SAW device applications of longitudinal leaky surface waves on lithium tetraborate

The possibility of high frequency SAW device applications of longitudinal leaky surface waves (LLSW) on lithium tetraborate (Li₂ B₄O₇; LBO) is investigated in this paper. An electrical equivalent circuit model (ECM) is extended in order to consider effects of bulk wave scattering for the LLSWs. The equivalent circuit parameters used in the extended ECM for designing the LLSW devices are directly determined from numerically calculated dispersion curves. For applications of the LLSW, high frequency SAW filters on LBO with the Euler angles (0°, 47.3°, 90°) are demonstrated. As examples of the high frequency devices, 1.5 GHz and 1.2 GHz SAW filters using the mode are designed by using the extended ECM, and fabricated by using conventional patterning processes. One is for the filter of the global positioning system (GPS), another is for the 1.2 GHz band data transmission radio system in Japan. As a result, low loss SAW filters can be obtained easily without submicron fabrication techniques by using the LLSWs on LBO. Furthermore, the frequency response calculated by the extended ECM are in a good agreement with the experiments     

Propagation of longitudinal leaky surface waves under periodic metal grating structure on lithium tetraborate

The dispersion properties of longitudinal leaky surface waves propagating under the periodic Al strip grating on lithium tetraborate (Li(2)B(4)O(7); LBO) are described theoretically and experimentally for applications of the mode to high frequency SAW devices. A theoretical method developed here is based on Floquet's theorem using space harmonics as an orthogonal function set and real boundary integral equations derived from the method of weighted residuals for a period of each region, i.e., substrate, metal, and free space. The boundary integral equations are solved by using the Galerkin procedure. The periodic strip gratings with both single-electrodes and double-electrodes are investigated, considering the convergency of the numerical computation for the number of the space harmonics. As a result, the propagation loss for shorted gratings was found to be relatively low in the thickness range of the Al strip below about 1% for the single-electrodes and 2% for the double-electrodes, although it greatly increases for a thickness over 2% for the single-electrodes and 3% for the double-electrodes.     

Propagation properties of longitudinal leaky surface waves on lithium tetraborate

Theoretical and experimental results of longitudinal leaky surface waves with a higher phase velocity than that of ordinary leaky surface waves and a low propagation loss on lithium tetraborate (LBO) are investigated in detail. They propagate along the surface with a phase velocity close to that of longitudinal bulk wave, slightly radiating two kinds of shear bulk waves (or one shear bulk wave in the case that one of two shear wave terms is uncoupled) into the solid. Most surface components of the mode consist of a longitudinal wave term and an electromagnetic wave term. The detailed propagation properties of the longitudinal leaky surface waves on LBO with the Euler angles (phi, theta, 90 degrees ) are investigated theoretically and experimentally. The (011) cut of LBO was found to be desirable for higher frequency SAW devices. One of the reasons why that mode on LBO has a low propagation loss is also discussed.     

Acoustic loss mechanisms in leaky SAW resonators on lithiumtantalate

Discusses acoustic losses in synchronous leaky surface acoustic wave (LSAW) resonators on rotated Y-cut lithium tantalate (LiTaO₃ ) substrates. Laser probe measurements and theoretical models are employed to identify and characterize the radiation of leaky waves into the busbars of the resonator and the excitation of bulk acoustic waves. Escaping LSAWs lead to a significant increase in the conductance, typically occurring in the vicinity of the resonance and in the stopband, but they do not explain the experimentally observed deterioration of the electrical response at the antiresonance. At frequencies above the stopband, the generation of fast shear bulk acoustic waves is the dominant loss mechanism     

Analysis and suppression of side radiation in leaky SAW resonators

This paper discusses side acoustic radiation in leaky surface acoustic wave (LSAW) resonators on rotated Y-cut lithium tantalite substrates. The mechanism behind side radiation, which causes a large insertion loss, is analyzed by using the scalar potential theory. This analysis reveals that side radiation occurs when the guiding condition is not satisfied, and the LSAW most strongly radiates at the frequency in which the LSAW velocities in the grating and busbar regions approximately correspond to each other. Based on these results, we propose a "narrow finger structure," which satisfies the guiding condition and drastically suppresses the side radiation. Experiments show that the resonance Q of the proposed structure drastically improves to over 1000 by suppressing the side radiation, which is three times higher than for a conventional structure. Applying the proposed resonators to the ladder-type SAW filters, ultra-low-loss and steep cut-off characteristics are achieved in the range of 800 MHz and 1.9 GHz.     

Conductance measurements on a leaky SAW harmonic one-port resonator

Conductance measurements are reported on a leaky SAW (LSAW) harmonic one-port resonator on a 64 degrees Y-X LiNbO(3) substrate. This employed a short three-finger IDT for fundamental and second harmonic operation together with long reflection gratings. Conductances were measured with and without the end gratings. From an analysis of the measurements, it was deduced that, for optimum second harmonic performance, the grating stop-band frequency should be higher than the IDT unperturbed center frequency. This result is in contrast to fundamental frequency resonator designs in which the end grating stop-band frequency is placed below the IDT center frequency for optimum performance.     

Suppression of the leaky SAW attenuation with heavy mechanical loading

We discuss effects on the propagation of surface acoustic waves (SAW) due to heavy mass loading on Y-cut lithium niobate and lithium tantalate substrates. An abrupt reduction in the leaky-SAW (LSAW) attenuation is observed in the measured admittance of a long resonator test structure on 64 degrees -YX-cut lithium niobate for aluminum electrodes of thickness h/lambda(0) beyond 9-10%. This experimental fact is explained theoretically as the slowing down of the leaky wave below the velocity of the slow shear surface-skimming bulk wave (SSBW), such that energy dissipation into bulk-wave emission becomes inhibited. An infinite transducer structure is modeled using the periodic Green's function and the boundary-element method (BEM); the computed theoretical properties well explain for the experimental findings. The model is further employed to quantify the leaky surface-wave attenuation characteristics as functions of the crystal-cut angle and the thickness of the electrodes. The resonance and antiresonance frequencies and the corresponding Q values are investigated to facilitate the selection of crystal cuts and electrode thicknesses. The transformation of the leaky SAW into a SAW-type nonleaky wave is also predicted to occur for gold electrodes, with considerably thinner finger structures.     

Longitudinal leaky SAW resonators and filters on YZ-LiNbO3.

The high-phase velocity (above 6100 m/s in an aluminum (Al) grating on lithium niobate (LiNbOs)) of the longitudinal leaky surface acoustic wave (SAW) (LLSAW) mode makes it attractive for application in high-frequency SAW ladder filters in the 2-5 GHz range. We investigate the dependence of one-port synchronous LLSAW resonator performance on YZ-LiNbO3 on the metallization thickness and metallization ratio, both experimentally and theoretically. Our results indicate a strong dependence of the Q factor and resonance frequency on the aluminum thickness, with the optimal thickness that produces the highest Q values being about 8%. The optimal thickness increases with the metallization ratio. The observed behavior is interpreted with the help of simulations using a combined finite element method (FEM)/boundary element method (BEM) technique. As an application, bandpass filters have been fabricated in the 2.8 GHz frequency regime, based on LLSAWs. The synchronous resonators constituting the ladder filters operate in the fundamental mode. The filters feature low insertion losses below 3 dB and wide relative passbands of 4.5-5%.     

Longitudinal-mode leaky SAW resonator filters on 64° Y-Xlithium niobate

Y-parameter modeling is applied to obtain the frequency response of a first/third dual-mode longitudinally-coupled leaky-SAW (LSAW) resonator-filter on 64°C Y-X LiNbO₃. Conventional driving-point and transfer admittance relationships for SAW filters are modified to incorporate the effects of LSAW reflection and bulk-wave scattering in the interdigital transducers and are expanded to include reflection gratings with shorted-metal strips. As inferred from experiment, the grating parameters incorporate a phase-shift term to relate the anomalous dispersion of shorted gratings, as well as a modified phase-slope parameter between input and output interdigital transducers (IDT's). Good agreement is obtained with experimental results published for 836.5 MHz two- and four-pole structures in the maximum-bandwidth configuration     

纵波在含有线性粘滞粘接层的粘接结构中的传播

研究了纵波垂直入射上下基体为同种介质且含有线性粘滞粘接层的三层板状粘接结构时声波的反射和透射特性,基于粘接界面的准静态模型(QSM)并结合各向同性线性粘滞体的本构方程,导出了含有粘滞系数和体积弹性模量的纵波反射和透射系数表达式。首先将纵波的准静态模型解和精确解进行对比,研究了准静态模型的适用条件。其次在界面处于不同接触形式(完好连接和粘滞型弱粘接)的情况下,分别讨论了考虑和不考虑界面相对质量对声反射和透射特性的影响。接着分析了粘滞粘接层参数的变化对纵波反射和透射特性的影响。最后在不大于0.1 MHz-mm的较小频厚积范围内简要阐述了如何鉴别界面形式。结果表明,准静态模型适用于较小频厚积的检测;是否考虑界面的相对质量对纵波的反射和透射特性影响不大;在特定的频厚积下,利用纵波的反射或透射系数方法结合准静态模型可有效辨别界面形式。研究成果可为实验时采用纵波垂直入射检测粘接结构提供一定的理论参考。     

Longitudinal leaky SAW resonators and filters on YZ-LiNbO/sub 3/

The high-phase velocity (above 6100 m/s in and aluminum (Al) grating on lithium niobate (LiNbO/sub 3/)) of the longitudinal leaky surface acoustic wave (SAW) (LLSAW) mode makes it attractive for application in high-frequency SAW ladder filters in the 2-5 GHz range. We investigate the dependence of one-port synchronous LLSAW resonator performance or YZ-LiNbO/sub 3/ on the metallization thickness and metallization ratio, both experimentally and theoretically. Our results indicate a strong dependence of the Q factor and resonance frequency on the aluminum thickness, with the optimal thickness that produces the highest Q values being about 8%. The optimal thickness increases with the metallization ratio. The observed behavior is interpreted with the help of simulations using a combined finite element method (FEM)/boundary element method (BEM) technique. As an application, bandpass filters have been fabricated in the 2.8 GHz frequency regime, based on LL-SAWs. The synchronous resonators constituting the ladder filters operate in the fundamental mode. The filters feature low insertion losses below 3 dB and wide relative passbands of 4.5-5%.     

Propagation of longitudinal leaky surface waves under periodic SiO (2)/Al structure on Li(2)B(4)O(7) substrate

The properties of longitudinal leaky surface waves (LLSW) under a periodic SiO(2)/Al structure on Li(2)B(4)O (7) (LBO) substrate, were investigated theoretically and experimentally, in order to improve the high propagation losses of LLSWs under a periodic Al grating with the normalized thickness over 2%. In the theoretical analysis, the previously presented method based on the boundary integral equations for the periodic metal grating structure on the substrate was extended to include the dielectric layer. In the experiments, devices with Al electrodes recessed into a SiO(2) groove on LBO were fabricated, and the propagation losses of them were estimated. As a result, it was shown that, when the surface of the structure was flattened, the propagation losses were sufficiently low and the first Bragg stopband width decreased.     

一种新型SH波传播特性研究

1.引言 Michio Kadota等于2001年首次提出了一种在 ST-90°X石英基片上利用重金属制成的叉指换能器与反射栅而激发的一种新型剪切(SH)波.这种波具有较大的机电耦合系数和反射系数,良好的频率温度特性.Michio Kadota等人已经将这种SH波应用于实现一种小型化的谐振器式滤波器[1][2] [3],取得了好的实际效果.Michio Kadota等人是利用Campbell的方法对这种波的传播特性即传播速度以及机电耦合系数来进行分析与求解的[4],这种方法比较烦琐,也不利于进一步扩展其应用,研究其特性.本文利用层状介质中波的传播的方法求解[5],求解过程简单准确.本文给出了求解的过程以及计算结果,并与前人的计算结果进行了对比,结果表明了其较好的一致性.     

Theoretical analysis of SAW propagation characteristics in (100) oriented AlN/diamond structure

In this study, the finite element method is employed to calculate SAW characteristics in (100) AlN/diamond based structures with different electrical interfaces; i.e., IDT/ AlN/diamond, AlN/IDT/diamond, IDT/AlN/thin metal film/ diamond, and thin metal film/AlN/IDT/diamond. The effects of Cu and Al electrodes as well as the thickness of electrode on phase velocity, coupling coefficient, and reflectivity of SAWs are illustrated. Propagation characteristics of SAWs in (002) AlN/diamond-based structures are also presented for comparison. Simulation results show that to retain a large reflectivity for the design of RF filters and duplexers, the Cu IDT/(100) AlN/diamond structure possesses the highest phase velocity and largest coupling coefficient at the smallest AlN film thickness- to-wavelength ratio.     

Approximate green?s function representations for the analysis of SAW and leaky wave devices

The Green?s function or boundary element method (BEM) is the preferred technique for rigorous SAW device analysis. However, because of its computational cost, its principal application is the analysis of mode propagation in periodic structures to determine parameters that can then be used in simplified coupling of modes (COM) or P-matrix models. In this paper, rigorous representations are derived that express the Green?s function in terms of a continuous superposition of modes. The derivations include detailed analysis of the Green?s function properties as a function of both frequency and wavenumber, and representations are obtained for both the slowness and spatial domains. Approximate forms are then generated by replacing the continuous mode superposition by a discrete one. The Green?s function can be approximated to any required degree of accuracy, and the resulting approximations are applicable to any type of wave on any type of substrate. The long-range spatial components in the approximate forms are represented by exponential terms. The separable properties of these terms allow this class of approximation to be applied to general SAW and leaky wave device analysis in such a way that the computational effort increases only linearly with device size.     

Optimal cut for leaky SAW on LiTaO3 for high performance resonators and filters

The paper describes how the characteristics of leaky surface acoustic wave (LSAW) propagation depend on the thickness of Al grating electrodes on rotated Y-X LiTaO3. It is shown that the propagation loss arising from leaky nature changes parabolically with both the grating electrode thickness and rotation angle and becomes zero when electrode thickness and rotation angle are properly determined. This means that even when thick grating electrodes are needed in device design, zero propagation loss is always realized by properly determining the rotation angle. When the grating electrode thickness is 0.07 to 0.1 in wavelength for example, LSAWs on 40-42 degrees Y-X LiTaO3 give zero propagation loss without deteriorating other characteristics. Ladder-type filters for the 800-MHz range were fabricated, which essentially need thick Al grating electrodes of about 0.1 wavelength thickness. As predicted by theoretical calculation, experimental results showed that if the rotation angle is increased to circa 420 from a conventional value of 36 degrees, the insertion loss and shape factor are markedly improved compared with devices based on 36 degrees Y-X LiTaO3. This is essentially a result of the minimized propagation loss.     

A SAW resonator filter using longitudinal and transverse modes

A SAW resonator filter using not only transverse but also longitudinal modes is presented. The design principle permits to construct four-pole filters without cascading or parallel connection. The input and output transducers arranged side by side have equal construction characterized by unsymmetrical withdrawing weighting. Neighboring disturbing longitudinal modes are suppressed due to weighting determined by an iterative procedure. The successful application of the principle to a device is demonstrated by experimental measurements     

Periodic Green's functions analysis of SAW and leaky SAWpropagation in a periodic system of electrodes on a piezoelectriccrystal

A method of periodic Green's functions with a propagation factor exp(iβx), unknown in advance, is used to calculate dispersion curves and attenuation coefficients for Rayleigh- and leaky- waves propagating in a periodic system of thin electrodes on a piezoelectric surface. To describe the charge distribution on the electrodes both a step approximation and Chebyshev polynomials are used, the last being more adequate in most cases. Numerically determined values of the Green's function are used and interpolated either linearly or using a modified variant of Ingebrigtsen's formula. Such basic parameters as stopband width, stopband center frequency, wave velocity and attenuation in the stopband are found. These parameters can be used in the coupling-of-modes (COM) analysis and design of SAW devices. The analysis includes bulk wave radiation and scattering. The dependence of the corresponding attenuation coefficient on frequency is determined. Results obtained allow the determination directly and properly of the COM parameters and the design of SAW devices having large number of electrodes most precisely and rapidly. Numerical results for Rayleigh waves on YZ-LiNbO₃ and leaky waves on 36°YX-LiTaO₃ substrates are presented