Investigation of Trap States in AlInN/AlN/GaN Heterostructures by Frequency-Dependent Admittance Analysis

We present a systematic study on the admittance characterization of surface trap states in unpassivated and SiN _x -passivated Al_0.83In_0.17N/AlN/GaN heterostructures. C–V and G/ω–V measurements were carried out in the frequency range of 1 kHz to 1 MHz, and an equivalent circuit model was used to analyze the experimental data. A detailed analysis of the frequency-dependent capacitance and conductance data was performed, assuming models in which traps are located at the metal–AlInN surface. The density (D _t) and time constant (τ _t) of the surface trap states have been determined as a function of energy separation from the conduction-band edge (E _c − E _t). The D _st and τ _st values of the surface trap states for the unpassivated samples were found to be D_st @ (4 - 13) ×10¹² D_{\rm{st}} \cong (4 - 13) \times 10^{12}  eV ^{- 1} cm ^{- 2} {\hbox{eV}}^{ - 1} {\hbox{cm}}^{ - 2} and τ _st ≈ 3 μs to 7 μs, respectively. For the passivated sample, D _st decreased to 1.5 ×10¹² 1.5 \times 10^{12}  eV ^{- 1} cm ^{- 2} {\hbox{eV}}^{ - 1} {\hbox{cm}}^{ - 2} and τ _st to 1.8 μs to 2 μs. The density of surface trap states in Al_0.83In_0.17N/AlN/GaN heterostructures decreased by approximately one order of magnitude with SiN _x passivation, indicating that the SiN _x insulator layer between the metal contact and the surface of the Al_0.83In_0.17N layer can passivate surface states.     

MOVPE grown Ga1−xInxAs solar cells for GaInP/GaInAs tandem applications

Lattice-mismatched Ga_1−xIn_xAs solar cells with an absorption edge between 900 and 1150 nm have been grown on GaAs substrates. Different graded Ga_1−xIn_xAs buffer layers and solar cell structures were evaluated to achieve a good electrical performance of the device. External quantum efficiencies comparable to our best GaAs solar cells were measured. The best 1 cm² cell with a bandgap energy of 1.18 eV has an efficiency of 22.6% at AM1.5g and a short circuit current density of 36.4 mA/cm². To our knowledge, this is the highest reported efficiency for a Ga_0.83In_0.17As solar cell.     

Luminescence spectra of blue and green light-emitting diodes based on multilayer InGaN/AlGaN/GaN heterostructures with quantum wells

The luminescence spectra of blue and green light-emitting diodes based on In_xGa_1−x N/Al_yGa_1−y N/GaN heterostructures with a thin (2–3 nm) In_xGa_1−x N active layer have been investigated in the temperature and current intervals 100–300 K and J=0.01–20 mA, respectively. The spectra of the blue and green light-emitting diodes have maxima in the interavals ℏω_max=2.55–2.75 eV and ℏω_max=2.38–2.50 eV, respectively, depending on the In content in the active layer. The spectral intensity of the principal band decreases exponentially in the long-wavelength region with energy constant E ₀=45–70 meV; this is described by a model that takes into account the tails of the density of states in the two-dimensional active region and the degree of filling of the tails near the band edges. At low currents radiative tunneling recombination with a voltage-dependent maximum in the spectrum is observed in the spectra of the blue diodes. A model of the energy diagram of the heterostructures is discussed. Fiz. Tekh. Poluprovodn. 31, 1055–1061 (September 1997)     

Drift velocity of electrons in quantum wells of selectively doped In0.5Ga0.5As/AlxIn1 ? xAs and In0.2Ga0.8As/AlxGa1 ? xAs heterostructures in high electric fields

The field dependence of drift velocity of electrons in quantum wells of selectively doped In_0.5Ga_0.5As/Al _x In_{1 − x} As and In_0.2Ga_0.8As/Al _x Ga_{1 − x} As heterostructures is calculated by the Monte Carlo method. The influence of varying the molar fraction of Al in the composition of the Al _x Ga_{1 − x} As and Al _x In_{1 − x} As barriers of the quantum well on the mobility and drift velocity of electrons in high electric fields is studied. It is shown that the electron mobility rises as the fraction x of Al in the barrier composition is decreased. The maximum mobility in the In_0.5Ga_0.5As/In_0.8Al_0.2As quantum wells exceeds the mobility in a bulk material by a factor of 3. An increase in fraction x of Al in the barrier leads to an increase in the threshold field E _th of intervalley transfer (the Gunn effect). The threshold field is E _th = 16 kV/cm in the In_0.5Ga_0.5As/Al_0.5In_0.5As heterostructures and E _th = 10 kV/cm in the In_0.2Ga_0.8As/Al_0.3Ga_0.7As heterostructures. In the heterostructures with the lowest electron mobility, E _th = 2–3 kV/cm, which is lower than E _th = 4 kV/cm in bulk InGaAs.     

Analysis of temperature coefficients for III–V multi‐junction concentrator cells

The temperature dependence of the I–V parameters of different III–V multi‐junction concentrator cells at several concentration levels was investigated. Moreover, the influence of spectral changes on the temperature coefficients of multi‐junction solar cells was examined. Complete sets of temperature coefficients of a metamorphic Ga_0.35In_0.65P/Ga_0.83In_0.17As dual‐junction cell, a metamorphic Ga_0.35In_0.65P/Ga_0.83In_0.17As/Ge triple‐junction cell and a lattice‐matched Ga_0.50In_0.50P/Ga_0.99In_0.01As/Ge triple‐junction cell determined under well‐controlled laboratory conditions are reported. Copyright © 2012 John Wiley & Sons, Ltd.     

Study of grown-in defects and effect of thermal annealing in Al0.3Ga0.7As and GaAs LPE layers

Studies of the grown-in deep-level defects in the undoped n-Al_xGa_1-xAs (x = 0.3) and GaAs epitaxial layers prepared by the liquid phase epitaxy (LPE) techniques have been made, using DLTS, I-V and C-V measurements. The effect of 300 °C thermal annealing on the grown-in defects was investigated as a function of annealing time. The results showed that significant reduction in these grown-in defects can be achieved via low temperature thermal annealing process. The main electron and hole traps observed in the Al_0.3Ga_0.7As LPE layer were due to the E_c-0.31 eV and E_v+0.18 eV level, respectively, while for the GaAs LPE layer, the electron traps were due to the E_c-0.42 and 0.60 eV levels, and the hole traps were due to E_v+0.40 and 0.71 eV levels. Research supported in part by the Air Force Wright Aeronautical Laboratories, Aeropropulsion Lab., Wright Patterson Air Force Base, Ohio, subcontract through SCEEE, contract F33615-81-C-2011, task-4, and in part by AFOSR grant no. 81-0187.     

Interface trap and interface depletion in lattice-mismatched GaInAs/GaAs heterostructures

The effects of lattice mismatch on the deep traps and interface depletion have been studied for the Ga_0.92In_0.08As(p⁺)/GaAs(N) and Ga_0.92In_0.08As(n)/GaAs(SI) heterostructures grown by molecular beam epitaxy. We have used deep level transient spectroscopy (DLTS) and admittance spectroscopy (AS) and observed two hole traps, one at an energy ranging from 0.1 to 0.4 eV and the other at 0.64 eV, and two electron traps at 0.49 and 0.83 eV in the GalnAs/GaAsp ⁺-N junction sample. The hole trap appeared as a broad peak in the DLTS data and its energy distribution (0.1 ∼ 0.4 eV) was obtained by a simulation fitting of the peak. Concentration of this distributed hole trap increased as the in-plane mismatch increased, suggesting its relation to defects induced by lattice relaxation, whereas the other traps are from the bulk. The misfit dislocations are believed to be responsible for the interface trap. For the Ga_0.92In_0.08As(n)/GaAs(SI) samples, Hall effect measurements showed an increased interface depletion width of about 0.14 Μm for the 0.5 Μm thick layer and about 0.12 /gmm for the 0.25 Μm thick layer, while a corresponding GaAs/GaAs sample had only 0.088 Μm for the interface depletion width.     

Optical and structural properties of MOVPE grown GaxIn1−xAs/InP strained multiple quantum well atructures

This paper presents a study of the structural and optical properties of strained GaInAs/ InP multiple quantum well (MQW) structures fabricated by LP-MOVPE. The composition of the Ga _x In_1−x As films ranged fromx = 0.17 tox = 1.0 and was determined by sputtered neutral mass spectrometry (SNMS) on thick layers. The structures of the MQW samples with well widths from 1.5 to 5 nm were investigated by high resolution x-ray diffraction (HR-XRD). Simulations of the diffraction patterns showed that transition layers of approximately 2 monolayer (ML) thickness with high lattice mismatch exist at the interfaces. Photoluminescence (PL) measurements indicate well widths of a multiple of a monolayer with local variations of one monolayer. The PL peak energies vary smoothly with the Ga concentration. These results were confirmed by optical absorption measurements.     

Nitride-based near-ultraviolet multiple-quantum well light-emitting diodes with AlGaN barrier layers

The In_0.05Ga_0.95N/GaN, In_0.05Ga_0.95N/Al_0.1Ga_0.9N, and In_0.05Ga_0.95N/Al_0.18Ga_0.82N multiple-quantum well (MQW) light-emitting diodes (LEDs) were prepared by metal-organic chemical-vapor deposition. (MOCVD). It was found that the 20-mA electroluminescence (EL) intensity of the InGaN/Al_0.1Ga_0.9N MQW LED was two times larger than that of the InGaN/GaN MQW LED. The larger maximum-output intensity and the fact that maximum-output intensity occurred at a larger injection current suggest that Al_0.1Ga_0.9N-barrier layers can provide a better carrier confinement and effectively reduce leakage current. In contrast, the EL intensity of the InGaN/Al_0.18Ga_0.82N MQW LED was smaller because of the relaxation that occurred in the MQW active region of the sample.     

Characterization of AlxInyGa1−x−yN quaternary alloys grown on sapphire substrates by molecular-beam epitaxy

High-resolution X-ray diffraction (HR-XRD) with rocking curve, atomic force microscopy (AFM) and photoluminescence (PL) spectroscopy have been performed on high-quality quaternary Al_xIn_yGa_1−x−yN thin films at room temperature. The Al_xIn_yGa_1−x−yN films were grown on c-plane (0 0 0 1) sapphire substrates with AlN as buffer layers using a molecular beam epitaxy (MBE) technique with aluminum (Al) mole fractions x ranging from 0.0 to 0.2 and constant indium (In) mole fraction y=0.1. HR-XRD measurements confirmed the high crystalline quality of these alloys without any phase separation. The X-ray rocking curve of Al_xIn_yGa_1−x−yN films typically shows full widths at half maximum (FWHM) intensity between 14.4 and 28.8 arcmin. AFM measurements revealed a two-dimensional (2D) growth mode with a smooth surface morphology of quaternary epilayers. PL spectra exhibited both an enhancement of the integrated intensity and an increasing blueshift with increased Al content with reference to the ternary sample In_0.1Ga_0.90N. Both effects arise from Al-enhanced exciton localization. PL was used to determine the behavior of the energy band gap of the quaternary films, which was found to increase with increasing Al composition from 0.05 to 0.2. This trend is expected since the incorporation of Al increases the energy band gap of ternary In_0.1Ga_0.90N (3.004 eV). We have also investigated the bowing parameter for the variation of energy band gaps and found it to be very sensitive on the Al composition. A value of b=10.4 has been obtained for our quaternary Al_xIn_yGa_1−x−yN alloys.     

Band offsets at interfaces of (1 0 0)InxGa1−xAs (0 ⩽ x ⩽ 0.53) with Al2O3 and HfO2

The electron energy band alignment at interfaces of In_xGa_1?xAs (0 ? x ? 0.53) with atomic-layer deposited insulators Al₂O₃ and HfO₂ is characterized using combined measurements of internal photoemission of electrons and photoconductivity. The measured energy of the In_xGa_1?xAs valence band top is found to be only marginally influenced by the semiconductor composition. This result suggests that the observed bandgap narrowing from 1.42 to 0.75 eV when the In content increases from 0 to 0.53 occurs mostly through downshift of the semiconductor conduction band bottom. Electron states originating from the interfacial oxidation of In_xGa_1?xAs lead to reduction of the electron barrier at the semiconductor/oxide interface.     

Isochronal annealing study of hydrogen interaction with implantation-induced point defects in p-type silicon

Isochronal annealing with zero and reverse bias applied to Schottky diodes was used to monitor the evolution of hydrogen interaction with point defects observed in hydrogen-implanted p-type silicon, i.e., divacancy (VV), carbon–oxygen interstitial pair (C_iO_i) and two levels at E_v+0.28 and E_v+0.50 eV. The VV and C_iO_i are passivated by hydrogen liberated from hydrogen-containing defects during annealing in the temperature range 90–150°C and reappear upon annealing above 180°C under reverse bias due to hydrogen liberation and its field drift. Two levels at E_v+0.50 and E_v+0.28 eV are ascribed to irradiation-induced and hydrogen-related defects, respectively.     

Study of electrically active defects in n-GaN layer

Deep level defects in both p⁺/n junctions and n-type Schottky GaN diodes are studied using the Fourier transform deep level transient spectroscopy. An electron trap level was detected in the range of energies at E_c−E_t=0.23–0.27 eV with a capture cross-section of the order of 10⁻¹⁹–10⁻¹⁶ cm² for both the p⁺/n and n-type Schottky GaN diodes. For one set of p⁺/n diodes with a structure of Au/Pt/p⁺–GaN/n–GaN/n⁺–GaN/Ti/Al/Pd/Au and the n-type Schottky diodes, two other common electron traps are found at energy positions, E_c−E_t=0.53–0.56 eV and 0.79–0.82 eV. In addition, an electron trap level with energy position at E_c−E_t=1.07 eV and a capture cross-section of σ_n=1.6×10⁻¹³ cm² are detected for the n-type Schottky diodes. This trap level has not been previously reported in the literature. For the other set of p⁺/n diodes with a structure of Au/Ni/p⁺–GaN/n–GaN/n⁺–GaN/Ti/Al/Pd/Au, a prominent minority carrier (hole) trap level was also identified with an energy position at E_t−E_v=0.85 eV and a capture cross-section of σ_n=8.1×10⁻¹⁴ cm². The 0.56 eV electron trap level observed in n-type Schottky diode and the 0.23 eV electron trap level detected in the p⁺/n diode with Ni/Au contact are attributed to the extended defects based on the observation of logarithmic capture kinetics.     

Stoichiometry-dependent deep levels in undoped p-type Al0.38Ga0.62As grown by liquid phase epitaxy

Photocapacitance (PHCAP) and photoluminescence (PL) measurements were applied to unintentionally doped p-type Al_0.38Ga_0.62As grown by liquid phase epitaxy using the temperature difference method under controlled vapor pressure. PHCAP spectra revealed three dominant deep levels at E_v+0.9, E_v + 1.45, and E_v+1.96 eV, and a deep level at E_v+0.9−1.5 eV which was not neutralized by forward bias injection. These level densities increase with increasing arsenic vapor pressure and net shallow acceptor density. Furthermore, PL spectra reveal a deep level at 1.6–1.7 eV. The PL intensity of this deep level increases with increasing arsenic vapor pressure. These deep levels are thought to be associated with excess As.     

Differential optical gain in a GaInN/AlGaN quantum dot

Electronic and optical properties are obtained with the increase in indium alloy content (x) in a Ga_1-xIn_xN/Al_0.2Ga_0.8N quantum dot. The barrier height with the different In alloy contents is applied to acquire the confinement potentials. The results are obtained taking into consideration geometrical confinement effect. The optical absorption coefficient with the photon energy is observed in a Ga_1-xIn_xN/Al_0.2Ga_0.8N quantum dot. The optical output with the injection current density and the threshold optical pump intensity for various In alloy contents are studied. The differential gain as functions of indium alloy content, charge density and the dot radii in the Ga_1-xIn_xN/Al_0.2Ga_0.8N quantum dot are investigated. The exciton binding energy is calculated in order to obtain the exciton density, the optical gain and the threshold current density in the Ga_1-xIn_xN/Al_0.2In_0.8N quantum dot. The results show that the red shift energy with an increase in In alloy content is found and the differential gain increases with the charge carrier density.     

Dislocation-Induced deep level states in In0.08Ga0.92As/GaAs heterostructures

We have performed luminescence experiments on In_0.08Ga_0.92As/GaAs heterointerfaces to explore the energy distribution of deep level states in the bandgap for two cases: (1) unrelaxed, pseudomorphic In_0.08Ga_0.92As films (200Å thick), which have few if any dislocations at the interface, and (2) partially relaxed In_0.08Ga_0.92As films (1000Å thick) which are expected to have a substantial interfacial dislocation density. A combined photoluminescence and cathodoluminescence technique is used which allows us to profile the sample luminescence through the buried interface region. Our results show the existence of deep level luminescent features characteristic of the GaAs substrate and features common to In_0.08Ga_0.92As and GaAs, as well as the existence of a deep level feature near 1 eV photon energy which undergoes a shift in energy depending upon the degree of strain relaxation in the In_0.08Ga_0.92As film. In addition, a deep level feature near 0.83 eV becomes prominent only in In_0.08Ga_0.92As films which have relaxed, and thus contain misfit dislocations at the interface. These deep level differences may be due to bandgap states associated with the intrinsic dislocation structure, impurities segregated at the dislocation, or bulk point defects, or threading dislocations generated during the strain relaxation. Previous work has determined that a deep level state 0.7 eV above the valence band edge would account for the electrical behavior of relaxed In_0.08Ga_0.92As/GaAs interfaces, which is in good agreement with the range of deep level transitions near 0.8 eV photon energy which we observe. These measurements suggest that photo- and cathodoluminescence measurements of deep level emission in these III-V semiconductors can provide a useful indicator of electrically active defect densities associated with misfit dislocations.     

Structural and optical investigation of InGaN/GaN multiple quantum well structures with various indium compositions

We have studied the influence of indium (In) composition on the structural and optical properties of In_x Ga_1−xN/GaN multiple quantum wells (MQWs) with In compositions of more than 25% by means of high-resolution x-ray diffraction (HRXRD), photoluminescence (PL), and transmission electron microscopy (TEM). With increasing the In composition, structural quality deterioration is observed from the broadening of the full width athalf maximum of the HRXRD superlattice peak, the broad multiple emission peaks oflow temperature PL, and the increase of defect density in GaN capping layers and InGaN/GaN MQWs. V-defects, dislocations, and two types of tetragonal shape defects are observed within the MQW with 33% In composition by high resolution TEM. In addition, we found that V-defects result in different growth rates of the GaN barriers according to the degree of the bending of InGaN well layers, which changes the period thickness of the superlattice and might be the source of the multiple emission peaks observed in the In_xGa_1−xN/GaN MQWs with high in compositions.     

Optical properties of bulk and epitaxial unordered GaxIn1−x P semiconductor alloys

The electron band structure of Ga_xIn_1?x P bulk solid solutions was calculated by the local model pseudopotential method taking into account lattice mismatch. The resulting local strain of the lattice was taken into account in calculations of effective mass and deformation potential. The main optical characteristics of Ga_xIn_1?x P alloys can be explained by the presence of internal local strains and antisite defects. In comparison with bulk samples, the concentration dependences of the spectral peaks E ₁ and E ₁+Δ₁ in pseudomorphic thin films were found to be more sensitive than the fundamental absorption edge E ₀ to deformations caused by the substrate.     

Impurity states in cobalt-doped silicon

Cobalt was diffused into p⁺ pn⁺ silicon structures at 900° and 1150°C for 2−4 hours followed by various quenching conditions. Four primary hole traps and two electron traps associated with cobalt in these devices were observed. The hole traps are labeled H1(E_v + 0.22 eV), H2(E_v + 0.29 eV), H3 (E_v + 0.40 eV) and H4(E_v + 0.45 eV) while the electron traps labeled E1 and E2 are located at E_c − 0.36 eV and E_c − 0.44 eV, respectively. The concentrations, thermal emission rates, and the capture cross sections for the majority carriers at these defects are reported. The behavior of these defects under heat treatment and the emergence of secondary defects, H5(E_v +0.22 eV) and H6 (E_v +0.34 eV), will be discussed.     

Studies on nucleation kinetics of InxGa1−xN/GaN heterostructures

Nucleation kinetics during the growth of In_xGa_1−xN on a GaN substrate have been studied. The behavior of nonequilibrium between the In_xGa_1−xN and the GaN substrate has been analyzed, and hence, the expression derived for the stress-induced supercooling/superheating has been numerically evaluated. The maximum amount of stress-induced supercooling is found to be 1.017 K at x=0.12. These values are incorporated in the classical heterogeneous nucleation theory. Using the regular solution model, the interfacial tension between the nucleus and substrate and, hence, the interfacial tension between nucleus and mother phase and thermodynamical potential of the compounds have been calculated. The amount of driving force available for the nucleation has been determined for different compositions and degrees of supercooling. It has been shown that the value of the interaction parameter of InN-GaN plays a dominant role in nucleation and growth kinetics of In_xGa_1−xN on a GaN substrate. These values have been used to evaluate the nucleation parameters. It is shown that the nucleation barrier for the formation of a In_xGa_1−xN nucleus on a GaN substrate is minimum in the range of x=0.12 to x=0.17, and it has been qualitatively proved that good quality In_xGa_1−xN on GaN can be grown only in the range 0<x≤0.2.