Extremely high peak specific transconductance AlGaAs/GaAsheterojunction bipolar transistors

Self-aligned AlGaAs/GAs heterojunction bipolar transistors with peak specific transconductances as high as 25 mS/μm² of emitter area are discussed. These are the highest specific transconductances ever reported for a bipolar transistor. These devices, which contain no indium in the emitter, display specific parasitic emitter resistances of less than 1×10^-7 Ω-cm². This low parasitic resistance is attributed to an improved n-type contact technology, in which a molybdenum diffusion barrier and a plasma-enhanced chemical vapor deposition SiO₂ overlayer are used to achieve low specific contact resistivities     

A 6-GHz integrated phase-locked loop using AlGaAs/GaAsheterojunction bipolar transistors

A fully integrated 6-GHz phase-locked-loop (PLL) fabricated using AlGaAs/GaAs heterojunction bipolar transistors (HBTs) is described. The PLL is intended for use in multigigabit-per-second clock recovery circuits for fiber-optic communication systems. The PLL circuit consists of a frequency quadrupling ring voltage-controlled oscillator (VCO), a balanced phase detector, and a lag-lead loop filter. The closed-loop bandwidth is approximately 150 MHz. The tracking range was measured to be greater than 750 MHz at zero steady-state phase error. The nonaided acquisition range is approximately 300 MHz. This circuit is the first monolithic HBT PLL and is the fastest yet reported using a digital output VCO. The minimum emitter area was 3 μm×10 μm with f_t=22 GHz and f_max=30 GHz for a bias current of 2 mA. The speed of the PLL can be doubled by using 1-μm×10-μm emitters in next-generation circuits. The chip occupies a die area of 2-mm×3-mm and dissipates 800 mW with a supply voltage of -8 V     

An analysis of the large-signal characteristics of AlGaAs/GaAsheterojunction bipolar transistors

The large-signal characteristics of AlGaAs/GaAs heterojunction bipolar transistors are reported. A harmonic balance analysis technique is used for their analysis. This is based on equivalent circuit extractions using approximate physical equations for constraining the fitted solutions and for describing certain circuit element value bias trends. Class A and Class AB large signal behavior was measured and modeled satisfactorily. Power saturation is shown to occur due to the input signal entering the cutoff or the saturation region of the HBT operations. This is illustrated by time-dependent current/voltage waveforms and the power dependence of large-signal equivalent circuit elements. Depending on device bias and matching conditions the main courses of nonlinearities in device output may be caused by the nonlinearities in transconductance, input conductance, and base-collector capacitance     

Influence of dislocations on the DC characteristics of AlGaAs/GaAsheterojunction bipolar transistors

The influence of dislocations on the minority electron lifetime in p-type GaAs layers and on AlGaAs/GaAs HBTs has been investigated. The minority electron lifetime in 1×10¹⁹/cm³ doped p-GaAs decreases significantly when the dislocation density is greater than 10⁷/cm². This result agrees well with analysis of carrier transport in highly dislocated material. Current gain reduction in HBTs with high dislocation density is found to be due to two effects: reduction of the electron lifetime in the base layer and an increase of the recombination current in the emitter-base junction depletion region. These two effects are comparable in reducing the current gain     

Effect of emitter-base spacing on the current gain of AlGaAs/GaAsheterojunction bipolar transistors

An investigation of the effect of surface recombination and emitter-base-contact spacing on the DC current-gain of AlGaAs/GaAs heterojunction bipolar transistor (HBT) using thin AlGaAs emitter structures is discussed. The selectively-etched, thin-AlGaAs-emitter layer has been used to prevent an exposed extrinsic base region, which has previously limited current gain because of high surface recombination. It is found that a factor of ~50 improvement in the current gain can be achieved by proper surface passivation and emitter-base-contact spacing     

Thermal effects on the characteristics of AlGaAs/GaAsheterojunction bipolar transistors using two-dimensional numericalsimulation

Two-dimensional numerical simulations incorporating the spatial distributions of the energy band and temperature were used to study AlGaAs/GaAs heterojunction bipolar transistor characteristics. It was found that the negative differential resistance and the reduction of the base-emitter voltage for a constant base current in the active region are due to thermal effects. The differential current gain and cutoff frequency decrease when the transistor is operated at high power levels. The temperature distribution of the transistor operated in the active region shows a maximum at the collector region right beneath the emitter mesa. When the transistor is operated in the saturation region, the emitter contact region may be at a slightly lower temperature than the heat sink temperature. This thermoelectric cooling effect results from the utilization of the thermodynamically compatible current and energy flow formulations in which the energy band discontinuities are part of the thermoelectric power     

Impact of Al composition on RF noise figure of AlGaAs/GaAsheterojunction bipolar transistors

The influence of Al content on the RF noise characteristics of Al _xGa_1-xAs/GaAs heterojunction bipolar transistors (HBT's) is presented. It is shown that the minimum noise figure (F_min) at 2 GHz is reduced by increasing the Al mole fraction (x). This observed improvement in noise figure is directly correlated to the differences in dc current gain. The lowest measured F_min(2 GHz) of HBT's with emitter dimensions 2×(3.5×30) μm², were 1.3, 1.61, and 2.1 dB for x=0.35, 0.30, and 0.25 devices, respectively at I_c=3 mA. The measured results were found to agree well with calculated values over a wide range of collector currents     

High-performance low-base-collector capacitance AlGaAs/GaAsheterojunction bipolar transistors fabricated by deep ion implantation

Low-base-collector capacitance (C_bc) AlGaAs/GaAs HBTs with f_MAX>200 GHz and f_T=52 GHz have been fabricated. With co-implants of high energy, high dose He⁺ and H⁺ ions through the external base layer, part of the heavily doped n⁺ sub-collector was compensated leading to a decrease in the extrinsic portion of C_bc. The implants caused only a slight increase of base resistance. Using this approach in combination with a standard low dose, shallow collector compensating implant, C_bc of double implanted HBT's can be reduced by more than 35%     

Tradeoff between 1/f noise and microwave performance in AlGaAs/GaAsheterojunction bipolar transistors

The 1/f noise characteristics and microwave gain of AlGaAs/GaAs heterojunction bipolar transistors (HBT's) have been investigated as a function of surface passivation ledge length. These measurements clearly demonstrate that the ledge length imposes a tradeoff between the 1/f noise and microwave power gain performance. Compared to a conventional unpassivated self-aligned HBT, HBT's with 0.4 and 1.1 μm ledge lengths improve the equivalent input base noise current spectral density at 100 Hz by as much as 2 dB and 6.5 dB, respectively; while degrading the maximum available gain at 18 GHz by 0.3 dB and 2.4 dB, respectively     

A study and optoelectronic verification of AlGaAs/GaAsheterojunction bipolar transistor large-signal characteristics

A hybrid optoelectronic measurement system is constructed and used to obtain the large-signal characteristics of AlGaAs/GaAs heterojunction bipolar transistors. The measurement system utilizes a terahertz-bandwidth electrooptic transducer gated by 100-fs laser pulses to interrogate the time-domain waveforms at the device input and output nodes. A microwave signal phase-locked to the laser pulse-train is used to synchronously excite the device in both small-signal and large-signal regimes. The measurement system is capable of 50-GHz bandwidth and provides time-domain voltage waveforms that can be used directly to verify the time-domain results of the large-signal analysis     

A low-noise K-Ka band oscillator AlGaAs/GaAsheterojunction bipolar transistors

The design considerations, fabrication process, and performance of the first K-Ka-band oscillator implemented using a self-aligned AlGaAs/GaAs heterojunction bipolar transistor (HBT) are described. A large-signal time-domain-based design approach has been used which applies a SPICE-F simulator for optimization of the oscillator circuit parameters for maximum output power. The oscillator employs a 2×10-μm² emitter AlGaAs/GaAs HBT that was fabricated using a pattern inversion technology. The HBT has a base current 1/f noise power density lower than 1×10^-20 A²/Hz at 1 kHz and lower than 1×10^-22 A/²/Hz at 100 kHz for a collector current of 1 mA. The oscillator, which is composed of only low-Q microstrip transmission lines, has a phase noise of -80 dBc/Hz at 100 kHz off carrier when operated at 26.6 GHz. These results indicate the applicability of the HBTs to low-phase-noise monolithic oscillators at microwave and millimeter-wave frequencies, where both Si bipolar transistors and GaAs FETs are absent     

AlGaAs/GaAs Heterojunction bipolar power transistors

An AlGaAs/GaAs heterojunction bipolar transistor with a total emitter periphery of 320 ?m has been developed for power amplifier applications. For the base contact, Zn diffusion was used to convert the n-type emitter material into p-type with a doping of ?1.0 × 1020 cm?3. Because of the highly doped layer, contact resistivity was extremely low (5 × 10?7 ?cm2). At 3 GHz, a CW output power of 320 mW with 7 dB gain and 30% power-added efficiency was obtained. Under pulsed operation, the output power increased to 500 mW with 6 dB gain and 40% power-added efficiency. With further device structure optimisations, the power performance of heterojunction bipolar transistors is expected to rival, or even surpass, that of the GaAs MESFETs.     

Numerical study on the injection performance of AlGaAs/GaAs abruptemitter heterojunction bipolar transistors

The injection performance of abrupt emitter HBT's and related effects on the device characteristics are studied by taking an Npn Al _0.25Ga_0.75As/GaAs/GaAs HBT as an example. In order to take into account the coupled transport phenomena of drift-diffusion and tunneling-emission processes across the abrupt heterojunction in a single coupled formulation, a numerical technique based on the boundary condition approach is employed. Compared to previous numerical investigations relying on either a drift-diffusion or a tunneling-emission scheme, more complete and accurate characterization of abrupt emitter HBT's has been achieved in this study. It is demonstrated that the presence of abrupt discontinuities of the conduction and valence bands at the emitter-base junction brings several different features to the injection efficiency and recombination characteristics of abrupt emitter HBT's compared to graded emitter HBT's. Based on investigations of the emitter doping effects on the current drive capability and device gain, an optimum emitter doping density is determined for a given structure. When the emitter-base p-n junction of the abrupt emitter HBT is slightly displaced with respect to the heterojunction, significant changes in the electrical characteristics are observed. A small displacement of the p-n junction into the narrow bandgap semiconductor is found to be very attractive for the performance optimization of abrupt emitter HBT's     

High-frequency characteristics of AlGaAs/GaAs heterojunction bipolar transistors

The fabrication and high-frequency performance of MBE-grown AlGaAs/GaAs heterojunction bipolar transistors (HBT's) is described. The achieved gain-bandwidth product fTis 25 GHz for a collector current density Jcof 1 × 10⁴A/cm²and a collector-emitter voltage VCEof 3 V.fTcontinues to increase with the collector current in the high current density region over 1 × 10⁴A/cm²with no emitter crowding effect nor Kirk effect. The limitation on fTin fabricated devices is found to be caused mainly by the emitter series resistance.     

Fabrication and characterization of AlGaAs/GaAs heterojunction bipolar transistors

The fabrication and characterization of MBE-grown AlGaAs/GaAs heterojunction bipolar transistors (HBT's) are described, A Be redistribution profile in the HBT epi-layer at the emitter-base heterojunction interface is investigated using secondary ion mass spectrometry, A relatively high substrate temperature of 650°C during growth can be employed by introducing a 100-Å undoped spacer layer between the emitter and base layer. A simple wafer characterization method using phototransistors is demonstrated for accurately predicting current gain in a three-terminal device. A dc current gain of up to 230 is obtained for the fabricated HBT with a heavy base doping of 1 × 10¹⁹/cm³. A gain-bandwidth product fTof 25 GHz is achieved with a 4.5-µm-width emitter HBT.     

High/fmax collector-up AlGaAs/GaAsheterojunction bipolar transistors with a heavily carbon-doped basefabricated using oxygen-ion implantation

AlGaAs/GaAs collector-up heterojunction bipolar transistors (HBTs) with a heavily carbon-doped base layer were fabricated using oxygen-ion implantation and zinc diffusion. The high resistivity of the oxygen-ion-implanted AlGaAs layer in the external emitter region effectively suppressed electron injection from the emitter, allowing collector current densities to reach values above 10⁵ A/cm ². For a transistor with a 2-μm×10-μm collector, f_T was 70 GHz and f_max was as high as 128 GHz. It was demonstrated by on-wafer measurements that the first power performance of collector-up HBTs resulted in a maximum power-added efficiency of as high as 63.4% at 3 GHz     

Measurement of junction temperature of an AlGaAs/GaAsheterojunction bipolar transistor operating at large powerdensities

An electrical method to determine the junction temperature of a power bipolar transistor is presented. The success of this method does not rely on the constancy of thermal resistance over the wide range of operating temperatures. It is hence suitable for transistors operating at high power densities where conventional measurement techniques would not apply. Using this method, we establish that the junction temperature can be 40°C higher than the product of the low temperature thermal resistance and the power dissipation     

GaAs/AlGaAs heterojunction emitter-down bipolar transistors fabricated on GaAs-on-Si substrate

GaAs/AlGaAs heterojunction bipolar transistors with emitter-down structure were fabricated on GaAs-on-Si substrate for the first time. A maximum current gain of 25 was measured at a collector current density of 6250 A/cm². This value is comparable with that from similar devices fabricated on GaAs substrates. This result, along with previous work on large-scale integration of emitter-down transistors, demonstrates the potential for high-level integration of bipolar devices on GaAs-on-Si substrates.     

High-frequency output characteristics of AlGaAs/GaAs heterojunction bipolar transistors

A model has been developed which generates the high-frequency i/sub c/-v/sub ce/ output characteristics of bipolar transistors from computed cutoff frequency against current density data. The presented results, which can be used directly for large-signal modelling are the first report of high-frequency output characteristics of bipolar transistors.<>     

Monte Carlo simulation of AlGaAs/GaAs heterojunction bipolar transistors

A first demonstration of one-dimensional Monte Carlo simulations of AlGaAs/GaAs heterojunction bipolar transistors is reported. The electron motion is solved by a particle model, while the hole motion is solved by a conventional hydrodynamic model. It is shown that the compositional grading of AlxGa1-xAs in the base region is effective to cause the ballistic acceleration of electrons in the base region, resulting in a high collector current density of above 1 mA/µm². The current-gain cutoff frequency fT reaches 150 GHz if the size of a transistor is properly designed. Also shown is the relation between the device performances and the electron dynamics investigated.