PCVD制备Ti1-xAlxN硬质薄膜的结构与硬度

用直流等离子体增强化学气相沉积(PCVD)方法获得了Ti1-xAlxN硬质薄膜;考察了Al含量x及高温退火对薄膜微观结构转变过程及其硬度的影响.结果表明,制备的Ti1-xAlxN薄膜由3-10 nm晶粒组成.随Al含量x增加,薄膜硬度升高,x超过0.83时,硬度开始急剧下降;结构分析证实x小于0.83,Ti1-xAlxN薄膜是固溶强化;x=0.83,薄膜中出现六方氮化铝相(h-AlN).热稳定性实验表明,Ti1-xAlxN薄膜的纳米结构和硬度在N2环境下可以维持到900℃.     

医用钛合金表面纳米晶TiN梯度涂层的显微组织及腐蚀磨损性能（英文）

采用磁控溅射方法在Ti6Al4V钛合金表面制备纳米晶TiN梯度涂层,研究涂层的显微组织和力学性能,并对涂层和Ti6Al4V合金基体在生理环境中的电化学腐蚀行为和腐蚀磨损性能进行比较。结果表明:纳米晶TiN的梯度分布有利于释放涂层中的内应力,使粘附强度增加到90 N。致密的结构和细化的晶粒使涂层表面纳米硬度达到28.5 GPa,纳米晶TiN涂层的防腐蚀效率达到96.6%。与Ti6Al4V合金基体相比,纳米晶TiN涂层的耐腐蚀磨损性能提高了100倍。纳米晶TiN梯度涂层具有良好的化学稳定性和较高的H~3/E~2比(H为硬度,E为弹性模量),是改善耐腐蚀性能和抗磨损性能的主要原因。     

Al_2O_3含量对Al_2O_3-Al复合涂层组织和摩擦磨损性能的影响

通过改变喷涂粉末中Al2O3和Al的比例,在AZ91D镁合金表面制备不同Al2O3含量的等离子喷涂Al2O3-Al复合涂层。对复合涂层的显微组织、硬度和摩擦磨损性能进行表征,研究Al2O3含量对涂层组织和磨损性能的影响。结果表明,涂层组织为带状Al2O3分布在致密的Al基体上,Al2O3内可见细微的片层结构,且层与层间存在一定的孔隙。复合涂层中Al平均硬度62HV,Al2O3平均硬度达1380 HV。摩擦磨损实验证实,复合涂层具有较小的摩擦系数和较低磨损量,大大改善了镁合金表面的抗磨损性能。涂层中Al2O3体积少于Al时,Al2O3增加使涂层的抗磨效果增强。涂层中Al2O3体积超过Al后,涂层的孔隙增多、涂层变脆,其耐磨损性能下降。     

钛合金切削用Ti_(1-x)Al_xN涂层的制备及其切削性能研究

采用磁控溅射法制备了不同Al含量的Ti1-xAlxN涂层.经XRD,SEM,EDX和纳米压痕仪分析发现,Al含量在0.50~0.58(原子分数,下同)之间时,Ti1-xAlxN涂层为(111)择优生长的fcc结构.当Al含量增加到0.63时,涂层中有六方纤锌矿结构的Al N生成,涂层硬度降低.另外,随着Al含量的增加,涂层表面颗粒尺寸变大,涂层变疏松.钛合金切削实验表明,涂层刀具的磨损形式主要为黏结磨损和崩刃.在低速切削(65 m/min)时,Ti0.50Al0.50N涂层刀具的切削性能略好于无涂层刀具,并且都好于Ti0.42Al0.58N和Ti0.37Al0.63N涂层刀具.在高速切削(100 m/min)时,Ti0.50Al0.50N涂层刀具有最好的切削性能,其切削距离比无涂层刀具提高4倍多.这主要因为Ti0.50Al0.50N涂层表面致密、硬度高,在钛合金切削时形成的切屑瘤致密而整齐.     

CrN/CrAlSiN涂层海水环境下的摩擦学性能

为提高海洋装备摩擦零部件的摩擦学性能,采用多弧离子镀技术在316L不锈钢上制备了CrN/CrAlSiN涂层。通过XRD、XPS表征涂层的物相及成分,SEM和TEM表征涂层的形貌和微观结构,并用纳米压痕仪测试其硬度,采用摩擦磨损试验机对涂层在大气和海水环境中的摩擦磨损性能进行测试。结果表明:CrN/CrAlSiN涂层的微观结构主要有CrN相、AlN相以及非晶态Si_3N_4包裹CrN、AlN相,(111)择优取向最为明显;基于微观结构与CrN过渡层的设计,CrAlSiN涂层硬度高达35.5 GPa;较之于316L基底,涂层致密的结构使其在海水环境下表现出更好的耐腐蚀性能;在大气和海水环境下,CrN/CrAlSiN涂层的摩擦因数及磨损率均明显降低,在海水环境下达到最优。     

非对称双极脉冲磁控溅射沉积氮化铬铝涂层的微观结构和硬度

利用非对称双极脉冲磁控溅射技术,双极分别接纯铬靶和纯铝靶,通过调整两靶的功率,以反应溅射的方式沉积不同铬铝比的氮化铬铝涂层。研究不同Al含量的氮化铬铝涂层的结构和硬度。所获得的涂层依次为Cr0.95Al0.05N、Cr0.9Al0.1N、Cr0.83Al0.17N和Cr0.75Al0.25N,均为B1NaCl结构,(220)为主要的织构取向。随着涂层中Al含量的增加,涂层表面突起的尺寸逐渐降低,涂层趋于光滑致密;低Al含量涂层为柱状晶结构,随Al含量提高,涂层结构更加致密,并向等轴晶结构转变。涂层硬度随Al含量的提高先增加后降低,Cr0.83Al0.17N涂层表现出最高的硬度,维氏硬度达到33GPa以上。     

CrAlN硬质刀具涂层的相结构稳定性及其热分解机制

采用基于密度泛函理论的第一性原理计算方法,从理论上系统研究不同Al固溶浓度x(x=0~1)下面心立方(FCC)结构Cr1-xAlxN硬质刀具涂层的微观几何构型、相结构稳定性及其热分解机制,并从电子结构角度对其稳定性起源进行分析。结果表明:随着Al固溶浓度增大,FCC-Cr1-xAlxN晶胞逐渐收缩,而其晶格畸变程度却先增大后减小,且当Al浓度x为0.5~0.75时,FCC-Cr1-xAlxN晶格畸变较为严重,为析出密排六方(HCP)结构的Al N化合物提供源动力;随着Al固溶浓度增大,FCC-Cr1-xAlxN相结构稳定性逐渐降低,且其极易按FCC-Cr1-xAlxN→(FCC-Cr N)+(HCP-Al N)→(HCP-Cr2N)+N2+(HCP-Al N)的路径进行分解,计算结果与实验保持一致;Al固溶致使FCC-Cr1-xAlxN相结构稳定性降低的内在原因在于Cr1-xAlxN晶胞中Cr—N共价键作用随Al固溶度的增大而逐渐减弱。     

激光熔覆CoCrFeNiSix高熵合金涂层的组织及性能

目的 研究Si含量对CoCrFeNi高熵合金激光熔覆涂层的组织及性能的影响.方法 利用激光熔覆技术在45#钢基材上制备CoCrFeNiSix(x=0.0,0.5,1.0,1.5,2.0)高熵合金涂层,通过扫描电镜(SEM)、X射线衍射仪(XRD)、显微硬度计、摩擦磨损试样机,对单道和多道熔覆层的宏观形貌、微观组织、显微硬度及摩擦磨损性能进行观察和测试.结果 高熵合金涂层与基体形成良好的冶金结合,添加适量的Si可以提高熔覆层的表面成形性,随着Si的添加,合金的稀释率先增后减,且润湿角逐渐减小.涂层的微观组织随Si含量的升高由等轴晶变为树枝晶,后又变为等轴晶,晶粒结构尺寸减小,涂层致密度提高.涂层由fcc结构变为bcc结构.涂层的显微硬度随Si含量的增加而增加,在x=2.0时,硬度达到600HV0.5左右,约为基体3倍.磨损方式由粘着磨损变为磨粒磨损,当Si含量最高时,磨损量达到最少,摩擦因数也最低,约为0.49.结论 在CoCrFeNi基高熵合金中添加Si可以降低合金的熔点,提高润湿能力;Si还可以增加涂层的形核率,起到细化晶粒的作用;Si作为添加元素还提高了涂层硬度,改善了涂层的耐磨减摩作用.     

PCrNi3Mo钢表面磁控溅射CrAlN涂层的结构及力学性能分析

采用磁控溅射技术在PCr Ni3Mo钢表面沉积Cr Al N硬质涂层,利用激光共聚焦显微镜、X射线衍射仪、纳米压痕仪分别对涂层的表面形貌、组织结构、硬度与弹性模量进行表征。结果表明,Cr Al N涂层表面较致密光滑,表面粗糙度为0.003 5μm。Cr Al N涂层的硬度和弹性模量分别为14.03 GPa和259.1 GPa,较基材显著提高。     

Ti-Al-N 涂层的组织结构与摩擦学性能

目的采用多元等离子体注入与沉积(MPIIID)技术制备Ti-Al-N涂层,系统研究涂层的微观组织结构、力学性能与摩擦学特性。方法借助XRD,XPS,SEM和TEM等,观察分析Ti-Al-N涂层的微观组织结构与物相组成,采用纳米压入试验仪、布氏硬度试验仪、摩擦磨损试验仪和激光共聚焦显微镜等测试分析Ti-Al-N涂层的力学性能、膜基结合力和摩擦磨损性能。结果 Ti-Al-N涂层表现出较高的膜-基结合强度。Al元素掺杂诱发Ti-Al-N涂层发生严重晶格畸变。当Al原子数分数为6.18%时,Ti-Al-N涂层以c-TiAlN相结构为主,表现出超高硬度(达到39.83 GPa);随着Al元素含量增加,涂层中的软质h-TiAlN相结构增多,硬度随之下降。摩擦试验结果表明,低Al含量Ti-Al-N涂层的抗磨损能力良好,其主要磨损机制为磨粒磨损;高Al含量Ti-Al-N涂层的抗磨损能力较差,其主要磨损机制倾向粘着磨损。结论 MPIIID技术成功实现了Ti-Al-N涂层的低温制备与成分调控,低Al含量的Ti-Al-N涂层具有优良的力学性能和优异的抗磨损能力。     

磁控溅射沉积硬韧 ZrAlN 薄膜及薄膜力 学性能

目的获得具有高硬度、高韧性的ZrAlN薄膜。方法采用磁控溅射技术在钛合金和单晶Si上沉积不同Al含量的ZrAlN薄膜,对薄膜的微观组织和相结构进行表征,并测试薄膜的硬度(H)、弹性模量(E)和断裂韧性(KIC)。结果当Zr1-xAlxN薄膜x分别为0.05,0.23,0.47,0.63时,对应的硬度依次为24.5,40.1,17.1,19.1 GPa,断裂韧性依次为1.47,3.17,1.13,1.58 MPa·m-0.5。x为0.05和0.23时,Al固溶到ZrN晶粒中,形成NaCl型面心立方(FCC)结构;x为0.47和0.63时,则形成纤锌矿密排六方(HCP)AlN第二相。结论 ZrAlN薄膜的硬度和韧性与相组成密切相关。Al固溶时,ZrAlN的硬度较高,韧性较好;超过固溶极限,形成六方AlN时,ZrAlN硬度较低,韧性较差。相比之下,Zr0.77Al0.23N薄膜同时具备最高的硬度和最高的韧性。     

VN基硬质耐磨涂层的制备及其性能

目的在N2及其与C2H2混合气氛下,制备VN基硬质耐磨涂层,研究VN基涂层的结构及力学、耐磨、抗腐蚀性能,为工业化应用积累科学数据。方法采用阳极层离子源辅助阴极电弧离子镀系统,在高速钢衬底上制备VN、VCN和VCN/VN多层涂层,系统研究多层涂层调制周期厚度变化对涂层晶体结构、表面形貌、硬度、耐磨性及耐腐蚀性能的影响。结果 C原子的加入和VCN/VN多层涂层调制周期的变化对VCN/VN涂层的晶体结构、表面形貌、硬度、摩擦系数及耐腐蚀性能均有明显影响。随着VCN/VN涂层调制周期的增加,VN(200)衍射峰逐渐减弱并宽化,VN (111)衍射峰消失,涂层表面金属熔滴大颗粒数量减少,小颗粒数量明显增加。VN涂层硬度为1890HV,VCN涂层硬度为2290HV,VN/VCN多层涂层硬度为2350HV左右。对磨材料为氧化铝时,VN涂层的摩擦系数为0.74左右,VCN涂层和VCN/VN涂层的摩擦系数明显降低,在0.60左右,磨损机理由以磨削磨损为主(VN涂层)逐渐转化为粘着磨损为主(S5),磨削磨损起次要作用。随着C原子的加入和VCN/VN多层涂层调制周期的变化,涂层耐腐蚀性能明显增强,自腐蚀电位由VN的-0.26 V增大到VCN的-0.14 V,自腐蚀电流密度由1.63′10^-5 A/cm^2降低到2.7′10(-6) A/cm^2。结论采用阳极层离子源辅助电弧离子镀技术可制备VN基硬质耐磨涂层,C元素的加入可有效提高VN涂层的硬度,降低VN涂层的摩擦系数,增强VN涂层的耐腐蚀性能。VCN/VN多层涂层通过周期厚度的调制可以有效提高VN基涂层的硬度、耐磨及耐腐蚀性能。     

Si和Y掺杂对(Ti,Al)N涂层结构和性能的影响

分别在未施加偏压和施加-100 V偏压条件下,利用磁控溅射技术在压气机叶片用1Cr11Ni2W2MoV热强不锈钢基体上沉积了Ti_0.3Al_0.7N和Ti_0.39Al_0.55Si_0.05Y_0.01N硬质涂层.实验结果表明,施加偏压及Si和Y掺杂明显改变了涂层的相结构,提高了涂层致密度,施加-100 V偏压且添加Si和Y的涂层为非晶结构,表面更加均匀致密.950℃氧化实验表明:Ti_0.39Al_0.55Si_0.05Y_0.01N涂层表面形成极薄且致密的Al₂O₃保护性氧化膜,大大降低了氧化速率.施加-100 V偏压的（Ti,Al）N和（Ti,Al,Si,Y）N沉积态涂层与未施加偏压的相应涂层相比,硬度均降低,尤其是（Ti,Al,Si,Y）N涂层变化显著.经950℃热处理,施加偏压的（Ti,Al,Si,Y）N涂层硬度略有降低,这是由于形成了硬度较低的B4相,而未施加偏压的（Ti,Al,Si,Y）N涂层硬度显著提高,这归因于B1相固溶体的分解.划痕测试结果表明,在实验载荷（50N）下,所有涂层均未出现连续性的剥落.     

Effects of Al Content on Microstructure and Mechanical Property of CrAlN Coating Synthesized by Reactive Magnetron Sputtering

A series of CrAlN coatings with different Al content were synthesized on high-speed steel(M2)substrate by reactive direct current(DC)magnetron sputtering.The influences of Al content on the microstructure and mechanical property of CrAlN coatings were studied by scanning electron microscopy(SEM),X-ray diffraction(XRD),energy dispersive spectrum(EDS)and nano-indentation techniques,respectively.The results indicate that the coatings exhibit only fcc c-CrN phase when Al content is less than 65 at%,and fcc c-CrN and c-AlN phases when Al content is 78 at%.The coating with Al content of 60 at%exhibits high hardness and elastic modulus.The maximum hardness and elastic modulus values could reach 36.8 GPa and 459.5 GPa,respectively.     

Mechanical and tribological properties of multi-element (AlCrTaTiZr)N coatings

Multi-element (AlCrTaTiZr)N coatings are deposited onto Si and cemented carbide substrates by reactive RF magnetron sputtering in an Ar + N₂ mixture. The influence of substrate bias voltage, ranging from 0 to − 200 V, on the microstructural, mechanical and tribological properties of these nitride coatings is studied. A reduction in concentration of N and Al is observed with increasing substrate biases. The (AlCrTaTiZr)N coatings show the face-centered-cubic crystal structure (B1-NaCl type). The use of substrate bias changes the microstructure of the (AlCrTaTiZr)N coating from the columns with microvoids in boundaries to the dense and less identified columns. The compressive macrostress increases from − 0.9 GPa to − 3.6 GPa with an increase of substrate bias. The hardness and adhesion increase to peak values of 36.9 GPa and 60.7 N at the bias voltage of − 150 V, respectively. The tribological properties of the (AlCrTaTiZr)N coatings against 100Cr6 steel balls are evaluated by a ball-on-disc tribometer with a 10 N applied load. With an increase of substrate bias, the wear rate reduces while the friction coefficient almost keeps constant at 0.75. The lowest wear rate of 3.65 × 10^− 6 mm³/Nm is obtained for the (AlCrTaTiZr)N coating deposited at the bias voltage of − 150 V.     

Dependence of Microstructure and Hardness of Nanocomposite Coatings of nc-(Ti_(1-x)Al_xN)/a-Si_3N_4 on Aluminum Contents

HARD COATINGS are finding a widely applicationin machining industries as tools and moulds since1980s[1].Hard coatings consisting of a variety of thetransition metal nitrides,for instance,TiN,TiC,TiCN,TiBN,TiAlN,CrN etc,usually service as a protectioncoatings that requires some better properties ofwear-resistance,corrosion-resistance and also highfatigue-strength especially at elevated temperature(formore details see Ref.2-6).The generic concept for the design of novelsuper-hard(>40G…     

氮含量对直流磁控溅射(TiAlTaCrZr)N涂层力学及钛合金切削性能影响研究

解决传统刀具耐磨涂层导热性差的问题。本文采用直流磁控溅射方法,在不同氮气流量下制备了(TiAlTaCrZr)N涂层,研究了不同氮含量对涂层微结构和硬度、结合力、导热等性能的影响。随着氮气流量的增加,涂层中N含量增加,涂层微观结构会由纳米晶向柱状晶转变。涂层的硬度从TiAlTaCrZr 涂层的11.0 GPa增加到5 SCCM氮流量时(TiAlTaCrZr)N 涂层的20.6 GPa。涂层在氮气流量为5 SCCM时膜基结合力可达到130 N以上,之后随着氮含量增加逐渐降低。(TiAlTaCrZr)N涂层的导热性均优于TiAlN涂层的导热性,但随着氮含量增加导热性降低。(TiAlTaCrZr)N涂层的高导热性、高结合力、高硬度等特性使其在钛合金高速切削时切削距离比TiAlN涂层提高175%,这为钛合金加工提供了一种新型耐磨涂层。     

(Zr,Ti)CN coatings as potential candidates for biomedical applications

(Zr,Ti)CN hard coatings, deposited by DC magnetron sputtering on Ti6Al4V alloy and Si substrates, were investigated as possible candidates to be used as protective layers for medical implants. Two coating types, with different non-metal/metal ratios, were prepared. The films were analyzed for elemental and phase composition, crystallographic structure, mechanical properties, corrosion behavior, surface wettability and cell viability. The coatings were found to have composite structures, in which a (Zr,Ti)CN crystalline phase coexists with an amorphous a-C(N) one. Film thickness and hardness in the ranges 1.8-2.1 μm and 25-29 GPa, respectively, were measured. The coated samples exhibited an improved corrosion resistance as compared with the Ti6Al4V alloy. Both coating types were found to be hydrophobic, the contact angles being higher than 100°. Cell viability measurements proved that the osteosarcoma cells are adherent to the coating surface, the highest viability (90.5%) after one week incubation being found for the film with high non-metal content.     

Effect of the aluminium content and the bias voltage on the microstructure formation in Ti1 − xAlxN protective coatings grown by cathodic arc evaporation

The effect of aluminium contents and bias voltage on the microstructure of cathodic arc evaporated Ti_1 − xAl_xN coatings was investigated with the aid of X-ray diffraction experiments and transmission electron microscopy. The coatings were deposited from mixed Ti-Al targets with different Ti:Al ratios (60:40, 50:50, 40:60 and 33:67) at bias voltages ranging between − 20 V and − 120 V. The microstructure of the coatings was described in terms of the phase composition, crystallite size and residual stress and related to the indentation hardness. The microstructure features were found to be related to the uniformity of the local distribution of Ti and Al in (Ti,Al)N, which was controlled, for a certain overall chemical composition of the coatings, by the bias voltage. The consequences of large local fluctuations of the Ti and Al concentrations in Ti_1 − xAl_xN that occurred at higher bias voltages were the phase segregation, which was indicated through the formation of the fcc-(Ti,Al)N/fcc-AlN nanocomposites and the increase of the compressive residual stress in the face-centred cubic (Ti,Al)N. Concurrently, the increasing bias voltage contributed significantly to the reduction of the crystallite size. Higher residual stress and smaller crystallite size increased the hardness of the coatings. The overall chemical composition of the coatings influenced mainly their phase composition. The high concentration of Al in (Ti,Al)N led to the formation of wurtzitic AlN in the coatings.