological properties of copper oxide films are studied and reported. X-ray diffraction studies revealed mixed phases of monoclinic and cubic for films grown at lower bath temperatures and that the deposited films at temperatures optimized as 75 °C exhibited cubic structure with preferential orientation along a (111) plane. Texture coefficient (T_c) values are calculated for all diffraction lines and the films were highly textured (T_c > 1). The surface morphology and surface roughness are estimated using scanning electron microscopy and atomic force microscopy, respectively and a morphology made up of pyramid shaped grains is presented. Energy dispersive analysis by X-rays revealed that the near stoichiometric CuO thin films are obtained at optimized preparative parameters. The refractive index is calculated using the envelop method. Also, the optical constants of CuO thin films such as complex dielectric constant (ε) and extinction coefficient (k) are also evaluated and reported.     

Property variations of direct-current reactive magnetron sputtered copper oxide thin films deposited at different oxygen partial pressures

Cuprous oxide (Cu₂O) and cupric oxide (CuO) thin films were deposited on glass substrates at different oxygen partial pressures by direct-current reactive magnetron sputtering of pure copper target in a mixture of argon and oxygen gases. Oxygen partial pressure was found to be a crucial parameter in controlling the phases and, thus, the physical properties of the deposited copper oxide thin films. Single-phase Cu₂O thin films with cubic structure were obtained at low oxygen partial pressure between 0.147 Pa and 0.200 Pa while higher oxygen partial pressure promoted the formation of CuO thin films with base-centered monoclinic structure. Polycrystalline Cu₂O thin films deposited with oxygen partial pressure at 0.147 Pa possessed the lowest p-type resistivity of 1.76 Ω cm as well as an optical band gap of 2.01 eV. On the other hand, polycrystalline CuO thin films deposited with oxygen partial pressure at 0.320 Pa were also single phase but showed a n-type resistivity of 0.19 Ω cm along with an optical band gap of 1.58 eV.     

Characterization of copper oxide thin films deposited by the thermal evaporation of cuprous oxide (Cu2O)

Thin films of copper oxide were deposited by thermal evaporation of cuprous oxide (Cu₂O) powder. The substrates were either unheated or heated to a temperature of 300 °C. The films were also annealed in air at a temperature of 500 °C for 3 h. The films were characterized by X-ray photoelectron spectroscopy, X-ray diffraction and UV-visible spectrophotometry. The effects of the substrate temperature and post-deposition annealing on the chemical, structural and optical properties of the films were investigated. As-deposited films on unheated substrates consisted of mixed cupric oxide (CuO) and Cu₂O phases, with a higher concentration of the Cu₂O phase. However, the films deposited on heated substrates and the annealed films were predominantly of the CuO phase.     

Structural and optical characterization of CuInSe2 films deposited by hot wall vacuum evaporation method

Copper indium diselenide (CuInSe₂) compound was prepared by direct reaction of high-purity elemental copper, indium and selenium. CuInSe₂ thin films were deposited onto well-cleaned glass substrates by a hot wall deposition technique using quartz tubes of different lengths (0.05, 0.07, 0.09, 0.11 and 0.13 m). X-ray diffraction studies revealed that all the deposited films are polycrystalline in nature and exhibit chalcopyrite structure. The crystallites were found to have a preferred orientation along the (1 1 2) direction. Micro-structural parameters of the films such as grain size, dislocation density, tetragonal distortion and strain have been determined. The grain sizes in the films were in the range of 65-250 nm. As the tube length increases up to 0.11 m the grain size in the deposited films increases, but the strain decreases. The film deposited using the 0.13 m long tube has smaller grain size and more strain. CuInSe₂ thin films coated using a tube length of 0.11 m were found to be highly crystalline when compared to the films coated using other tube lengths; it has also been found that films possess the same composition (Cu/In=1.015) as that of the bulk. Scanning electron microscope analysis indicates that the films are polycrystalline in nature. Structural parameters of CuInSe₂ thin films deposited under higher substrate temperatures were also studied and the results are discussed. The optical absorption coefficient of CuInSe₂ thin films has been estimated as 10⁴ cm⁻¹ (around 1050 nm). The direct band gap of CuInSe₂ thin films was also determined to be between 1.018 and 0.998 eV.     

Low temperature (< 100 °C) deposited P-type cuprous oxide thin films: Importance of controlled oxygen and deposition energy

With the emergence of transparent electronics, there has been considerable advancement in n-type transparent semiconducting oxide (TSO) materials, such as ZnO, InGaZnO, and InSnO. Comparatively, the availability of p-type TSO materials is more scarce and the available materials are less mature. The development of p-type semiconductors is one of the key technologies needed to push transparent electronics and systems to the next frontier, particularly for implementing p-n junctions for solar cells and p-type transistors for complementary logic/circuits applications. Cuprous oxide (Cu₂O) is one of the most promising candidates for p-type TSO materials. This paper reports the deposition of Cu₂O thin films without substrate heating using a high deposition rate reactive sputtering technique, called high target utilisation sputtering (HiTUS). This technique allows independent control of the remote plasma density and the ion energy, thus providing finer control of the film properties and microstructure as well as reducing film stress. The effect of deposition parameters, including oxygen flow rate, plasma power and target power, on the properties of Cu₂O films are reported. It is known from previously published work that the formation of pure Cu₂O film is often difficult, due to the more ready formation or co-formation of cupric oxide (CuO). From our investigation, we established two key concurrent criteria needed for attaining Cu₂O thin films (as opposed to CuO or mixed phase CuO/Cu₂O films). First, the oxygen flow rate must be kept low to avoid over-oxidation of Cu₂O to CuO and to ensure a non-oxidised/non-poisoned metallic copper target in the reactive sputtering environment. Secondly, the energy of the sputtered copper species must be kept low as higher reaction energy tends to favour the formation of CuO. The unique design of the HiTUS system enables the provision of a high density of low energy sputtered copper radicals/ions, and when combined with a controlled amount of oxygen, can produce good quality p-type transparent Cu₂O films with electrical resistivity ranging from 10² to 10⁴ Ω-cm, hole mobility of 1-10 cm²/V-s, and optical band-gap of 2.0-2.6 eV. These material properties make this low temperature deposited HiTUS Cu₂O film suitable for fabrication of p-type metal oxide thin film transistors. Furthermore, the capability to deposit Cu₂O films with low film stress at low temperatures on plastic substrates renders this approach favourable for fabrication of flexible p-n junction solar cells.     

Crystallization and electrical resistivity of Cu2O and CuO obtained by thermal oxidation of Cu thin films on SiO2/Si substrates

In this work, we study the crystallization and electrical resistivity of the formed oxides in a Cu/SiO₂/Si thin film after thermal oxidation by ex-situ annealing at different temperatures up to 1000 °C. Upon increasing the annealing temperature, from the X ray diffractogram the phase evolution Cu → Cu + Cu₂O → Cu₂O → Cu₂O + CuO → CuO was detected. Pure Cu₂O films are obtained at 200 °C, whereas uniform CuO films without structural surface defects such as terraces, kinks, porosity or cracks are obtained in the temperature range 300-550 °C. In both oxides, crystallization improves with annealing temperature. A resistivity phase diagram, which is obtained from the current-voltage response, is presented here. The resistivity was expected to increase linearly as a function of the annealing temperature due to evolution of oxides. However, anomalous decreases are observed at different temperatures ranges, this may be related to the improvement of the crystallization and crystallite size when the temperature increases.     

Growth process of CuO(1 1 1) and Cu2O(0 0 1) thin films on MgO(0 0 1) substrate under metal-mode condition by reactive dc-magnetron sputtering

The growth process of CuO and Cu₂O thin films on MgO(0 0 1) substrates by reactive dc-magnetron sputtering was studied by reflection high-energy electron diffraction (RHEED) and atomic-force microscopy (AFM). The RHEED pattern and AFM image showed that (1) three-dimensional Cu(0 0 1) islands grew on MgO under the nonreactive sputtering condition, (2) CuO(1 1 1) was deposited layer by layer on MgO at 400 °C under the reactive sputtering condition, and (3) the film deposited at 600 °C in the initial growth stage was composed of three-dimensional Cu islands because O₂ gas could not be incorporated into them due to the low sticking coefficient of O₂ on MgO under the reactive sputtering condition. The layer-by-layer CuO(1 1 1) thin-film growth process is discussed from the viewpoint that Cu and oxygen species are supplied in stoichiometry onto the MgO substrate to form CuO thin-film crystals while maintaining minimum interfacial energy between CuO and MgO.     

Characterization of stepwise flash-evaporated CuInSe2 films

CuInSe₂ (CIS) films were deposited by stepwise flash evaporation from polycrystalline powder source onto glass substrates held at various temperatures ranging from 100 to 560 K. The phase purity and microstructure were analyzed by transmission electron microscopy. The investigations show that films grown at 300 K and below were amorphous, whereas those grown at 370 K and above were polycrystalline in nature. The grain size in polycrystalline films were found to improve with increase in substrate temperature and during post-deposition annealing. The films had near stoichiometric composition as revealed by Rutherford backscattering spectrometry. Analysis of the optical transmittance spectra of CIS films deposited at 520 K yielded a value of ∼0.97 eV for the fundamental band gap.     

Studies on the effect of hydrogen doping during deposition of Al:ZnO films using RF magnetron sputtering

Aluminum doped ZnO (ZnO:Al) films were deposited using rf magnetron sputtering in the presence of hydrogen gas in the chamber. A comparative study of the films deposited with and without hydrogen was performed. The XPS studies indicated that the decrease in resistivity of ZnO:Al films with the introduction of hydrogen gas is attributed to the reduced adsorption of oxygen species in the film grain boundaries. The average percentage transmission in the visible region of the films was around 92–95% and band gap was found to be about in the range of 3.15–3.17 eV. The lowest resistivity of 1.8 × 10⁻⁴ Ω cm was achieved for the ZnO:Al film deposited with hydrogen.     

Thermal evolution of morphological,optical, and photocatalytic properties of Au–Cu2O–CuO nanocomposite thin film

Plasmonic nanocomposite thin films find exciting applications in environmental remediation and photovoltaics. We report on thermal annealing driven development of morphology, structure and photocatalytic performance of Au–Cu₂O–CuO nanocomposite thin film. Nanocomposite thin film coatings of Au–Cu₂O–CuO, prepared by radio frequency (RF) magnetron co-sputtering, were annealed at different temperatures. Thermal annealing driven evolution of morphology of Au–Cu₂O–CuO nanocomposite was studied by field emission scanning electron microscopy (FESEM), which revealed significant growth in size of nanostructures from 10 nm to 69 nm upon annealing. X-ray diffraction (XRD) together with Raman studies confirmed the nanocomposite nature of Au–Cu₂O–CuO film. UV-visible diffuse reflectance spectroscopy (UV-vis-DRS) studies showed band gap variation from 2.44 eV to 1.8 eV upon annealing at 250 °C. Nanocomposite thin film annealed at 250 °C exhibited superior photocatalytic activity for organic pollutants [methylene blue (MB) and methyl orange (MO)] decomposition. The origins of thermal transformation of morphological, optical and photocatalytic behaviour of the Au–Cu₂O–CuO nanocomposite coating are discussed.

     

Effect of annealing on the electrodeposited Cu2O films for photoelectrochemical hydrogen generation

Cu₂O films were electrodeposited on stainless steel substrates followed by Ar annealing for photoelectrochemical hydrogen generation. Plating variables including time and pH for the plating bath were explored to obtain desirable film qualities. X-ray diffraction (XRD) patterns indicated that the as-deposited Cu₂O films exhibited preferred orientations in (200) and (111) planes from the plating bath of pH 9 and pH 11, respectively. Images from scanning electron microscope (SEM) revealed pyramid-like grains in 1 µm size for the Cu₂O films from pH 9 plating bath and large plate-like grains in 3-8 µm size from pH 11 plating bath. Identical results from SEM and XRD were obtained from the Cu₂O films at longer plating time. After annealing at 350 °C for 30 and 60 min, the Cu₂O phase was nicely maintained but SEM images demonstrated coarser grains. Photoelectrochemical activity for H₂ generation was obtained on the Cu₂O films before and after annealing by recording relevant photoelectrochemical currents at − 0.3 V in 0.5 M aqueous Na₂SO₄ solution. For the Cu₂O films from both baths, substantial increments in photoelectrochemical current were observed for the annealed samples as opposed to as-deposited ones. The largest photoelectrochemical current was obtained at 0.143 mA/cm² from the Cu₂O film of pH 9 plating bath with 60 min annealing, which exhibited a 560% increase over the as-deposited sample. We attributed the enhanced photoelectrochemical current to the improved crystallinity and reduced defects for the annealed Cu₂O films.     

A study of microstructural and optical properties of nanocrystalline ceria thin films prepared by pulsed laser deposition

Thin films of cerium oxide (CeO₂) have been deposited on (100) Si substrates using pulsed laser deposition technique at various substrate temperatures from room temperature (RT) to 973 K at an optimized oxygen partial pressure of 3 Pa. Structural, morphological and optical properties have been carried out using X-ray diffraction (XRD), Raman, ellipsometry and atomic force microscopy techniques. XRD results showed that the deposited films are polycrystalline with cubic structure. At room temperature, the film showed preferred orientation along (111) plane, while at higher temperatures, it exhibited preferred orientation along (200). The crystallite sizes were calculated and were found to be in the range 17-52 nm. The texture coefficient for (200) reflection increased until 573 K, and then decreased in the temperature range 673-973 K. The Raman peak appeared at 463 cm^− 1 due to the F_2g active mode also confirmed the formation of CeO₂ with a cubic structure. There was a systematic variation in the Raman peak intensity, frequency shift and line broadening with the increase of temperature. The ellipsometry studies showed that the refractive index and band gap increased from 2.2 to 2.6 and 3.4 to 3.6 eV, respectively with increasing substrate temperature from RT to 973 K.     

Variation of microstructure and transport properties with filament temperature of HWCVD prepared silicon thin films

Thin films of hydrogenated silicon are prepared by varying the filament temperature (T_F) (1600-1900 °C) at a deposition rate of 8-12 Å/s without using any hydrogen dilution. While the films deposited at low T_F are amorphous in nature, those deposited at higher T_F (≥ 1800 °C) contain nanocrystallites embedded in the amorphous network. The optical band gap (E₀₄) of the films (~ 1.89-1.99 eV) is slightly higher compared to the regular films, which is attributed to the improved short and medium range order as well as the presence of low density amorphous tissues in the grain boundary regions. The films show improved stability under long term light exposure due to more ordered structure and presence of hydrogen mostly as strong Si-H bonds.     

Preparation of anatase TiO2 thin films for dye-sensitized solar cells by DC reactive magnetron sputtering technique

Anatase titanium dioxide (TiO₂) thin films are prepared by DC reactive magnetron sputtering using Ti target as the source material. In this work argon and oxygen are used as sputtering and reactive gas respectively. DC power is used at 100 W per 1 h. The distance between the target and substrate is fixed at 4 cm. The glass substrate temperature value varies from room temperature to 400 °C. The crystalline structure of the films is determined by X-ray diffraction analysis. All the films deposited at temperatures lower than 300 °C were amorphous, whereas films obtained at higher temperature grew in crystalline anatase phase. Phase transition from amorphous to anatase is observed at 400 °C annealing temperature. Transmittances of the TiO₂ thin films were measured using UV-visible NIR spectrophotometer. The direct and indirect optical band gap for room temperature and substrate temperature at 400 °C is found to be 3.50, 3.41 eV and 3.50, 3.54 eV respectively. The transmittance of TiO₂ thin films is noted higher than 75%. A comparison among all the films obtained at room temperature showed a transmittance value higher for films obtained at substrate temperature of 400 °C. The morphology of the films and the identification of the surface chemical stoichiometry of the deposited film at 400 °C were studied respectively, scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). The surface roughness and the grain size are measured using AFM.     

Physical properties of hydrogenated Al-doped ZnO thin layer treated by atmospheric plasma with oxygen gas

Hydrogenated Al-doped ZnO (H:AZO) thin films were deposited on glass substrates at room temperature by radio-frequency magnetron sputtering at various hydrogen flow rates. The addition of hydrogen improved the resistivity of the H:AZO films significantly. A thin insulating layer was produced on H:AZO films by atmospheric pressure plasma with Ar/O₂ reactive gas. The resistivity degenerated and the optical band gap of the oxygen plasma-treated H:AZO films decreased from 3.7 eV to 3.4 eV. This was attributed to a decrease in the hydrogen concentration at the film surface according to elemental depth analysis.     

Photoelectrochemical and optical properties of N-doped TiO2 thin films prepared by oxidation of sputtered TiNx films

Nitrogen-doped titanium dioxide thin films with visible light photoresponse were prepared by oxidation of sputtered TiN_x films, whose nitrogen contents can be easily changed by controlling the volume ratio of N₂/(Ar + N₂) during reactive direct current (DC) magnetron sputtering process. The reference TiO₂ sample was also deposited by the same method under Ar/O₂ gas mixture. The as-prepared films were characterized by X-ray diffraction, scanning electron microscopy, X-ray photoemission spectroscopy, UV-vis spectrophotometry and photoelecrochemical measurements. The formation of anatase type TiO₂ is confirmed by XRD. SEM measurement indicates a rough surface morphology with sharp, protruding modules after annealing treatment. Optical properties reveal an extended tailing of the absorption edge toward the visible region due to nitrogen presence. The band gap of the N-doped sample is reduced from 3.36 eV to 3.12 eV compared with the undoped one. All the N-doped samples show red shift in photoresponse towards visible region and improved photocurrent density under visible irradiance is observed for the N-doped samples.     

In-situ energy-dispersive X-ray diffraction of metal sulfide assisted crystallization of strongly (001) textured photoactive tungsten disulfide thin films

Highly (001) textured tungsten disulphide (WS₂) thin films were grown by rapid metal (Ni, Pd) sulfide assisted crystallization of amorphous reactively sputtered sulfur-rich tungsten sulfide (WS_3 + x) and by metal sulfide assisted sulfurization of tungsten metal films. The rapid crystallization was monitored by real-time in-situ energy dispersive X-ray diffraction (EDXRD). Provided that a thin nickel or palladium film was deposited prior to the deposition of WS_3 + x or W, the films crystallized very fast (about 20 nm/s) at temperatures above the metal sulfide eutectic temperature. After crystallization, isolated MeS_x crystallites are located on the surface of the WS₂ layer, which was proved by scanning electron microscopy. The metal sulfide assisted crystallized WS₂ layers exhibit a pronounced (001) orientation with large crystallites up to 2 µm. The in-situ EDXRD analysis revealed distinct differences of the two crystallization routes from tungsten and from amorphous, sulfur-rich WS_3 + x precursors, respectively. The crystallized WS₂ films showed photoactivity. Combined with the high absorption coefficient of 10⁵ cm^− 1 and a indirect band gap of 1.8 eV these properties make such films suitable for absorber layers in thin film solar cells.     

Properties of cu-doped low resistive ZnSe films deposited by two-sourced evaporation

Two-sourced evaporation technique is used to prepare hard ZnSe films by controlling the evaporation rates of both Zn and Se at substrate temperature of 400 °C. The films are doped with Cu by immersion in the Cu(NO₃)₂-H₂O solution for different periods of time. The XRD has not shown a drastic change in the film structure while the electrical resistivity of the deposited film dropped from 10⁹ Ω-cm to about 1.6 Ω-cm for solution immersed films after heat treatment. Optical properties of deposited and doped films, such as film thickness, absorption coefficient and optical band gap have been calculated from the normal transmission spectra in the range of 300-2200 nm.The optical results show a decrease of the transmission and an increase of the refractive index and a slight shift in the optical band gap. Chemical composition of the Cu is determined by using absorption of immersed films. The composition of Cu is also compared with the composition detected by electron microprobe analyzer (EMPA).