厚度对掺铝氧化锌透明导电薄膜性质的影响

采用紫外光助溶胶一凝胶法在玻璃基底上制备了掺铝氧化锌薄膜。研究了厚度对薄膜性质的影响,结果表明：所有薄膜均由具有c轴优先生长取向的六角纤锌矿结构的ZnO晶体构成,晶体的粒径随厚度的增加而先增大,达到最大值后,不再随厚度的增加而改变;薄膜的方阻随厚度的增加先减小,在达刮最小值2．1×10^2Ω／口后,随厚度的增加又略有增大;而所有薄膜均是透明的,在可见光区的透光率〉80％。     

Gallium oxide films deposition by RF magnetron sputtering; a detailed analysis on the effects of deposition pressure and sputtering power and annealing

In this study, gallium oxide (Ga₂O₃) thin films were deposited on sapphire and n-Si substrates using Ga₂O₃ target by radio frequency magnetron sputtering (RFMS) at substrate temperature of 300 °C at variable RF power and deposition pressure. The effects of deposition pressure and growth power on crystalline structure, morphology, transmittance, refractive index and band gap energy were investigated in detail. X-ray diffraction results showed that amorphous phase was observed in all the as-deposited thin films except for the thin films grown at low growth pressure. All the films showed conversion to poly-crystal β-Ga₂O₃ phase after annealing process. When the deposition pressure increased from 7.5 mTorr to 12.20 mTorr, change in the 2D growth mode to 3D columnar growth mode was observed from the SEM images. Annealing clearly showed formation of larger grains for all the thin films. Lower transmission values were observed as the growth pressure increases. Annealing caused to obtain similar transmittance values for the thin films grown at different pressures. It was found that a red shift observed in the absorption edges and the energy band gap values decrease with increasing growth pressure. For as-deposited and annealing films, increasing sputtering power resulted in the increase refractive index.     

The optical and electrical properties of ZnO:Al thin films deposited at low temperatures by RF magnetron sputtering

Several ZnO:Al thin films have been successfully deposited on glass substrates at different substrate temperatures by RF (radio frequency) magnetron sputtering method. Effects of the substrate temperatures on the optical and electrical properties of these ZnO:Al thin films were investigated. The UV–VIS–NIR spectra of the ZnO:Al thin films revealed that the average optical transmittances in the visible range are very high, up to 88%. X-ray diffraction results showed that crystallization of these films was improved at higher substrate temperature. The band gaps of ZnO:Al thin films deposited at 25 ℃, 150 ℃, 200 ℃, and 250 ℃ are 3.59 eV, 3.55 eV, 3.53 eV, and 3.48 eV, respectively. The Hall-effect measurement demonstrated that the electrical resistivity of the films decreased with the increase of the substrate temperature and the electrical resistivity reached 1.990×10^?3 Ω cm at 250 ℃.     

Effect of Fe-doping on the structural,optical and magnetic properties of ZnO thin films prepared by RF magnetron sputtering

In this paper, we report the fabrication and systematic characterization of Fe Doped ZnO thin Films. Fe_xZn_1−x O (x=0<0.05) films were prepared by RF magnetron sputtering on Si (400) substrate. Influence of Fe doping on structural, optical and magnetic properties has been studied. The X-ray diffraction (XRD) analysis shows that Fe doping has affected the crystalline structure, grain size and strain in the thin films. The best crystalline structure is obtained for 3% Fe Doping as observed from Atomic Force Microscopy (AFM) and X-ray diffraction (XRD). The magnetic properties studied using Vibrating Sample Magnetometer reveals the room temperature ferromagnetic nature of the thin films. However, changing the Fe concentration degrades the magnetic property in turn. The mechanism behind the above results has been discussed minutely in this paper.     

Influence of annealing atmosphere on the structure, resistivity and transmittance of InZnO thin films

Dependence of the electrical and optical properties of In₂O₃–10 wt% ZnO (IZO) thin films deposited on glass substrates by RF magnetron sputtering on the annealing atmosphere was investigated. The electrical resistivities of indium zinc oxide (IZO) thin films deposited on glass substrate can be effectively decreased by annealing in an N₂ + 10% H₂ atmosphere. Higher temperature (200 °C) annealing is more effective in decreasing the electrical resistivity than lower temperature (100 °C) annealing. The lowest resistivity of 6.2 × 10⁻⁴ Ω cm was obtained by annealing at 200 °C in an N₂ + 10% H₂ atmosphere. In contrast, the resistivity was increased by annealing in an oxygen atmosphere. The transmittance of IZO films is improved by annealing regardless of the annealing temperature.     

Effect of deposition temperature and quality of free-standing diamond substrates on the properties of RF sputtering ZnO films

Highly c-axis oriented ZnO film is often deposited on diamond substrates by RF magnetron sputtering and widely used for high frequency surface acoustic wave (SAW) devices. Deposition temperature is a key factor affecting the quality of the ZnO film. Different quality polished free-standing diamond films prepared by DC Arc Plasma Jet were used as the substrates to deposit ZnO films at different temperatures. Effect of the deposition temperature and the quality of the diamond films on the properties of the ZnO films were investigated by means of scanning electron microscopy (SEM) and X-ray diffraction (XRD). The results show that highly c-axis oriented ZnO films can be much easier deposited on the optical-grade diamond films with < 111> preferred orientation than the tool-grade diamond films with < 220> preferred orientation. The optimal deposition temperature is 200 °C for highly c-axis oriented and lower roughness ZnO films. Acoustic phase velocity of more than 10,000 m/s for the SAW devices based on the ZnO/optical-grade free-standing diamond films was obtained.     

Influence of ZnO buffer layer thickness on the electrical and optical properties of indium zinc oxide thin films deposited on PET substrates

The influence of the ZnO buffer layer thickness on the electrical and optical properties of In₂O₃–10 wt.% ZnO and ZnO bilayers deposited on polyethylene terephthalate (PET) substrates by RF magnetron sputtering were investigated. The optimum ZnO buffer layer thickness was found to be 90 nm which gives the lowest electrical resistivity of the bilayer of IZO and ZnO deposited on the PET substrate. The surface roughness decreases and diffusion of moisture and gas is more efficiently restrained, which contributes to lower the resistivity of the bilayer as the ZnO buffer layer thickness is increased. On the other hand, the total resistivity of the bilayer increases as the ZnO buffer layer thickness is increased because the resistivity of ZnO is higher than that of IZO. Introduction of a ZnO buffer layer does not nearly affect the IZO/ZnO/PET sample.     

Effect of Au ion beam on structural,surface, optical and electrical properties of ZnO thin films prepared by RF sputtering

In the present work, ZnO thin films were irradiated with 700?keV Au⁺ ions at different fluence (1?× 10¹³, 1?× 10¹⁴, 2?× 10¹⁴ and 5?× 10¹⁴ ions/cm²). The structural, morphological, optical and electrical properties of pristine and irradiated ZnO thin films were characterized by X-ray diffraction (XRD), Fourier transforms infrared spectroscopy (FTIR), scanning electron microscope (SEM), spectroscopy ellipsometry (SE) and four point probe technique respectively. XRD results showed that the crystallite size decreased from pristine value at the fluence 1?×?10¹³ ions/cm², with further increase of ion fluence the crystallite size also increased due to which the crystallinity of thin films improved. SEM micrographs showed acicular structures appeared on the ZnO thin film surface at high fluence of 5?×?10¹⁴ ions/cm². FTIR showed absorption band splitting due to the growth of ZnO nanostructures. The optical study revealed that the optical band gap of ZnO thin films changed from 3.08?eV (pristine) to 2.94?eV at the high fluence (5?× 10¹⁴ ions/cm²). The electrical resistivity of ZnO thin film decreases with increasing ion fluence. All the results can be attributed to localized heating effect by ions irradiation of thin films and well correlated with each other.     

Effect of sputtering power on piezoresistivity and interfacial strength of SiCN thin films prepared by magnetic sputtering

SiCN ceramics show large potential in high temperature pressure sensors with excellent stability up to 1000 °C, as it is changeling for the most of the existing pressure sensors to work stably at a temperature above 600 °C. However, bulk SiCN ceramics are not compatible to microelectronic processing and exhibit slow response due to viscoelasticity, it is necessary to propose alternative method to prepare SiCN functional structures. In this work, SiCN piezoresistive thin films are prepared by magnetron sputtering, and the influence of sputtering power on their piezoresistive properties and interfacial strengths are studied. The gauge factors of SiCN films range from 2786 to 4714 at various sputtering powers, which are significantly higher than the range from 46 to 1105 for existing piezoresistive thin films. Upon an optimal sputtering power of 75 W for silicon nitride target, the obtained SiCN sample show the largest gauge factors in a large range from 0.5 to 3.4 MPa. Furthermore, the SiCN thin films present high critical loads up to 36.5 N in scratch tests and indicate strong interfacial adhesion with substrate. This work provides an important reference for developing SiCN-based MEMS pressure sensors.     

Structural and optical properties of ZnS thin films deposited by RF magnetron sputtering

Zinc sulfide [ZnS] thin films were deposited on glass substrates using radio frequency magnetron sputtering. The substrate temperature was varied in the range of 100°C to 400°C. The structural and optical properties of ZnS thin films were characterized with X-ray diffraction [XRD], field emission scanning electron microscopy [FESEM], energy dispersive analysis of X-rays and UV-visible transmission spectra. The XRD analyses indicate that ZnS films have zinc blende structures with (111) preferential orientation, whereas the diffraction patterns sharpen with the increase in substrate temperatures. The FESEM data also reveal that the films have nano-size grains with a grain size of approximately 69 nm. The films grown at 350°C exhibit a relatively high transmittance of 80% in the visible region, with an energy band gap of 3.79 eV. These results show that ZnS films are suitable for use as the buffer layer of the Cu(In, Ga)Se₂ solar cells.     

Influence of postdeposition annealing on the properties of ZnO films prepared by RF magnetron sputtering

ZnO films were prepared on unheated silicon substrate by RF magnetron sputtering technique. Postdeposition annealing of ZnO films in vacuum were found to improve film structure and electrical characteristics, such as dense structure, smooth surface, stress relief and increasing resistivity. Suitable annealing temperature also reduced loss factor. The correlation between annealing conditions and the physical structure of the films (crystalline structure and microstructure) was investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM). The preferred annealing condition has been found to improve ZnO film characteristics for piezoelectric applications. An over-mode acoustic resonator using the ZnO film after annealing at 400 °C in vacuum circumstance for 1 h showed a large return loss of 42 dB at the center frequency of 1.957 GHz.     

Effects of substrate temperature on thermal stability of Al-doped ZnO thin films capped by AlOx

Effects of substrate temperature on the thermal stability of Al-doped ZnO (AZO) films have been studied. Degradation of electrical properties of AZO films by annealing under flowing N₂ gas depends on their crystallinity controlled by the substrate temperature. A thin AlO_x capping layer was employed to passivate the thermal degradation of the AZO layer. A strong correlation between Zn desorption and reduction in carrier concentration was observed. Thermal desorption of Zn was prevented by the AlO_x layer, retaining carrier concentration. With the AlO_x capping layer, the reduction in Hall mobility was prevented in samples with good c-axis orientation, while the reduction in Hall mobility was still observed in poor c-axis oriented films. However, the reduction was smaller than that in bare AZO films. The dependence of Hall mobility evolution on the substrate temperature, and therefore, on crystallinity, strongly suggests the impact of grain boundary scattering on thermal degradation. An increase in optical mobility, which was evaluated from optical spectra using the Drude model, with annealing temperatures, supports the conclusion that an increase in grain boundary scattering by annealing caused the degradation of Hall mobility. The increase in grain boundary scattering induced by Zn desorption was prevented by the capping layer, while contributions of domain alignment and other segregation of defects to the grain boundary scattering, which depend on the substrate temperature retained, leading to different evolutions of Hall mobility.     

CIGS absorbing layers prepared by RF magnetron sputtering from a single quaternary target

Cu(In_1−xGa_x)Se₂ (CIGS) thin films were prepared by RF magnetron sputtering from a single quaternary target at multiple processing parameters. The structural, compositional, and electrical properties of the as-deposited films were systematically investigated by XRD, Raman, SEM, and Hall effects analysis. The results demonstrate that by adjusting the processing parameters, the CIGS thin films with a preferential orientation along the (112) direction which exhibited single chalcopyrite phase were obtained. The films deposited at relatively higher substrate temperature, sputtering power, and Ar pressure exhibited favorable stoichiometric ratio (Cu/(In+Ga):0.8–0.9 and Ga/(In+Ga):0.25–0.36) with grain size of about 1–1.5 µm, and desirable electrical properties with p-type carrier concentration of 10¹⁶−10¹⁷ cm⁻³ and carrier mobility of 10–60 cm²/Vs. The CIGS layers are expected to fabricate high efficiency thin film solar cells.     

Microstructural and optical properties of Ta-doped ZnO films prepared by radio frequency magnetron sputtering

Ta-doped ZnO films with different doping levels (0–5.02 at%) were prepared by radio frequency magnetron sputtering. The effects of the doping amount on the microstructure and the optical properties of the films were investigated. The grain size and surface roughness first significantly decrease and then slowly increase with the increase of Ta doping concentration. Both the grain size and the root mean square (RMS) roughness reach their minimum values at the doping content of 3.32 at%. X-ray Diffraction (XRD) patterns confirmed that the prepared Ta-doped ZnO films are polycrystalline with hexagonal wurtzite structure and a preferred orientation along the (002) plane. X-ray photoelectron spectroscopy (XPS) analysis reveals that Ta exists in the ZnO film in the Ta⁵⁺ and Ta⁴⁺ states. The average optical transmission values of the Ta-doped ZnO films are higher than those of the un-doped ZnO film in the visible region. The band gap energy extracted from the absorption edge of transmission spectra becomes large and the near band edge (NBE) emission energy obtained from PL spectra blueshifts to high energy when the Ta doping content grows from 0 at% to 5.02 at%, which can be explained by the Burstein–Moss shift.     

射频磁控溅射法制备FC/ZnO杂化材料及其基本性质

采用射频磁控溅射法,首先以聚四氟乙烯（PTFE）为靶,氩气为载气,在聚对苯二甲酸乙二醇酯（PET）基底上沉积氟碳（FC）膜;然后以金属锌为靶,氩气为载气,氧气为反应气体,在FC膜上再沉积一层ZnO膜而形成FC/ZnO有机-无机纳米杂化材料。用AFM、XPS、UV以及静态接触角测定仪对杂化材料的基本性质进行了研究。结果表明,该法制得的杂化材料是由纳米粒子组成的岛状结构,岛的表面起伏不平。其生长模式是一种依附于有机核的沉积-扩张生长。杂化材料具有较好的紫外吸收特性,这是由于其分子结构中含有π-π共轭双键、表面的不平整性以及纳米氧化锌粒子对紫外光的吸收共同作用的结果。静态水接触角均大于90°,呈现出良好的疏水性。     

Spray-grown highly oriented antimony-doped tin dioxide transparent conducting films

Undoped and Sb-doped tin dioxide films of varying thickness with a remarkable crystallographic orientation in the [200] direction were grown by spray-pyrolysis from tin(II) chloride solutions. Films grown on silica-coated glass substrates were completely crystalline and showed a higher degree of orientation with respect to films that were grown on uncoated glass. The presence of the silica barrier was seen to have increased the degree of orientation and to have enhanced the resulting electrical properties. Transmission electron microscopy revealed that the silica layer may have played the crucial role of a nucleation layer. Moreover, the developed microstructures were correlated with the optical and electrical behaviour of the films. Dense conducting films with thicknesses between 280–450 nm and visible transmittances of 80-70 % showed resistivities of about 10⁻³ Ωcm.     

Physical properties of Al-doped ZnO films deposited on nonwoven substrates by radio frequence magnetron sputtering

In this study, the polyethylene terephthalate (PET) spunbonded nonwoven materials were used as substrates for creating electro-optical functional nanostructures on the fiber surfaces. A magnetron sputter coating was used to deposit Al-doped ZnO (AZO) films onto the nonwovens. The influences of the deposition time on the structural, optical, and electrical properties of AZO films were investigated. Atomic force microscopy (AFM) was employed to examine the topography of the fibers. The AFM observation revealed a significant difference in the morphology of the fibers before and after the AZO sputter coating. The examination by UV–visible spectrophotometer analysis showed that the nonwovens deposited with transparent nanostructure AZO films had better UV absorption, and an average transmittance was approximately 50% in the visible light wavelength region. The surface conductivity of the materials was analyzed using a four-probe meter, and it was found that electrical resistance was significantly decreased as the sputtering time increased.