基于双阵元超声波接收阵列的风矢量测量

针对当前超声波测风仪测量精度不高及抑制噪声干扰能力不强的问题,提出了一种双阵元超声波接收阵列结构及基于该结构的风矢量测量方法.首先,设计了一种基于超声波测风原理的风速风向测量系统结构,该结构中包含一个超声波发射阵元和两个超声波接收阵元;然后,依据该系统结构给出了一种基于相关方法的超声波时延估计算法,根据超声波传输时间与...     

Precision machining of micro tool electrodes in micro EDM for drilling array micro holes

Micro electro discharge machining (micro EDM) is suitable for machining micro holes on metal alloy materials, and the micro holes can be machined even to several microns by use of wire electro discharge grinding (WEDG) of micro electrodes. However, considering practicability of micro holes <Φ100 μm in batch processing, the controllable accuracy of holes’ diameter, the consistency accuracy of repeated machining and the processing efficiency are required to be systematically improved. On the basis of conventional WEDG method, a tangential feed WEDG (TF-WEDG) method combined with on-line measurement using a charge coupled device (CCD) was proposed for improving on-line machining accuracy of micro electrodes. In TF-WEDG, removal resolution of micro-electrode diameter (the minimum thickness to be removed from micro electrode) is greatly improved by feeding the electrode along the tangential direction of wire-guide arc, and the resolution is further improved by employing negative polarity machining. Taking advantage of the high removal resolution, the precise diameter of micro-electrode can be achieved by the tangential feed of electrode to a certain position after diameter feedback of on-line measurement. Furthermore, a hybrid process was presented by combining the TF-WEDG method and a self-drilled holes method to improve the machining efficiency of micro electrodes. A cyclic alternating process of micro-electrode repeated machining and micro holes’ drilling was implemented for array micro holes with high consistency accuracy. Micro-EDM experiments were carried out for verifying the proposed methods and processes, and the experimental results show that the repeated machining accuracy of micro electrodes was less than 2 μm and the consistency accuracy of array micro holes was ±1.1 μm.     

基于高阶累积量的阵列式超声波传感器风速风向测量

针对现有超声波测风系统在实际应用中环境噪声抑制效果差、风速和风向测量精度不高的问题,提出了一种基于高阶累积量的阵列式超声波传感器风速风向测量方法。所提方法采用一种由一个超声波发射阵元和五个超声波接收阵元组成的阵列式超声波测风系统结构,并在此系统结构上,采用基于高阶累积量的多重信号分类(MUSIC)算法,抑制高斯白噪声及高斯色噪声的干扰,实现高斯混合噪声下风速风向的有效测量。所提方法与应用相关算法的测风方法相比,具有更高的噪声抑制能力及更高的风速风向测量精度。最后通过仿真实验与实测数据验证实验对所提方法的有效性进行了验证与分析,实验结果表明风速和风向角的测量误差分别为2.3%和-2°,基本达到了超声波测风方法的技术要求。     

Management of the wind speed data using adaptive neuro-fuzzy methodology

In this paper, the accuracy of the Weibull model of wind speed is evaluated using an adaptive neuro-fuzzy inference system (ANFIS) based on wind data. The wind data comprises of wind speed measurements in the city of Nis in Serbia at different heights of 10 m, 30 m and 40 m for duration of one year. The ANFIS results are compared with the experimental results and Weibull model using root-mean-square error (RMSE), coefficient of determination, and Pearson coefficient. The effectiveness of the proposed unified strategy is verified based on the simulation results.     

基于二次相关的超声波风速风向测量方法

为解决超声波测风仪存在的抑制噪声能力不足、受环境温湿度等影响导致稳定性差等问题,提出一种基于二次相关算法的三阵元超声波测风方法。首先结合超声波测风原理设计了一种三阵元测风结构,该结构包含3个收发一体式超声波换能器;其次依据该系统结构给出一种基于二次相关的超声波传播时间测量方法,利用二次相关算法对噪声抑制更强的性能可有效提高风速风向测量的精度,并从理论上说明了所提测风方法不受超声波本身传播速度即环境温湿度对其的影响。最后通过模拟仿真实验和搭建的实际测量系统对所提方法进行了有效性验证。在实际测量中风速风向角的最大测量误差分别为2.0%和2.1°,基本达到了超声波风速风向测量的精度要求。     

Design and experimental evaluation of a precise and compact tubular ultrasonic motor driven by a single-phase source

A precise and compact tubular ultrasonic motor driven by a single-phase source is proposed and tested in this study. The motor is designed by modeling a motor stator in FEM software. The motor fabricated according to the design is tested experimentally and its working characteristics including speed and torque are measured and presented. The maximum speed and torque of the motor are 59 rpm and 0.28 mN m at 80 V_pp of applied voltage. The proposed motor possesses advantages such as a simple and compact structure with application in the fields of robotics, space, medical devices and high-resolution stages, among others. The proposed motor is a good candidate for applications where accurate control and high resolution at low speed is required.     

Optical fiber distributed temperature sensor using short term Fourier transform based simplified signal processing of Raman signals

A simplified technique using short term Fourier transform to reduce the errors in distributed temperature measurement with a Raman scattering based optical fiber sensor system is presented. The two main sources of errors are differential attenuation to anti-Stokes and Stokes signal by fiber and local change in Stokes due to change in temperature. The proposed technique compensates these errors and extracts correct temperature profile in spite of practical difficulties encountered in applying the theoretical concept. Moreover proposed technique is less complex, self-reliant, can tolerate variation in laser power, requires less dead zone and suits automation using embedded solution. Results of measurement carried out, using the system developed at RRCAT, Indore, for two hot zones having spatial width of 1.9 m (kept at 56 °C) and 1.5 m (kept at 78 °C), located at 47 m and 85 m respectively, show that these parameters can be recovered with significantly small errors.     

Miniaturized liquid film sensor (MLFS) for two phase flow measurements in square microchannels with high spatial resolution

Two miniaturized liquid film sensors (MLFS) based on electrical conductance measurement have been developed and tested. The sensors are non-intrusive and produced with materials and technologies fully compatible and integrable with standard microfluidics. They consist of a line of 20 electrodes with a purpose-designed shape, flush against the wall, covering a total length of 5.00 and 6.68 mm. The governing electronics achieve 10 kHz of time resolution. The electrode spacing of the two sensors is 230 μm and 330 μm, which allows measurements of liquid films up to 150 μm and 400 μm for sensors MLFS_A and MLFS_B, respectively. The sensor characteristics were obtained by imposing static liquid films of known thickness on top of the actual sensor. Further dynamic measurements of concurrent air-water flow in a horizontal microchannel were performed. The line of electrodes is placed across the flow direction with an angle of 3.53° from the direction of flow, allowing for a spatial resolution perpendicular to the flow of 14.2 μm for sensor MLFS_A and 20.5 μm for sensor MLFS_B. The high time and spatial resolution allows for fast and accurate detection of the presence of bubbles, and even measurement of film thickness and bubble velocity. Further information, such as the bubble shape, can be gathered based on the shape of the liquid layer underneath the bubble, which is particularly important for heat transfer studies in microchannels.     

Subpixel edge location method proposed to improve the performance of optical fiber spherical coupling probe during dimensional measurement of micro-cavities with high aspect ratio

A subpixel edge location method based on orthogonal Jacobi–Fourier moments is proposed in this paper to improve the performance of optical fiber spherical coupling probe during dimensional measurement of micro-cavities with high aspect ratio. The effectiveness of the proposed method is proved through the performance test of a micro-hole measuring machine with optical spherical coupling probe. Test results indicate that a blind micro-hole of 400 μm in diameter can be experimentally measured at the depth of 2000 μm with a repeatability of 40 nm and an extremity resolution of 42 nm.     

A highly accurate ultrasonic ranging method based on onset extraction and phase shift detection

The opposite-type ultrasonic ranging application is widely used in spatial 3D coordinates measurement systems. The traditional phase shift (PS) estimation based on multi-frequency ultrasonic pulse is a highly accurate ranging method but has high requirement to the transducers and signal processing algorithm. This paper proposes a novel opposite-type ultrasonic ranging method with single frequency pulse. It can estimate the time of flight (TOF) roughly through extracting the signal’s onset based on self-correlation and correct the TOF accurately through detecting the phase shift between the transmission and reception signals. In order to reduce the noise disturbance to this algorithm, a new de-noising method based on wavelet decomposition is presented, and the de-noising effect is analyzed by MATLAB simulation. Finally, three separate ultrasonic ranging experiments were designed to validate the effects of wavelet de-noising, PS detection and temperature field compensation. The accuracy of distance measurement can achieve 0.5 mm for the distance up to 5000 mm.     

Application of ultrasonic Doppler velocimetry to molten glass by using broadband phase difference method

An ultrasonic velocity profile (UVP) measurement in high temperature molten glass was presented using buffer rod technique. A ceramic buffer rod was used to transmit ultrasound into molten glass. The rod had a taper shape and porous cladding to suppress trailing echo, which is the spurious echo in the buffer rod measurement. The broadband signal processing method was presented to improve noise tolerance in velocity estimation. This method is based on the phase difference method, which is originally proposed as a narrowband method. Measurable distance of the UVP measurement was investigated combining the buffer rod and the broadband signal processing method. Experiment was conducted at the temperature from 1000 °C to 1200 °C. As a preliminary test, motion tracking in molten glass was successfully demonstrated.     

Non-contact temperature measurement of silicon wafers based on the combined use of transmittance and radiance

We propose a non-contact temperature measurement method that combines the temperature dependence of transmittance below 600 °C and radiation thermometry above 600 °C. The combined method uses a polarization technique and the Brewster angle between air and a dielectric film such as SiO₂ or Si₃N₄ grown on silicon wafers. A prominent feature of this method is that both measurements of transmittance and radiance are performed with the same geometrical arrangement.For a semitransparent wafer, the measurement of p-polarized transmittance at the wavelengths of 1.1, 1.2 and 1.3 μm enables temperature measurement in the range from room temperature to 600 °C. For an opaque wafer above 600 °C, the p-polarized radiation thermometry at the wavelength of 4.5 μm allows the temperature measurement without the emissivity problem. The combined method with the use of transmittance and radiance is valid in the entire temperature range irrespective of variations of film thickness and resistivity.     

Ultrasonic vibration assisted grinding of hard and brittle linear micro-structured surfaces

In this paper, a novel ultrasonic vibration assisted grinding (UVAG) technique was presented for machining hard and brittle linear micro-structured surfaces. The kinematics of the UVAG for micro-structures was first analyzed by considering both the vibration trace and the topological features on the machined surface. Then, the influences of the ultrasonic vibration parameters and the tilt angle on the ground quality of micro-structured surfaces were investigated. The experimental results indicate that the introduction of ultrasonic vibration is able to improve the surface quality (The roughness SR_a was reduced to 78 nm from 136 nm), especially in guaranteeing the edge sharpness of micro-structures. By increasing the tilt angle, the surface roughness can be further reduced to 56 nm for a 59% improvement in total. By using the preferred UVAG parameters realized by orthogonal experiments, a micro cylinder array with surface roughness of less than 50 nm and edge radius of less than 1 μm was fabricated. The primary and secondary sequence of the grinding parameters obtained by the orthogonal experiments are as follows: feed rate, tilt angle of workpiece, depth of grinding, vibration frequency and amplitude. The spindle speed in the range of 1000 rpm–3000 rpm does not significantly affect the machined micro-structured surface roughness. Finally, more micro-structures including a micro V-groove array and a micro pyramid array were machined on binderless WC as well as SiC ceramic by means of the UVAG technique. The edge radius on the V-grooves and pyramids are both less than 1 μm, indicating the feasibility of UVAG in machining hard and brittle micro-structured surfaces for an improved surface quality.     

Effects of flow patterns and salinity on water holdup measurement of oil-water two-phase flow using a conductance method

This research investigates the effects of flow pattern and salinity of oil-water two-phase flow on water holdup measurement using a conductance method. Firstly, vertical upward oil-water two-phase flow experiment is conducted in a 20 mm inner diameter (ID) pipe, in which the salinities of aqueous solutions are set as 151 ppm, 1003 ppm, 2494 ppm and 4991 ppm respectively. Experimental water-cut and mixture velocity are set as 80–100% and 0.0184–0.2576 m/s. In the experiment, three different flow patterns, i.e., dispersed oil-in-water slug flow (D OS/W), dispersed oil-in-water flow (D O/W) and very fine dispersed oil-in-water flow (VFD O/W) are observed and recorded by a high speed camera. Meanwhile, we collect the response of Vertical Multiple Electrode Array (VMEA) conductance sensor excited by a sine voltage signal. The result shows that, for VFD O/W, the water holdup from VMEA sensor shows a satisfied agreement with that of quick closing valve (QCV) method under certain salinities, i.e., 1003 ppm as well as 2494 ppm. For D OS/W flow and D O/W flow characterized by dispersed oil droplets with various sizes, considerable deviations of water holdup between VMEA sensor and QCV method under four kinds of salinity aforementioned are presented. Afterward, according to experimental analysis along with theoretical deviation, it is concluded that the deviation of the measurement system reaches its minimum when reference resistance in the measurement circuit and salinity of the aqueous solution satisfy constraint conditions, and the accuracy of water holdup using the conductance method can be improved through adjusting reference resistance to match the salinity of water phase. Finally, the recurrence plot algorithm is utilized to identify typical flow patterns mentioned above and it shows satisfied results on comprehending the discrepancies among different flow patterns, demonstrating that the recurrence plot algorithm can be effectively applied in flow pattern identification regarding oil-water flows.     

High-accuracy ultrasonic temperature measurement based on MLS-modulated continuous wave

Ultrasonic temperature measurement has the potential to improve measurement accuracy by increasing the length of a received signal due to its excellent performance with noise resistance. However, when the distance between the transmitter and receiver is limited, the received signal can be polluted by strong multiple echoes, which can significantly degrade temperature accuracy. This paper proposes a method for high-resolution ultrasonic temperature measurement. With the use of a maximum length sequence (MLS)-modulated continuous wave, the obstructive effect of echoes is effectively suppressed. A hybrid method is employed for accurate time-of-flight (TOF) estimation by incorporating both cross-correlation and phase shift (PS), which is the basis of highly accurate temperature measurement. The experimental results in distilled water show that the proposed method estimates TOF with a standard deviation of less than 0.3 ns, and temperature errors consistently remain within ±0.04 °C.     

Three-dimensional profile stitching measurement for large aspheric surface during grinding process with sub-micron accuracy

A novel measurement method is proposed to realize three-dimensional (3D) profile stitching for large aspheric surface. The proposed method is based on the multiple sub-regions stitching technology applying a four-axis fixture and a commercial small-range profiler. The partition of sub-regions is due to the effective profiler’s range and the characteristic parameters of aspheric surface, and the measurement for each sub-region within the profiler’s range is achieved through the fixture to translate and rotate the aspheric surface. Then a stitching algorithm including the multi-body theory, the invariability of curvature radiuses and the least square principle is established to reconstruct the full 3D profile. Simulations of multiple sub-regions stitching for different aspheric surfaces are performed to predict the stitching accuracy of proposed method and analyze the influence of alignment errors in Y direction caused by the rotation error along Z direction (Δβ_w,g). The stitching accuracy of proposed method is verified by measuring the 3D profile of an off-axis parabolic surface and an axisymmetric aspheric surface. The experimental standard deviations of stitching errors are 0.16 μm and 0.42 μm, which are less than the form errors of aspheric surface during grinding process. The results show that the proposed method achieves 3D profile stitching for large aspheric surface with sub-micron accuracy.     

An instrumentation system for multi-parameter measurements of gas-solid two-phase flow based on Capacitance-Electrostatic sensor

In this paper, an instrumentation system for the measurements of local solid volumetric concentration, local solid velocity, local solid mass flowrate and solid mass flowrate in gas-solid two-phase flow system is developed. It is based on a new type of a Capacitance-Electrostatic sensor (CES). The CES sensor is mainly composed of a capacitance electrode array and two electrostatic electrode arrays. The optimum design of the sensor is achieved by finite element method. The capacitance electrode array is employed to detect the solid distribution over the cross-section of the pipe, and the local solid volumetric concentration measurement is further derived. The electrostatic electrode arrays are used to measure the local solid velocities in conjunction with cross-correlation method. From the local solid velocity and local volumetric concentration, the solid mass flowrate and the local solid mass flowrate can be achieved. The developed system for the local solid volumetric concentration measurement is verified through analogue simulation experiments and static experiments. Finally, the system is employed to measure the local solid volumetric concentration, local solid velocity, local solid mass flowrate and solid mass flowrate on a belt conveyor. The experimental results show that the measurement error of the local solid volumetric concentration measurement results are less than 10.43% for solid local volumetric concentration ranging from 0.02 to 0.56, the standard deviations of the local solid velocity measurement results are less than 0.42 for solid velocity ranging from 3.5 m/s to 15.0 m/s, and the relative error of the solid mass flowrate is within −19.6% to +14.9% for solid mass flowrate ranging from 0.006 kg/s to 0.103 kg/s, indicating that the system is capable of achieving multi-parameters measurement in gas-solid two-phase flow system.     

Electrogenerated chemical polishing of copper

Stress free polishing method is preferred for a damage free surface of copper with ultra-flatness and ultra-smoothness. Such a surface offers a perfect substrate for integrated circuits and micro-electromechanical systems fabrication. A new polishing method, called electrogenerated chemical polishing (EGCP), is proposed based on the principle of the scanning electrochemical microscope (SECM) and the diffusion controlled chemical reaction. Roughness of a Cu surface is reduced from 100.5 nm to 3.6 nm by the proposed method. To demonstrate the planarization capability of this new method, a patterned Cu surface with an array of micro-columns is planarized with a peak-valley (PV) value from 4.7 μm to 0.059 μm.     

A signal interpolation method for Fabry–Perot interferometer utilized in mechanical vibration measurement

In this investigation, a self-developed signal processing method for Fabry–Perot interferometer is proposed which can be utilized for high-speed dynamic displacement measurements, e.g. mechanical vibration measurements. The lookup table (LUT) integrated with the interference intensity equation has been employed for the interpolation processing of interference signals. With the aid of this method, the interpolation error has been reduced by 40% in comparison with that resulting from the commercial sinusoidal signal processing module. By operations of Fast Fourier Transform (FFT), the displacement measurement distribution can be converted into the frequency spectrum diagram. The interpolation resolution of the proposed interferometric displacement measurement system is about 0.1 nm. Experimental results demonstrate that this interferometer system is available for measuring frequencies till 2 kHz where its corresponding amplitude is 0.15 μm.     

A novel ultrasonic array signal processing scheme for wind measurement

This article presents a novel ultrasonic array signal processing scheme for wind speed and wind direction measurement. Two ultrasonic array structures are illustrated and the corresponding array signal processing method is proposed. The statistical performance of proposed scheme, such as estimation variance and Cramer Rao Bound (CRB), is derived. The ambiguity problem for traditional uniform line array (ULA) structure is theoretically discussed. The hardware experiment results verify the feasibility of the proposed wind measurement method.