高性能复杂形状金刚石薄膜涂层刀具的制备和切削性能研究

通过偏压辅助增强热丝化学气相沉积法,采用螺旋形热丝排布方式以及优化的预处理方法和沉积工艺,在硬质合金印刷电路板铣刀的表面沉积了均匀的金刚石薄膜,采用扫描电镜和拉曼光谱研究了金刚石薄膜的表面特征.随后,通过铣削试验研究了金刚石涂层刀具的附着强度和切削性能.试验结果表明,复杂形状金刚石薄膜涂层铣刀既具有附着力强、耐磨性好的特点,同时又具备优异的切削性能,并且其制备无需后续抛光处理就能得到平整光滑的表面,这对于推动金刚石薄膜在复杂形状刀具上的产业化应用具有重要意义.     

纳米金刚石在聚乙二醇中的摩擦学特性

用分级提纯对爆轰法得到的纳米金刚石进行超纯化处理,透射电子显微镜分析表明,超纯化纳米金刚石粒径分布均匀,平均粒径大约为10nm的球状颗粒。将这种纳米金刚石分散于聚乙二醇高分子分散体系,用四球摩擦磨损研究了分散体系的摩擦学性能,实验结果表明：纳米金刚石能有效提高聚乙二醇的抗磨性和承载能力;对其摩擦磨损表面的扫描电子显微镜分析表明,在边界润滑时,纳米金刚石减小摩擦磨损的机理为金刚石的纳米微球填充于磨损表面起滚球轴承效应形成一层超硬合金薄膜,由于这层膜的存在,避免了摩擦副的直接接触。     

ECR结合中频磁控溅射制备掺Cu类金刚石膜工艺及性能研究

为改善DLC膜的内应力及导热问题,采用ECR微波等离子体化学气相沉积及中频磁控溅射的方法制备掺Cu类金刚石膜,研究溅射电流对薄膜中Cu含量、薄膜表面形貌、结构及机械性能的影响.结果表明:改变溅射电流能有效地控制类金刚石膜中金属含量,拉曼光谱显示,制备的薄膜为典型的类金刚石薄膜结构;Cu的掺入使得类金刚石膜的硬度和耐磨损性能下降,但在一定溅射电流下可得到薄膜结构及机械性能均较好的掺Cu类金刚石膜.     

采用双辉等离子表面冶金技术在金刚石厚膜表面制备钽涂层的性能

采用双辉等离子表面冶金技术在机械抛光后的金刚石厚膜表面制备钽涂层,研究了涂层的表面及截面形貌、微区成分、物相组成及结合性能。结果表明:制备得到的钽涂层连续、均匀,由钽金属层与界面处的化合物层组成,厚度约1.7μm,组织为柱状晶;金刚石厚膜与钽涂层的界面处存在厚度约为1.1μm的钽与碳元素呈梯度分布的扩散区,且生成了TaC和Ta2C两种化合物;钽原子填充了金刚石厚膜抛光产生的磨痕,其表面粗糙度由128nm降低为57nm;钽涂层的塑性以及与金刚石厚膜的结合性能良好。     

钛合金双层辉光等离子体渗钽工艺的研究

利用双层辉光等离子渗金属技术,以纯钽作为源极,氩气为工作气体,利用不等电位空心阴极效应,在钛合金表面进行渗钽试验研究。用扫描电子显微镜（SEM）观察分析了钛钽合金渗层的截面形貌。用显微硬度仪测量渗层的显微硬度。结果表明,在Ti6A14V合金基材表面成功形成钛钽合金扩散层约为10μm厚。表面显微硬度值达到530HV。工艺参数对渗钽层的厚度有较大影响,渗钽最佳工艺参数范围为工件电压550～600V,源极电压850～900V,极间距15～40mm,温度800～900℃。     

激光气体氮化对工业纯钛TA2表面硬度的影响

通过组织观察和硬度测试分析了工业纯钛TA2在激光气体氮化中,带式积分镜的应用和激光气体氮化参数对氮化后TA2表面硬度的影响。结果表明:采用带式积分镜进行激光光束变换可以有效提高工业纯钛TA2的表面硬度和激光氮化处理的效率;氮化区域内生成硬质相TiN是工业纯钛TA2表面硬度得到提高的主要原因,有利于硬质相TiN形成的激光气体氮化参数都会提高其表面的硬度。     

金刚石颗粒粒径对Ni-Co/金刚石复合镀层微观组织和耐磨性能的影响

运用埋砂复合电沉积法制备了金刚石颗粒增强Ni-Co合金复合镀层,研究了金刚石颗粒粒径对Ni-Co/金刚石复合镀层微观组织结构、致密度、显微硬度和摩擦学性能的影响。结果表明:随金刚石颗粒粒径的增大,Ni-Co/金刚石复合镀层的致密度和显微硬度均随之降低,且当颗粒粒径为6~12μm时,复合镀层致密度最高为0.9,硬度最高达950HV;随金刚石颗粒粒径的增大,复合镀层的磨损失重逐渐减小,当金刚石在粒径125~150μm范围时,磨损失重最小。     

硬质合金刀具基体沉积低表面粗糙度金刚石薄膜的工艺研究

CVD金刚石薄膜刀具的表面粗糙度是影响刀具切削性能的重要参数。为通过改进CVD沉积工艺减小金刚石薄膜表面粗糙度 ,提出了适当提高碳源浓度和合理控制沉积气压两项新的工艺方法 ,并通过切削试验研究了其对金刚石薄膜刀具耐用度及切削性能的影响     

偏压对掺钨含氢类金刚石碳膜摩擦学性能的影响

利用非平衡磁控溅射技术在单晶硅片及9Cr18基体表面制备不同偏压下的掺钨含氢类金刚石碳膜。采用Ra-man光谱分析薄膜结构,采用纳米硬度测试仪和纳米划痕仪研究薄膜的纳米硬度、弹性模量和膜基附着力,在球-盘摩擦试验机上测试薄膜在大气环境中的摩擦学性能,研究薄膜的摩擦学性能与偏压的关系。结果表明:制备的薄膜样品均具有典型的类金刚石碳膜结构;基体偏压强烈影响薄膜的力学和摩擦学性能,薄膜硬度和弹性模量在0～150 V范围内随着偏压增加而增大,薄膜的摩擦因数在偏压为100 V时最小,在此参数下的耐磨寿命也最长。     

金刚石薄膜与 WC-Co 硬质合金的附着性研究

以甲烷和氢气为气源，用热丝ＣＶＤ法，在ＷＣ－６％Ｃｏ的硬质合金基体上沉积金刚石薄膜。研究了基体表面经抛光、腐蚀、脱碳及镀中间层等不同的预处理对金刚石薄膜与基体的附着性的影响。试验结果表明：基体表面经抛光、腐蚀再经脱碳或镀ＴｉＮ中间层，可改善和提高附着性，金刚石薄膜的形核率和沉积速率有所降低；基体表面只经抛光、腐蚀预处理，金刚石薄膜的形核率和沉积速率较高，结晶性好，但附着性较差；采用分段沉积，可以提高金刚石薄膜的附着性。     

Friction and Wear Performance of Boron Doped,Undoped Microcrystalline and Fine Grained Composite Diamond Films

Chemical vapor deposition(CVD) diamond films have attracted more attentions due to their excellent mechanical properties. Whereas as-fabricated traditional diamond films in the previous studies don’t have enough adhesion or surface smoothness, which seriously impact their friction and wear performance, and thus limit their applications under extremely harsh conditions. A boron doped, undoped microcrystalline and fine grained composite diamond(BD-UM-FGCD) film is fabricated by a three-step method adopting hot filament CVD(HFCVD) method in the present study, presenting outstanding comprehensive performance, including the good adhesion between the substrate and the underlying boron doped diamond(BDD) layer, the extremely high hardness of the middle undoped microcrystalline diamond(UMCD) layer, as well as the low surface roughness and favorable polished convenience of the surface fine grained diamond(FGD) layer. The friction and wear behavior of this composite film sliding against low-carbon steel and silicon nitride balls are studied on a ball-on-plate rotational friction tester. Besides, its wear rate is further evaluated under a severer condition using an inner-hole polishing apparatus, with low-carbon steel wire as the counterpart. The test results show that the BD-UM-FGCD film performs very small friction coefficient and great friction behavior owing to its high surface smoothness, and meanwhile it also has excellent wear resistance because of the relatively high hardness of the surface FGD film and the extremely high hardness of the middle UMCD film. Moreover, under the industrial conditions for producing low-carbon steel wires, this composite film can sufficiently prolong the working lifetime of the drawing dies and improve their application effects. This research develops a novel composite diamond films owning great comprehensive properties, which have great potentials as protecting coatings on working surfaces of the wear-resistant and anti-frictional components.     

氩气浓度对热丝法化学气相沉积纳米金刚石膜的影响

采用热丝化学气相沉积方法,以Ar+CH4+H2混合气体作为气源,通过改变氩气浓度,在单晶硅(100)基片上沉积纳米金刚石膜;采用扫描电子显微镜、原子力显微镜、X射线衍射仪和拉曼光谱仪等分析了纳米金刚石膜的形貌、微结构以及残余应力。结果表明:随着氩气浓度的增大,膜的晶粒尺寸逐渐减小到纳米级;由于晶粒细化导致膜内残余应力由拉应力变为压应力,并且压应力随氩气浓度的增大呈现先增大后减小的趋势;当氩气体积分数为98%时,即在贫氢的气氛中成功获得了平均晶粒尺寸为54 nm、均方根粗糙度约为14.7 nm的纳米金刚石膜。     

Tribological properties of lubricated nanocrystalline diamond surfaces for various loads and geometries

Abstract

Diamond and diamond-like carbon films are well known for their outstanding properties such as high hardness, low coefficient of friction, good thermal conductivity, excellent biocompatibility and electrical insulation. Diamond films with nanocrystalline grains offer added advantages of higher hardness, improved surface finish (less roughness), very high sp³ content, etc. In view of the above, the present investigation is undertaken to explore the possibility of using nanocrystalline diamond films in advanced tribological applications. In this work, a nanocrystalline diamond film is deposited using a unique chemical vapour deposition (CVD) technique. The microstructural features are characterised using atomic force microscopy (AFM). Tribological behaviour of these films is evaluated by means of a reciprocating model tribometer with various lubricants. The worn surfaces are examined using three-dimensional confocal microscopy. The results show that these films have comparable friction coefficient with and without lubricants. Furthermore, they exhibited negligible wear for the tested range of loads.     

STUDY ON COATING MECHANISM OF DIAMOND FILM ON CUTTING TOOL AND ITS APPLICATION

0 INTRODUCT[ONDiamond is a kind Of excellent cutting tool material for cutting non-fermus metal and nonmetallicmaterials. Because of the limited supply and high cost of natural diamond it has been mainly used forspecial aPPlications Where no other tools can Perform satisfactorily.The study of dePOsition of diamond film on cutting tools and its wide aPPlications began in 1980.Great Progress has been made at the same time. The [ypical principles used in coated-cutting tool are thehacrow…     

CVD金刚石涂层刀具切削性能的试验研究

金刚石薄膜具有高硬度、低摩擦系数、高耐磨性和高导热性能。文中通过用金刚石薄膜涂层刀具对含硅量不同的硅铝合金进行干切削试验,探讨其切削性能。     

金刚石薄膜断裂强度及形貌分析

金刚石薄膜以其优异的性能成为许多行业不可或缺的功能材料,但因金刚石薄膜制备质量差、不稳定,导致金刚石薄膜力学性能的研究一直处于探索阶段,没有得出系统全面的结论。本文利用金刚石力学试验机对自支撑金刚石薄膜断裂强度与薄膜沉积厚度、抛光与否之间的关系进行了研究,利用扫描电子显微镜SEM对金刚石薄膜的表面和断口形貌进行了分析。研究表明,自支撑金刚石薄膜断裂主要是解离断裂,且其断裂强度随着沉积厚度的增加而减低,自支撑金刚石薄膜是否经过抛光对其断裂强度的大小有显著影响。     

Structural, optical and mechanical properties of nanostructure diamond synthesized by chemical vapor deposition

Nanostructure diamond (NSD) films on Si substrate are prepared by microwave plasma enhanced chemical vapor deposition (MPECVD) using methane and hydrogen as the reactants with two-step negative substrate bias (SB). The dependencies of the NSD film morphology, grains, surface roughness, crystal and bonding structures and hardness on the negative SB at the bias-enhanced growth (BEG) step and substrate temperature during growth have been investigated by conducting atomic force microscopy (CAFM), X-ray diffraction (XRD), Raman spectroscopy and nanoindentation. The hardness of the NSD film is found to be as high as 80 GPa with CAFM average and root mean square roughness of 7 and 9 nm, respectively, under optimal negative SB at the BEG step. From the studies of substrate temperature effect, the hardness of the NSD film is as high as 70 GPa, with average and root mean square CAFM roughness of 9 and 11 nm, respectively, which were obtained at a substrate temperature of 500 °C. In both cases, the film hardness was found to be affected by the size of clusters, which are composed of many small NSD particles, the amount of NSD in an amorphous matrix as well as surface roughness. We also synthesized transparent NSD films by MPECVD under optimized single-step growth conditions on quartz substrates, which are scratched with several micrometers diamond powder. A hardness as high as 60 GPa and a maximum transmittance of 60% in the visible light region are achieved for an NSD coating of 1.0 μm thickness with small surface roughness.     

Microstructure and Magnetic Properties of Sputtered Co5 Sm Films

Co5Sm/Cr bilayer films were deposited on Si and glass slides by means of a Direct-Current(DC)magnetron sputtering system with substrate heating.Magnetic properties measurements show that the sample with glass substrate has a comparatively large coercivity(Hc=2 141.2 Oe)with a relatively low optimal temperature(Ts=350 ℃).X-ray diffraction patterns indicate that Cr presents a hexagonal-close-packed(hcp)texture on Si,while a body-centered-cubic(bcc)structure on glass substrate,which leads to Co5Sm films having different lattice constants on Si and glass substrates.At their optimal temperature,the grain size of the sample on glass slide is smaller with its size distribution more uniform.Concurrently,the shape of magnetic domain is more regular and ordered.The value of magnetic switching volume(V)for the film on glass is 1.65×10-18 cm3,smaller than that for films on Si.For the film on glass,the magnetization reversal mechanism is mainly influenced by magnetocrystalline anisotropy,the shape of the crystal grain and the stress in the film.     

Surface characteristics and tribology study of metal oxide thin films

Abstract

Microcrystalline high quality undoped ZnO thin films were deposited on Si(100) and Corning 1737F glass substrates by a dc magnetron sputtering system. Surface and mechanical properties of ZnO thin films deposited under different deposition conditions (thickness, deposition rate and plasma composition) were investigated. Atomic force microscopy, nanoindentation techniques and scratch tests have been carried out. The lateral grain radius was between 50 and 160 nm. Surface roughness was found to vary from 1·3 to 10·3. In order to measure the real hardness of ZnO thin films grown on Si(100) and glass Continuous Stiffness Measurement technique was used. The hardness was found to be between 11 and 13 GPa for the polycrystalline ZnO almost five times larger than for the corresponding single crystalline material, while scratch tests verified a film structure, thickness, and surface morphology dependency on the mechanical properties for these metal oxide thin films.     

晶粒细化对金刚石涂层刀具切削性能的影响

金刚石涂层具有高硬度、低摩擦系数、高耐磨性和高导热性能。本文着重介绍了金刚石涂层刀具的发展动向及现状,并通过金刚石涂层刀具的切削试验表明了金刚石涂层刀具的使用寿命明显高于未涂层的硬质合金刀具,采用金刚石涂层刀具进行切削可以获得更高的表面加工质量和生产率。