磁力研磨加工永磁极设计及仿真研究

为进一步提高磁力研磨加工的表面质量和加工效率,基于平面磁力研磨装置,采用端面中心材料去除且开矩形槽的强永磁材料作为磁极,进行磁力研磨加工。利用ANSYS对磁极不同端面形状、开槽尺寸的磁力线分布和磁场强度分布进行模拟仿真,并通过磁力研磨加工试验验证设计磁极实际加工效果。结果表明:去除中心材料的磁极磁力线分布更加密集且增大了磁极中心处的磁场强度,从而提高研磨效率;通过仿真对比发现,当磁极中心去除材料半径与底面半径之比为1:3且开矩形槽深宽之比为1:1时研磨质量最佳。     

SrTiO3陶瓷基片集群磁流变研磨加工表面特性研究

采用集群磁流变效应研磨加工工艺进行SrTiO3陶瓷基片研磨加工,分析了研磨盘材料、磨粒种类、研磨压力和磨粒团聚等因素对SrTiO3陶瓷基片表面粗糙度和表面完整性的影响。 结果表明:磁流变效应研磨工作液中的SiC、Al2O3和CeO2等磨料的大尺寸磨粒在SrTiO3陶瓷基片研磨加工表面产生的局部大尺寸划痕破坏了加工表面的完整性;采用铸铁研磨盘和SiO2磨料的磁流变研磨工作液研磨加工后,原始表面粗糙度Ra从约1.7854μm下降到0.6282μm,并且表面完整,SrTiO3材料与SiO2磨料之间存在的化学机械研磨过程促进了研磨加工表面性能的改善;研磨压力也是影响研磨加工表面粗糙度和大尺寸划痕的主要因素之一,研磨压力取较小值(1.875kPa）为宜。      

研磨压力对固结聚集体磨料垫自修正影响

固结磨料研磨过程中磨料的微破碎是实现固结磨料垫自修正特性的主要途径,研磨压力是影响磨粒微破碎的关键参数。选用单晶金刚石和聚集体金刚石作为磨粒制备固结磨料垫,在15 kPa压力下以石英玻璃为加工对象进行研磨实验,比较两者的材料去除率及加工稳定性;制备了4种陶瓷结合剂含量的聚集体金刚石,并制备成固结聚集体金刚石磨料垫,探索了不同压力下的固结聚集体金刚石磨料垫的自修正性能;分析了研磨后的工件表面粗糙度和表面微观形貌。结果表明:采用固结聚集体金刚石磨料垫,研磨后工件表面粗糙度低,去除效率稳定;在15~21 kPa的压力下,结合剂含量次高的聚集体金刚石研磨效率高,材料去除率达到8.94~12.43μm/min,加工性能较稳定,研磨后的工件表面粗糙度R a在60 nm左右;在3.5~7 kPa压力下,结合剂含量次低的聚集体金刚石研磨性能较稳定,材料去除率在2.67~3.12μm/min,研磨后的表面粗糙度R a在40 nm左右。高结合剂含量的聚集体金刚石磨粒更适合高研磨压力条件,而低结合剂的聚集体金刚石磨粒更适合于低研磨压力。     

游离磨料和固结磨料研磨后亚表面裂纹层深度研究

不同研磨方式加工K9玻璃产生不同的亚表面裂纹层深度,亚表面裂纹层深度的测量对确定材料下一步的加工去除量和提高加工效率具有重要意义。利用磁流变抛光斑点法测量游离磨料和固结磨料两种方式研磨后的亚表面裂纹层深度,每种研磨方式选用粒径分别为W40和W14的两种磨料。结果表明:磨粒粒径为W40和W14的游离磨料研磨后K9玻璃的亚表面裂纹层深度分别为20.1μm和3.646μm,而对应固结磨料研磨后的深度分别为3.37μm和0.837μm。固结磨料研磨在加工过程中能有效减小K9玻璃的亚表面裂纹层深度,提高加工效率和工件表面质量,改善器件的性能。     

磁力光整加工永磁极结构参数设计及仿真

在磁力研磨加工中,磁极结构形状和参数是影响其加工效率的主要因素之一。本文以XK7136C数控铣床为加工平台,将主轴头头部更换为永磁研磨磁极,对磁极结构形状和参数进行研究。设计符合加工使用的两种不同形状的磁极,利用Ansys仿真软件对其磁场进行有限元分析。通过仿真分析及试验验证发现,两种不同形状的磁极与普通磁极相比都能提高磁力光整加工的效率,同时开槽后的锥形磁极比球形磁极的端面在磁力线分布上更加密集,聚磁能力更好。试验研究发现,镍基高温合金Inconel 718的表面粗糙度在21分钟内由Ra0.502μm下降到Ra0.059μm,表面显微硬度和残余应力也有所改善,设计的磁极结构参数更有利于磁力光整加工。     

不同粒径金刚石固结磨料抛光硫化锌晶体研究

磨粒粒径是影响抛光最重要的参数之一,是决定加工效率和工件表面质量的关键要素。采用1~3μm、2~4μm、3~5μm 3种粒径的金刚石固结磨料抛光垫加工硫化锌晶体,分析磨粒粒径对工件表面质量和材料去除率的影响。实验结果表明,磨粒粒径对硫化锌晶体的固结磨料抛光影响显著,随着磨粒粒径的增大,固结磨料抛光硫化锌晶体的材料去除率增大,而表面质量变差。2~4μm金刚石固结磨料抛光垫加工硫化锌晶体可同时获得高材料去除率和优表面质量,材料去除率达到100 nm/min,表面粗糙度为4.37 nm。     

永磁场磁力研磨316L不锈钢实验研究

基于磁力研磨,采用永磁极吸附雾化法制备的新型球形磨料,对316L不锈钢进行光整加工.研究了当加工时间和磁感应强度为定值时,主轴转速、加工间隙、磨料粒径、磨粒相粒径对表面粗糙度和材料去除量的影响及其变化规律.并利用正交设计得出优化的加工参数:转速S=1 000 r/min,加工间隙δ=1.5 mm,磨料粒径为150～124μm时(磨粒相粒径为6μm),工件经研磨后平均原始表面粗糙度可由研磨前的0.275μm下降到0.038μm(工件最初表面粗糙度值为2.76μm).     

磁力研磨加工的永磁极结构优化设计

通过分析总结磁力研磨加工机理及永磁极结构,得出磁极端面形状对空间磁场分布的影响是决定磁力研磨加工表面质量和加工效率的关键因素。利用ANSYS软件对磁极进行建模与仿真,并对比分析仿真结果中磁力线的分布和磁场强度的分布,其结果表明,去除磁极端面中心部分材料半径与端面半径之比为1∶3的材料且在磁极端面开矩形槽的深宽之比为1∶1时,加工区域产生的磁场强度值可达到0.85~1.2T,且能获得较高的磁场强度梯度。这种利用仿真软件指导磁极设计的方法,为磁极的设计改进提供了理论依据和参考方案。     

磁极开槽情况对磁力研磨的影响

通过ANSOFT软件仿真和实验的方法,研究在磁极头表面加工出矩形槽、60°V型槽、圆环槽和分布圆孔4种不同槽型时对磁力研磨后工件表面粗糙度的影响。采用ANSOFT软件仿真磁极头表面加工出不同槽型时,工件表面的感应磁场强度分布。仿真结果表明:在磁极头表面加工出矩形槽时,工件表面感应磁场周向梯度最明显。实验结果表明,在磁极头表面加工出矩形槽时,工件表面粗糙度改善率最高为32.95%。对比不开槽和加工出矩形槽两种磁极头形式下的磁力研磨加工结果,得出采用矩形槽开槽形式时,磁力研磨的加工效率有所提升。     

磁力研磨外圆面的磁极设置及工艺参数优化

对磁力研磨Q345外圆面的磁极设置形式和工艺参数进行研究。采用控制变量法研究四种磁极设置形式(N、NS180、N-S90和N-S-N)对磁力研磨后工件表面质量的影响;应用正交实验方法进行四因素(加工间隙、工件转速、磨料比重和磨料粒度)三水平的正交实验组设计;分析对比不同实验条件下得到工件表面粗糙度改善率(%ΔSa)和表面形貌,确定较优的磁极设置形式和主要工艺参数组合。从实验结果中得出:磁力研磨外圆面的较优磁极设置形式为N-S-N型;优化的工艺参数组合为:加工间隙1mm、工件转速830r/min、SiC占磁性磨料总比重40%和SiC磨料粒度240#;磁力研磨加工后的工件表面尖峰与凹谷的最大高度差Sz从10.944μm降至3.441μm,有明显降低。     

采用粘结法的磁性磨粒制备工艺及实验研究

现有的粘结法制备工艺存在混合不均等问题,且磁介质相和磨粒相在破碎过程中会发生分离,易造成浪费,为此,提出了一种新的粘结法磁性磨粒制备工艺。在相同条件下,运用两种不同工艺分别制备了两种磁性磨粒,并进行了实验研究。采用扫描电镜、三维超景深显微镜观测试件表面,并用电子天平测试试件光整加工前后的质量变化。实验结果表明,采用新粘结法工艺制备的磁性磨粒对试件进行光整加工10 min后,表面粗糙度值Ra从0.800 μm减小到0.076 μm,材料去除率的最大值为0.67 μm/min。与现有粘结法工艺制备的磁性磨粒相比,新粘结法制备的磁性磨粒的微观结构良好、各成分分布均匀,加工性能更加优异。     

不锈钢物流管道内表面磁力研磨的回转磁场设计

分析了不锈钢物流管道内表面磁力研磨运动轨迹和速度的要求,研究了各种励磁方法及其研磨运动轨迹, 提出了同时产生回转磁场和往复磁场的励磁方法,设计了能实现复杂研磨轨迹的一种新型回转磁场装置,该回转 磁场通过磁极轴向分布产生波浪形研磨条纹,同时完成磁性磨料对工件的周向回转和轴向往复运动,最后用316L 管道进行了回转磁场的材料去除试验。     

New iron-based SiC spherical composite magnetic abrasive for magnetic abrasive finishing

SiC magnetic abrasive is used to polish surfaces of precise, complex parts which are hard, brittle and highly corrosion-resistant in magnetic abrasive finishing(MAF). Various techniques are employed to produce this magnetic abrasive, but few can meet production demands because they are usually time-consuming, complex with high cost, and the magnetic abrasives made by these techniques have irregular shape and low bonding strength that result in low processing efficiency and shorter service life. Therefore, an attempt is made by combining gas atomization and rapid solidification to fabricate a new iron-based SiC spherical composite magnetic abrasive. The experimental system to prepare this new magnetic abrasive is constructed according to the characteristics of gas atomization and rapid solidification process and the performance requirements of magnetic abrasive. The new iron-based SiC spherical composite magnetic abrasive is prepared successfully when the machining parameters and the composition proportion of the raw materials are controlled properly. Its morphology, microstructure, phase composition are characterized by scanning electron microscope(SEM) and X-ray diffraction(XRD) analysis. The MAF tests on plate of mold steel S136 are carried out without grinding lubricant to assess the finishing performance and service life of this new SiC magnetic abrasive. The surface roughness(Ra) of the plate worked is rapidly reduced to 0.051 μm from an initial value of 0.372 μm within 5 min. The MAF test is carried on to find that the service life of this new SiC magnetic abrasive reaches to 155 min. The results indicate that this process presented is feasible to prepare the new SiC magnetic abrasive; and compared with previous magnetic abrasives, the new SiC spherical composite magnetic abrasive has excellent finishing performance, high processing efficiency and longer service life. The presented method to fabricate magnetic abrasive through gas atomization and rapid solidification presented can significantly improve the finishing performance and service life of magnetic abrasive, and provide a more practical approach for large-scale industrial production of magnetic abrasive.     

Surface roughness modeling in chemically etched polishing of Si (100) using double disk magnetic abrasive finishing

Abstract

The present paper focuses on proposing a new method for determining the surface roughness of chemically etched polishing of Si (100) using double disk magnetic abrasive finishing (DDMAF). Based on chemical etching in KOH solution Vicker’s hardness of Si (100) at different concentration of KOH was determined in context to chemical etching phenomenon. A mathematical relationship was established to relate Vicker’s hardness of Si (100) as a function of the concentration of KOH. The penetration depth of abrasive particle into Si (100) workpiece was determined considering viz; the normal force acting on the abrasive particle under the influence of magnetic flux density and Vicker’s hardness of etched Si (100). The other modeling variables such as wear constant, penetration area of the abrasive particle into Si (100) workpiece which is dependent on the penetration depth of abrasive particle was modified in terms of magnetic flux density and concentration of KOH. The process parameters such as working gap, abrasive mesh number and the rotational speed of the primary magnet were also considered in modeling the surface roughness. The results of surface roughness obtained by the model were also experimentally validated. The theoretical and experimental findings agreed well with each other.     

On the effect of relative size of magnetic particles and abrasive particles in MR fluid-based finishing process

Magnetorheological fluid-based finishing (MRFF) process is widely used for fabrication of optical material such as glasses, lenses, mirrors, etc. Performance of the process is significantly affected by the properties (size, concentration, hardness, etc.) of the constituents of MR fluid. MR fluids have been prepared by varying three abrasive particles mean sizes (4 µm, 6 µm and 9 µm) with carbonyl iron particles (CIPs) having average particles size of 6 µm. Yield stress of MR fluids is measured using a rheometer. The composition of the fluid has CIPs of 25%, abrasive 10% (by volume) and rest of the base medium (liquid). The yield stress was evaluated at magnetic flux density of 0.33 Tesla. It is observed that MR fluid having the same particle size of CIPs and abrasive particles exhibits higher yield stress as compared to other combinations. The lowest yield stress is observed in case of 9 µm abrasive particles size. A set of finishing experiments is carried out to understand the effect of relative size of magnetic particles and abrasive particles on surface roughness values.     

ON THE PERFORMANCE ANALYSIS OF FLEXIBLE MAGNETIC ABRASIVE BRUSH

ABSTRACT

Magnetic abrasive finishing (MAF) of alloy steel workpiece with unbounded magnetic abrasive particles (UMAPs) indicates that the surface finish in the range of nanometer can be achieved. Important controllable four process parameters have been identified which are as current to the electromagnet, machining gap, abrasive size (mesh number), and number of cycles. Experiments have been planned using design of experiments technique. Based upon the results of response surface methodology and analysis of variance (ANOVA), it is concluded that magnetic flux density that depends on current to the electromagnet and machining gap, is most influencing parameter followed by grain size and number of cycles. The surface roughness profile generated during the MAF process has been discussed. To understand the cutting mechanism of magnetic abrasive finishing process, scanning electron microscopy (SEM) and atomic force microscopy (AFM) of the machined surfaces have been carried out. The correlation between surface finish and material removal has also been established.     

ON THE PERFORMANCE ANALYSIS OF FLEXIBLE MAGNETIC ABRASIVE BRUSH

Magnetic abrasive finishing (MAF) of alloy steel workpiece with unbounded magnetic abrasive particles (UMAPs) indicates that the surface finish in the range of nanometer can be achieved. Important controllable four process parameters have been identified which are as current to the electromagnet, machining gap, abrasive size (mesh number), and number of cycles. Experiments have been planned using design of experiments technique. Based upon the results of response surface methodology and analysis of variance (ANOVA), it is concluded that magnetic flux density that depends on current to the electromagnet and machining gap, is most influencing parameter followed by grain size and number of cycles. The surface roughness profile generated during the MAF process has been discussed. To understand the cutting mechanism of magnetic abrasive finishing process, scanning electron microscopy (SEM) and atomic force microscopy (AFM) of the machined surfaces have been carried out. The correlation between surface finish and material removal has also been established.     

脉冲磁场辅助磁性复合磨粒化学机械抛光技术及其加工试验研究

提出一种脉冲磁场辅助新型磁性复合磨粒化学机械抛光技术。该技术利用磁性聚合物微球与SiO2磨粒组成的复合磨粒抛光液,在脉冲磁场辅助作用下,实现磨粒尺寸对硬质抛光盘微观形貌依赖性小、磨粒易进入抛光区域、材料去除率较高的抛光。设计了“之”字形的对位式结构电磁铁,模拟计算表明其磁感应强度沿抛光平面分布均匀,磁性微球受到的磁力一致性好。磁性微球在抛光系统中的受力分析表明：磁性微球受磁力作用时有利于复合磨粒从近抛光区进入抛光区,以二体磨损的方式去除加工表面;磁性微球不受磁力作用时,复合磨粒随抛光液的流动而移动,避免大量聚集形成磁链。以表面粗糙度Ra=1.1μm的硬质抛光盘进行硅片抛光试验,施加不同频率和占空比的脉冲磁场前后,硅片的去除率从137nm/min提高到288nm/min,频率5Hz、占空比50%时获得最大值,硅片表面粗糙度由抛光前Ra=405nm减小到Ra=0.641nm。     

球形磁性磨料磁力研磨ZrO2材料机理研究

在磁力研磨加工ZrO 2材料过程中,分析了单颗磁性磨料在加工区域内的受力情况,并对研磨压力的形成进行探讨,利用公式推导计算研磨压力,通过研磨压力的大小分析了磁力光整加工中材料的去除机理,包括脆性断裂去除、塑性变形去除和粉末化去除。通过白光干涉仪、扫描电子显微镜等分析检测仪器对磁力研磨加工后的工件表面进行检测,可知在其他条件相同时,磁力研磨加工后的工件材料精度高于传统的草轮抛光精度,可达到0.59μm。     

磁悬浮陀螺飞轮用隐式洛伦兹力磁轴承

针对磁悬浮陀螺飞轮用显式洛伦兹力磁轴承气隙磁密均匀性差的问题,提出了一种磁钢内置的隐式洛伦兹力磁轴承,并采用三维有限元法对两种方案的气隙磁密进行比较分析。隐式方案的气隙磁密在周向和纵向的变化率分别为0.8%和8.4%,远优于显式方案的15.0%和23.7%。利用磁场分割法对隐式方案的磁阻进行了区域分割,采用积分法精确计算各区域磁阻,建立了磁轴承磁路数学模型,得到了影响偏转电流刚度的关键结构参数,并基于有限元法对隐式方案形状及结构参数进行详细优化。结果表明,在不恶化气隙磁密变化率的前提下,优化前后绕组区域的最大磁密和最小磁密分别从0.404T和0.368T增加至0.464T和0.427T,增幅为14.6%和16.0%。根据优化结果研制了一台隐式洛伦兹力磁轴承,并进行了气隙磁密和偏转电流刚度实验测试,测试结果与设计结果相符,对洛伦兹力磁轴承的设计具有重要意义。