MEMS陀螺仪驱动谐振频率的温度补偿方法

微机电系统(MEMS)陀螺的模态谐振频率和品质因子具有较强的温度敏感性,使得MEMS陀螺的输出零偏随温度漂移。为了解决零偏随温度漂移问题,提出了一种基于MEMS微机械陀螺的驱动谐振频率做温度基准的零偏温度补偿方法。温度在-40～60℃范围内变化,经多次循环测量陀螺零偏,获得零偏与温度之间的变化关系,并在此基础上,对零偏进行建模分析。利用谐振频率与温度的线性关系,以驱动谐振频率为温度参考,对陀螺零偏进行实时温度补偿。实验结果表明:上电零偏稳定性由补偿前的143. 81°/h变为补偿后的26. 51°/h,降低了5. 42倍;温度在-40～60℃范围内变化,补偿前后的零偏稳定性分别为1368. 05°/h和62. 86°/h,降低了22倍。     

基于FPGA的硅微陀螺数字测控和温补技术研究

硅微陀螺仪由陀螺结构和测控电路组成,随着模拟接口电路的日臻完善,陀螺仪性能的提升主要靠数字电路中的测控和补偿算法。目前硅微陀螺测控电路正在向芯片化方向发展,为了加速硅微陀螺测控电路芯片化进程,用Verilog硬件描述语言设计了AGC和PLL对陀螺幅度和相位进行闭环控制,科氏力平衡进行闭环检测。对因加工造成的正交误差,设计了正交校正闭环。根据温度对陀螺仪的影响,对标度因数进行线性补偿,对零偏进行了BP神经网络补偿。实验结果表明,该控制系统下AGC相对稳定性为124ppm,PLL相对稳定性为79.1ppm,常温零偏稳定性为2.9o/h。在0℃到65℃温度范围内补偿前零偏稳定性为17.7o/h,补偿后零偏稳定性为9.1o/h,标度因数温度灵敏度降低1个数量级,不仅提升了硅微陀螺仪的性能,也为陀螺ASIC设计奠定了良好基础。     

基于多分辨率分析的硅微陀螺随机漂移时间序列建模

针对硅微陀螺的随机漂移误差,根据多尺度分析理论,提出了随机漂移趋势项提取算法,并应用于时间序列分析,采用波克斯-詹金斯法建立了ARMA模型。进一步采用长自回归-白噪化建模方法对模型进行了辨识和适用性检验。最后,构造Kalman滤波器对ARMA模型进行了滤波,滤波后方差减小了一个数量级,硅微陀螺原始漂移的零偏稳定性为34.428°/h,Kalman滤波后零偏稳定性为2.34°/h,有效地提高了陀螺的使用精度。     

振动式微陀螺正交误差自补偿方法

微陀螺正交误差会影响陀螺的零偏稳定性,为了提高微陀螺的性能,必须减小正交误差。针对正交误差处理中存在的问题,推导了包含交叉耦合误差效应的驱动模态和检测模态的动力学方程,研究了交叉耦合误差引起的正交误差表达式,提出了一种正交误差闭环控制自补偿方法。通过将经正交误差幅值调幅控制的驱动位移信号闭环反馈作用到检测模态的输出,实现正交误差的自补偿。制作PCB电路测试了微陀螺的性能。正交误差自补偿后微陀螺零偏输出均值从778 mV减小到了2 mV,零偏稳定性从75°/h提高到了34.5°/h。实验结果表明,此方法是可行的。     

三轴光纤陀螺样机研制及其关键技术

介绍一种小型三轴一体化光纤陀螺仪工程样机的研制.三轴一体化设计是三个光纤陀螺共用一套光源系统和信号处理电路系统,光源采用SLD光源,光源驱动电路为精密温控和恒流源驱动;信号处理电路采用方波调制和阶梯波反馈实现数字闭环;核心光路采用模块化设计;为了提高陀螺温度性能,建立了三轴陀螺全温误差模型并进行了补偿.工程样机测试表明,三轴光纤陀螺零值稳定性小于0.3°/h,零偏重复性小于0.2°/h,标度因数非线性小于50ppm,陀螺温度性能较好,具有较强的抗振动和冲击能力.     

硅微角振动陀螺仪温度特性补偿方法研究

在研究硅微角振动陀螺结构和温度特性的基础上,创建了二元高阶多项式补偿模型,并设计了基于STM32F405的硬件补偿电路,实现该陀螺仪实时温度补偿.实验结果表明:温度补偿后的标度因数温度系数和全温零偏稳定性分别由344 ×10-6/℃和441°/h减小为12.6×10-6/℃和40.6°/h,使得该陀螺仪的温度特性有明显改善,验证了该补偿方法的有效性和可行性.     

硅微陀螺温度漂移补偿研究

温度是影响陀螺仪漂移的重要因素.在试验的基础上,通过对某型硅微陀螺零漂数据进行小波滤波除噪,研究了既定温度范围内陀螺零漂的变化.基于最小二乘法原理,建立了陀螺仪的零漂补偿模型.通过补偿使陀螺的零漂稳定性由0.2751°/s减小为0.0114°/s,提高了零漂稳定性.从补偿的效果来看,多项式模型能够有效地补偿零漂,从而满足工程应用的需要.     

MEMS微机械陀螺温度特性分析与建模

针对MEMS微机械陀螺的零偏随温度变化波动较大的特性,通过建立MEMS陀螺零偏随温度变化之间的误差模型,在温度范围为-20℃~60℃温箱试验下,分析MEMS陀螺的零偏输出变化,经去除野值后使用建立的误差模型对零偏进行补偿,结果表明,MEMS陀螺仪因温度引起的零偏从最大约为160°/h,经补偿后降至约为10°/h。该温度误差模型使MEMS陀螺的全温区零偏特性得到了一定程度的提升,为提高之后的导航精度打下基础,具有一定的工程价值。     

双闭环真空硅微陀螺仪设计及测试性能分析

所设计的硅微陀螺仪工作在10 Pa,品质因素达到3000,采用CAN金属壳封装形式,测控线路采用闭环自激驱动,力反馈式闭环检测方式.驱动采用单边驱动单边检测,尽量使线路简化;检测采用双重分解和重构回路.测试结果表明:有用信号和正交信号实现很好的相位解耦,互不影响.在实现标度因素10 mY/(°)S-1的情况下,零偏稳定性已达到了60°/h;线性度已达到了400 ppm;带宽仿真达到150 Hz;这较以前设计的空气下闭驱开检方式下的硅微陀螺性能提高了近2个数量级.     

基于激励-校准法的硅微陀螺仪模态匹配控制电路研究

提出了一种基于激励-校准法的硅微陀螺仪实时模态匹配控制电路,利用了检测模态的幅度响应信号关于其谐振频率对称的特点,采用双边激励信号激励检测模态,通过比较双边信号的响应幅度大小来获得相应的调谐电压,实现模态匹配.介绍了静电负刚度调谐原理;然后设计了基于激励-校准法的硅微陀螺仪实时模态匹配控制方案,并分析了该法的误差来源;在Simulink环境下搭建了模态匹配控制电路模型,验证了该方案的可行性;最后,设计了基于FPGA的自动模态匹配控制电路.实验结果表明,相比于模态不匹配情况,模态匹配后的陀螺仪零偏稳定性系数由1.69 °/h降低到0.42 °/h,静态性能提升了4.02倍;角度随机游走系数由0.046 °/ h降低到0.0195 °/ h,静态性能提升了2.36倍.     

An x-axis single-crystalline silicon microgyroscope fabricated by the extended SBM process

A high-aspect ratio, single-crystal line silicon x-axis microgyroscope is fabricated using the extended sacrificial bulk micromachining (SBM) process. The x-axis microgyroscope in this paper uses vertically offset combs to resonate the proof mass in the vertical plane, and lateral combs to sense the Coriolis force in the horizontal plane. This requires fabricating vertically and horizontally moving structures for actuation and sensing, respectively, which is very difficult to achieve in single-crystalline silicon. However, single-crystalline silicon high-aspect ratio structures are preferred for high performance. The extended SRN/I process is a two-mask process, but all structural parts and combs are defined in one mask level. Thus, there is no misalignment in any structural parts or comb fingers. In this extended SBM process, all vertical dimensions of the structure, including the comb height, vertical comb offset and sacrificial gap, can be defined arbitrarily (up to a few tens of micrometers). For electrical isolation, silicon-on-insulator (SOI) wafers are used, but the inherent footing phenomenon in the SOI deep etching is eliminated and smooth structural shapes are obtained, because the SBM process is used. In the fabricated x-axis microgyroscope, the lower combs used to vibrate the proof mass are vertically offset 12 /spl mu/m from the upper combs. The fabricated x-axis microgyroscope can resolve 0.1 deg/s angular rate, and the measured bandwidth is 100 Hz. The reported work represents the first x-axis single-crystalline silicon microgyroscope fabricated using only one wafer without wafer bonding. We have previously reported several versions of z-axis microgyroscopes and x-, y-, and z-axis accelerometers, using the SBM process. The results or this paper allow integrating x-, y-, and z-axis microgyroscopes as well as x-, y-, and z-axis microaccelerometers in one wafer, using the same mask and the same process.     

Effects of environmental temperature on the performance of a micromachined gyroscope

This paper presents the modeling of the detection capacitance analysis for a tuning fork vibratory microgyroscope fabricated by the bulk silicon micromachining technology. The dynamic characteristics of the detection capacitance of the microgyroscope are calculated based on the model. Then the effects of environmental thermal fluctuations on the microgyroscope are considered. Non-linear analysis and numerical simulations show that the frequencies and output of the microgyroscope have slight deviations when the microgyroscope works at different environmental temperature. The deviations of the frequencies and dynamic characteristics are calculated accurately, which provides a reference for the design of temperature compensation method and robust structural design for the microgyroscope.     

4—5GHz低噪声放大器模块设计

根据低噪声放大器（LNA）的性能指标要求,首先介绍了LNA结构选取,再从器件和介质板的选择,输入输出匹配,稳定性和偏置电路等方面介绍了LNA的设计,并且利用微波仿真软件Serenade8．7对LNA电路进行了仿真和优化设计,给出仿真结果。最后给出的实际测试结果表明,该LNA能够满足指标要求。     

Multiple behavior information fusion based quantitative threat evaluation

How to evaluate network security threat quantitatively is one of key issues in the field of network security, which is vital for administrators to make decision on the security of computer networks. A novel model of security threat evaluation with a series of quantitative indices is proposed on the analysis of prevalent network intrusions. This model is based on multiple behavior information fusion and two indices of privilege validity and service availability that are proposed to evaluate the impact of prevalent network intrusions on system security, so as to provide security evolution over time, i.e., monitor security changes with respect to modification of security factors. The Markov model and the algorithm of D-S evidence reasoning are proposed to measure these two indices, respectively. Compared with other methods, this method mitigates the impact of unsuccessful intrusions on threat evaluation. It evaluates the impact of important intrusions on system security comprehensively and helps administrators to insight into intrusion steps, determine security state and identify dangerous intrusion traces. Testing in a real network environment shows that this method is reasonable and feasible in alleviating the tremendous task of data analysis and facilitating the understanding of the security evolution of the system for its administrators.     

集成电路振荡频率的性能测试

LCPU01是岭芯微电子公司的一款用于无线网卡的电源管理类IC,内部包含了一个同步降压转换器、九个高速LDO和一个反相器用来与外部晶振构成振荡电路。实际芯片测试时,通过合理设置晶振两端的电容容量,可以加速晶振起振,增加频率测试的稳定性、减少测试时间,最终提高芯片测试效率。     

电阻/电容信息融合成像系统的硬件电路设计

为了实现工业生产过程中更准确的参数计量和更精确的过程可视化测量,经过对电成像技术和多传感器信息融合技术的研究,提出了一种电阻／电容成像信息融合成像系统的硬件电路。该电路具有分别获取电阻和电容成像信息的功能,并且可以在适当的时序控制下将成像信息稳定地传送到计算机进行成像。通过对电路原理的理论分析和稳定性测试表明,该电路可以获取较可靠的成像信息,因而适用于电容电阻复合式成像系统,并能应用于各种工业生产。     

0.001 3 mm2自动频率校正算法电路的设计及应用

在高速串行接口PCIE2.0的设计中,为了保证数据传输的正确性,数据串行传输的工作时钟需要在很短的时间内完成锁定。为了减小锁相环的锁定时间,提高时钟稳定性,在传统的顺序搜索自动频率校正算法电路的基础上,提出了一种新的二进制搜索算法校正电路,并且应用于5 GHz的锁相环中,最大校正时间为22.5 μs。锁相环在SMIC 55 nm CMOS工艺下流片,SS工艺角下,AFC电路的面积为0.001 3 mm2。经测试,锁相环能够快速锁定,性能良好。