24~30 GHz高精度低附加相移数控衰减器

基于0.18 μm CMOS工艺,设计并实现了一种5位高精度低附加相移数控衰减器。该衰减器的衰减动态范围为15.5 dB,步进为0.5 dB。采用了T型衰减结构和SPDT型衰减结构的衰减网络。采用了悬浮栅和悬浮衬底,提高了衰减精度,减小了插入损耗。采用了相位补偿网络,有效降低了衰减器的附加相移。测试结果表明,在24~30 GHz频带范围内,衰减步进为0.5 dB,插入损耗小于8 dB,衰减误差均方根(RMS)小于0.45 dB,附加相移小于±5°。芯片尺寸为1.2 mm×0.3 mm。     

一种DC～10GHz的低附加相移高衰减精度的开关型衰减器

本文设计了一种DC～10GHz的带有低附加相移以及高衰减精度的6位开关型衰减器。分析了三种传统的开关型的T型、简化T型以及∏型衰减器的拓扑结构^[1],通过在∏型衰减器的结构中采用电感和电容补偿技术,实现在超宽带范围内的低附加相移^[2]。该基于55-nm CMOS工艺的6位衰减器,芯片核心版图面积为0.05mm²,仿真结果表明,该衰减器在DC～10GHz频段范围内的插入损耗为3dB～4.3dB,64态的回波损耗均小于10.6dB,衰减误差的均方根值小于0.18dB,64态的衰减附加相移小于2.5度,衰减器在5GHz时处于参考态下的1dB压缩点对应的输入功率为7.7dBm。     

一款DC～40 GHz六位数控衰减器芯片设计

针对微波通信等领域的整机系统对超宽带数控衰减器的需求,采用GaAs pHEMT 0.15μm工艺研制了一款DC～40 GHz带数字驱动的6位数控衰减器芯片。衰减器电路采用6个基本衰减单元级联结构,每个衰减单元采用合适的电路拓扑,通过合理优化后,实现了低插入损耗、高衰减精度、低衰减附加相移和小尺寸的目标。由芯片在片测试结果可知,插入损耗小于6.5 dB,输入输出电压驻波比小于1.8:1,均方根衰减精度（64态）小于0.8 dB,全态衰减附加相移小于±10°,静态功耗为3 mA@-5 V,芯片尺寸为2.08 mm×1.1 mm×0.1 mm。     

10.4~28 GHz的超宽带6位数字衰减器设计

基于中芯国际40 nm CMOS工艺设计并实现了一种超宽带6位数字衰减器,其工作频率为10.4～28 GHz。该衰减器采用内嵌式开关型结构,6位衰减单元的设计采用T型、桥T型和π型三种拓扑结构。该6位衰减器可以实现0.5 dB的衰减步进,31.5 dB的动态衰减范围。采用大衰减量幅度补偿电路和高匹配特性的衰减位级联结构,衰减器在10.4～28 GHz的频段范围内具有平坦的64态衰减量,衰减器的整体前仿真插入损耗为1.73～2.08 dB,后仿真插入损耗为4.32～6.31 dB,64态的输入输出回波损耗均小于-10 dB。     

GaN MMIC六位数字衰减器的设计

基于GaN HEMT工艺成功研制出一款宽带六位数字衰减器,衰减范围为0～31.5 dB.通过研究GaN HEMT开关器件模型及电阻式衰减网络,选取合适的衰减器拓扑,减小了衰减器的插入损耗,提高了衰减精度,缩小了芯片尺寸.测试结果表明,在2～ 18 GHz频带内,该衰减器的插入损耗小于4.8 dB,64态衰减精度均方根误差小于0.6 dB,输入回波损耗小于-13 dB,输出回波损耗小于-12.5 dB,附加相移为-14°～4°.在10 GHz下,其1 dB压缩点输入功率达到34.5 dBm.裸片尺寸为2.30 mm× 1.10 mm.     

带数字驱动的Ku波段6bit数控衰减器设计北大核心CSCD

采用GaAs增强/耗尽型（E/D）赝配高电子迁移率晶体管（PHEMT）工艺研制了一款带数字驱动的Ku波段6bit数控衰减器微波单片集成电路（MMIC）。该MMIC将数字驱动和6bit数控衰减器集成在一起,数字驱动电路采用的是直接耦合场效应晶体管逻辑（DCFL）电路,6bit数控衰减器由6个衰减基本态级联组成。版图经过合理优化后,最终的MMIC芯片尺寸为2.4mm×1.3mm。测试结果表明,在12~18GHz,芯片可以实现最大衰减量为31.5dB,步进为0.5dB的衰减量控制。衰减64态均方根误差小于0.6dB,附加相移-2°~2.5°,插入损耗小于6.1dB,输入输出驻波比均小于1.5∶1。     

Ku波段6bit数字衰减器MMIC的小型化设计

基于0.25μm GaAs增强/耗尽(E/D)型赝配高电子迁移率晶体管(PHEMT)工艺,设计并实现了一款集成了6 bit并行驱动器的数字衰减器单片微波集成电路(MMIC)。该衰减器采用T型衰减网络结构,不仅缩小了芯片面积,并且可实现较好的衰减精度和衰减附加相移。芯片在片测试结果表明,在-5 V电源电压下驱动器的静态电流为1.8 mA,响应速度为25 ns。在9~18 GHz频率范围内,衰减器芯片的插入损耗不大于3.6 dB,均方根衰减精度不大于0.7 dB,衰减附加相移为-2°~4°,输入电压驻波比(VSWR)不大于1.25∶1,输出VSWR不大于1.5∶1。芯片尺寸为1.6 mm×0.6 mm×0.1 mm。该电路具有响应速度快、功耗低、面积小、衰减附加相移小等优点,可广泛应用于通信设备和微波测量系统中。     

一种新颖的4bit和5bit超宽带GaAs单片数字衰减器

介绍了一种新颖的DC～20GHz的4bit和5bit GaAs单片数字衰减器的设计、制造和测试结果．该衰减器的设计采用纵向思维的方法．最终得到的4bit数字衰减器的主要性能指标是：在DC～20GHz频带内,插入损耗≤3.5dB,最大衰减量15dB,衰减步进1dB,衰减平坦度≤0.2dB,衰减精度≤±0.3dB,两端口所有态的电压驻波比≤1.6,相对于参考态,衰减态的插入相移在－10°～5°以内,芯片尺寸1.8mm×1.6mm×0.1mm．5bit数字衰减器的主要性能指标是：在DC～20GHz频带内,插入损耗≤3.8dB,最大衰减量15.5dB,衰减步进0.5dB,衰减平坦度≤0.3dB,衰减精度≤±0.4dB,两端口所有衰减态的电压驻波比≤1.8,相对于参考态,衰减态的插入相移在－14°～2°以内,芯片尺寸2.0mm×1.6mm×0.1mm．     

串转并数控集成宽带幅相控制MMIC

基于NEDI 0.15μm E/D GaAs PHEMT工艺,研制出了一款集成了6位移相器、6位衰减器和24位串转并数字驱动器的X-Ku波段宽带幅相控制多功能芯片。其中衰减器采用了电容补偿T型开关衰减结构和电感校正π型开关衰减结构,具有衰减精度高和相位变化小等优点。24位串转并数字电路极大地减少了MMIC控制线的数目,且具有存储两个控制码的能力。测试结果表明:在8~18GHz频带内,插入损耗为-9.8~-12.2dB,移相误差均方根值(RMS)小于8°,移相幅度均衡小于±1.2dB。衰减误差RMS小于1.2dB,衰减附加相移RMS小于6°,输入输出驻波小于1.8。24位串转并数字电路时钟频率为17 MHz,高低电平的阈值电压分别为3.6V和3.4V。     

一种基于相移补偿技术的Ka波段四通道幅相控制芯片

提出了一种基于衰减器附加相位补偿技术的Ka波段四通道幅相控制芯片,采用有源矢量合成移相器和无源衰减器进行高精度幅相控制,每个通道由功率放大器、有源移相器、无源衰减器、功分器等单元构成。提出了一种新颖的基于可调谐补偿电容阵列的相移补偿技术,实现了较低的衰减附加相移。测试结果表明,通道增益大于24 dB,带内增益平坦度小于2 dB,输出1 dB压缩点大于10 dBm,发射效率大于12%@P_1dB,6位RMS移相精度小于2°,5位RMS衰减精度小于1 dB,衰减相位误差小于4°。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.