Flexible High-Resolution Triboelectric Sensor Array Based on Patterned Laser-Induced Graphene for Self-Powered Real-Time Tactile Sensing

Flexible tactile sensors are garnering substantial interest for various promising applications, including artificial intelligence, prosthetics, healthcare monitoring, and human–machine interactions (HMI). However, it still remains a critical challenge in developing high-resolution tactile sensors without involving high-cost and complicated manufacturing processes. Herein, a flexible high-resolution triboelectric sensing array (TSA) for self-powered real-time tactile sensing is developed through a facile, mask-free, high-efficient, and environmentally friendly laser direct writing technique. A 16 × 16 pixelated TSA with a resolution of 8 dpi based on patterned laser-induced graphene (LIG) electrodes (7 Ω sq⁻¹) is fabricated by the complementary intersection overlapping between upper and lower aligned semicircular electrode arrays. With the especially patterning design, the complexity of TSA and the number of data channels is reduced. Meanwhile, the TSA platform exhibits excellent durability and synchronicity and enables the achievement of real-time visualization of multipoint touch, sliding, and tracking motion trajectory without power consumption. Furthermore, a smart wireless controlled HMI system, composed of a 9-digital arrayed touch panel based on a LIG-patterned triboelectric nanogenerator, is constructed to control personal electronics wirelessly. Consequently, the self-powered TSA as a promising platform demonstrates great potential for an active real-time tactile sensing system, wireless controlled HMI, security identification and, many others.     

E‐Skin Tactile Sensor Matrix Pixelated by Position‐Registered Conductive Microparticles Creating Pressure‐Sensitive Selectors

Electronic skin (E‐skin) imitates human skin by converting external stimuli into electrical signals. E‐skin requires high flexibility and a high level of device integration. Unlike conventional E‐skin creation methods, a highly sensitive pressure sensor matrix (100 pixels cm^?2) made of position‐registered elastic conductive microparticles (MPs) is created. The MPs form a Schottky junction with the bottom electrode and the current through the junction is sensitive to external pressure, forming a simple one‐selector two‐terminal device array. The Schottky junction eliminates the electrical cross talks between the sensor pixels consisting of 64 MPs in each. The flexible pressure sensor matrix is used as an artificial fingertip for Braille reading and as an electronic scale based on detailed force distribution. This work opens up the possibility that assembled MPs, which have been a long‐standing research topic in academia, can be used to make practical electronic devices.     

Self‐Powered Tactile Sensor Array Systems Based on the Triboelectric Effect

With the arrival of intelligent terminals, tactile sensors which are capable of sensing various external physical stimuli are considered among the most vital devices for the next generation of smart electronics. To create a self‐powered tactile sensor system that can function sustainably and continuously without an external power source is of crucial significance. An overview of the development in self‐powered tactile sensor array system based on the triboelectric effect is systematically presented. The combination of multi‐functionalization and high performance of tactile sensors aimed at achieving highly comprehensive performance is presented. For the tactile sensor unit, a development is summarized based on the two primary modes which are vertical contact–separation and single‐electrode. For the pressure mapping array, the resolution is significantly enhanced by the novel cross‐type configuration based on the single‐electrode mode. Integrated with other mechanisms, the performance will be further elevated by broadening of the detect range and realizing of visualization of pressure imaging. Then, two main applications of human–machine interaction (HMI) and trajectory monitoring are comprehensively summarized. Finally, the future perspectives of self‐powered tactile sensor system based on triboelectric effect are discussed.     

Wearable Force Touch Sensor Array Using a Flexible and Transparent Electrode

Transparent electrodes have been widely used for various electronics and optoelectronics, including flexible ones. Many nanomaterial‐based electrodes, in particular 1D and 2D nanomaterials, have been proposed as next‐generation transparent and flexible electrodes. However, their transparency, conductivity, large‐area uniformity, and sometimes cost are not yet sufficient to replace indium tin oxide (ITO). Furthermore, the conventional ITO is quite rigid and susceptible to mechanical fractures under deformations (e.g., bending, folding). In this study, the authors report new advances in the design, fabrication, and integration of wearable and transparent force touch (touch and pressure) sensors by exploiting the previous efforts in stretchable electronics as well as novel ideas in the transparent and flexible electrode. The optical and mechanical experiment, along with simulation results, exhibit the excellent transparency, conductivity, uniformity, and flexibility of the proposed epoxy‐copper‐ITO (ECI) multilayer electrode. By using this multi‐layered ECI electrode, the authors present a wearable and transparent force touch sensor array, which is multiplexed by Si nanomembrane p‐i‐n junction‐type (PIN) diodes and integrated on the skin‐mounted quantum dot light‐emitting diodes. This novel integrated system is successfully applied as a wearable human–machine interface (HMI) to control a drone wirelessly. These advances in novel material structures and system‐level integration strategies create new opportunities in wearable smart displays.     

A Monocharged Electret Nanogenerator‐Based Self‐Powered Device for Pressure and Tactile Sensor Applications

This study reports a self‐powered pressure sensor based on a monocharged electret nanogenerator (MENG). The sensor exhibits great advantages in terms of high reliability, ease of fabrication, and relatively high sensitivity. The working mechanism of the MENG sensor is studied by both theoretical derivations and finite element analyses to determine the electric potential distribution during the device operation. The MENG sensor exhibits a stable open circuit voltage ≈10 V at a 30.8 kPa pressure and a corresponding sensitivity of 325 mV kPa^?1. The stability testing result shows that the device has only ≈5% attenuation after 10 000 cycles of repeated testing at 30.8 kPa pressure. Furthermore, it is found that the MENG sensor responds not only to a dynamic force but also a static force. Finally, a sensor array consisting of nine MENG sensor elements is fabricated. The testing results from the sensor array also reveal that a single touch of the sensor element can immediately light up an LED light at the corresponding position. This device holds great promise for use in future tactile sensors and artificial skin applications.     

Energy‐Autonomous,Flexible, and Transparent Tactile Skin

Tactile or electronic skin is needed to provide critical haptic perception to robots and amputees, as well as in wearable electronics for health monitoring and wellness applications. Energy autonomy of skin is a critical feature that would enable better portability and longer operation times. This study shows a novel structure, consisting of a transparent tactile sensitive layer based on single‐layer graphene, and a photovoltaic cell underneath as a building block for energy‐autonomous, flexible, and tactile skin. Transparency of the touch sensitive layer is considered a key feature to allow the photovoltaic cell to effectively harvest light. Moreover, ultralow power consumed by the sensitive layer (20 nW cm^?2) further reduces the photovoltaic area required to drive the tactile skin. In addition to its energy autonomy, the fabricated skin is sensitive to touch, mainly because a transparent polymeric protective layer, spin‐coated on the sensor's active area, makes the coplanar capacitor sensitive to touch, detecting minimum pressures of 0.11 kPa with a uniform sensitivity of 4.3 Pa^?1 along a broad pressure range. Finally, the tactile skin patches are integrated on a prosthetic hand, and the responses of the sensors for static and dynamic stimuli are evaluated by performing tasks, ranging from simple touching to grabbing of soft objects.     

Self‐Healable and Recyclable Tactile Force Sensors with Post‐Tunable Sensitivity

It is challenging to post‐tune the sensitivity of a tactile force sensor. Herein, a facile method is reported to tailor the sensing properties of conductive polymer composites by utilizing the liquid‐like property of dynamic polymer matrix at low strain rates. The idea is demonstrated using dynamic polymer composites (CB/dPDMS) made via evaporation‐induced gelation of the suspending toluene solution of carbon black (CB) and acid‐catalyzed dynamic polydimethylsiloxane (dPDMS). The dPDMS matrices allow CB to redistribute to change the sensitivity of materials at the liquid‐like state, but exhibit typical solid‐like behavior and thus can be used as strain sensors at normal strain rates. It is shown that the gauge factor of the polymer composites can be easily post‐tuned from 1.4 to 51.5. In addition, the dynamic polymer matrices also endow the composites with interesting self‐healing ability and recyclability. Therefore, it is envisioned that this method can be useful in the design of various novel tactile sensing materials for many applications.     

Low‐Voltage Operational,Low‐Power Consuming,and High Sensitive Tactile Switch Based on 2D Layered InSe Tribotronics

Electronics based on layered indium selenide (InSe) channels exhibit promising carrier mobility and switching characteristics. Here, an InSe tribotronic transistor (denoted as w/In InSe T‐FET) obtained through the vertical combination of an In‐doped InSe transistor and triboelectric nanogenerator is demonstrated. The w/In InSe T‐FET can be operated by adjusting the distance between two triboelectrification layers, which generates a negative electrostatic potential that serves as a gate voltage to tune the charge carrier transport behavior of the InSe channel. Benefiting from the surface charging doping of the In layer, the w/In InSe T‐FET exhibits high reliability and sensitivity with a large on/off current modulation of 10⁶ under a low drain–source voltage of 0.1 V and external frictional force. To demonstrate its function as a power‐saving tactile sensor, the w/In InSe T‐FET is used to sense “INSE” in Morse code and power on a light‐emitting diode. This work reveals the promise of 2D material–based tribotronics for use in nanosensors with low power consumption as well as in intelligent systems.     

Microchannel‐Confined MXene Based Flexible Piezoresistive Multifunctional Micro‐Force Sensor

Multifunctional micro‐force sensing in one device is an urgent need for the higher integration of the smaller flexible electronic device toward wearable health‐monitoring equipment, intelligent robotics, and efficient human–machine interface. Herein, a novel microchannel‐confined MXene‐based flexible piezoresistive sensor is demonstrated to simultaneously achieve multi‐types micro‐force sensing of pressure, sound, and acceleration. Benefiting from the synergistically confined effect of the fingerprint‐microstructured channel and the accordion‐microstructured MXene materials, the as‐designed sensor remarkably endows a low detection limit of 9 Pa, a high sensitivity of 99.5 kPa^?1, and a fast response time of 4 ms, as well as non‐attenuating durability over 10 000 cycles. Moreover, the fabricated sensor is multifunctionally capable of sensing sounds, micromotion, and acceleration in one device. Evidently, such a multifunctional sensing characteristic can highlight the bright prospect of the microchannel‐confined MXene‐based micro‐force sensor for the higher integration of flexible electronics.     

Flexible Piezoresistive Sensor Patch Enabling Ultralow Power Cuffless Blood Pressure Measurement

Noninvasive and real‐time cuffless blood pressure (BP) measurement realizes the idea of unobtrusive and continuous BP monitoring which is essential for diagnosis and prevention of cardiovascular diseases associated with hypertension. In this paper, a wearable sensor patch system that integrates flexible piezoresistive sensor (FPS) and epidermal electrocardiogram (ECG) sensors for cuffless BP measurement is presented. By developing parametric models on the FPS sensing mechanism and optimizing operational conditions, a highly stable epidermal pulse monitoring method is established and beat‐to‐beat BP measurement from the ECG and epidermal pulse signals is demonstrated. In particular, this study highlights the compromise between sensor sensitivity and signal stability. As compared with the current optical‐based cuffless BP measurement devices, the sensing patch requires much lower power consumption (3 nW) and is capable of detecting subtle physiological signal variations, e.g., pre and postexercises, thus providing a promising solution for low‐power, real‐time, and home‐based BP monitoring.     

Textile‐Based Flexible Electroluminescent Devices

Flexible and transparent textile‐based conductors are developed by inkjet printing poly(3,4‐ethylenedioxythiophene):poly(styrene sulfonate) (PEDOT:PSS) onto polyethylene terephthalate (PET) mesh fabrics. The conductivity–transparency relationship is determined for textile‐based conductors with different thicknesses of the printed PEDOT:PSS film. The function of these textile‐based conductors is studied in the alternating current powder electroluminescent (ACPEL) devices and compared with indium tin oxide (ITO) glass in an ACPEL device of the same configuration. Textiles coated with conducting polymers are a potential alternative to coated polymer films for flexible, transparent conductors.     

Template‐Directed Growth of Hierarchical MOF Hybrid Arrays for Tactile Sensor

Recently, conductive metal?organic frameworks (MOFs) as the active material have provided broad prospects for electronic device application. The positioning technologies for MOFs enable the fabrication of novel microstructures, which can modulate the morphology of the material and tune the properties for the targeted application. Herein, a template‐method is used to synthesize the hierarchical structure of MOF hybrid array (MHA) on copper mesh (MHA@Mesh) for flexible sensor. Finite element method (FEM) results indicate that the 3D hierarchical MHA@Mesh can mimic the micro/nanoscale structure of human skin, which enables an interlocking contact. MHA@Mesh‐based flexible sensor presents rapid response rate (<1 ms) and high sensitivity (up to 307 kPa^?1) which is 20 times higher than that of MHA@Foil‐based sensor (15 kPa^?1). The flexible pressure device could be applied to monitor the finger motion and human pulses. Moreover, the music recognition can be performed by integrating the MOFs hardware sensors with machine learning algorithms. Overall, this design concept of 3D hierarchical microarray structures demonstrates potential in the fields of wearable technologies and human–machine interfaces.     

Water‐Based Isotropically Conductive Adhesives: Towards Green and Low‐Cost Flexible Electronics

This paper reports the first high‐performance water‐based isotropically conductive adhesives (WBICAs) – a promising material for both electrical interconnects and printed circuits for ultralow‐cost flexible/foldable printed electronics. Through combining surface iodination and in situ reduction treatment, the electrically conductivity of the WBICAs are dramatically improved (8 × 10^‐5 Ω cm with 80 wt% of silver); moreover, their reliability (stable for at least 1440 h during 85 °C/85% RH aging) meets the essential requirements for microelectronic applications. Prototyped applications in carrying light emitting diode (LED) arrays and radio frequency identification (RFID) antennas on flexible substrates were demonstrated, which showed satisfactory performances. Moreover, their water‐based character may render them more environmentally benign (no volatile organic chemicals involved in the printing and machine maintenance processes), more convenient in processing (reducing the processing steps), and energy economic (thermally sintering the silver fillers and curing the resin is not necessary unlike conventional ICAs). Therefore, they are especially advantageous for mass‐fabricating flexible electronic devices when coupled with paper and other low‐cost substrate materials such as PET, PI, wood, rubber, and textiles.     

Textile‐Based Wireless Pressure Sensor Array for Human‐Interactive Sensing

A textile‐based wireless pressure sensor array (WiPSA) is proposed for flexible remote tactile sensing applications. The WiPSA device is composed of a fabric spacer sandwiched by two separate layers of passive antennas and ferrite film units. Under the external pressure, the mechanical compression of the flexible fabric spacer leads to an inductance change, which can further be transduced to a detectable shift of the resonant frequency. Importantly, WiPSA integrates the ferrite film featuring an ultrahigh permeability, which effectively improves the device sensitivity and avoids the interference of conductive materials simultaneously. The device performance with a high quality factor (>35) and sensitivity (?0.19 MHz kPa^?1) within a pressure range of 0–20 kPa is demonstrated. In addition, WiPSA achieves excellent reproducibility under periodical pressures (>20 000 cycles), temperature fluctuations (15–103 °C), and humidity variations (40–99%). As a proof of concept for human‐interactive sensing, WiPSA is successfully 1) integrated with a flexible wrist band for fingertip pressure‐guided direction choices, 2) developed into a smart wireless insole to map the plantar stress distributions, and 3) embedded into a waist‐supporting belt to resolve the contact pressure between the belt and human abdomen in a remote transmitting scheme.     

High‐Performance Integrated ZnO Nanowire UV Sensors on Rigid and Flexible Substrates

Due to the large surface area‐to‐volume ratio and high quality crystal structure, single nanowire (NW)‐based UV sensors exhibit very high on/off ratios between photoresponse current and dark current. Practical applications require a large‐scale and low‐cost integration, compatibility to flexible electronics, as well as reasonably high photoresponse current that can be detected without high‐precision measurement systems. In this paper, NW‐based UV sensors were fabricated in large‐scale by integrating multiple NWs connected in parallel via the contact printing method. Linear scaling of the photoresponse current with the number of NWs is demonstrated. Integrated ZnO NW UV sensors were fabricated on rigid glass and flexible polyester (PET) substrates at the macroscopic scale. The flexible and rigid sensors performed comparably, exhibiting on/off current ratios approximately three orders of magnitude higher than sensors made from polycrystalline ZnO thin films. Under UV irradiance of 4.5 mW cm^?2 and 3 V bias, photoresponse currents and on/off current ratios for the rigid and flexible UV sensors reached 12.22 mA and 82 000, and 14.1 mA and 120 000, respectively. This result suggests that lateral integration of semiconductor NWs is an effective approach to large‐scale fabrication of flexible NW sensors that inherit the merits of single‐NW‐based systems with unaffected performance compared to using rigid substrate.     

Stretchable Energy‐Harvesting Tactile Interactive Interface with Liquid‐Metal‐Nanoparticle‐Based Electrodes

Energy‐harvesting electronic skin (E‐skin) is highly promising for sustainable and self‐powered interactive systems, wearable human health monitors, and intelligent robotics. Flexible/stretchable electrodes and robust energy‐harvesting components are critical in constructing soft, wearable, and energy‐autonomous E‐skin systems. A stretchable energy‐harvesting tactile interactive interface is demonstrated using liquid metal nanoparticles (LM‐NPs)‐based electrodes. This stretchable energy‐harvesting tactile interface relies on triboelectric nanogenerator composed of a galinstan LM‐NP‐based stretchable electrode and patterned elastic polymer friction and encapsulation layer. It provides stable and high open‐circuit voltage (268 V), short‐circuit current (12.06 µA), and transferred charges (103.59 nC), which are sufficient to drive commercial portable electronics. As a self‐powered tactile sensor, it presents satisfactory and repeatable sensitivity of 2.52 V·kPa^?1 and is capable of working as a touch interactive keyboard. The demonstrated stretchable and robust energy‐harvesting E‐skin using LM‐NP‐based electrodes is of great significance in sustainable human–machine interactive system, intelligent robotic skin, security tactile switches, etc.     

Flexible Multifunctionalized Carbon Nanotubes‐Based Hybrid Nanowires

In this work, flexible multifunctionalized carbon nanotube (CNT)‐based hybrid nanowires are synthesized through surface modification processes. The good dispersability of the hybrid nanowire in polar solvents facilitates directly making fine patterns with a minimum width of 40 μm for applications of flexible and stretchable circuits (FSCs). The hybrid nanowire possesses a flexible and highly conductive structure which demonstrates stable electro‐mechanical properties on polydimethylsiloxane (PDMS) substrates under large structural deformation. FSCs fabricated from the hybrid nanowires show a constant resistance of 0.096 Ω □^?1 (equivalent of a resistivity 0.96 Ω μm) under repeated bending cycles. The FSCs also have a low and stable sheet resistance of 0.4 Ω □^?1 for strains up to 30%, which is almost four orders of magnitude lower than that of pure CNT samples (1316 Ω □^?1). Further improved stretchability and electro‐mechanical properties (0.1 Ω □^?1, at the strain of 100%) are achieved with a prestrain PDMS substrate. Repeated deformation tests demonstrate the high reliability of FSCs. The observed stable and reliable electro‐mechanical performance of FSCs suggests the potential use of the material in wearable and portable electronics.     

Textile‐Based Triboelectric Nanogenerators for Self‐Powered Wearable Electronics

Wearable smart electronic devices based on wireless systems use batteries as a power source. However, recent miniaturization and various functions have increased energy consumption, resulting in problems such as reduction of use time and frequent charging. These factors hinder the development of wearable electronic devices. In order to solve this energy problem, research studies on triboelectric nanogenerators (TENGs) are conducted based on the coupling of contact‐electrification and electrostatic induction effects for harvesting the vast amounts of biomechanical energy generated from wearer movement. The development of TENGs that use a variety of structures and materials based on the textile platform is reviewed, including the basic components of fibers, yarns, and fabrics made using various weaving and knitting techniques. These textile‐based TENGs are lightweight, flexible, highly stretchable, and wearable, so that they can effectively harvest biomechanical energy without interference with human motion, and can be used as activity sensors to monitor human motion. Also, the main application of wearable self‐powered systems is demonstrated and the directions of future development of textile‐based TENG for harvesting biomechanical energy presented.