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Tin Oxide thin films have a large transmittance in the visible region of the electromagnetic spectrum, owing to the large bandgap, which varies from 3.6 eV to about 4.2 eV. In general, the films are transparent from a wavelength of 400nm to about 2000nm. The transparency decreases with increasing carrier concentration due to the larger absorbance by the electrons. The Tin Oxide films were deposited under a vacuum of 0.1 mbar on glass substrate by DC sputtering. The structural characterization was done using XRD spectral analysis which was followed by UV-VIS-NIR Spectroscopy. Optical properties of these films are investigated in the entire UV-Visible-IR region. The observed absorption edge lies at 3.8 eV for undoped tin oxide. 相似文献
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Mechanical properties of thin films 总被引:20,自引:0,他引:20
William D. Nix 《Metallurgical and Materials Transactions A》1989,20(11):2217-2245
The mechanical properties of thin films on substrates are described and studied. It is shown that very large stresses may
be present in the thin films that comprise integrated circuits and magnetic disks and that these stresses can cause deformation
and fracture to occur. It is argued that the approaches that have proven useful in the study of bulk structural materials
can be used to understand the mechanical behavior of thin film materials. Understanding the mechanical properties of thin
films on substrates requires an understanding of the stresses in thin film structures as well as a knowledge of the mechanisms
by which thin films deform. The fundamentals of these processes are reviewed. For a crystalline film on a nondeformable substrate,
a key problem involves the movement of dislocations in the film. An analysis of this problem provides insight into both the
formation of misfit dislocations in epitaxial thin films and the high strengths of thin metal films on substrates. It is demonstrated
that the kinetics of dislocation motion at high temperatures are expecially important to the understanding of the formation
of misfit dislocations in heteroepitaxial structures. The experimental study of mechanical properties of thin films requires
the development and use of nontraditional mechanical testing techniques. Some of the techniques that have been developed recently
are described. The measurement of substrate curvature by laser scanning is shown to be an effective way of measuring the biaxial
stresses in thin films and studying the biaxial deformation properties at elevated temperatures. Submicron indentation testing
techniques, which make use of the Nanoindenter, are also reviewed. The mechanical properties that can be studied using this
instrument are described, including hardness, elastic modulus, and time-dependent deformation properties. Finally, a new testing
technique involving the deflection of microbeam samples of thin film materials made by integrated circuit manufacturing methods
is described. It is shown that both elastic and plastic properties of thin film materials can be measured using this technique.
The Institute of Metals Lecture was established in 1921, at which time the Institute of Metals Division was the only professional
division within the American Institute of Mining and Metallurgical Engineers Society. It has been given annually since 1922
by distinguished men from this country and abroad. Beginning in 1973 and thereafter, the person selected to deliver the lecture
will be known as the “Institute of Metals Division Lecturer and R.F. Mehl Medalist” for that year.
WILLIAM D. NIX, Professor, obtained his B.S. degree in Metallurgical Engineering from San Jose State University, San Jose,
CA, and his M.S. and Ph.D. degrees in Metallurgical Engineering and Materials Science, respectively, from Stanford University,
Stanford, CA. He joined the faculty at Stanford in 1963 and was appointed Professor in 1972. In 1964, Professor Nix received
the Western Electric Fund Award for Excellence in Engineering Instruction and, in 1970, the Bradley Stoughton Teaching Award
of ASM. He received the 1979 Champion Herbert Mathewson Award and, in 1988, was the Institute of Metals Lecturer and recipient
of the Robert Franklin Mehl Award of TMS-AIME. He was elected Fellow of the American Society for Metals in 1978 and elected
Fellow of TMS-AIME in 1988. He also received a Distinguished Alumnus Award from San Jose State University in 1980, and he
served as Chairman of the 1985 Gordon Conference on Physical Metallurgy. In 1987, he was elected to the National Academy of
Engineering. In 1966, he participated in the Ford Foundation's “Residence in Engineering Practice” program as Assistant to
the Director of Technology at the Stellite Division of Union Carbide Corporation. From 1968 to 1970, Professor Nix was Director
of Stanford's Center for Materials Research. Professor Nix is engaged in research on the mechanical properties of solids.
He is principally concerned with the relation between structure and mechanical properties of materials in both thin film and
bulk form. He is coauthor of about 190 publications in these and related fields. Professor Nix teaches courses on dislocation
theory and mechanical properties of materials. He is coauthor of “The Principles of Engineering Materials,” published in 1973
by Prentice-Hall, Incorporated, Englewood Cliffs, NJ. 相似文献
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