软X射线多层膜元件研究进展

对各国进行的软Ｘ射线多层膜研究所取得的最新成果给出了比较系统全面的评述，首次给出了文献报道的软Ｘ射线全波段的各种膜系实测正入射反射率的统计结果。     

软X射线多层膜光栅

详细介绍了软X射线多层膜光栅的国内外发展概况和广阔的应用领域，全面分析了它的制作工艺，并指出制作多层膜光栅的关键技术及解决方案。     

软X射线高反射率多层膜反射镜

日本松下技术研究所用准分子激光CVD工艺技术实现软X射线聚光用高反射率多层膜反射镜,这种反射镜是在硅基板上由钨(W)和硅(Si)交互沉积的多层膜(W/Si)构成椭圆柱面反射镜(尺寸:55×55mm~2,短半径60mm),(图1).多层膜的各层,在基板纵剖面内的膜厚是不同的.该椭圆形反射镜能把点光源发出的软X射线聚成光束.所发出的两条光线能聚焦成一点.     

常用材料软X射线多层膜的全波段设计

利用薄膜光学理论及材料在软X射线波段的原子散射因子,设计了大批量的软X射线多层膜的计算程序,对常用材料的膜系配对进行了优化设计,给出的结果对软X 射线整个波段内的多层膜膜系的选择有一定的指导意义。     

45°角入射的13.1nm软X射线多层膜的研制

报道了对４５°入射角高反的１３．１ｎｍ软Ｘ射线多层膜反射镜的研制情况。利用在星光装置中进行的软Ｘ射线激光等离子体实验测量多层膜反射率的方法，获得了２６．２％的实测反射率，该反射率已达到理论反射率的７０％。     

长波长软X射线多层膜的设计与制备

“长波长软X射线多层膜的设计与制备”这篇论文介绍了用离子束溅射法制备长波长软X射线多层膜的研究工作,并报道了一种新的材料组合C/Si用于28.4nm(43. 65eV)和30.4nm(40.78 eV)波段的多层膜反射镜,并且用离子束溅射装置制备了正入 射条件下的C/Si多层膜反射镜.同时,用软X射线反射计测量了样品的反射率,从实验结果看出,制备的多层膜样品在28.4nm和30.4nm波段附近的实测正入射反射率分别达到11.4%和14.3%,实验指标达到了国内领先水平,并接近了国际水平.     

常用间隔层材料软X射线多层膜的设计

为了研究常用间隔层材料的软X射线多层膜的材料设计,利用Lawrence-Livermore国家实验室提供的软X射线多层膜设计程序进行模拟计算,得到了软X射线波段内的具有高反射率的膜系。结果表明,Mo在相当大的波段范围内具有良好的光学特性;除了在12.44nm是首选膜系外(除4.36nm外),其它波长都有较高的反射率;U作为吸收层材料,在相当大的波段范围内,与其它间隔层材料配对的多层膜也具有较高的反射率。这对多层膜膜系的材料选择有一定的指导意义。     

X射线多层反射膜

评述X射线多层反射膜原理、现状和问题。讨论了投影X射线光刻和X射线毛细管放电重复率激光器所用的反射镜。     

C/Al软X射线多层膜反射镜

在λ=285nm波长处,选择了一种新的多层膜材料对C／Al。与Mo／Si,C／Si软X射线多层膜相比,正入射C／Al多层膜在150nm附近有很低的二级衍射峰。用磁控溅射法制备了C／Al软X射线多层膜样品,并用X射线小角衍射法对其结构进行了测试。     

基于模拟退火的软X射线多层膜反射镜设计

基于模拟退火(SA)算法,对软x射线短波段中的几个波长的多层膜反射镜进行了优化设计,获得了它们的光学参数,包括多层膜反射镜的最佳周期厚度、最佳厚度比和峰值反射率,进而制作多层膜反射镜并在北京同步辐射装置上进行了反射率的实际测量。测量结果表明,该反射镜具有实用的反射率。这表明,SA方法适用于软x射线短波段多层膜反射镜的优化设计。     

合肥国家同步辐射光源软X光空间相干性的数值计算

提出了计算同步辐射软Ｘ光空间相干性的方法。根据合肥国家同步辐射光源软Ｘ光实验站的具体数据，通过数值计算得到了不同针孔半径、不同工作波长时的相干范围，并得到了估计相干范围直径的近似公式。所得结果为软Ｘ光实验和单色仪的改造提供了具体的数值依据。     

Immunomodulation‐Based Strategy for Improving Soft Tissue and Metal Implant Integration and Its Implications in the Development of Metal Soft Tissue Materials

The difficulties associated with metal implants and soft tissue integration have significantly affected the applications of metal implants in soft‐tissue‐related areas. Prompted by the close association between soft tissue integration and the immune response, an immunomodulation‐based strategy is proposed to manipulate the immune microenvironment and improve metal implant–soft tissue integration. Considering their vital roles in soft tissue responses to metal implants, macrophages are used and the cytokines fingerprints of M1 and M2 macrophage immune microenvironments are evaluated for their potential modulatory effects on metal implant–soft tissue integration. The modulatory effects of different immune microenvironments on model soft tissue cells (human gingival epithelium cells) cultured on model metal implants (titanium alloy disks) are then described, with the underlying possible mechanism FAK‐AKT‐mTOR signaling unveiled. As further proof of concept, IL‐4/PDA (polydopamine)‐coated titanium alloy implants, aiming at modulating M2 macrophage polarization, are prepared and found to improve the in vivo metal implant‐soft tissue integration. It is the authors' ambition that this immunomodulation‐based strategy will change the negative perception and encourage the active development of metal materials with favorable soft tissue integration properties, thus improving the success rates of perforating metal implants and broadening their application in soft‐tissue‐related areas.     

软X光激光用多层膜反射镜的制备与检测

介绍在制备和检测软Ｘ光激光用多层膜反射镜中听做的研究工作。重点是制备过程，包括基板、镀膜设备、膜厚控制方法，以及经大量实验得出的镀膜工艺条件、给出了利用Ｘ光射线衍射仪所做的周期结构检测结果，以及利用激光等离子体作光源的精密反射率计所作的反射率测量结果。最后，对工作进展和存在的问题做了简略评述。     

Influence of Annealing and Interfacial Roughness on the Performance of Bilayer Donor/Acceptor Polymer Photovoltaic Devices

Through controlled annealing of planar heterojunction (bilayer) devices based on the polyfluorene copolymers poly(9,9‐dioctylfluorene‐co‐bis(N,N′‐(4,butylphenyl))bis(N,N′‐phenyl‐1,4‐phenylene)diamine) (PFB) and poly(9,9‐dioctylfluorene‐co‐benzothiadiazole) (F8BT) we study the influence of interface roughness on the generation and separation of electron–hole pairs at the donor/acceptor interface. Interface structure is independently characterized by resonant soft X‐ray reflectivity with the interfacial width of the PFB/F8BT heterojunction observed to systematically increase with annealing temperature from 1.6 nm for unannealed films to 16 nm with annealing at 200 °C for ten minutes. Photoluminescence quenching measurements confirm the increase in interface area by the three‐fold increase in the number of excitons dissociated. Under short‐circuit conditions, however, unannealed devices with the sharpest interface are found to give the best device performance, despite the increase in interfacial area (and hence the number of excitons dissociated) in annealed devices. The decrease in device efficiency with annealing is attributed to decreased interfacial charge separation efficiency, partly due to a decrease in the bulk mobility of the constituent materials upon annealing but also (and significantly) due to the increased interface roughness. We present results of Monte Carlo simulations that demonstrate that increased interface roughness leads to lower charge separation efficiency, and are able to reproduce the experimental current‐voltage curves taking both increased interfacial roughness and decreased carrier mobility into account. Our results show that organic photovoltaic performance can be sensitive to interfacial order, and heterojunction sharpness should be considered a requirement for high performance devices.     

强激光与气凝胶靶相互作用的二次谐波与X射线发射的实验研究几种金属有机化合物的合成、结构和光学非线性

主要通过对气凝胶多孔材料平面靶产生的激光等离子体Ｘ射线和谐波发射的研究,发现气凝胶平面靶的光谱发射与普通平面靶明显不同。气凝胶靶发射的Ｘ射线光厚较薄,容易产生二次谐波的次峰结构,这是由于气凝胶靶本身的低密度特性容易激发离子声衰变不稳定性而引起的。采用相转移Witig反应合成了5种二茂铁金属有机化合物,对它们进行了红外光谱、紫外光谱、元素分析、核磁共振的表征,研究了分子的结构和二阶非线性光学性质。研究表明该类化合物具有较高的分子二阶非线性极化率,作为给体和受体的推拉电子取代基的存在和扩大共轭范围都对增大二阶光学非线性有利。     

Tailoring the Surface Chemical Reactivity of Transition‐Metal Dichalcogenide PtTe2 Crystals

PtTe₂ is a novel transition‐metal dichalcogenide hosting type‐II Dirac fermions that displays application capabilities in optoelectronics and hydrogen evolution reaction. Here it is shown, by combining surface science experiments and density functional theory, that the pristine surface of PtTe₂ is chemically inert toward the most common ambient gases (oxygen and water) and even in air. It is demonstrated that the creation of Te vacancies leads to the appearance of tellurium‐oxide phases upon exposing defected PtTe₂ surfaces to oxygen or ambient atmosphere, which is detrimental for the ambient stability of uncapped PtTe₂‐based devices. On the contrary, in PtTe₂ surfaces modified by the joint presence of Te vacancies and substitutional carbon atoms, the stable adsorption of hydroxyl groups is observed, an essential step for water splitting and the water–gas shift reaction. These results thus pave the way toward the exploitation of this class of Dirac materials in catalysis.     

分析大口径凹形结构散射的一种混合射线方法

在大口径凹形结构散射的特点及有关分析方法的基础上,提出了一类基于复射线方法和几何绕射方法的分析处理大口径凹形结构散射的混合射线方法,即用复射线法计算反射场,以几体绕射法来计算边缘绕射场。基于所设计的便于工程上实现的计算流程,有关分析及相关结果说明了这一方法的可行性和可靠性。     

Development of Multilayer Optics for the EUV, Soft X-ray and X-ray Regions in Tongji University

1 Introduction The EUV and X- ray optics has been regarded as one of the important fields in modern optics, having many promising applications in next generation lithography system, astronomical telescope, spectroscopy, plasma diagnostics and X- ray laser. However, in the EUV and X- ray regions, the nature of the complex optical con- stants of all materials makes the realization of the ideal optical elements like ones working in visible region im-possible. The development of EUV and X- ra…     

Spatial Carrier Bi-frequency Fourier Transform Profilometry for the 3-D Shape Measurement of Object with Discontinuous Height Steps

The combination of shearing interferometer, Fourier-transform profilometry, phase unwrapping by lookup table method has resulted in a new and more powerful method of measuring surface profile. The technique permits the three-dimensional shape measurement of objects that have discontinuous height steps. Experimental results have demonstrated the validity of the principle.