硅微悬臂梁谐振器的电激电拾方法研究

采用电热激励、压电拾取方法对硅微机械悬臂梁的谐振性能进行了实验研究。成功实现了对硅微悬臂梁谐振器前三阶振型的实验测试。电热激励利用在硅微机械悬臂梁表面优化设计的热激励电阻加以实现。为拾取硅微悬臂梁的微弱谐振信号,在硅微悬臂梁表面优化设计并制作了压敏电阻全桥,利用压敏电阻的压电效应实现对谐振微弱信号的拾取。     

集成硅微机械光压力传感器

介绍了一种新颖的集成硅微机械光压力传感器的结构、工作原理、制造工艺和实验结果。该传感器是利用半导体集成电路微细加工技术和各向异性腐蚀相结合的方法，将传输、获取信息的光波导，敏感弹性硅膜和光电探测器集成在一块三维硅基片上得到的。它具有灵敏度高、抗干扰能力强、自身无需电源、防爆、成本低和可靠性高等优点。     

基于谐振原理的硅微机械加速度计

基于力学振动原理，导出敏感梁类谐振振动的微分方程，给出了振梁型加速度计的设计原理。指出了加速度计谐振梁频率的相对变化量与梁的厚度无关；为避免输出非线性频率信号，频率的相对变化率和激励振动的振幅都不宜太大。     

光激励微硅梁谐振机理研究

用实验的方法研究了微硅梁在光激励下产生谐振的机理 ,解释了微硅梁在光激励下的谐振是由于光 热 机能量转化的结果     

用微机械技术的光集成传感器

硅单晶作为半导体材料具有优良的特性,它是一种硬度、拉伸强度和杨氏模量较大、机械性能也较好的材料.半导体工艺技术在硅单晶材料中可以充分发挥作用.因此,在硅单晶基板上利用微机械技术作成三维结构,试图把它作为坚固的机械结构与器件组合在一起使用.     

硅微机械谐振压力传感器技术的发展

现阶段,硅微机械谐振压力传感器应该是稳定性最好及精确度最高的传感器,在航空航天及工业等领域内广泛应用。按照硅微机械谐振压力传感器目前研究成果,对硅微机械谐振压力传感器工作原理进行阐述,分析不同类别硅微机械谐振压力传感器芯体结构,对硅微机械谐振压力传感器未来发展方向进行分析,希望能够增加对硅微机械谐振压力传感器技术的了解。     

硅微传感器的热挠曲及谐振频率的计算

分析了硅微机械谐振式传感器在热激励下的挠曲及谐振频率变化 ,建立了相应的数学模型 ,并对热挠曲灵敏度进行了优化设计。同时通过算例和测试数据的对比 ,验证了谐振频率计算模型的正确性。     

基于FPGA的硅谐振压力微传感器数字闭环系统设计

在微小型特别是硅谐振微传感器中,低信噪比的微弱信号检测,电路的小型化和抗干扰等问题十分突出。介绍了硅谐振压力微传感器闭环系统的基本工作原理,在成功研制出模拟闭环系统的基础上,为了克服模拟系统的不足,依据相关检测原理和频率扫描技术提出了基于FPGA的闭环系统设计框架,详细分析了该系统中的微弱信号检测技术和数字电路部分数字信号处理及接口技术,最后结合实际数据和开环测试曲线,指出可用的扫频方法。     

硅微机械谐振式压力传感器组合敏感原理

为解决硅微机械谐振式压力传感器的微弱信号检测问题，并改善其可靠性和动态响应，提出在传感器原有结构上增加辅助传感器，构成组合敏感原理。利用根据辅助传感器测量结果推算出的谐振频率近似值，可控制带通滤波器的中心频率以改善噪声抑制；可及时判断闭环系统失效；可在闭环系统失效状态下继续部分维持传感器的测量功能。辅助传感器的制造工艺与主传感器兼容，附加成本低。     

硅微板条谐振式传感器谐振频率率分析及计算

对硅微机械谐振式传感器的谐振频率计算提出了新的物理模型－两端固支薄板条模型，该模型不同于常说的硅桥（梁）或硅弦模型。计算结果表明该模型更符合实际，优于有关文献结果。     

非晶硅集成型色敏元件及其传感器

研究了一种新型的非晶硅ＰＩＮ异质结集成型色敏元件及其传感器的制备工艺和结构，详细讨论了色敏元件的优化设计以及响应特性、暗电流等性能。     

新结构的硅一体化微加速度传感器

本文介绍了一种新结构的硅一体化微加速度传感器，理论和实验结果表明，这种传感器与传统硅微机械结构加速度传感器相经具有温度特性好，工艺简单和成品率高等优点，这种结构特别适合制作谐振传感器。     

Process design for plasma etching of polysilicon/silicon nitride/polysilicon sandwich structures for sensor applications

An in situ two-step process has been developed for plasma etching of poly-Si/silicon nitride/poly-Si sandwich structures for a surface micromachined tactile sensor. The first step of the process uses a CF₄-based gas mixture to etch the upper poly-Si layer and the second uses a CHF₃-based gas mixture to etch the silicon nitride with an etching selectivity of three over the lower poly-Si layer. Both the upper poly-Si and the silicon nitride of the sandwich structure can be etched with the same photoresist mask, while the lower poly-Si layer remains relatively un-etched. Compared with a one-step process which uses the same chemistry as in step one of the two-step process, the two-step process provides the desired etch selectivity, better uniformity and process tolerance.     

太赫兹共振隧穿二极管探测器研究进展及应用

太赫兹波独特的性质使其在物理学、生物学、医疗诊断、无损检测、无线通信等领域有着广阔的应用前景。共振隧穿二极管(RTD)是一种基于量子隧穿效应的半导体器件,利用其负微分电阻和直流非线性特性,可以分别实现太赫兹波的产生和探测,近年来获得越来越多的关注。基于RTD的太赫兹探测器具有可室温工作、体积小、易集成、灵敏度高等特点,使其在未来短距离、超高速的太赫兹无线通信及万物互联等场景具备优势。本文将重点介绍太赫兹RTD探测器的研究进展及其应用进展,并对后续技术发展进行展望。     

灵巧结构与蒙皮中的光纤传感技术

在复合材料结构部件内或蒙皮中埋入光纤传感网络，称为灵巧结构与蒙皮。该技术受到各国政府和军方的高度重视，成为９０年代材料与传感技术的一个热点。     

分布式光纤温度传感器的原理和应用

分布式光纤温度传感器是近年来开始研究的新型传感技术，它可以同时获取被测温度场 空间分布状态和随时间变化的信息。文章讨论了分布式光纤温度传感器的工作原理，设计思想、研究现状及应用前景。     

Structural and optical properties of silicon nanowires synthesized by Ag-assisted chemical etching

Metal-assisted chemical etching (MACE) of silicon in an aqueous solution of hydrofluoric acid and hydrogen peroxide is established for the fabrication of large-area uniform silicon nanowire (SiNW) arrays. The effect of the silver catalyst layer thickness on the morphology of the synthesized nanostructures and nanowires is investigated. Atomic force microscopy (AFM) and field emission scanning electron microscopy (FESEM) reveal that the morphology of the fabricated silicon nanostructures remarkably depends on the catalyst layer thickness, and an optimum layer thickness is necessary for the fabrication of SiNWs. Also the effect of different etching times on the structural and optical properties of the fabricated SiNWs is investigated. FESEM showed a linear increment of the nanowire length and slight diameter changes through different etching times. The ultralow reflectance of SiNWs in the absorption region through the measurement of specular and diffuse reflectance showed that with increase in the etching time, the total reflectance remarkably decreases. A broadband visible photoluminescence (PL) emission from these wires was observed, and it could be stated that the silicon nanocrystals (SiNCs) are mostly responsible for the PL emission. The SiNC sizes were determined by an analytical model through a frequency shift in the Raman spectrum. The synthesized optically-active SiNWs could, therefore, be considered as a promising candidate for a new generation of nanoscale opto-electronic devices.     

New Optical Triangulation and Digital Image Processing in Measurement

In this paper,a new direct optical triangulation(DOT)for measuring the out-of plane displacement is given.In order to state its principle,DOT is used to mea-sure a micro-displacement of a rigid boty,and at the same time,the method of digital image processing is also given.     

Synthesis and characterization of CuO–SnO2 nanocomposite and its application as liquefied petroleum gas sensor

Present paper reports the synthesis of CuO–SnO₂ nanocomposite via sol–gel route as a sensing material for a liquefied petroleum gas (LPG). X-ray diffraction analysis confirmed the formation of CuO–SnO₂ nanocomposite. Crystallite size was found 5 nm. The optical band gap of the nanocomposite was found 4.1 eV. The thin/thick films were fabricated using spin coating and screen printing technology respectively and investigated with the exposition of LPG at room temperature (25 °C). Surface morphology of the thin film exhibits that it has a number of gas adsorption sites. The sensitivities of the thick and thin film sensors were found 4.1 and 42 respectively. The response and recovery times of the fabricated film sensor were 180 and 200 s respectively. Maximum sensor response of thin film sensor was found 4100. Better sensitivity and percentage sensor response, small response and recovery times, and good reproducibility and stability recognize the fabricated thin film of CuO–SnO₂ as a challenging material for the detection of LPG.