微型电液动力泵的实验

本研究在硅片上制作了有平面电极的微型电液动力泵并进行了实验研究.微泵由一组平面电极组成,施加直流电压驱动液体流动.分别采用HFE7100和无水乙醇作为工作流体进行了静压头测试.使用HFE7100时最高可以得到1050Pa的压头.     

一种用于FIA系统的微型泵

介绍了一种FIA（Flow Injection Analysis－流动注入分析）系统中的部件－微型振膜泵。该微型泵体采用无阀式的扩散管／喷嘴结构,由电磁－机械方式驱动振膜的振动,用干电池作电源。实验数据表明,该泵可在0－1．5ml/min（液体）流量范围内工作稳定,并具有结构简单、流量易于控制以及利于批量生产成本低廉等优点,有很好的应用前景。     

Field-emission electron source for vacuum micropump

In the work a conception of a miniature, orbitron ion vacuum micropump for an integration with vacuum MEMS devices is presented. It is made of silicon and glass using microengineering technology. The main part of the device is a lateral field-emission source of electrons, which has been fabricated on oxidized silicon wafer. Both, cold cathode and anode of the source are made of thin gold layer using only one photolithography process. Fabrication process and the preliminary results of electrical tests of the field-emission electron source are presented. Experimental studies have shown its good emission parameters: a low threshold voltage (over a dozen Volts), a high electron current (from tens to several hundred micro amperes), and field enhancement coefficient from 10⁷ to 10⁸ cm⁻¹. These results are promising and give possibility to fabricate orbitron micropump as an integrated part of vacuum MEMS.     

Field-emission electron source for vacuum micropump

In the work a conception of a miniature, orbitron ion vacuum micropump for an integration with vacuum MEMS devices is presented. It is made of silicon and glass using microengineering technology. The main part of the device is a lateral field-emission source of electrons, which has been fabricated on oxidized silicon wafer. Both, cold cathode and anode of the source are made of thin gold layer using only one photolithography process. Fabrication process and the preliminary results of electrical tests of the field-emission electron source are presented. Experimental studies have shown its good emission parameters: a low threshold voltage (over a dozen Volts), a high electron current (from tens to several hundred micro amperes), and field enhancement coefficient from 10⁷ to 10⁸ cm⁻¹. These results are promising and give possibility to fabricate orbitron micropump as an integrated part of vacuum MEMS.     

PZT压电薄膜无阀微泵

介绍了一种基于PZT压电薄膜的无阀压电微泵.该微泵利用自制的压电圆型薄膜片作为驱动部件、聚二甲基硅氧烷(PDMS)作为泵膜.本文在对微豕制备工艺研究的基础上,对其性能进行了数值和实验研究.建立了基于扩张管/收缩管理论的无阀微泵的有限元模型.利用MFX-AN-SYS/CFX技术实现了对微泵的双向流固耦合分析.对微泵的锥形角、最小宽度、扩散管长度、泵腔高度进行数值计算,得到了优化参数.数值计算的结果与实际测量的数据进行了比较,验证了仿真的正确性.     

微泵动态模型和虚拟运行

虚拟运行是MEMS器件运行规律的图形化展示,虚拟运行的基础是器件动态模型.首先分析了微泵的静态模型.以有限元分析数据为起点,获得了膜片静态模型.随后给出了阀片的静态模型,得到变形解析表达式且只包含压力变化量.然后以静态模型为基础,从分析微泵运行机制入手,从并不充分的实验数据中得到微泵的动态运行规律.最后基于上述动态模型实现了微泵的虚拟运行,对照实测实验结果,它具有较高的精度.在虚拟环境中可以在线看到虚拟运行状态的相应变化,最终达到了在设计参数和器件运行之间建立直接联系的目标.     

压电微泵性能的终端特性分析及其模拟研究

 根据压电微泵的结构及其功能可将其划分成6个功能块或子系统：压电片子系统、泵腔、入口阀子系统、出口阀子系统、入口通道子系统和出口通道子系统．对6个子系统建立终端特性模型，并进行有关终端特性分析．最后，将压电微泵子系统的终端特性模型进行了组合，得到整个系统的特性模型．对此进行分析，可以方便地获得压电微泵的性能特性．     

热驱动薄膜式微型泵的效率研究

微型泵在生物化学分析、药物输送和芯片冷却等领域有广阔的应用前景。为了确定热驱动薄膜式微泵达到最大工作效率的工作条件,对泵的温度响应和振动响应进行数值模拟,分别得到五种加热功率下微泵的流率－频率曲线,效率－频率曲线以及微泵的最佳效率曲线。发现微泵的流率在4－5Hz达到最大,当加热功率大于2W时,微泵的流量不再显著增加;微泵在加热功率为1W时的效率最大,最佳工作条件是加热功率1W、加热频率5Hz,此时微泵的效率为32．54μl/min.W。     

基于MEMS的静电微泵建模与仿真

对MEMS中应用广泛的静电微泵进行有限元建模分析．对于涉及多能量域下多场耦合的静电微泵建模,在仿真过程中进行了合理简化．其中在静态分析中,利用圆型薄板的小挠度变形理论和微机电系统中的静电力驱动理论来模拟静电-结构耦合过程;在泵膜的模态分析、谐响应分析以及非线性瞬态分析中,把腔内的流体当作附加质量作用在泵膜上,近似代替流场对泵膜的影响,从而减小计算量,提高了仿真效率．     

介电弹性材料驱动的大流量无阀微泵研究

在对基于介电弹性材料的无阀微泵流量分析基础上,从增加流量的角度出发,分析了结构参数对流量的影响规律,并对微泵泵膜预拉伸率及封装材料对微泵流量的影响进行了实验研究。实验结果表明,采用参数优选后的无阀微泵结构可使微泵的流量大幅度增加,可达到500的流量。该类型无阀微泵在生物医学等微流体系统中的应用具有广泛的前景。     

一种新型电磁驱动无阀微泵的研究

介绍了一种适用于微流体系统的电磁驱动无阀微泵.该微泵的泵腔以及扩散口和喷口都采用微机电系统(MEMS)技术进行制备,利用扁平振动马达作为驱动部件,以弹性模量较小的聚二甲基硅氧烷(PDMS)作为振动膜,研制出一个尺寸为12mm×12mm×5mm的微泵.对微泵的振动频率和输出流量进行了测试,结果显示:电压对频率和流量均有显...     

基于MEMS工艺的电磁驱动无阀微泵

基于实现主动微流体芯片的目的,提出了一种非闭合磁路型电磁驱动无阀微泵.微型电磁驱动器采用硅深刻蚀和微电铸工艺制作在硅基体上,微泵泵体的收缩/扩张单元采用微机械工艺制作,采用两步注塑工艺加工磁性PDMS(polymethylsiloxane)振动膜.电磁微泵样机的实验结果显示:该微泵的工作性能稳定,整机具有较高的体积功能比,样机尺寸32mm×28mm×10mm,在0.6A电流输入,工作频率为13Hz时,流量可达180μl/min,零流量下的最大背压达2.75mbar.     

Manipulating fluid with vibrating 3D-printed paddles for applications in micropump

This paper presents a novel working mechanism of a micropump using micropaddles(MPs) to actively manipulate fluid based on 3 D printing technology. The novel working principle is systematically discussed using analysis,computation and experiment methods. A theoretical model is established to research the working mechanism and crucial parameters for driving ability, such as MPs shape, size, vibration amplitude and frequency. Two different 3 D printing techniques that simplify the multi-step process into only one step are introduced to manufacture the prototype pump for investigating the principle experimentally. A testing system is designed to evaluate the flow rate of pumps with eight different vibrating paddles. A maximum flux of 127.9 mL/min is obtained at an applied voltage of 9 V. These experiments show that the active-type mechanical pump could not only freely control flow direction but also change flux by adopting different shapes or distribution ways. The advantage of the novel micropump is the application of the MP structure into the micropump system to actively manipulate fluid with flexibility and high driving ability at fairly low power.     

Development of a miniature cryogenic fluid circuit and a cryogenic micropump

This article presents the development of a miniaturized cryogenic fluid circuit for distributed cooling of low-temperature tracking detectors in high-energy physics (HEP). The heart of the circuit is a prototype cryogenic micropump. This volumetric pump is compatible with cooling powers of about 10-100 W, and capable of producing pressure heads of up to around 0.3 MPa. Besides detector and electronics cooling in HEP, potential applications are found in the field of superconductor technology.     

Performance evaluation of a valveless micropump driven by a ring-type piezoelectric actuator

Presented in this paper is the study of the performance evaluation of a valveless micropump driven by a ring-type piezoelectric actuator. The application of this micropump is to circulate fuel inside a miniaturized direct methanol fuel cell (DMFC) power system. A theoretical model based on the theory of plates and shells is established to estimate the deflection and the volume change of this micropump without liquid loading. Both finite-element method (FEM) and experimental method are applied to verify this model. Using this model, the optimal design parameters such as the dimensions and the mechanical properties of the micropump can be obtained. Furthermore, various system parameters that will affect the performance of the micropump system with liquid loading are identified and analyzed experimentally. It is expected that this study will provide some vital information for many micropump applications such as fuel delivery in fuel cells, ink jet printers, and biofluidics.     

Design,simulation and analysis of micro electro‐mechanical system microneedle for micropump in drug delivery systems

This article reports on the mechanical strength analysis and flow characteristics of square tip and circular tip microneedles by employing highly potent drugs that are given in extremely little quantity (microlitres) using MEMS technology, which proves to be a significant component of micropump in the application of Bio‐MEMS. These microneedles are well suitable for a MEMS‐based micropump in the drug delivery systems. It is an essential part of the micropump through which the drug is released into the patient’s body. The proposed microneedles can withstand a stress of 23 MPa and 20 KPa. An extensive investigation on selection of material for the microneedle is carried out to meet the requirements of the biocompatibility and high yield, as well as tensile strength. As mighty drugs such as vasopressin, atropine and digoxin are administered in large quantities, the microneedle is designed so as to deliver 800 µl of drug, with each microneedle delivering 90 µl. in a 3 3 array. 3 × 3 array releasing 90 µl.