1700 V精细沟槽栅IGBT器件设计

为了改善绝缘栅双极型晶体管(IGBT)器件关断损耗和导通压降之间的折中关系,同时降低器件制造成本,基于1 700 V电压平台设计了一种采用精细沟槽栅结构的IGBT。采用TCAD软件进行仿真,研究衬底电阻率、衬底厚度、沟槽栅深度、沟槽栅宽度、载流子存储层注入剂量、沟槽栅元胞结构等因素对精细沟槽栅IGBT器件性能参数的影响,确定了最优工艺参数,并对1 700 V精细沟槽栅IGBT芯片进行流片和封装。测试结果显示,相比普通沟槽栅IGBT模块,1 700 V精细沟槽栅IGBT模块在芯片面积减小34.2%的情况下,关断损耗降低了8.6%,导通压降仅升高5.5%,器件性价比得到了优化。     

基于高压大电流模块应用的3300V软穿通快速IGBT的设计

设计了3 300V/50A的软穿通型IGBT芯片(SPT IGBT),利用数值仿真软件MEDICI对其各项特性进行了仿真研究,包括静态特性、开关特性、动态雪崩特性、短路特性、电容特性和闩锁特性,在满足设计需求的同时重点进行动态失效特性仿真,验证了该器件的可靠性。仿真结果显示,器件的额定工作电流为50A、正向阻断电压为4 178.8V、阈值电压VTH为7.8V、导通压降为2.67V、短路电流为857A、工作电流为100A时的雪崩耐量为1.755J。利用局域载流子寿命控制的方法对器件进行优化后,器件的正向阻断电压仍为4 178.8V,导通压降为4.13V,没有明显的改变,关断时间由6 725.75ns降低到了1 006.49ns,关断速度提高了568%,大大提高了器件的性能,降低了损耗。     

基于Hefner模型的SPT+型IGBT改进通态数学模型

新一代增强平面栅软穿通型(Soft Punch Through+,SPT+)IGBT采用了阴极侧载流子浓度增强技术,降低了通态损耗.现有仿真模型大多是基于典型穿通型(Punch Through,PT)IGBT建立的,无法准确描述SPT+型IG-BT的通态特性.本文在现有PT模型的基础上,结合SPT+型IGBT的结构特点和工作特性,将基区分为PIN区和PNP区两个部分,对阴极侧载流子分布进行优化,提出一种改进的SPT+型IGBT稳态模型.通过新旧模型的仿真波形与实测波形的对比,验证了改进模型的准确性.     

SPT -IGBT的性能研究及优化

本文研究了一种改进型软穿通（SPT）IGBT结构,被称为SPT -IGBT,并给出了基于1200V器件结构的动静态特性以及所采用技术的仿真结果。在此基础上进一步对器件结构的优化进行了讨论。和传统结构相比,SPT -IGBT具有更低的饱和导通压降（VCE(sat)）和更优秀的开关特性,因此它非常适用于3000V以上的应用场合。同时,薄芯片厚度带来的高开关速度使得SPT -IGBT在1200V和1700V的应用领域也有着很强的竞争优势。     

内透明集电极绝缘栅双极晶体管温度特性的仿真研究

ITC-IGBT是新一类IGBT,它在PT-IGBT结构基础上,在集电区近集电结附近引入一局域载流子寿命控制(LCLC)层,只要该层内载流子寿命足够低,则LCLC层对其以下衬底内的空穴具有屏蔽作用,从而使集电区范围变窄、集电区电子有效扩散长度减小,可使器件集电区由非透明变成内透明。本论文首次对600V平面栅内透明集电极IGBT(ITC-IGBT)的温度特性进行了仿真研究,并与传统PT-IGBT进行了比较。仿真结果表明,ITC-IGBT不仅技术折衷曲线明显优于PT-IGBT,且电流零温度系数点以及关断损耗随温度的增加率也比PT-IGBT要低,这说明ITC-IGBT不仅具有优良的电参数指标,同时具有良好的热稳定性。是一类颇具潜力的低压快速IGBT。     

SPT^＋，下一代低损耗高压IGBT

继高压软穿通（Soft-Punch-Through，SPT）IGBT的成功推出，本论文将介绍采用新研发的SPT＋技术的下一代HV-IGBT。新型IGBT，除了与成熟的HV—SPTIGBT一样，具有光滑的开关波形和极佳的SOA性能指标，同时通态和关断损耗大大降低。     

内透明集电极IGBT（ITC-IGBT）与PT-IGBT、FS-IGBT的性能比较

首次对600 V平面型内透明集电极IGBT(ITC-IGBT)、PT-IGBT和FS-IGBT通态电压与关断能耗之间的折中曲线进行了仿真分析和比较.ITC-IGBT是在PT-IGBT结构中的p+型衬底与n型缓冲层之间加入一层厚度很薄、掺杂浓度低于p+衬底的p型内透明集电区,并且在集电区之内、集电结附近设置具有很低过剩载流子寿命的载流子局域寿命控制层,从而实现透明集电极的效果.仿真结果表明,ITC-IGBT具有优良的综合性能,采用缓冲层浓度最优值的ITC-IGBT的折中曲线明显优于PT-IGBT与FS-IGBT.说明ITC-IGBT结构不仅能解决现有透明集电极IGBT超薄片加工工艺难度大的问题,还为进一步改善IGBT器件综合性能提供了新途径.     

一种带有超结浮空层的槽栅场阻IGBT

本文提出了一种带有超结浮空层的槽栅场阻IGBT,它具有高的击穿电压(>1200V),低的正向压降和快速的关断能力。高掺杂的 SJ 浮空层在阳极侧引入了电场峰的同时优化了器件内载流子分布,带来关态击穿电压提高,开态、开关态能量损耗减少等好处。在保持电荷平衡的前提下,增加 SJ 浮空层的厚度可以提高击穿电压和降低正向压降,降低 P 型阳极浓度可以减少关断损耗。与传统结构相比,新结构击穿电压提高了100V,正向压降降低了0.33V（电流密度为100A/cm2）,关断时间缩短了60%。     

一种具有载流子存储层的500 V高速SOI-LIGBT

为了改善LIGBT的关断特性,已有一种采用PMOS管来控制LIGBT阳极空穴注入的方法。在此基础上,提出了一种具有载流子存储效应的高速SOI-LIGBT结构。采用二维仿真软件MEDICI,对器件P-top区的剂量、载流子存储层的长度、掺杂浓度等参数进行优化设计。结果表明,SOI-LIGBT的击穿电压为553 V,正向压降为1.73 V。关断时,引入的PMOS管可以阻止LIGBT阳极向漂移区注入空穴,使器件的关断时间下降到13 ns,相比传统结构下降了87.6%。     

一种具有新耐压层结构的IGBT

介绍了一种具有新型耐压层结构的IGBT——低功耗IGBT。新结构用三重扩散的方法在n- 单晶片上引入了n 缓冲层。保留了NPT-IGBT中薄而轻掺杂的背p 层和高载流子寿命的本质优点,同时又具有PT-IGBT中n-/n 双层复合的薄耐压层 (即薄基区) 的优点。计算机仿真得出,新结构IGBT的关断损耗比传统的IGBT减小50%左右。针对LPL-IGBT的创新点——新耐压层结构,我们还进行了优化仿真。     

An insulated gate bipolar transistor employing the plugged n anode

A vertical Insulated Gate Bipolar Transistor, entitled CB-IGBT(Carrier-inducing Barrier-controlled IGBT) has been proposed and verified by a two-dimensional numerical simulation. The structure of the proposed device is almost identical with that of the conventional IGBT, except for the anode structure in which the p-barrier region and n⁺ anode region are employed. In the CB-IGBT, the potential barrier height at the junction between the p-barrier region and n-drift region is controlled by the amount of carriers, so that the trade-off relation between the on-state voltage drop and the switching speed is decoupled efficiently. The switching speed of CB-IGBT is so much enhanced with a negligible increase of the on-state voltage drop, since electrons stored in the n-drift region can be extracted rapidly into the n⁺ anode via p-barrier region during turn-off process.     

A novel high performance insulated gate bipolar transistor

For the first time, a new concept of LDE-IGBT (local drift-region enhanced IGBT) is proposed and verified by two-dimensional (2D) device-circuit mixed simulations. The structure of the proposed device is almost identical to that of the conventional IGBT, except for an additional n⁺ plugged region under the gate contact. The proposed device exhibits larger maximum operating current, meaning higher current capability, which is expected for high-power operation. The simulation results indicate the LDE-IGBT can obtain a low on-state voltage drop with negligible increase of turn-off time due to lower sensitivity of turn-off time to the novel structure. Therefore, the trade-off relation between on-state voltage and turn-off time is improved and decoupled efficiently. Finally, the effects of three novel structure parameters on the on-state voltage are demonstrated in detail.     

一种新型高发射效率的阳极短路IGBT

提出了一种新型的双发射短接的阳极短路IGBT结构,该结构有两个空穴放射区和二氧化硅阻挡层。首先,第二发射区可以增加空穴的发射效率同时阻止电子直接流向金属,增加了阳极上的电阻和电压,有效的抑制了负阻效应;另一方面,二氧化硅阻挡层使得大量电子聚集在阳极区附近,进一步降低了导通压降。结果表明：相对于传统NPT IGBT, NPN-IGBT和阳极短路IGBT,导通压降分别降低了10%, 17%, 30%。另外,这种阳极短路结构由于有一个电子通道,在关断过程中可以像阳极短路结构一样抽取过剩载流子,使得其关断时间很短,在同样的导通压降下关断,相对于传统NPT IGBT,NPN-IGBT和阳极短路IGBT,关断损耗分别降低了43.7%, 32%, 28%。这种新结构最终实现了导通压降和关断损耗之间很好的折中。     

A novel TFS-IGBT with a super junction floating layer

A novel trench field stop (TFS) IGBT with a super junction (SJ) floating layer (SJ TFS-IGBT) is proposed.This IGBT presents a high blocking voltage (>1200 V), low on-state voltage drop and fast turn-off capability. A SJ floating layer with a high doping concentration introduces a new electric field peak at the anode side and optimizes carrier distribution, which will improve the breakdown voltage in the off-state and decrease the energy loss in the on-state/switching state for the SJ TFS-IGBT. A low on-state voltage (VF) and a high breakdown voltage (BV) can be achieved by increasing the thickness of the SJ floating layer under the condition of exact charge balance. A low turn-off loss can be achieved by decreasing the concentration of the P-anode. Simulation results show that the BV is enhanced by 100 V, VF is decreased by 0.33 V (at 100 A/cm2) and the turn-off time is shortened by 60%, compared with conventional TFS-IGBTs.     

Trench SJ IGBT 的仿真研究

本文对沟槽型超结绝缘栅双极晶体管(trench SJ IGBT)进行了全面的分析,并通过Sentaurus TCAD仿真软件将其与沟槽型场截止绝缘栅双极晶体管(trench FS IGBT)进行了详尽的对比,仿真结果显示,在相同的条件下与trench FS IGBT 相比,trench SJ IGBT 的击穿电压提高了100 V,饱和导通压降降低了0.2 V,关断损耗减少了50%。最后,文章研究了电荷不平衡对trench SJ IGBT 的动静态参数的影响。对各参数和它们对电荷不平衡的灵敏度之间的折中进行了讨论。     

A new vertical IGBT structure with a monolithic over-current,over-voltage, and over-temperature sensing and protecting circuit

A new 600 V vertical Insulated Gate Bipolar Transistor (IGBT) structure with monolithically integrated over-current, over-voltage, and over-temperature sensing and protecting functions has been developed to exploit an extremely excellent trade-off characteristic between an on-state voltage drop and turn-off time for the first time. This device can be easily made by the conventional IGBT fabrication process. An accurate and a real-time device temperature detection, as well as a high withstand capability against over-current and over-voltage conditions (short circuit immunity of 30 μsec, clamped collector voltage of 640 V), have been achieved. Furthermore, an excellent trade-off characteristic of 1.40 V as an on-state voltage drop and of 0.18 μsec as a fall time is also obtained     

Novel buffer engineering: A concept for fast switching and low loss operation of planar IGBT

For the first time, an insulated gate bipolar transistor with a novel buffer is proposed and verified by two-dimensional (2D) mixed device-circuit simulations. The structure of the proposed device is almost identical with that of the conventional IGBT, except for the buffer layer which is formed by employing a three-step, gradually changing doping n⁺ structure. Compared with the conventional IGBT, the proposed device exhibits better trade-off relation between the conduction and switching losses. The turn-off time is halved from 9.4 μs of the conventional IGBT to 4.5 μs of the proposed device, so the operation speed of the proposed device is greatly improved. Further, the forward blocking voltage is enormously increased from 907 V of the proposed device to 1278 V of the proposed device, which is required for high power operation.     

Dual MOS gate controlled thyristor (DMGCT) structure withshort-circuit withstand capability superior to IGBT

A dual MOS gate controlled thyristor (DMGCT) structure is analyzed with experimental data and shown to have superior performance over insulated-gate bipolar transistor (IGBT) for power switching applications. The DMGCT device structure consists of a thyristor structure with the thyristor current constrained to flow via the channel region of a MOSFET. Although this increases the on-state voltage drop in the thyristor current path by a small amount due to the voltage drop across the low-voltage series MOSFET, this structure allows control of the thyristor current by the gate voltage applied to the MOSFET even after latch-up of the thyristor. This configuration allows uniform turn-off in the device with no current crowding. The DMGCT does not have any parasitic thyristor structure. In contrast to the IGBT, the saturation current of the DMGCT can be controlled independently of the on-state voltage drop