电弧离子镀(Ti,Cr)N涂层的制备与性能研究

采用电弧离子镀膜机,通过调节Ti靶和Cr靶的阴极弧电流,在W6Mo5Cr4V2高速钢基体上制备了（Ti1-x Crx）N涂层,并对其组织结构和性能进行了研究。结果表明,该涂层具有较高的显微硬度,而且随Cr含量的增加,硬度值先增大后减小;涂层具有较高的膜基结合力;Cr的引入不仅有利于提高膜基结合力,对（Ti,Cr）N涂层的抗氧化性也有好处,在700℃时具有很好的抗氧化性。     

铝合金上电弧离子镀(Ti,Al)N膜的腐蚀特性

研究铝合金上电弧离子镀(Ti,Al)N膜层的腐蚀性能。通过对3种N2气分压下沉积膜层的阳极极化曲线、电化学阻抗谱、盐雾腐蚀失重曲线以及表面形貌的分析表明:沉积过程氮分压较低时,膜层中含有富金属相,耐腐蚀性能较低;增加氮分压使膜层中金属与非金属呈理想配比时,膜层的耐腐蚀性明显增加;膜层在缺陷处产生点蚀、电偶腐蚀,并通过形成裂纹、碎屑脱落使质量显著减小。     

电弧离子镀梯度(Ti,Al)N 薄膜的结构与抗氧化性能

采用电弧离子镀(AIP)技术在航空发动机压气机用1Cr11Ni2W2MoV不锈钢上沉积 (Ti,Al) N 梯度薄膜,并研究其微观结构和高温抗氧化性能.结果表明,薄膜均匀致密,与基体结合良好;薄膜为B1型 (NaCl)单相结构,具有 (220) 择优取向;薄膜是内层富 TiN、外层富(Ti,Al) N的梯度薄膜;梯度薄膜在700℃和800℃氧化后,表层形成富 Al2O3 的保护膜,在 700℃较长时间内和 800℃短时间内对不锈钢基体具有良好的保护作用.     

SiC颗粒增强铝基复合材料基材上制备(Ti,Al)N涂层的研究

利用电弧离子镀技术在SiCp／2024Al基体上制备(Ti，Al)N涂层．研究了偏压对涂层的相组成、晶格常数和成分的影响及不同过渡层对涂层与基体结合性能的影响．结果表明，在较小偏压下，(Ti，Al)N涂层呈(111)择优取向；偏压在-150V时，涂层无择优取向；但随偏压继续升高，出现(200)和(220)择优取向．在添加Ti过渡层时，涂层与基体形成致密均匀的良好结合．同时通过设计梯度涂层，获得了厚度达105um的无裂纹(Ti，Al)N涂层．     

γ-TiAl合金表面磁控溅射与电弧离子镀制备Al涂层高温氧化行为的比较(英文)

利用XRD、EDS和SEM分析研究了磁控溅射和电弧离子镀2种工艺制备的Al涂层的微观结构、形貌和抗氧化性能。磁控溅射技术制备的均匀、致密的Al层拥有更为细小的晶粒组织。在氧化实验后,磁控溅射制备的Al涂层形成了一个由表层氧化层、次表层富Al层和互扩散层的保护性结构。相比之下,电弧离子镀制备的Al涂层表现出了更差的抗氧化性。这是由于在离子镀制备的Al涂层中发现的针孔可以为氧气的侵入提供通道,从而引起涂层的内氧化并最终导致涂层的剥离。结果表明,磁控溅射制备Al涂层具备更好的抗高温氧化性能。     

(Ti,Al)N单层和TiN/(Ti,Al)N复合涂层的切削性能研究

借助EDX、SEM、强度测试和切削实验研究了采用磁控溅射在硬质合金基体上沉积的(Ti,Al)N单层和TiN/(Ti,Al)N复合涂层的切削性能。研究表明,两种涂层均与基体结合紧密;TiN/(Ti,Al)N复合涂层则表现出更好的切削性能。     

反应溅射Ti(0，N)涂层的微结构与力学性能

采用反应磁控溅射方法在Ar、N2和O2混合气氛中制备了一系列Ti(O,N)涂层,并采用EDS、XRD、SEM、AFM和微力学探针研究了氧分压对涂层的化学成分、微结构和力学性能的影响.结果表明:随混合气氛中氧分压的提高,涂层中的氧含量逐步增加,氮含量相应减少,但涂层始终保持与TiN相同的NaCl结构.少量氧的加入,可以改善涂层的结晶状态,涂层的硬度也相应升高,明显高于未含氧的TiN涂层的硬度.氧含量为8.0%(原子数分数)时,涂层硬度达到最大值26.2 GPa.进一步增加氧含量,涂层的硬度基本保持不变.     

A comparative research on physical and mechanical properties of (Ti, Al)N and (Cr, Al)N PVD coatings with high Al content

Arc ion plating (Ti_0.34, Al_0.66)N and (Cr_0.28, Al_0.72)N coatings are deposited onto cemented carbide substrates at 350 °C. The crystal structure and microstructure of the deposited coatings are characterized by means of X-ray diffraction (XRD), electron probe microanalysis (EPMA), scanning electron microscopy (SEM), and transmission electron microscopy (TEM). XRD examination indicates that both (Ti_0.34, Al_0.66)N and (Cr_0.28, Al_0.72)N coatings are of fcc structure. The atomic ratios of Al against Ti (Cr) for the two coatings are approximately close to those of the alloy targets according to EPMA measurement. In accordance with SEM observation, the fractured cross-section of the (Cr_0.28, Al_0.72)N coating is composed of columnar crystallites repeatedly interrupted by a renucleation process. Based on SEM and TEM methods, the cross-sectional fracture of (Ti_0.34, Al_0.66)N coating is found to show nano-crystalline feature without appearance of the columnar structure. (Cr_0.28, Al_0.72)N coating exhibits better wear resistance, approximately equal adhesion with the substrate, but lower nano-hardness compared with (Ti_0.55, Al_0.45)N coating.     

Effect of deposition processes on residual stress profiles along the thickness in (Ti,Al)N films

The effect of deposition processes on the distribution of residual stresses in the thickness of the (Ti,Al)N films prepared by arc ion plating (AIP) was investigated in the present work, which indicates that the stress distribution exhibits a “bell” shape and the maximum compressive stress appears in the layer near the surface. The residual stress increases with the thickness of a film and the substrate bias voltage, respectively. The stress distribution can be altered, and the adhesion of the film/substrate can be improved by optimizing the deposition parameters. Finally, a film with a thickness of 7.57 μm was successfully directly deposited on the substrate through optimizing the bias voltage.     

Fatigue behavior of (graded) (Ti, Al)N-coated 1Cr11Ni2W2MoV stainless steel at high temperature

The high-cycle fatigue properties of graded (Ti, Al)N- and Ti_0.7Al_0.3N-coated 1Cr11Ni2W2MoV at 500 °C have been investigated using a rotating bending fatigue testing machine. The results show that fatigue strength and life of 1Cr11Ni2W2MoV stainless steel were apparently increased by the presence of Ti_0.7Al_0.3N coating. The fatigue life and strength was also improved to some extent by the presence of the graded coating at higher stress levels (475 MPa-525 MPa). The fracture morphologies were analyzed by SEM. It is concluded that the presence of the coatings, which were well adhered and have high compressive stress, restricted plastic deformation of the substrate, thus improved the fatigue properties of the steel.     

脉冲偏压对（Ti，Al）N／TiN／（Ti，Al）N多层复合涂层成分和硬度的影响

采用脉冲偏压多弧离子镀技术在Hss-Al高速钢上涂镀（Ti,Al）N/TiN/（Ti,Al）N多层复合涂层。所用设备为复合八阵弧离子镀膜生长系统。简要介绍了多层复合膜的镀层工艺过程。鉴于复合涂层中的Al含量对涂层的性能特别是抗磨损性能有极重要的影响。实验中重点考察了脉冲偏压幅对Al含量的影响。同时测试了复合涂层的Vickers硬度与偏压幅值的关系。研究结果推出,随着脉冲偏压幅值的增加,涂层中Al含量先增加,然后减少,偏压幅值为-150V时,Al含量高达36.41at%,偏压幅与涂声能显微硬度的关系有相似的规律,在偏压幅值为-150V时,7层复合膜的Vickers硬度达2750MPa左右,10层复合膜的硬度约2880MPa。     

Microstructure and physical properties of PVD TiN/（Ti, Al）N multilayer coatings

Magnetron sputtered （Ti, Al） N monolayer and TiN/（Ti, Al） N multilayer coatings grown on cemented carbide substrates were studied by using energy dispersive X-ray spectroscopy （EDX）, scanning electron microscopy （SEM）, nanoindentation, Rockwell A indentation test, strength measurements and cutting tests. The results show that the （Ti, Al）N monolayer and TiN/（Ti, Al）N multilayer coatings perform good affinity to substrate, and the TiN/（Ti, Al）N multilayer coating exhibits higher hardness, higher toughness and better cutting performance compared with the （Ti, Al）N monolayer coating. Moreover, the strength measurement indicates that the physical vapour deposition （PVD） coating has no effect on the substrate strength.     

高速钢表面多弧离子镀(Ti,Al)N薄膜及性能研究

采用多弧离子镀技术在W18Cr4V表面制备出(Ti,Al)N硬质薄膜,研究了Al含量对(Ti,Al)N薄膜的形貌、硬度、膜基结合力、耐磨性、摩擦系数的影响。并利用扫描电镜、X射线衍射仪对薄膜进行了分析。结果表明Al含量在25%左右的(Ti,Al)N薄膜硬度达到2780HV0.05,耐磨性好,摩擦系数仅为0.168,且与钢基体结合良好,具有最佳的综合性能。     

Mechanical Properties and Oxidation Behavior of a Graded (Ti,Al)N Coating Deposited by Arc-Ion Plating

A graded (Ti,Al)N coating was deposited on 1Cr–11Ni–2W–2Mo–V stainless steel for aero-engine compressor blades by arc-ion plating(AIP). The microstructure and the morphology of the graded coating were investigated using electron-probe microanalysis (EPMA), X-ray diffraction and scanning-electron microscopy. The mechanical properties of the graded coating were investigated and it was found that the microhardness and the wear resistance were similar to those of the monolithic (Ti,Al)N coating, but much better than those of a homogenous TiN coating. In addition, the adhesive strength and the thermal-shock resistance of the graded (Ti,Al)N coating were much better than those of the monolithic TiN and (Ti,Al)N coatings. The oxidation tests were performed at 600 and 700°C in air for 500 hr, and corrosion tests were carried out at 600°C under the synergistic effect of water vapor and NaCl for 20 hr. Compared to pure TiN, it was found that due to the incorporation of aluminum, a protective layer rich in alumina was formed on top of the graded (Ti,Al)N coating, which greatly improved the oxidation resistance and corrosion resistance of the coating.     

空心阴极辅助多弧镀(Ti,Al)N涂层物相组成及性能

采用空心阴极离子束辅助多弧离子镀技术,通过变换靶材中Ti-Al比例(Al含量分别为30 at%、50 at%和70 at%)沉积了(Ti,Al)N涂层。利用XRD、激光共聚焦显微镜、材料表面微纳米力学测试系统等检测了涂层的质量和性能。研究了涂层的相组成、表面粗糙度、摩擦系数和硬度、以及涂层的耐高温性能等随靶材成分比例改变而变化的规律。结果表明,当靶材中Al含量为50 at%时,沉积层相组成以Ti_(1-x)Al_xN为主,涂层粗糙度和摩擦系数最小,分别为0.3188和0.6074,而硬度值最高,为34.19 GPa;加热温度低于800℃时涂层物相组成没有发生明显变化,900℃时涂层产生开裂基体被氧化;空心阴极离子束辅助沉积时能够形成"混合界面",并减轻涂层表面"大颗粒"现象。