溅射气压对TbFeCo磁光薄膜的光学常数的影响

利用直流磁控溅射制备了TbFeCo/Si薄膜，采用可变入射角全自动椭圆偏振光谱仪，测量了用磁控溅射法制备的TbFeCo/Si薄膜的光学常数，测量能量范围为1．5～4．5eV。分析了不同氩气压强对磁控溅射制备的TbFeCo/Si磁光薄膜的光学常数的影响。实验结果表明，在低能区域，样品的所有光学常数均随压强增加而增加，受制备工艺影响较大。但在高能区域，光学常数随压强的变化相对说来不再明显．     

磁光薄膜在椭偏测量中的应用

由费尔德常数大的石榴石磁光薄膜制成的磁光调制器具有体积小，驱动功率低等优点，将它应用于椭偏测量中，可以降低对激光器输出光强稳定性的要求，测量准确度也会得到较大的提高。     

SmDyFeCo磁光薄膜的制备和性能研究

本文采用射频磁控溅射方法制备了ＳｍＤｙＦｅＣｏ非晶磁光薄膜。研究了氩气压、溅射功率对ＳｍＤｙＦｅＣｏ薄膜性能的影响。实验表明，反射率随氩气压升高而降低。矫顽力随氩气压升高而逐渐增大，达到一定值时克尔回线反向，随后矫顽力又逐渐减小。高气压下的矫顽力温度特性较低气压下的矫顽力温度特性要好，但氩气压进一步升高，磁光克尔回线矩形度变差。本征磁光克尔角随氩气压升高而增大，到达最大值后又逐渐减小。反射率随溅射     

直流磁控溅射中Ar气压强对TbFeCo磁光薄膜均匀性的影响

本文研究了磁光盘生产中 Ar气压强对直流磁控溅射 Tb Fe Co磁光薄膜均匀性的影响 ,通过调整溅射气压来提高薄膜的厚度均匀性和成分均匀性。在靶 -基片距离为 6 0 0 m m,溅射功率为 6 0 0 W,溅射气压为 0 .6～0 .8Pa的条件下 ,获得了均匀性良好的磁光薄膜 ,并将此工艺参数用于磁光盘的生产     

Tb-Fe-Co磁光薄膜溅射条件对Kerr转角的影响

在实际磁光盘生产线上大都使用合金溅射靶溅射记录介质膜,而尚示有直接使用合金靶研究这些关系的报道。我们首先研究了用于磁光油射的系列合金靶,并完善了靶材制造工艺参数,且在此基础上进行了成分以及溅射参数对各种磁光性能影响的研究。首先确定了各种溅射和N2－Ar气流量下Al、Si以及Tb-Fe-Co(Mo）的溅射速率,在此基础上通过改变溅射功率和调整气汉量改变SiN的成分和厚度,在各种功率和气流量下溅射了Mo膜,并测定了这些磁光膜的Kerr线以获得Kerr转角等性能,从而探讨了溅射工艺条件对Kerr的影响。     

新型牙用碳纳米管种植体材料的制备

采用放电等离子烧结(SPS)法,在烧结温度为1 200℃,压力从20 MPa到60 MPa的条件下,以聚碳硅烷(PCS)为结合剂,制备出一种新型的大块多壁碳纳米管(MWCNTs).用SEM和TEM进行观察.结果表明,烧结后材料的纳米级结构仍被保留;XRD分析显示,纳米管通过聚碳硅烷热解的SiC纳米晶相互粘结;随着PCS含量的增加及烧结压力的升高,材料的密度和维氏硬度增加,比表面积减少.动物试验表明,CNTs/PCS材料的炎性反应随着PCS含量增加有轻度增加;通过此种方法制备的碳纳米管,物理性能接近于骨组织,且具有较好的生物相容性,是适宜的候选牙用种植体材料.     

Ce掺杂对TbFeCo材料磁光性能影响的研究

采用射频磁控溅射方法制备了TbFeCo非晶磁光薄膜，并在TbFeCo中引入轻稀土元素Ce，测试了薄膜的磁光性能。研究了薄膜成分对其磁光性能的影响。结果表明；在TbFeCo薄膜中掺入少量Ce时，薄膜的磁光克尔角及矫顽力都有所提高，矩形度也增加了。但随Ce掺入量的增加，薄膜的磁光性能发生恶化，较好的掺杂在10.31?左右。     

非传统粉末冶金制备生物医用多孔钛及其性能

以生物医用球形雾化钛粉为原料,碳酸氢铵做造孔剂,采用放电等离子烧结(SPS)技术制备了生物医用多孔钛块体材料。采用XRD、SEM分别对所制备的多孔钛的物相组成、微观形貌进行分析,并研究了多孔钛的力学性能及成骨细胞在其表面的粘附生长情况。结果表明:通过调节造孔剂添加量、控制烧结工艺可制备孔隙率为50.3%～70.5%、孔径为100～300μm的多孔钛,其力学性能(抗压强度为24.40～68.96MPa、弹性模量为1.010～1.287GPa)与人体松质骨相匹配。与SD大鼠成骨细胞的联合培养结果表明,该材料的粗糙表面和多孔结构可粘附生长成骨细胞,具有良好的生物相容性。     

TbFeCo磁光薄膜飞秒激光感应超快磁化动力学研究

利用时间分辨磁光克尔光谱技术,研究TbFeCo磁光薄膜飞秒激光感应超快磁化动力学过程。观测到亚皮秒的超快退磁过程,符合"三温度"模型中由电子-自旋散射引起的超快退磁机制。磁化动力学的激发功率流密度依赖关系结果表明,随着激发功率流密度的增大,超快退磁程度增加和磁化恢复时间延长,符合"三温度"模型的解释。在衬底厚度不同的TbFeCo样品对比实验中发现,同功率流密度激发下衬底较薄的样品退磁程度更高,磁化恢复速率更快。     

Structural and optical properties of La-doped ZnO films prepared by magnetron sputtering

La-doped ZnO films were prepared by RF magnetron sputtering using different composition powder compacted targets (0, 1, 2, 3 and 5 at.%). All films show a preferred c-axis growth orientation. Furthermore, the (002) diffraction peak shifts to a small angle and the full-width at half-maximum augments with increasing La concentration up to 2 at.%, which indicate that a small quantity of La atoms are incorporated into the ZnO lattice. The average transmittance in the visible range is over 80%, and a blue shift of the absorption edge is observed. With increasing La concentration, the band gap of ZnO films evaluated by the linear fitting linearly increases from 3.270 to 3.326 eV. In the photoluminescence spectra, a strong violet emission peak and a weak green emission band can be observed. The former is due to the electron transition between the defect energy levels, associated with the interfacial traps existing at the ZnO grain boundaries, and valence band. The latter could be ascribed to crystal defects related to oxygen vacancies.     

Structural and optical properties of yttrium trioxide thin films prepared by RF magnetron sputtering

Yttrium trioxide (Y₂O₃) thin films have been deposited on silicon (111) at different RF powers and the sputtering pressures by RF magnetron sputtering. The influences of the RF power and the sputtering pressures on the structural and optical properties of Y₂O₃ thin films were investigated by X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), atomic force microscope (AFM) and spectroscopic ellipsometer (SE). The results show that chemical composition of as-deposited Y₂O₃ film is apparently close to the stoichiometric ratio and it is crystallized but crystallinity is poor. The monoclinic and cubic fluorite-like structure can coexist in as-deposited Y₂O₃ film. A four-layer-structured optical model consisting of silicon substrate, silicon dioxide (SiO₂) interlayer, Y₂O₃ layer and a surface roughness (SR) layer is built for interpreting preferably the results measured by spectroscopic ellipsometry. With the increase of RF power or decrease of sputtering pressure, the refractive index and optical bandgap of sputtered Y₂O₃ film is increased and the extinction coefficients is decreased.     

反应射频磁控溅射法制备HfTaO薄膜的热稳定性和光学性能

采用反应射频磁控溅射技术制备HfTaO薄膜,利用X射线衍射(XRD)分析了薄膜的微结构,通过紫外-可见光分光光度计测量了薄膜的透过谱,计算了薄膜的折射率和禁带宽度,利用原子力显微镜观察了薄膜的表面形貌。结果表明,随着Ta掺入量(10%,26%,50%)的增加,HfTaO薄膜的结晶化温度分别为800、900、950℃,Ta掺入量继续增加到72%,经过950℃退火处理的HfTaO薄膜仍然保持非晶态,具有优良的热稳定性。AFM形貌分析显示非晶HfTaO薄膜表面非常平整。在550nm处薄膜折射率n随着Ta掺入量的增大而增大,n的变化区间为1.90～2.15。同时HfTaO薄膜的光学带隙Eg随着Ta掺入量的增大而逐渐减小,Eg的变化区间为4.15～5.29eV。     

Structural and optical properties of yttrium trioxide thin films prepared by RF magnetron sputtering

Yttrium trioxide (Y₂O₃) thin films have been deposited on silicon (111) at different RF powers and the sputtering pressures by RF magnetron sputtering. The influences of the RF power and the sputtering pressures on the structural and optical properties of Y₂O₃ thin films were investigated by X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), atomic force microscope (AFM) and spectroscopic ellipsometer (SE). The results show that chemical composition of as-deposited Y₂O₃ film is apparently close to the stoichiometric ratio and it is crystallized but crystallinity is poor. The monoclinic and cubic fluorite-like structure can coexist in as-deposited Y₂O₃ film. A four-layer-structured optical model consisting of silicon substrate, silicon dioxide (SiO₂) interlayer, Y₂O₃ layer and a surface roughness (SR) layer is built for interpreting preferably the results measured by spectroscopic ellipsometry. With the increase of RF power or decrease of sputtering pressure, the refractive index and optical bandgap of sputtered Y₂O₃ film is increased and the extinction coefficients is decreased.     

温度对磁控溅射氮化钛薄膜光学性能的影响

本文采用能量过滤磁控溅射技术(Energy Filter Direct Magnetron Sputtering,EFDMS),通过改变沉积温度在玻璃衬底上制备了一系列TiN薄膜.利用XRD进行了物相鉴定,使用分光光度计、椭圆偏振光谱仪和四探针电阻仪测试了TiN薄膜的光学性能.结果表明:制备的TiN薄膜为多晶态立方结构TiN,且随着衬底温度的升高,薄膜结晶性提高,在近红外区的反射率显著上升,可见光区的透光率有所下降,同时,薄膜的禁带宽度变宽,折射率减小,消光系数升高.     

Electrical and optical properties of MoSe2 films prepared by r.f. magnetron sputtering

The electrical resistivity of MoSe₂ films prepared by r.f. magnetron sputtering was measured between 300 and 10 K. The main sputtering parameter governing the physical properties of the films was found to be the substrate temperature T_sub. The room temperature resistivity of the as-sputtered films increased from $\text{1.7 × 10}{}^{-1}\text{Ω}\text{cm}$(T_sub = -70 °C) to $\text{1.4 × 10}{}^1\text{Ω}\text{cm}\text{(T}{}_{\mathrm{<mtext>sub</mtext>}}\text{= 150 °}\text{C}\text{)}$. A check of the thermo-electrical response showed that the majority charge carriers are holes except for films deposited at T_sub = 150 °C which are n type. Hall effect measurements indicated very low Hall mobilities (3–5 cm² V^-1 s^-1). Thermal annealing increased the room temperature resistivities by more than one order of magnitude for the specimens sputtered at a low substrate temperature. The optical properties were weakly influenced by the process conditions. The optical gap was determined to be 1.06 eV.     

Al-Mg-B thin films prepared by magnetron sputtering

Hard, nanocomposite aluminum magnesium boride thin films were prepared on Si (100) substrates with a three target magnetron sputtering system. The films were characterized by X-ray diffraction, atomic force microscope, electron micro-probe, Fourier transform infrared spectroscopy and nanoindentation. The results show that the maximum hardness of the as-deposited films is about 30.7 GPa and these films are all X-ray amorphous with smooth surfaces. The influences of substrate temperature and boron sputtering power on the quality of the films are discussed. From the results of this work, magnetron sputtering is a promising method to deposit Al-Mg-B thin films.     

Structural properties of Eu-doped GaN films prepared by RF magnetron sputtering

Films of Eu-doped GaN (GaN:Eu) were grown on c-plane of sapphire (c-Al₂O₃), GaAs(1 0 0), Si(1 0 0) and glass substrates by RF magnetron sputtering method. The X-ray diffraction (XRD) measurement of the sputtered film was carried out. For GaN:Eu and undoped GaN, the lattice constants c and a of as-grown films were larger than those of the bulk GaN. After annealing, the lattice constants c and a of the films decreased.