共查询到20条相似文献,搜索用时 62 毫秒
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采用抗辐射0.8μm SOI CMOS加固技术,研制了抗辐射SOI CMOS器件和电路。利用Co60γ射线源对器件和电路的总剂量辐射效应进行了研究。对比抗辐射加固工艺前后器件的Id-Vg曲线以及前栅、背栅阈值随辐射总剂量的变化关系,得到1 Mrad(Si)总剂量辐射下器件前栅阈值电压漂移小于0.15 V。最后对加固和非加固的电路静态电流、动态电流、功能随辐射总剂量的变化情况进行了研究,结果表明抗辐射加固工艺制造的电路抗总剂量辐射性能达到500 krad(Si)。 相似文献
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闫旭亮孟丽娅袁祥辉黄友恕吕果林 《半导体技术》2014,(11):861-866
X射线直接成像的CMOS图像传感器由于工作在X射线辐射下,其内部器件会因为辐射效应引起性能恶化,因此需要对器件进行抗辐射加固并研究辐射对器件参数的影响。辐射导致的氧化物陷阱电荷及界面陷阱电荷受到栅氧厚度、偏置电压大小、辐射总剂量以及剂量率等多种因素影响。设计了n型场效应晶体管辐射加固结构版图,用0.5μm CMOS工艺流片,并进行了30 kGy(Si)的总剂量辐照效应实验。实验结果显示,所设计的n型场效应晶体管在辐射之后漏电流有所增加、跨导减小、阈值电压向负向漂移;辐射加固晶体管在漏电流性能上较未加固晶体管更好,在跨导改变和阈值电压漂移上未能表现出其更优的性能。 相似文献
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X射线直接成像的CMOS图像传感器由于工作在X射线辐射下,其内部器件会因为辐射效应引起性能恶化,因此需要对器件进行抗辐射加固并研究辐射对器件参数的影响。辐射导致的氧化物陷阱电荷及界面陷阱电荷受到栅氧厚度、偏置电压大小、辐射总剂量以及剂量率等多种因素影响。设计了n型场效应晶体管辐射加固结构版图,用0.5μm CMOS工艺流片,并进行了30 kGy(Si)的总剂量辐照效应实验。实验结果显示,所设计的n型场效应晶体管在辐射之后漏电流有所增加、跨导减小、阈值电压向负向漂移;辐射加固晶体管在漏电流性能上较未加固晶体管更好,在跨导改变和阈值电压漂移上未能表现出其更优的性能。 相似文献
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文章对采用了埋层二氧化硅抗总剂量加固工艺技术的SOI器件栅氧可靠性进行研究,比较了干法氧化和湿法氧化工艺的栅氧击穿电荷,干法氧化的栅氧质量劣于湿法氧化。采用更敏感的12.5nm干法氧化栅氧工艺条件,对比采用抗总剂量辐射加固工艺前后的栅氧可靠性。抗总剂量辐射加固工艺降低了栅氧的击穿电压和击穿时间。最后通过恒压法表征加固工艺的栅氧介质随时间击穿(TDDB)的可靠性,结果显示抗总剂量辐射加固工艺的12.5nm栅氧在常温5.5V工作电压下TDDB寿命远大于10年,满足SOI抗总剂量辐射加固工艺对栅氧可靠性的需求。 相似文献
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与其他半导体器件相比,CMOS集成电路具有功耗小、噪声容限大等优点,对于对重量、体积、能源消耗都有严格要求的卫星和宇宙飞船来说,CMOS集成电路是优先选择的器件种类。随着半导体器件的等比例缩小,辐射效应对器件的影响也在跟着变化。这些影响包括:栅氧化层厚度、栅长的减小、横向非均匀损伤、栅感应漏电流等方面。对于微电子器件的抗辐射加固,文章就微电子器件的应用场合、辐射环境的辐射因素和强度等,从微电子器件的制作材料、电路设计、器件结构、工艺等多方面进行加固考虑,针对各种应用环境提出加固方案。 相似文献
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《电子与封装》2017,(11):44-48
基于抗辐射0.6μm CMOS工艺,对5 V/20 V&LV/HV NMOS器件进行了总剂量加固结构设计,并采用叠栅氧工艺成功制备了抗总剂量能力≥500 krad(Si)高低压兼容的NMOS器件。重点研究了不同的栅氧化工艺对NMOS器件总剂量辐射电离效应的影响作用。研究发现,在抗总剂量电离能力方面,湿法氧化工艺优于干法氧化工艺:即当栅氧厚度小于12.5 nm时,LVNMOS器件因总剂量电离效应引起的阈值电压漂移ΔV_(tn)受栅氧化方式的影响甚小;当栅氧厚度为26 nm时,HVNMOS器件因总剂量电离效应引起的阈值电压漂移ΔVtn受栅氧化方式及工艺温度的影响显著。在500 krad(Si)条件下,采用850℃湿氧+900℃干氧化方式的HVNMOS器件阈值电压漂移ΔV_(tn)比采用800℃湿氧氧化方式的高2倍左右。 相似文献
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Michael Reilly 《半导体技术》2004,29(12)
DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system. 相似文献
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Thomas M.Trexler 《半导体技术》2004,29(5)
From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test. 相似文献
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The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation. 相似文献
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The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high. 相似文献
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Today, micro-system technology and the development of new MEMS (Micro-Electro-Mechanical Systems) are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible. 相似文献
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Qi-jiang Ran Pei-de Han Yu-jun Quan Li-peng Gao Fan-ping Zeng Chun-hua Zhao 《光电子快报》2008,4(4):239-242
This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel's. 相似文献
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Teleportation of an arbitrary unknown N-qubit entangled state under the controlling of M controllers
A new quantum protocol to teleport an arbitrary unknown N-qubit entangled state from a sender to a fixed receiver under M controllers(M < N) is proposed. The quantum resources required are M non-maximally entangled Greenberger-Home-Zeilinger (GHZ) state and N-M non-maximally entangled Einstein-Podolsky-Rosen (EPR) pairs. The sender performs N generalized Bell-state measurements on the 2N particles. Controllers take M single-particle measurement along x-axis, and the receiver needs to introduce one auxiliary two-level particle to extract quantum information probabilistically with the fidelity unit if controllers cooperate with it. 相似文献
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A continuous-wave (CW) 457 nm blue laser operating at the power of 4.2 W is demonstrated by using a fiber coupled laser diode module pumped Nd: YVO4 and using LBO as the intra-cavity SHG crystal With the optimization of laser cavity and crystal parameters, the laser operates at a very high efficiency. When the pumping power is about 31 W, the output at 457nm reaches 4.2 W, and the optical to optical conversion efficiency is about 13.5% accordingly. The stability of the out putpower is better than 1.2% for 8 h continuously working. 相似文献
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It is well known that adding more antennas at the transmitter or at the receiver may offer larger channel capacity in the multiple-input multiple-output(MIMO) communication systems. In this letter, a simple proof is presented for the fact that the channel capacity increases with an increase in the number of receiving antennas. The proof is based on the famous capacity formula of Foschini and Gans with matrix theory. 相似文献
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《中国通信》2014,(7)
正Wireless Body-area Networks The last decade has witnessed the convergence of three giant worlds:electronics,computer science and telecommunications.The next decade should follow this convergence in most of our activities with the generalization of sensor networks.In particular with the progress in medicine,people live longer and the aging of population will push the development of wireless personal networks 相似文献