用于检测激光棒的变倾角马赫-曾德尔干涉仪

为实现激光棒透射波前的测量,改善一般泰曼型或斐索型干涉仪测量小口径激光棒透射波前时的边缘衍射效应,研究了一种变倾角移相马赫-曾德尔干涉仪。通过调整移相反射镜的倾斜姿态,改变入射到马赫-曾德尔干涉光路的光束倾角,参考光束与测试光束的光程差随之变化,从而在相干光之间引入相移,实现了相移干涉测量。利用该干涉仪测量一根口径为Ф6 mm、长度为60 mm激光棒(Nd:YAG)的透射波前,测量结果的峰谷值(PV)为0.391λ,均方根值(RMS)为0.056λ;使用ZYGO激光干涉仪测量同一根激光棒,其透射波前的峰谷值(PV)为0.370λ,均方根值(RMS)为0.064λ。对比结果表明该干涉仪能实现光学元件透射波前的高精度检测,测试结果的一致性验证了该方案的可行性。该变倾角移相方法具有较高的移相精度和较大的移相范围,且该变倾角干涉系统中光束仅一次透过待测激光棒,可有效抑制多光束干涉现象,改善小口径激光棒的边缘衍射效应。     

半导体激光端点干涉测长法原理探讨

阐述利用半导体激光的频率变化和波长变化测量干涉仪光程差的基本原理，探讨一种在长度的两个端点干涉测量长度的新方法，即端点干涉测长法的原理，推导这种方法测量长度的公式，指出这种方法区别于其它干涉测长方法的独特优点，最后讨论测量中的注意事项以及需要深入研究的问题。     

半导体激光端点干涉长法原理探讨

阐述利用半导体激光的频率变化和波长变化测量干涉仪光程差的基本原理，探讨一种在长度的两个端点干涉测量长度的新方法，即端点干涉测长法的原理，推导这种方法测量长度的公式，指出这种方法区别二其它干涉测长方法的独特优点，最后讨论测量中的注意事项以及需要深入的研究的问题。     

用相位法捕捉白光干涉动态“零次”条纹峰值位置的光电原理

一、引言精密计量技术中有不少测试手段利用白光源的双光束干涉仪,它是利用两束相干光在等光程条件下产生“零次”无色条纹的物理特性,作为测长定位手段。例如应用在量块比长的乌氏干涉仪;精密     

一种用于线膨胀系数测量的高稳定性激光干涉系统

介绍了一种可以对材料长度变化进行测量的高稳定性双光程激光干涉系统,由于该干涉系统的测量光路和参考光路具有相似的传播路径,光程差仅由被测试样的长度引起,干涉系统具有较强的抵抗环境温度变化和振动等外界干扰的能力。通过平晶反射膜测量试验,对干涉系统的稳定性进行了验证,结果表明在6. 5 h内测量数据的标准偏差为4. 2 nm。该激光干涉系统可用于材料尺寸变化(如线膨胀系数)的高准确度测量。     

移相干涉仪环境微扰的外差检测及信号处理

对环境微振动干扰进行补偿可减小移相干涉测量的误差,其中振动量的检测是实现振动补偿的前提。以声光调制器作为光学移频器,在移相式平面干涉仪中组合成外差干涉测振系统,可以实现光程差微小变化(范围为0到1/2波长)的实时检测。在外差信号处理中采用单片RF/IF相位测量芯片直接对两路40MHz模拟信号进行比相,简化了通常使用的数字测相方法,其精确测相的典型非线性值小于1度。用该系统实际测量了周期性振动和地面冲击振动对干涉仪的影响,获得了干涉仪所受微振动的幅度和相位。     

激光测量系统探查及校准

激光测量系统探查及校准Ｋ·Ｈｅｒｒｍａｎｎ１长度测量中整套激光干涉仪系统１．ｌ校准方法方面整套激光干涉仪校准（以下缩写为ＬＩ）以下面这种方式被了解。被校准的测量反射器及标准ＬＩ最好由测量车（架）与测量方问一致放置。两个ＬＩ测量轴线被放在相同的光束通道...     

激光干涉仪在纳米测量中的典型应用

激光干涉仪具有测量分辨力高、测量结果可溯源等优点,在纳米测量中的应用日益广泛。介绍纳米测量机和低膨胀材料线膨胀系数测量装置中应用的迈克尔逊型激光干涉仪以及在高准确度位移测量装置中应用的法布里-珀罗型激光干涉仪,并结合这些实例对激光干涉仪光学系统设计、测量环境控制、迈克尔逊干涉仪非线性误差补偿以及法布里-珀罗干涉仪量程扩展等方面的关键问题进行分析和总结。所述原则和方法对实现纳米级测量准确度具有重要意义,可为高准确度激光干涉仪的研制及其在纳米测量中的更广泛应用提供技术参考。     

大长度激光测量中阿贝误差消除方法的研究

提出一种基于3路独立激光干涉仪消除大长度激光测量中的阿贝误差的方法,3路干涉仪的安装位置可布置成任意三角形。通过3路干涉仪的测量结果及被测仪器与3路干涉仪安装位置的几何关系,构造一路与被测仪器同光路的虚拟干涉仪,推导虚拟干涉仪的测长公式。该算法对干涉仪的安装位置无特殊要求,在实践中易于实现。为验证算法的有效性,依托于室内80 m大长度标准装置,通过改变被测仪器安装位置,在45 m范围内进行了3组不同的验证实验。实验结果显示消除阿贝误差后,残余的其它误差的最大值仅为1.10 μm,该算法可有效地消除阿贝误差。     

一种用于纳米计量的原子力显微镜测头的设计

介绍了我们研制的一种高精度、具有计量学意义的原子力显微镜测头.该显微测头与其它部件协同工作在50 mm×50 mm×2 mm的测量范围内实现纳米级精度的测量.测头采用光束偏转法检测探针悬臂的微小偏移,由单模保偏光纤引入半导体激光作为光源.该测头安装有3个立体反射镜作为激光干涉仪的参考镜.样品与原子力显微镜测头的相对位置可以由激光干涉仪直接读数,可溯源到米国际定义及国家基准上.激光干涉仪的布置无阿贝误差.测头采用立体光路设计,结构紧凑.测头厚度小于20 mm,质量约200 g,却实现了100 mm的反射光程.使用该测头测得与量块表面的力-距离曲线,还测得标称高度300 nm SiO2台阶样板的图像,分辨率优于0.05 nm.     

Prism-pair interferometry by homodyne interferometers with a common light source for high-accuracy measurement of the absolute refractive index of glasses

A prism-pair interferometer comprising two homodyne interferometers with a common light source was developed for high-precision measurements of the refractive index of optical glasses with an uncertainty of the order of 10(-6). The two interferometers measure changes in the optical path length in the glass sample and in air, respectively. Uncertainties in the absolute wavelength of the common light source are cancelled out by calculating a ratio between the results from the interferometers. Uncertainties in phase measurement are suppressed by a quadrature detection system. The combined standard uncertainty of the developed system is evaluated as 1.1×10(-6).     

System for precise balancing and controlled unbalancing of fiber-optic interferometers

A system for accurate balancing and controlled unbalancing of the optical path difference in all-fiber optical interferometers is described. Interferometers with various arm lengths (1-30 m) and with initial optical path differences of as much as 1 cm have been successfully balanced within a 5-microm range. In addition, the proposed system allows for controlled unbalancing of arbitrary all-fiber optical interferometers with a precision better than 5 microm.     

Vibration-resistant direct-phase-detecting optical interferometers

Two dual-beam differential direct-phase-detecting optical interferometers for scanning moving surfaces are described. Two beams from these interferometers are focused ~42 mum apart on moving surfaces, and the difference in their reflected path lengths is measured to provide the surface roughness measurement. These interferometers are exceptionally insensitive to environmental vibrations and to surface physical and chemical factors. Applications discussed include the measurement of the surface roughness of a rotating cylinder and a moving web.     

Effects of birefringence on Fizeau interferometry that uses a polarization phase-shifting technique

Interferometers that use different states of polarization for the reference and the test beams can modulate the relative phase shift by using polarization optics in the imaging system. Thus the interferometer can capture simultaneous images that have a fixed phase shift, which can be used for phase-shifting interferometry. As all measurements are made simultaneously, the interferometer is not sensitive to vibration. Fizeau interferometers of this type have an advantage compared with Twyman-Green-type systems because they are common-path interferometers. However, a polarization Fizeau interferometer is not strictly common path when both wavefronts are transmitted by an optic that suffers from birefringence. The two polarized beams see different phases owing to birefringence; as a result, an error can be introduced in the measurement. We study the effect of birefringence on measurement accuracy when different polarization techniques are used in Fizeau interferometers. We demonstrate that measurement error is reduced dramatically and can be eliminated if the reference and test beams are circularly polarized rather than linearly polarized.     

Interferometric phase reconstruction by nonuniform shifting of the reference beam

A method for phase measurement in common-path interferometers, believed to be novel, is presented. We use the property of phase reconstruction algorithms, such as the Carré and Hariharan algorithms, that do not require uniform phase across the reference beam. Only the ratio of the phase steps must be the same at each pixel. We show phase measurement and reconstruction in a common-path interferometer by shifting either the tilt or the focus of the reference wave front. We present a theoretical explanation of phase measurement using this property. We also present results from a proof-of-principle experiment using a scatterplate interferometer, in conjunction with the tilt phase-shifting technique, to measure the reflected phase of a test optical element. Furthermore, we present a computer simulation to demonstrate the mathematical validity of this measurement technique using defocus shifting, rather than tilt shifting, in the reference wave front.     

Adaptive beam shaping by controlled thermal lensing in optical elements

We describe an adaptive optical system for use as a tunable focusing element. The system provides adaptive beam shaping via controlled thermal lensing in the optical elements. The system is agile, remotely controllable, touch free, and vacuum compatible; it offers a wide dynamic range, aberration-free focal length tuning, and can provide both positive and negative lensing effects. Focusing is obtained through dynamic heating of an optical element by an external pump beam. The system is especially suitable for use in interferometric gravitational wave interferometers employing high laser power, allowing for in situ control of the laser modal properties and compensation for thermal lensing of the primary laser. Using CO(2) laser heating of fused-silica substrates, we demonstrate a focal length variable from infinity to 4.0 m, with a slope of 0.082 diopter/W of absorbed heat. For on-axis operation, no higher-order modes are introduced by the adaptive optical element. Theoretical modeling of the induced optical path change and predicted thermal lens agrees well with measurement.     

基于迈克尔逊干涉法的太赫兹波长精密测量

搭建了以迈克尔逊干涉法为基础并引入参考激光作为光程变化度量值的分光路波长测量系统。利用理论分析配合软件仿真的方式研究测量光路中存在的影响因素,以动镜偏转、分束镜偏转和光束偏转导致的相对附加光程差作为评价标准进行分析与判定。测量结果表明：100 GHz的太赫兹源波长为3.114 2 mm,相对扩展不确定度为0.9%(k=2)。使用标准太赫兹频率计对同一太赫兹源进行比对实验,获得修正系数为1.003 5,从而验证了测量结果的准确性和太赫兹波长测量系统的可靠性。     

Group refractive index reconstruction with broadband interferometric confocal microscopy

We propose a novel method of measuring the group refractive index of biological tissues at the micrometer scale. The technique utilizes a broadband confocal microscope embedded into a Mach-Zehnder interferometer, with which spectral interferograms are measured as the sample is translated through the focus of the beam. The method does not require phase unwrapping and is insensitive to vibrations in the sample and reference arms. High measurement stability is achieved because a single spectral interferogram contains all the information necessary to compute the optical path delay of the beam transmitted through the sample. Included are a physical framework defining the forward problem, linear solutions to the inverse problem, and simulated images of biologically relevant phantoms.     

Vibration compensating beam scanning interferometer for surface measurement

Light beam scanning using a dispersive element and wavelength tuning is coupled with fiber-optic interferometry to realize a new surface measurement instrument. The instrument is capable of measuring nanoscale surface structures and form deviations. It features active vibration compensation and a small optical probe size that may be placed remotely from the main apparatus. Active vibration compensation is provided by the multiplexing of two interferometers with near common paths. Closed loop control of a mirror mounted on a piezoelectric transducer is used to keep the path length stable. Experiments were carried out to deduce the effectiveness of the vibration compensation and the ability to carry out a real measurement in the face of large environmental disturbance.