NMOSFET ESD self-protection strategy and underlying failuremechanism in advanced 0.13-μm CMOS technology

In this paper, the high current characteristics encountered during electrostatic discharge (ESD) stress using nMOS/L_npn protection devices in a 0.13-μm CMOS technology are investigated for different device parameters: channel length, channel width, gate-oxide thickness, and drain/source contact to gate (DCG/SCG) spacing. From leakage current measurements following ESD stress, it is concluded that the shorter (0.13 μm) devices fail because of source/drain filamentation, whereas longer (0.3 μm) devices with thin (22 Å) oxide gate fail because of oxide breakdown. This conclusion is consistent with and supported by numerical simulations of the electric field. It is also supported by the observed effect of hot carrier stress on I_t2. Hot carrier stress experiments additionally revealed that ESD stress can and does affect subsequent hot carrier degradation of the device     

Robust Computational Models of Quantum Transport in Electronic Devices

A family of efficient quantum transport models for simulation of modern nanoscale devices is presented. These models are used for quantitative calculations of quantum currents in nanoscale electronic devices within our device simulator software. Specifically, we used them to simulate the tunneling current through thin barrier in vertical-cavity surface-emitting laser (VCSEL), direct and reverse tunnel currents through the tunnel junction, Schottky contact characteristics, and gate induced drain leakage (GIDL).     

Quantum Simulation Study of a New Carbon Nanotube Field-Effect Transistor With Electrically Induced Source/Drain Extension

In this paper, we present the unique features exhibited by a proposed structure of coaxially gated carbon nanotube field-effect transistor (CNTFET) with doped source and drain extensions using the self-consistent and atomistic scale simulations, within the nonequilibrium Green's function formalism. In this novel CNTFET structure, three adjacent metal cylindrical gates are used, where two side metal gates with lower workfunction than the main gate as an extension of the source/drain on either side of the main metal gate are biased, independent of the main gate, to create virtual extensions to the source and the drain and also to provide an effective electrical screen for the channel region from the drain voltage variations. We demonstrate that the proposed structure of CNTFET shows improvement in device performance focusing on leakage current, on–off current ratio, and voltage gain. In addition, the investigation of short-channel effects for the proposed structure shows improved drain-induced barrier lowering, hot-carrier effect, and subthreshold swing, all of which can affect the reliability of CMOS devices.      

Temperature-dependent short-channel parameters of FinFETs

The remarkable development and continual proliferation of research in the nanotechnology field have led to improvement in the efficiency of elementary devices. To improve their performance, the parameters of such devices can be scaled down while optimizing their characteristics. However, this simultaneously results in degraded switching characteristics and the appearance of short-channel effects. Multigate-based fin-shaped field-effect transistors (FinFETs) represent a new option to address all these problems. However, thermal failure of FinFET devices under nominal operating conditions is an important issue in the design and implementation of high-speed semiconductor devices. It is also seen that bulk FinFETs exhibit better thermal performance compared with silicon-on-insulator FinFETs. In the work presented herein, various FinFET characteristics including the subthreshold swing, drain-induced barrier lowering, threshold voltage, and drain current were investigated as functions of temperature. The (effective) channel length is larger than the physical gate length (in off-state) due to the undoped underlap regions. This paper also discusses the effects of drain, source, and gate overlap.     

The statistics of NBTI-induced V/sub T/ and /spl beta/ mismatch shifts in pMOSFETs

Negative bias temperature instability (NBTI) is a pFET degradation mechanism that can result in threshold voltage shifts up to 100 mV or more, even in very thin oxide devices. Since analog circuits that utilize matched pairs of devices, such as current mirrors and differential pairs, generally depend on V/sub T/ matching considerably better than this, NBTI-induced V/sub T/ mismatch shift may represent a serious reliability concern for CMOS analog applications. Furthermore, induced /spl beta/ mismatch shift (affecting drain current level at a fixed gate overdrive voltage) may also impact drain current and transconductance mismatch. In this paper, experimental results of the statistics and scaling properties of NBTI-induced V/sub T/ and /spl beta/ mismatch shifts in saturation, and models describing these results, are presented.     

Simulation of slow current transients and current compression in AlGaAs/GaAs HFETs

Two-dimensional transient simulations of AlGaAs/GaAs HFETs are performed in which substrate traps and surface states are considered. When the drain voltage is raised abruptly, the drain current overshoots the steady-state value, and when it is lowered abruptly, the drain current remains at a low value, showing drain-lag behavior. Turn-on characteristics are also calculated when both the gate voltage and the drain voltage are changed abruptly, and quasi-pulsed I-V curves are derived from them. It is shown that the drain lag due to substrate traps could become a cause of so-called current compression of the HFETs. It is also shown that gate lag due to surface states could become a major cause of the current compression.     

Fabrication of Ferroelectric Gate Memory Device Using BLT/HfO2/Si Gate Structure

Ferroelectric gate FET's with BLT/HfO₂ structure were fabricated on 5-inch-scale Si wafer using well-refined CMOS compatible 0.8 μm-based fabrication processes for the first time. We obtained excellent device characteristics and good memory operations of the fabricated n-ch and p-ch MFIS-FET's, in which the memory window and on/off drain current ratio of typical p-ch memory device were measured to be 1.5 V at V_G of ±5 V and 8 orders-of-magnitude, respectively. We also confirmed by evaluating the gate voltage and gate size dependences of device properties that the fabricated devices showed quantitatively reasonable ferroelectric memory operations.     

Random Telegraph Noise in 30 nm FETs with Conventional and High-κ Dielectrics

The magnitude of fractional current variation in ultra-small (30 nm channel length) MOSFETs due to single charge trapping-detrapping events at any position within the gate dielectric is studied using numerical simulation. These random telegraph signals in the drain current indicate the amplitude of low frequency MOSFET noise. Simulations are performed for realistic devices with poly-silicon gates subject to poly-silicon depletion, and for both SiO₂ and HfO₂ as dielectric materials.     

Monte Carlo analysis of dynamic characteristics and high‐frequency noise performances of nanoscale double‐gate MOSFETs

In this paper, a full‐band Monte Carlo simulator is employed to study the dynamic characteristics and high‐frequency noise performances of a double‐gate (DG) metal–oxide–semiconductor field‐effect transistor (MOSFET) with 30 nm gate length. Admittance parameters (Y parameters) are calculated to characterize the dynamic response of the device. The noise behaviors of the simulated structure are studied on the basis of the spectral densities of the instantaneous current fluctuations at the drain and gate terminals, together with their cross‐correlation. Then the normalized noise parameters (P, R, and C), minimum noise figure (NF_min), and so on are employed to evaluate the noise performances. To show the outstanding radio‐frequency performances of the DG MOSFET, a single‐gate silicon‐on‐insulator MOSFET with the same gate length is also studied for comparison. The results show that the DG structure provides better dynamic characteristics and superior high‐frequency noise performances, owing to its inherent short‐channel effect immunity, better gate control ability, and lower channel noise. Copyright © 2012 John Wiley & Sons, Ltd.     

Analytical and Numerical Investigation of Noise in Nanoscale Ballistic Field Effect Transistors

The current of ballistic nanoscale MOSFETs is expected to exhibit shot noise, essentially because the electron distribution is very far from equilibrium. Here, we derive an analytical expression of shot noise in fully ballistic MOSFETs and show how it can be computed on the basis of numerical simulations of the DC electrical properties. We show that the power spectral density of shot noise of the drain current is strongly suppressed as an effect of both Pauli exclusion and electrostatic interaction. The amount of such suppression depends on the device structure, and in particular on the gate capacitance. Results on shot noise of the gate current are also shown, since such the leakage current might be significant in nanoscale MOSFETs, for small equivalent oxide thickness.     

Thermal noise in nanometric DG-MOSFET

The noise performance of double-gated (DG) and single-gated (SG) MOSFETs is compared. We observe a significant improvement of the noise figure (NF) in the DG structure, which is explained in terms of a favorable increase of cross-correlation between the drain and gate currents. Finally, we showed that the presence of a residual P-type impurity in the channel of a DG structure induces noticeable changes in the spectral density of the gate current fluctuations that is reflected on the noise figure.     

Microscopic simulation of RF noise in junctionless nanowire transistors

A deterministic solver for the analysis of microscopic noise and small-signal fluctuations in junctionless nanowire field-effect transistors is presented, which is based on a self-consistent and simultaneous solution of the Poisson/Schrödinger/Boltzmann equations. It is verified that the numerical framework fulfills the vital properties of reciprocity and passivity in the small-signal sense, and yields Johnson–Nyquist noise under equilibrium conditions. Key figures such as the cutoff frequency, drain excess noise factor, the Fano factor, and gate/drain correlation coefficient are presented at various bias conditions. In this work we show that similar to the inversion-mode MOSFETs, the gate and drain current noises mainly stem from the warm electrons at the source side, whereas the hot electrons do not have a significant contribution. Also, our results show that the device behaves similar to long-channel FETs in terms of its excess noise even for a channel length of 10 nm, due to the strong control of its electrostatics by the all-around gate.     

Modeling and comparative analysis of DC characteristics of AlGaN/GaN HEMT and MOSHEMT devices

In this paper, a charge control model is developed for AlGaN/GaN High Electron Mobility Transistor (HEMT) and Metal Oxide Semiconductor High Electron Mobility Transistor (MOSHEMT) by considering the triangular potential well in the two‐dimensional electron gas (2DEG) and simulated with matlab . The obtained results from the developed model are compared with the experimental data for drain current, transconductance, gate capacitance and threshold voltage of both devices. The physics‐based models for 2DEG charge density, threshold voltage and gate capacitance have been developed. By using these developed models, the drain current for both linear and saturation modes is derived. The predicted threshold voltage with the variation of barrier thickness has been plotted. A positive threshold voltage can be obtained by decreasing the barrier thickness that builds up the foundation for enhancement mode MOSHEMTs. The predicted C‐V, I_d‐V_gs, I_d‐V_ds and transconductance characteristics show an excellent agreement with the experimental results from the literature and hence validate the developed model. The results clearly establish the potential of using AlGaN/GaN MOSHEMT approach for high power microwave and switching applications. Copyright © 2015 John Wiley & Sons, Ltd.     

Numerical Analysis of Coaxial Double Gate Schottky Barrier Carbon Nanotube Field Effect Transistors

Carbon nanotube field-effect transistors (CNTFETs) have been studied in recent years as a potential alternative to CMOS devices, because of the capability of ballistic transport. The ambipolar behavior of Schottky barrier CNTFETs limits the performance of these devices. A double gate design is proposed to suppress this behavior. In this structure the first gate located near the source contact controls carrier injection and the second gate located near the drain contact suppresses parasitic carrier injection. To avoid the ambipolar behavior it is necessary that the voltage of the second gate is higher or at least equal to the drain voltage. The behavior of these devices has been studied by solving the coupled Schrödinger-Poisson equation system. We investigated the effect of the second gate voltage on the performance of the device and finally the advantages and disadvantages of these options are discussed.     

1/f Noise: threshold voltage and ON-current fluctuations in 45 nm device technology due to charged random traps

Discrete impurity effects in terms of their statistical variations in number and position in the inversion and depletion region of a MOSFET, as the gate length is aggressively scaled, have recently been investigated as being a major cause of reliability degradation observed in intra-die and die-to-die threshold voltage variation on the same chip resulting in significant variation in saturation drive (on) current and transconductance degradation—two key metrics for benchmark performance of digital and analog integrated circuits. In this paper, in addition to random dopant fluctuations (RDF), the influence of random number and position of interface traps lying close to Si/SiO₂ interface has been examined as it poses additional concerns because it leads to enhanced experimentally observed fluctuations in drain current and threshold voltage. In this context, the authors of this article present novel EMC based simulation study on trap induced random telegraph noise (RTN) responsible for statistical fluctuation pattern observed in threshold voltage, its standard deviation and drive current in saturation for 45 nm gate length technology node MOSFET device. From the observed simulation results and their analysis, it can be projected that with continued scaling in gate length and width, RTN effect will eventually supersede as a major reliability bottleneck over the already present RDF phenomenon. The fluctuation patterns observed by EMC simulation outcomes for both drain current and threshold voltage have been analyzed for the cases of single trap and two traps closely adjacent to one another lying in the proximity of the Si/SiO₂ interface between source to drain region of the MOSFET and explained from analytical device physics perspectives.     

寄生电感对于功率MOSFET开关特性的影响

分散在MOSFET栅极、源极、漏极的寄生电感由于封装以及印制电路板（PCB）走线,改变了MOSFET的开关特性。通过仿真分析对比,指出MOSFET寄生电感存在如下特性：源极电感对栅极驱动形成负反馈,导致开关速度变慢,采用开尔文连接,可以将栅极回路与功率回路解耦,提高驱动速度;在米勒效应发生时刻需要合理地降低栅极电感来降低栅极驱动电流;漏极电感通过米勒电容影响MOSFET的开通速度,在关断时刻导致电压应力增加;在并联的回路当中,非对称的布局将导致MOSFET之间的动态不均流;当MOSFET在开关过程中,环路电感与MOSFET自身的结电容产生振荡时,可以在电路增加吸收电容减小环路电感,改变振荡特性。     

An analytic drain current model for long‐channel undoped gate stack surrounding‐gate MOSFETs including interface fixed charges

On the basis of the exact solution of Poisson's equation and Pao–Sah double integral for long‐channel bulk MOSFETs, a continuous and analytic drain current model for the undoped gate stack (GS) surrounding‐gate (SRG) metal–oxide–semiconductor field‐effect transistor (MOSFET) including positive or negative interface fixed charges near the drain junction is presented. Considering the effect of the interface fixed charges on the flat‐band voltage and the electron mobility, the model, which is expressed with the surface and body center potentials evaluated at the source and drain ends, describes the drain current from linear region to saturation region through a single continuous expression. It is found that the surface and body center potentials are increased/decreased in the case of positive/negative interface fixed charges, respectively, and the positive/negative interface fixed charges can decrease/increase the drain current. The model agrees well with the 3D numerical simulations and can be efficiently used to explore the effects of interface fixed charges on the drain current of the gate stack surrounding‐gate MOSFETs of the charge‐trapped memory device. Copyright © 2013 John Wiley & Sons, Ltd.     

Drain current multiplication in thin pillar vertical MOSFETs due to depletion isolation and charge coupling

Drain current multiplication in vertical MOSFETs due to body isolation by the drain depletion region and gate–gate charge coupling is investigated at pillar thicknesses in the range of 200–10 nm. For pillar thickness >120 nm depletion isolation does not occur and hence the body contact is found to be completely effective with no multiplication in drain current, whereas for pillar thicknesses <60 nm depletion isolation occurs for all drain biases and hence the body contact is ineffective. For intermediate pillar thicknesses of 60–120 nm, even though depletion isolation is apparent, the body contact is still effective in improving floating body effects and breakdown. At these intermediate pillar thicknesses, a kink is also observed in the output characteristics due to partial depletion isolation. The charging kink and the breakdown behavior are characterized as a function of pillar thickness, and a transition in the transistor behavior is seen at a pillar thickness of 60 nm. For pillar thickness greater than 60 nm, the voltage at which body charging occurs decreases (and the normalized breakdown current increases) with decreasing pillar thickness, whereas for pillar thickness less than 60 nm, the opposite trend is seen. The relative contributions to the drain current of depletion isolation and the inherent gate–gate charge coupling are quantified. For pillar thickness between 120 and 80 nm, the rise in the drain current is found to be mainly due to depletion isolation, whereas for pillar thicknesses <60 nm, the increase in the drain current is found to be governed by the inherent gate–gate charge coupling.     

Gate leakage behavior of source/drain-to-gate non-overlapped MOSFET structure

In this paper, novel nanoscale MOSFET with Source/Drain-to-Gate Non-overlapped and high-k spacer structure has been demonstrated to reduce the gate leakage current for the first time. The gate leakage behavior of novel MOSFET structure has been investigated with help of compact analytical model and Sentaurus Simulation. Fringing gate electric field through the dielectric spacer induces inversion layer in the non-overlap region to act as extended source/drain region. It is found that optimal source/drain-to-gate non-overlapped and high-k spacer structure has reduced the gate leakage current to great extent as compared to those of an overlapped structure. Further, the proposed structure had improved off current, subthreshold slope and drain induced barrier lowering characteristic with a slight degradation in source/drain series resistance and effective gate capacitance.