1330 V, 67 m/spl Omega//spl middot/cm/sup 2/ 4H-SiC(0001) RESURF MOSFET

Design and fabrication of 4H-SiC(0001) lateral MOSFETs with a two-zone reduced surface field structure have been investigated. The dose dependencies of experimental breakdown voltage show good agreement with simulation. Through the optimization of implant dose, high-temperature (1700/spl deg/C) annealing after ion implantation, and reduction of channel length, a breakdown voltage of 1330 V and a low on-resistance of 67 m/spl Omega//spl middot/cm/sup 2/ have been obtained. The figure-of-merit (V/sub B//sup 2//R/sub on/) of the present device reaches 26 MW/cm/sup 2/, being the best performance among lateral MOSFETs reported. The temperature dependence of static characteristics is also presented.     

10-kV, 123-m/spl Omega//spl middot/cm/sup 2/ 4H-SiC power DMOSFETs

10-kV, 123-m/spl Omega//spl middot/cm/sup 2/ power DMOSFETs in 4H-SiC are demonstrated. A 42% reduction in R/sub on,sp/, compared to a previously reported value, was achieved by using an 8 /spl times/ 10/sup 14/ cm/sup -3/ doped, 85-/spl mu/m-thick drift epilayer. An effective channel mobility of 22 cm/sup 2//Vs was measured from a test MOSFET. A specific on-resistance of 123 m/spl Omega//spl middot/cm/sup 2/ were measured with a gate bias of 18 V, which corresponds to an E/sub ox/ of 3 MV/cm. A leakage current of 197 /spl mu/A was measured at a drain bias of 10 kV from a 4H-SiC DMOSFET with an active area of 4.24 /spl times/ 10/sup -3/ cm/sup 2/. A switching time of 100 ns was measured in 4.6-kV, 1.3-A switching measurements. This shows that the 4H-SiC power DMOSFETS are ideal for high-voltage, high-speed switching applications.     

Demonstration of 1789 V, 6.68 m/spl Omega/ /spl middot/ cm/sup 2/ 4H-SiC merged-PiN-Schottky diodes

The design, fabrication and characterisation of a high performance 4H-SiC diode of 1789 V-6.6 A with a low differential specific-on resistance (R/sub SP/spl I.bar/ON/) of 6.68 m/spl Omega/ /spl middot/ cm/sup 2/, based on a 10.3 /spl mu/m 4H-SiC blocking layer doped to 6.6/spl times/10/sup 15/ cm/sup -3/, is reported. The corresponding figure-of-merit of V/sub B//sup 2//R/sub SP/spl I.bar/ON/ for this diode is 479 MW/cm/sup 2/, which substantially surpasses previous records for all other MPS diodes.     

4H-SiC power bipolar junction transistor with a very low specific ON-resistance of 2.9 m/spl Omega//spl middot/cm/sup 2/

This letter reports a newly achieved best result on the specific ON-resistance (R/sub SP/spl I.bar/ON/) of power 4H-SiC bipolar junction transistors (BJTs). A 4H-SiC BJT based on a 12-/spl mu/m drift layer shows a record-low specific-ON resistance of only 2.9 m/spl Omega//spl middot/cm/sup 2/, with an open-base collector-to-emitter blocking voltage (V/sub ceo/) of 757 V, and a current gain of 18.8. The active area of this 4H-SiC BJT is 0.61 mm/sup 2/, and it has a fully interdigitated design. This high-performance 4H-SiC BJT conducts up to 5.24 A at a forward voltage drop of V/sub CE/=2.5 V, corresponding to a low R/sub SP-ON/ of 2.9 m/spl Omega//spl middot/cm/sup 2/ up to J/sub c/=859 A/cm/sup 2/. This is the lowest specific ON-resistance ever reported for high-power 4H-SiC BJTs.     

930-V 170-m/spl Omega//spl middot/cm/sup 2/ lateral two-zone RESURF MOSFETs in 4H-SiC with NO annealing

The first lateral two-zone reduced surface field MOSFETs in 4H-SiC with NO annealing are reported. Interface properties of 4H-SiC-SiO/sub 2/ are improved, with inversion layer field-effect mobility increased to 25 cm/sup 2//V/spl middot/s, five times higher than that of dry reoxidation process, and with channel resistance significantly reduced. Devices are normally off with low leakage current. Threshold voltage is around 3 V. Blocking voltage of 930 V and specific on-resistance of 170 m/spl Omega//spl middot/cm/sup 2/ were obtained. Large-area devices with multifinger geometry are also demonstrated with scaled-up current. The output characteristics exhibit excellent linear and saturation regions.     

A 4.15 kV 9.07-m/spl Omega//spl middot/cm/sup 2/ 4H-SiC Schottky-barrier diode using Mo contact annealed at high temperature

In this letter, we report the fabrication of high-voltage and low-loss 4H-SiC Schottky-barrier diodes (SBDs) with a performance close to the theoretical limit using a Mo contact annealed at high-temperature. High-temperature annealing for the Mo contact was found to be effective in controlling the Schottky-barrier height at 1.2-1.3 eV without degradation of n-factor and reverse characteristics. We successfully obtained a 1-mm/sup 2/ Mo-4H-SiC SBD with a breakdown voltage (V/sub b/) of 4.15 kV and a specific on resistance (R/sub on/) of 9.07 m/spl Omega//spl middot/cm/sup 2/, achieving a best V/sub b//sup 2//R/sub on/ value of 1898 MW/cm/sup 2/. We also obtained a 9-mm/sup 2/ Mo-4H-SiC SBD with V/sub b/ of 4.40 kV and R/sub on/ of 12.20 m/spl Omega//spl middot/cm/sup 2/.     

8.5 m/spl Omega/ /spl middot/ cm/sub 2/ 600-V double-epitaxial MOSFETs in 4H-SiC

The most important issue in realizing a 4H-SiC vertical MOSFET is to improve the poor channel mobility at the MOS interface, which is related to high on-resistance. This letter focuses on a novel 4H-SiC vertical MOSFET device structure where a low acceptor concentration epitaxial layer is used as a channel. We call this structure a double-epitaxial MOSFET (DEMOSFET). In the structure, the p-well is composed of two p-type epitaxial layers, while an n-type region between the p-wells is formed by low-dose n-type ion implantation. A buried channel is formed at the surface of the upper p/sup $/epitaxial layer. A fabricated DEMOSFET showed an on-resistance of 8.5 m/spl Omega//spl middot/cm/sup 2/ at a gate voltage of 15 V and a blocking voltage of 600 V. This on-resistance is the lowest so far reported for a vertical MOSFET with a blocking voltage of 600 V.     

1710-V 2.77-m/spl Omega/cm/sup 2/ 4H-SiC trenched and implanted vertical junction field-effect transistors

This letter reports the demonstration of a 4H-SiC trenched and implanted vertical-junction field-effect transistor (TI-VJFET). The p/sup +/n junction gates are created on the sidewalls of deep trenches by angled Al implantation, which eliminates the need for epitaxial regrowth during the JFET fabrication. Blocking voltages up to 1710 V has been achieved with a voltage supporting drift layer of only 9.5 /spl mu/m by using a two-step junction termination extension. The TI-VJFET shows a low specific on-resistance R/sub ON-sp/ of 2.77m/spl Omega/cm/sup 2/, corresponding to a record high value of V/sub B//R/sub ON-sp/ equal to 1056 MW/cm/sup 2/.     

An O(k/sup 2//spl middot/log(n)) algorithm for computing the reliability of consecutive-k-out-of-n: F systems

This study presents an O(k/sup 2//spl middot/log(n)) algorithm for computing the reliability of a linear as well as a circular consecutive-k-out-of-n: F system. The proposed algorithm is more efficient and much simpler than the O(k/sup 3//spl middot/log(n/k)) algorithm of Hwang & Wright.     

Efficient amplification using the /sup 4/F/sub 3/2//spl rarr//sup 4/I/sub 9/2/ transition in Nd-doped silica fiber

Amplification characteristics of the three-level /sup 4/F/sub 3/2//spl rarr//sup 4/I/sub 9/2/ transition in Nd-doped silica glass fiber are investigated under strong signal saturation and high pump power (150 mW). Aluminum codoped Nd-silica fibers exhibit strong superfluorescent behavior in the four-level /sup 4/F/sub 3/2//spl rarr//sup 4/I/sub 11/2/ transition which limits the optical conversion efficiency into the three-level transition. Ge-doped silica fibers do not exhibit this limitation and can efficiently amplify in the three-level transition with current laser-diode pump technology.     

Cyclic codes over GR(4/sup m/) which are also cyclic over /spl Zopf//sub 4/

Let GR(4/sup m/) be the Galois ring of characteristic 4 and cardinality 4/sup m/, and /spl alpha/_={/spl alpha//sub 0/,/spl alpha//sub 1/,...,/spl alpha//sub m-1/} be a basis of GR(4/sup m/) over /spl Zopf//sub 4/ when we regard GR(4/sup m/) as a free /spl Zopf//sub 4/-module of rank m. Define the map d/sub /spl alpha/_/ from GR(4/sup m/)[z]/(z/sup n/-1) into /spl Zopf//sub 4/[z]/(z/sup mn/-1) by d/spl alpha/_(a(z))=/spl Sigma//sub i=0//sup m-1//spl Sigma//sub j=0//sup n-1/a/sub ij/z/sup mj+i/ where a(z)=/spl Sigma//sub j=0//sup n-1/a/sub j/z/sup j/ and a/sub j/=/spl Sigma//sub i=0//sup m-1/a/sub ij//spl alpha//sub i/, a/sub ij//spl isin//spl Zopf//sub 4/. Then, for any linear code C of length n over GR(4/sup m/), its image d/sub /spl alpha/_/(C) is a /spl Zopf//sub 4/-linear code of length mn. In this article, for n and m being odd integers, it is determined all pairs (/spl alpha/_,C) such that d/sub /spl alpha/_/(C) is /spl Zopf//sub 4/-cyclic, where /spl alpha/_ is a basis of GR(4/sup m/) over /spl Zopf//sub 4/, and C is a cyclic code of length n over GR(4/sup m/).     

RF Characteristics of a high-performance, 10-fF//spl mu/m/sup 2/ capacitor in a deep trench

We report the properties of a novel polysilicon-insulator-polysilicon trench capacitor with a 380-/spl Aring/ Si/sub 3/N/sub 4/ dielectric that is designed and fabricated for high-frequency bypass and decoupling applications. The capacitor has a specific capacitance as high as 10 fF//spl mu/m/sup 2/ normalized to its footprint area, and a breakdown voltage greater than 15 V at room temperature. The measured S-parameters are in excellent agreement with simulations of an equivalent circuit model that includes a shunt substrate resistance to ground (R/sub sub/). A geometric factor /spl mu/ is defined as the ratio of the imaginary parts of Y/sub 11/ and -Y/sub 21/ at low frequency. The values of /spl mu/ and, consequently, R/sub sub/ are extracted from fitting the measured S-parameter data, and the layout dependence of /spl mu/ and R/sub sub/ is also explained by the model.     

Maximum minimal distance partitioning of the /spl Zopf//sup 2/ lattice

We study the problem of dividing the /spl Zopf//sup 2/ lattice into partitions so that minimal intra-partition distance between the points is maximized. We show that this problem is analogous to the problem of sphere packing. An upper bound on the achievable intra-partition distances for a given number of partitions follows naturally from this observation, since the optimal sphere packing in two dimensions is achieved by the hexagonal lattice. Specific instances of this problem, when the number of partitions is 2/sup m/, were treated in trellis-coded modulation (TCM) code design by Ungerboeck (1982) and others. It is seen that methods previously used for set partitioning in TCM code design are asymptotically suboptimal as the number of partitions increases. We propose an algorithm for solving the /spl Zopf//sup 2/ lattice partitioning problem for an arbitrary number of partitions.     

Very high-density (23 fF//spl mu/m/sup 2/) RF MIM capacitors using high-/spl kappa/ TaTiO as the dielectric

A very high density of 23 fF//spl mu/m/sup 2/ has been measured in RF metal-insulator-metal (MIM) capacitors which use high-/spl kappa/ TaTiO as the dielectric. In addition, the devices show a small reduction of 1.8% in the capacitance, from 100 kHz to 10 GHz. Together with these characteristics the MIM capacitors show low leakage currents and a small voltage-dependence of capacitance at 1 GHz. These TaTiO MIM capacitors should be useful for precision RF circuits.     

A high-density MIM capacitor (13 fF//spl mu/m/sup 2/) using ALD HfO/sub 2/ dielectrics

Metal-insulator-metal (MIM) capacitors with different HfO/sub 2/ thickness have been investigated. The results show that both the capacitance density and voltage coefficients of capacitance (VCCs) increase with decreasing HfO/sub 2/ thickness. In addition, it is found that the VCCs decrease logarithmically with increasing thickness. Furthermore, the MIM capacitor with 10-nm HfO/sub 2/ shows a record high capacitance density of 13 fF//spl mu/m/sup 2/ and a VCC of 607 ppm/V, which can meet the requirement of the International Technology Roadmap for Semiconductors. It can also provide a low leakage current of 5.95 /spl times/ 10/sup -8/A/cm/sup 2/ at room temperature at 1 V, low tangent values below 0.05, and a small frequency dependence. These results indicate that the devices are suitable for use in silicon integrated circuit applications.     

On the filtering problem for stationary random /spl Zopf//sup 2/-fields

It is shown that whenever a stationary random field (Z/sub n,m/)/sub n,m/spl isin/z/ is given by a Borel function f:/spl Ropf//sup z/ /spl times/ /spl Ropf//sup z/ /spl rarr/ /spl Ropf/ of two stationary processes (X/sub n/)/sub n/spl isin/z/ and (Y/sub m/)/sub m/spl isin/z/ i.e., then (Z/sub n, m/) = (f((X/sub n+k/)/sub k/spl epsi/z/, (Y/sub m + /spl lscr// )/sub /spl lscr/ /spl epsi/z/)) under a mild first coordinate univalence assumption on f, the process (X/sub n/)/sub n/spl isin/z/ is measurable with respect to (Z/sub n,m/)/sub n,m/spl epsi/z/ whenever the process (Y/sub m/)/sub m/spl isin/z/ is ergodic. The notion of universal filtering property of an ergodic stationary process is introduced, and then using ergodic theory methods it is shown that an ergodic stationary process has this property if and only if the centralizer of the dynamical system canonically associated with the process does not contain a nontrivial compact subgroup.     

On the generators of /spl Zopf//sub 4/ cyclic codes of length 2/sup e/

Results are presented on the generators of ideals in the ring /spl Zopf//sub 4/[x]/(x/sup n/-1). In particular, each ideal (cyclic code) has a unique distinguished set of generators that characterizes any cyclic code. Some results about dual codes are also included.     

The FT/sup /spl Lambda//-FR/sup /spl Lambda// AWG network: a practical single-hop metro WDM network for efficient uni- and multicasting

Single-hop wavelength-division-multiplexed (WDM) networks with a central passive star coupler (PSC), as well as single-hop networks with a central arrayed-waveguide grating (AWG) and a single transceiver at each node, have been extensively studied as solutions for the quickly increasing amounts of unicast and multicast traffic in the metropolitan area. The main bottlenecks of these networks are the lack of spatial wavelength reuse in the studied PSC-based networks and the single transceiver in the studied AWG-based metro WDM networks. This paper describes the development and evaluation of the FT/sup /spl Lambda//-FR/sup /spl Lambda// AWG network, which is based on a central AWG and has arrays of fixed-tuned transmitters and receivers at each node. Transceiver arrays are a mature technology, making the proposed network practical. In addition, the transmitter arrays allow for high-speed signaling over the AWG while the receiver arrays relieve the receiver bottleneck arising from multicasting in conjunction with spatial wavelength reuse on the AWG. The results from probabilistic analysis and simulation reported here indicate that the FT/sup /spl Lambda//-FR/sup /spl Lambda// AWG network gives particularly good throughput-delay performance for a mix of unicast and multicast traffic.     

Wide-band impedance matching: H/sup /spl infin// performance bounds

This paper presents the first implementation of Helton's H/sup /spl infin// approach to wide-band impedance matching. The prototypical problem is to maximize the transducer power gain uniformly over an operating band for a load connected to a generator by a lossless two-port. The H/sup /spl infin// approach computes the maximum transducer power gain attainable by any lossless two-port uniformly over the operating band. This maximum gain is computed for Fano's classic RLC circuit and an high-frequency antenna represented by measured reflectance data.     

Efficient quantization for overcomplete expansions in /spl Ropf//sup N/

We study construction of structured regular quantizers for overcomplete expansions in /spl Ropf//sup N/. Our goal is to design structured quantizers which allow simple reconstruction algorithms with low complexity and which have good performance in terms of accuracy. Most related work to date in quantized redundant expansions has assumed that the same uniform scalar quantizer was used on all the expansion coefficients. Several approaches have been proposed to improve the reconstruction accuracy, with some of these methods having significant complexity. Instead, we consider the joint design of the overcomplete expansion and the scalar quantizers (allowing different step sizes) in such a way as to produce an equivalent vector quantizer (EVQ) with periodic structure. The construction of a periodic quantizer is based on lattices in /spl Ropf//sup N/ and the concept of geometrically scaled- similar sublattices. The periodicity makes it possible to achieve good accuracy using simple reconstruction algorithms (e.g., linear reconstruction or a small lookup table).