PCVD直流脉冲沉积温度对TiN／TiSiN复合涂层高温氧化性能的影响

采用工业用直流脉冲等离子体增强化学气相沉积（PCVD）法在硬质合金刀具材料上制备了TiN／TiSiN复合涂层。对比研究了TiN及不同温度制备的TiN／TiSiN复合涂层高温抗氧化性能。研究表明：含有非晶阻隔抗氧化结构si3N。的TiN／TiSiN复合涂层高温氧化性能远高于TiN涂层,TiN／TiSiN复合涂层提高到800℃,仍可避免出现较大面积氧化及脱落;PCVD直流脉冲沉积制备温度对涂层高温抗氧化能力有重要影响,550℃沉积制备的致密、均匀、颗粒小的复合涂层高温氧化性能最佳,600℃次之,500％最差。     

PCVD直流脉冲频率对TiN/TiSiN复合涂层结构与性能的影响

为了探讨频率对硬质合金基体上TiN/TiSiN复合涂层组织结构及性能的影响,选择了几个不同频率来制备TiN/TiSiN复合涂层。研究结果表明:不同频率制备TiN/TiSiN复合涂层的表面形貌都呈圆盘状颗粒,频率在30kHz-70kHz变化时,复合涂层颗粒尺寸随频率的增加而增大,均匀性随频率的增加而变差;复合涂层频率在30kHz-70kHz变化时,TiN始终在(200)方向上择优取向;硬质合金基体上,TiN/TiSiN复合涂层比单一TiN涂层的硬度提高更大,从1973 HV0.05增加到3417 HV0.05;30kHz时TiN/TiSiN复合涂层的硬度、涂层结合力和耐磨性能明显优于其他两种TiN/TiSiN复合涂层。故在硬质合金基体上,30kHz制备的TiN/TiSiN复合涂层工艺最佳。     

电弧离子镀制备TiN/TiSiN多层涂层及其性能研究

为提高单一TiN涂层的性能，采用AS600DMTXBE型阳极层离子源辅助电弧离子镀系统制备TiN层和TiSiN层厚度比分别为1∶2、2∶2、3∶1的TiN/TiSiN多层涂层。研究不同厚度比的TiN/TiSiN多层涂层的形貌、结构以及性能，并与TiN涂层性能进行比较。结果表明：TiN/TiSiN多层涂层为TiN面心立方结构，其中厚度比为2∶2的TiN/TiSiN多层涂层的TiN(111)衍射峰较强；厚度比为1∶2的TiN/TiSiN多层涂层摩擦因数最低，表明掺入Si的含量越大，涂层减摩性能越好；TiN/TiSiN多层涂层的减摩作用、硬度和结合强度都优于TiN涂层，且厚度比为2∶2的TiN/TiSiN多层涂层的硬度和结合强度均最大；厚度比为2∶2的TiN/TiSiN多层涂层的耐腐蚀性最高，表明Si元素的掺入能够提升涂层的耐腐蚀性能。     

等离子体浸没离子注入与沉积TiN/Ti复合涂层高温微动磨损特性研究

采用等离子体浸没离子注入与沉积技术（PIII＆D）,在T225NG钛合金基材上制备了TiN/Ti复合涂层.对沉积涂层的组织和化学成分作了XPS和AES分析,用扫描电镜SEM、能谱仪EDS和激光共焦扫描显微镜（LCSM）对该涂层大气氛围中室温（25 ℃）,200 ℃和400 ℃的微动磨损特性与基材进行了对比研究.结果表明：复合涂层中的组织为TiN和TiO2;在部分滑移区和混合区,PIII＆D TiN/Ti复合涂层摩擦因数随温度升高而降低,在滑移区,涂层摩擦因数波动较大,温度对基材摩擦因数影响不明显.在部分滑移区磨损轻微,在混合区和滑移区,涂层磨损机制以剥层和氧化磨损为主,局部存在磨粒磨损.     

不同温度下沉积TiN/TiCN/Al_2O_3/TiN复合涂层的物相结构和性能

采用高温化学气相沉积技术,于1 000～1 100℃在WC-6%Co硬质合金基体表面制备了TiN/TiCN/Al2O3/TiN复合陶瓷涂层,研究了复合涂层的物相、表面和横截面形貌、显微硬度、界面结合强度和耐磨损性能。结果表明:沉积温度为1 000℃时,复合涂层中Al2O3层为κ相和α相共存;当沉积温度升至1 050℃和1 100℃时,Al2O3层为单一的α相;1 050℃下沉积复合涂层的表面平整、结构致密,1 000℃沉积复合涂层中的TiCN层存在少量孔洞,1 100℃下沉积复合涂层中TiCN层的柱状晶沿某一方向生长比较明显,较高的沉积温度加速了钛元素向Al2O3层的外扩散;1 050℃下沉积复合涂层的显微硬度最大,为1 828HV,该涂层的耐磨损性能最佳,其与基体间的结合强度最高,临界载荷为135.2N。     

反应等离子喷涂TiN/AlN涂层的性能研究

TiN涂层可以通过传统的物理或者化学气相沉积（PVD及CVD）工艺制备,但其缺点是沉积速率低,涂层厚度过薄;这些都严重地限制了TiN涂层材料在磨、蚀服役条件下的应用.本文利用反应等离子喷涂的方法制备了TiN/AlN涂层并研究分析了涂层的组织及摩擦磨损性能.结果表明：TiN/AlN涂层韧性比TiN涂层有所提高;TiN/AlN涂层不仅有较低的摩擦系数,且在高载下的磨损性能比TiN涂层有较大的提高.     

离子镀沉积TiSiCN单层和TiSiCN/TiSiN多层涂层的微观形貌及摩擦学行为

采用多弧离子镀技术在钛合金表面制备了TiSiCN单层涂层和TiSiCN/TiSiN多层涂层,对比研究了两种涂层的微观形貌、硬度、结合性能和摩擦磨损性能。结果表明:两种涂层的组织结构均致密均匀;与TiSiCN单层涂层相比,TiSiCN/TiSiN多层涂层的硬度更高;TiSiCN/TiSiN多层涂层与基体的结合强度小于TiSiCN单层涂层的;TiSiCN/TiSiN多层涂层在大气中和人工海水中的摩擦因数分别为0.32和0.30,TiSiCN单层涂层在大气中和人工海水中的摩擦因数和磨损率均低于TiSiCN/TiSiN多层涂层的,TiSiCN单层涂层的耐磨性能更优。     

TiSiN/AlCrN纳米多层涂层高温热稳定性及摩擦学特性研究

采用电弧离子镀技术于硬质合金基体上沉积TiSiN/AlCrN纳米多层涂层,利用扫描电子显微镜(Scanning electron microscope,SEM)、透射电子显微镜(Transmission electron microscope,TEM)、X射线衍射仪(X-ray diffraction,XRD)、能谱仪(Energy dispersive spectrometer,EDS)、纳米硬度计、划痕仪以及摩擦磨损试验机对TiSiN/AlCrN涂层的结构、高温热稳定性能和高温摩擦磨损性能进行研究。结果表明,TiSiN/AlCrN涂层呈现出纳米多层结构,由c-Cr(Al)N与c-Ti(Si)N相构成,涂层硬度为49.7 GPa±0.83 GPa,结合力达到83 N。经800℃和950℃真空退火后涂层微观结构变得更加致密,缺陷密度下降,而涂层硬度和结合力没有明显变化,TiSiN/AlCrN纳米多层涂层经950℃真空退火处理后未发生相变。摩擦磨损测试结果表明,随着温度由室温增加至400℃,涂层摩擦因数急剧升高,继续增加温度至600~800℃,涂层摩擦因数降低,然而涂层磨损率随着测试温度的升高先降低后增加。在室温摩擦磨损测试中TiSiN/AlCrN涂层磨损机制主要以磨粒磨损、塑性磨损为主,400℃时涂层处于二体摩擦转三体摩擦的过渡阶段,主要磨损机制为磨粒磨损和粘着磨损,600~800℃下涂层磨损机制主要为粘着磨损以及氧化磨损。     

优化TiN/MT-TiCN/Al2O3/TiN多层涂层摩擦磨损性能的研究

通过研究微喷砂处理和使用TiOCN、ZrCN替代TiN顶层对TiN/MT-TiCN/Al2O3/TiN多层涂层摩擦磨损性能的影响,进一步提高TiN/MT-TiCN/Al2O3/TiN涂层刀具的性能.采用化学气相沉积(CVD)在硬质合金基体上沉积TiN/MT-TiCN/Al2O3/TiN、TiN/MT-TiCN/Al2O3/TiOCN和TiN/MT-TiCN/Al2 O3/ZrCN多层涂层,并进行微喷砂处理.采用扫描电子显微镜(SEM)表征涂层的组织结构,采用显微硬度计、划痕测试仪和往复式多功能摩擦磨损实验机(UMT-3)分别对涂层的硬度、结合强度和摩擦磨损性能进行测试.结果 表明:微喷砂处理后,TiN/MT-TiCN/Al2O3/TiN多层涂层的顶层TiN被完全去除,摩擦系数增大,且涂层发生剥落、疲劳磨损严重,耐磨性下降.经微喷砂处理的TiN/MT-TiCN/Al2 O3/TiOCN涂层硬度最高,磨粒磨损程度最轻,且无明显剥落,耐磨性最好.经微喷砂处理的TiN/MT-TiCN/ Al2O3/ZrCN涂层摩擦系数最小,但硬度低,磨粒磨损严重,且涂层存在明显剥落,耐磨性较差.     

高结合力工模具TiN涂层的制备

本文分析了电弧离子镀TiN涂层各工艺参数的相互关系,提出了以镀膜温度为主控参数的工艺设计思路;探讨了TiN涂层膜/基结合强度与涂层组织结构的关系和制备高结合力涂层的技术方法。     

Wear behavior and cutting performance of nanostructured hard coatings on cemented carbide cutting tools in hard milling

The influence of nanolayer AlTiN/TiN and multilayer nanocomposite TiAlSiN/TiSiN/TiAlN hard coatings on the wear behavior and cutting performance of carbide cutting tools was investigated in face milling of hardened AISI O2 cold work tool steel (∼58 HRC) at dry conditions. Characterization of the coatings was performed using nanoindentation, scratch test, reciprocating multi-pass wear test. The chips forming during cutting process were also analyzed. Results showed that abrasive and oxidation wear are dominant tool failures. The nanolayer AlTiN/TiN coating gives the best adhesion to the substrate, the best wear resistance in machining and thus provides the longest lifetime with carbide inserts.     

钛合金铣削加工的PVD涂层适应性研究

利用电弧法沉积制备Al Cr N、Al Cr Si N、Al Cr N/Ti Al N、Al Cr N/Ti Si N四种用于钛合金切削加工涂层,研究了涂层的基本特性及切削使用效果。结果表明,Al Cr N涂层呈柱状生长,通过添加Si等元素或采用多层交替沉积有利于形成细化晶粒组织,提升涂层纳米硬度。切削试验表明,在低速铣削钛合金TC4时,Al Cr N/Ti Al N复合涂层表现最好。在较高速铣削时,四种涂层的刀具表现性能接近。     

Investigation of the performance of carbide cutting tools with hard coatings in hard milling based on the response surface methodology

Machining of hard materials has become a great challenge for several decades. One of the problems in this machining process is early tool wear, and this affects the machinability of hard materials. In order to increase machinability, cutting tools are widely coated with nanostructured physical vapor deposition hard coatings. The main characteristics of such advanced hard coatings are high microhardness and toughness as well as good adhesion to the substrate. In this paper, the influence of hard coatings (nanolayer AlTiN/TiN, multilayer nanocomposite TiAlSiN/TiSiN/TiAlN, and commercially available TiN/TiAlN) and cutting parameters (cutting speed, feed rate, and depth of cut) on cutting forces and surface roughness were investigated during face milling of AISI O2 cold work tool steel (～61 HRC). The experiments were conducted based on 3¹³ factorial design by response surface methodology, and response surface equations of cutting forces and surface roughness were obtained. In addition, the cutting forces obtained with the coated and uncoated tools were compared. The results showed that the interaction of coating type and depth of cut affects surface roughness. The hard coating type has no significant effect on cutting forces, while the cutting force F _z is approximately two times higher in the case of uncoated tool.     

Al/TiN软硬交替多层膜的制备及摩擦磨损性能研究

软硬交替的多层膜体系具有超硬、强韧、耐磨、自润滑的优势,能大大提高金属切削刀具在现代加工过程中的耐用度和适应性。设计Al/TiN软硬交替纳米多层膜体系,并采用直流磁控溅射和阴极弧磁过滤等离子体沉积相结合的技术,室温下在单晶硅Si（100）衬底上制备一系列不同TiN层厚度纳米多层膜,研究其结构、形貌、力学及摩擦磨损性能。结果表明：该涂层具有良好的多层结构,多层膜中Al呈非晶态或纳米晶态,TiN结晶质量随其厚度增加得到提高;Al/TiN多层膜硬度均高于混合法则计算的硬度值,出现了硬度增强效应;该多层膜体系虽具有较高的摩擦因数,但表现出较好的韧性。     

Formation of wear-resistant nanostructured TiN/Cu coatings

Results of studying the structural and physicomechanical properties of TiN/Cu coatings deposited from multicomponent separated vacuum-arc plasma are presented. Specific features of the formation of the nanostructured TiN-based coatings, which are alloyed with an element that does not form chemical compounds with titanium and nitrogen under the selected conditions of deposition, are considered. It is shown that alloying of the coating with this element leads to refinement of its structure. Regularities of variations in the microhardness and the tribological characteristics of TiN/Cu coatings of different elemental compositions are investigated. It has been found that the coatings that contain 2–4% of Cu have the highest microhardness (39–40 GPa) and the lowest coefficient of friction (0.2–0.4). Main factors responsible for the high wear resistance of the coatings are determined.     

不同温度下多层结构TiCN/TiC/TiN镀层的摩擦学行为

用化学气相沉积法在高速钢基体上制备了多层结构的TiCN/TiC/TiN镀层,分别用压入法和球坑法测定了镀层的结合强度和厚度;用显微硬度计测定了镀层的努氏硬度;在不同温度条件下,用球盘磨损试验机研究了镀层摩擦因数的变化规律,分析了温度对镀层摩擦磨损性能的影响。结果表明:该镀层的结合强度优异,厚度约为5μm,硬度约为2 352HK;在高温(550℃)下,镀层的摩擦因数一开始就很高,随后继续上升直到最大值,接着开始逐渐下降;室温下,镀层的摩擦因数一开始很低,随后较快地上升到一定值,之后上升速度减缓,最后达到稳定阶段;室温下,镀层磨痕中间局部有块状剥离,边缘有大量磨屑;高温下镀层出现塑性变形。     

TiVN涂层的耐磨性与切削性能的关联研究

通过多弧离子镀沉积技术制备了TiN和TiVN涂层,对比了两种涂层在不同工况下的摩擦磨损性能和切削性能,并指出影响刀具涂层服役性能的主要因素。结果表明,V元素掺杂有效提高了TiN涂层的硬度和结合力、减小了TiN涂层的摩擦因数和低温下的磨损率,但V容易氧化的特性导致500 ℃及以上温度TiVN涂层产生较高的磨损率。切削测试表明,在麻花钻的主切削刃和横刃区域两种涂层发生明显的剥落,而在后刀面涂层未发生明显剥落,TiVN涂层较高的膜基结合强度和耐磨性能使得它对刀具的防护效果更佳;刀具涂层的服役性能与其耐磨性能和膜基结合强度有关,刀具的主切削刃和横刃区域对涂层的耐磨性能和膜基结合强度有着苛刻的要求,且切削刃尖端温度较高,对涂层的高温耐磨性能和膜基结合强度要求也高。     

Low Friction CrNMPP/TiNDCMS Multilayer Coatings

Transition metal nitrides like CrN and TiN are widely used in automotive applications due to their high hardness and wear resistance. Recently, we showed that a multilayer architecture of CrN and TiN, deposited using the hybrid—high power impulse magnetron sputtering (HIPIMS) and direct current magnetron sputtering (DCMS)—HIPIMS/DCMS deposition technique, results in coatings which indicate not only increased mechanical and tribological properties but also friction coefficients in the range of diamond-like-carbon coatings when tested at RT and ambient air conditions. The modulated pulsed power (MPP) deposition technique was used to replace the HIPIMS powered cathode within this study to allow for a higher deposition rate, which is based on the complex MPP pulse configuration. Our results on MPP/DCMS deposited CrN/TiN multilayer coatings indicate excellent mechanical and tribological properties, comparable to those obtained for HIPIMS/DCMS. Hardness values are around 25 GPa with wear rates in the range of 2 × 10⁻¹⁶ Nm/m³ and a coefficient of friction around 0.05 when preparing a superlattice structure. The low friction values can directly be correlated to the relative humidity in the ambient air during dry sliding testing. A minimum relative humidity of 13% is necessary to guarantee such low friction values, as confirmed by repeated tests, which are even obtained after vacuum annealing to 700 °C. Our results demonstrate that the co-sputtering of high metal ion sputtering techniques and conventional DC sputtering opens a new field of applications for CrN/TiN coatings as high wear resistance and low friction coatings.