空气静压轴承孔型节流器的CFD研究

应用计算流体力学CFD软件,建立了空气静压轴承孔型节流器的流体边界模型,根据雷诺方程运用等温条件下的κ-ε湍流模型,给定合适的初始值和边界条件,计算得到了孔型节流器的速度场及压强场的分布,分析了节流孔直径对速度和压强的影响.     

Frictional characteristics of an aerostatic linear bearing

Frictional characteristics of an aerostatic linear bearing are evaluated in detail by means of a developing method. In the method, the resultant force acting on the moving part of the bearing is measured highly accurately as the inertial force using an optical interferometer. The velocity dependence of dynamic friction is focused on in this paper. The component of dynamic frictional force, which is almost independent of the absolute value of velocity, is detected in the experiment, in addition to the force component that is proportional to velocity. Before this study, dynamic frictional force had only been explained as the viscous frictional force acting inside the air film, which is proportional to the velocity.     

基于气浮轴承的无摩擦气缸设计及参数优化

针对超精密垂直轴对无摩擦、高稳定性重力平衡系统的需求,本文设计了一种新式无摩擦气缸,并对气浮轴承的参数进行优化.首先,确定气浮轴承初始参数,据此建立基于ANSYS的有限元分析模型,将分析结果与工程计算、实验结果对比,验证仿真计算的可靠性.然后,利用该模型,采用响应面优化方法,得到不同节流孔布置下(对应最佳气膜厚度时)的...     

均压槽尺寸对空气静压导轨静态性能的影响

引入有限体积法,采用理想气体等温条件下的k—ε模型封闭流动控制方程组,对均压槽尺寸改变条件下空气静压导轨润滑气膜流场分布进行数值模拟,得到导轨工作面压力分布图及承载力、刚度变化曲线,数值模拟结果表明：导轨承载力及气膜刚度随均压槽尺寸的增大而先增大后减小,存在一个最佳值;随均压槽尺寸增大,导轨工作面压强分布趋于均匀;但当均压槽大于一定尺寸时,气膜湍动随机性引发导轨工作面压强不规则分布,易造成偏载、导致导轨性能不稳。该结论为空气静压导轨均压槽设计及导轨系统静态性能的提高提供依据。     

基于球面轴承的空气静压主轴设计

在分析空气静压球轴承工作原理的基础上,设计了气体静压对置双半球球面轴承.通过理论分析及计算确定了气体静压球轴承的尺寸,为了提高气体静压球轴承的性能,研究了其结构设计,提出一些改进措施.通过改进结构,有助于提高气体静压球轴承的承载力和刚度,消除加工装配误差的影响.     

超精密机床径推一体式空气静压轴承的静态特性(英文)

提出了一种新的径推一体式静压主轴支撑方式来优化机床主轴系统性能,以满足超精密飞切机床对气体静压轴承高刚度的要求.采用计算流体力学和有限体积法对气体静压轴承气膜内部的流场与压力场进行仿真,并研究其静态特性.为提高计算精度,完成了轴承宏观尺寸与气膜厚度相差几个数量级时气膜厚度方向2 μm间距的网格划分.仿真结果表明,在偏心状态下由于气膜压力的变化使节流孔气体流速在1～200 m/s内变化,机床所采用径推一体式轴承静态刚度达到3 508 N/μm.研究表明,通过增大轴承的供气压强和减小节流孔的直径可改善轴承的静态性能进而提升机床性能.     

基于FLUENT的气体静压轴承数值仿真与实验研究

应用基于有限体积法的计算流体动力学软件FLUENT进行数值模拟,对影响气体静压止推轴承静态性能的相关因素进行了分析研究,并给出了相应的变化曲线.在自行研制的实验平台上进行气体静压实验,实验与数值模拟计算的结果取得了较好的一致性,证明了将该方法应用在气体润滑领域的可行性,也为进一步改进小孔节流气体静压止推轴承的设计和改善、提高其性能提供了理论依据.     

面向空气静压支承的多孔材料渗透特性研究

为提高多孔质材料渗透系数的理论计算精度,本文基于分形理论建立了渗透系数求解模型,并基于图像处理优化了分形维数的求解方法。首先,利用扫描电子显微镜拍取4种多孔材料表面图像后,使用盒维法求解分形维数并研究多孔材料图像大小和放大倍数对分形维数求解准确性的影响。其次,基于气体Darcy定律、分形理论及修正的HagenPoiseulle气体方程建立了无修正系数的渗透系数求解方程,从而完善了多孔材料分形理论计算公式。最后搭建渗透系数测量平台,基于流动状态的判定结果,验证了理论推导的正确性。结果表明:图像越大、放大倍数越低,分形维数越趋近于真实值;通过建立材料的最大孔径、最小孔径、迂曲度及分形维数与渗透系数间的无经验参数的理论关系,可使渗透系数理论计算值更加准确。通过对比渗透系数理论计算值及实验值可知,误差值为5%~8%,满足材料渗透系数测量的误差要求。本文研究为材料渗透系数的准确获取提供了新的途径。     

空气静压径向轴承静态性能的有限元分析

针对空气静压轴承在静态性能方面存在的承载力小和刚度低等问题,对空气静压轴承的结构参数对其静态性能的影响等方面进行了研究,对空气在径向轴承中的流动状态进行了验证。提出了全参数三维实体建模的方法,利用有限元软件ANSYS开展了在不同空气流动状态下气体轴承流场的仿真计算,研究了节流小孔的轴向位置、节流孔径、供气的压力以及平均半径间隙这几种因素对气体径向轴承静态特性的影响,得出了相关因素的变化规律曲线,并进行承载性能对比,据此优选出了空气静压轴承的结构参数,研究结果表明,空气在径向轴承中的流动状态为可压缩紊流,工程理论计算的结果与数值仿真的结果进行比较误差为4%,说明了该仿真方法的有效性,为设计超高速微切削空气静压电主轴提供一定的理论依据。     

气体静压推力轴承性能测试实验台设计

为解决气体静压推力轴承性能测试的问题,设计了一种气体静压推力轴承性能测试实验台。该实验台利用弹簧拉压平衡原理对轴承加载,并利用力传感器测定施加载荷大小;分别采用位移传感器和流量计实现对气膜间隙大小及耗气量的测量;使用单坐标工作台实现压力分布的连续测定。该实验台具有操作方便、自动化程度高及精度便于控制的特点。     

光学检测下气浮支承的玻璃薄板变形

液晶玻璃基板在线检测过程中对玻璃板在垂直方向上的变形量有严格的要求,为了确定在指标要求光学检测精度下的喷嘴间距。本文基于弹性薄板的小挠度弯曲理论对气浮支承下的液晶玻璃板进行理论分析,推导出液晶玻璃薄板在吹吸喷嘴作用下的最大挠度计算公式,分析得出最大挠度与通孔间距的二次方、载荷集度成正比;通过Fluent对液晶玻璃基板气浮支承系统进行仿真,得到了不同的喷嘴孔间距下的载荷分布以及玻璃基板最大位移处受到载荷的准确值,从满足玻璃板最大位移要求、气膜面的压力分布状况及经济性方面综合考虑得到气膜单元的通孔横向间距范围,给出了采用气浮支承传输的液晶玻璃基板光学检测仪器的喷嘴布置参数,即喷嘴的合理间距应处于20~25mm之间。     

Accuracy prediction model of an orifice-compensated aerostatic bearing

In order to reduce the synchronous radial error motion of the orifice-compensated aerostatic bearing, an accuracy prediction model was built to discuss the direct relationship among the synchronous radial error motion, the roundness error, and the nozzle number. It was found that increasing the nozzle number delayed the appearance of the obvious peak of the averaging coefficient and roughly reduced the synchronous error motion. The optimized nozzle number was n_p = 2 × 3 × 5 × 7 × …, which was equal to the product of the prime numbers within the prime sequence. The existence of axial grooves and the increase in the nozzle row number didn't reduce the synchronous error motion, but it might cause an increase in the synchronous error motion. The accuracy prediction model gave a simple method for predicting the synchronous radial error motion of the orifice-compensated aerostatic bearing.     

Static characteristics of aerostatic porous rectangular thrust bearings

A theoretical analysis of the steady state performance of aerostatic rectangular thrust bearings with porous pads is presented. The equations governing the gas flow through the porous pad and the bearing clearance are solved simultaneously using a finite-difference method to obtain the pressure distribution in the bearing clearance. The load capacity, the mass rate of flow and the static stiffness are calculated numerically for different bearing dimensions and operating pressures and are presented in graphical form. The load capacity predicted for a square bearing correlates with previous results.     

应用有限体积法研究空气静压导轨力学特性

研究了润滑气膜的主要力学参数.引入有限体积法,应用理想气体等温条件下的k-ε模型封闭控制方程组对润滑气膜的力学特性进行数值分析,得出不同气膜厚度下导轨工作面上的压强分布规律.数值结果表明:导轨内气膜从节流孔沿工作面到导轨边缘的压强分布规律并非按雷诺润滑方程均匀递减变化,而是在节流孔附近存在半径约为500μm的负压区;在静压导轨气膜厚度与承载力分析的基础上,指出气膜与导轨间的气固耦合所引发的导轨弹性自激振动是静压导轨实现纳米级定位的主要制约因素.本项研究为导轨自激振动抑制、气膜振幅减小乃至空气静压导轨整体精度提高等工作做了有益探索.     

应用有限体积法空气静压导轨力学特性的研究

空气静压润滑是精密工程领域的关键技术之一,润滑气膜的压强分布、承载能力、刚度等力学特性是决定导轨稳定性的主要因素。目前,空气静压导轨设计中常采用简化雷诺方程的工程计算方法,存在静态性能误差大的特点。本文针对润滑气膜的压强分布规律、承载力等主要力学特性参数进行研究。基于节流孔出射气流为冲击射流,引入计算流体力学的有限体积法,应用理想气体等温条件下的k-ε模型封闭控制方程组对润滑气膜的力学特性进行数值分析,得出不同气膜厚度下空气静压导轨工作面上的压强分布规律。数值结果表明：导轨内气膜从节流孔沿工作面到导轨边缘的压强分布规律非雷诺润滑方程所给出的均匀递减变化,而是在节流孔附近存在半径约为500µm的负压区、峰值约为0.05MPa;在静压导轨气膜厚度与承载力分析的基础上,指出气膜与导轨间的气固耦合所引发的导轨弹性自激振动是空气静压导轨实现纳米级定位的主要制约因素。     

Analysis of aerostatic porous annular thrust bearings with tilt

A theoretical analysis is presented in order to predict the static characteristics of an aerostatic porous annular thrust bearing with a tilted runner pad. The flow through the porous matrix is assumed to be axial because the thickness of the pad is small compared with its radius. After the pressure in the porous matrix is obtained, the modified Reynolds equation is solved numerically using a finite-difference technique for the pressure distribution in the bearing clearance. The theoretical results are computed numerically in dimensionless form for the load capacity, mass rate of flow and static stiffness for various bearing dimensions and supply conditions. The results are presented in the form of design charts as a function of the feeding parameter. The effect of tilt is to improve the load capacity and the mass rate of flow.     

Effects of flying height deviations on glide height tests for manufacturing hard disks

In this study, theoretical analysis and experiments were carried out to investigate the effects of avalanche-point deviation and the deviation between the calibration and test-flying heights during the glide head calibration in the glide height tests for manufacturing hard disks. To obtain accurate glide height test results and improve the reproducibility of the test, flying height control should be carried out by limiting the acceptable deviation range of the flying heights of the glide heads. When the avalanche-point deviation is zero, the test results using different calibrated rails (or heads) are the same when they are used to detect the same defect. To avoid wrong test results due to avalanche-point deviation, the test-flying height should be the same as the calibration flying height because the difference of the output voltages of any two rails (or heads) is zero in this case. If these two deviations cannot be eliminated completely, the calibration and test-flying heights should be carefully selected because the error still can be minimised depending on the selection of the flying heights.     

气体静压轴承相位致振气锤失稳机理与试验

针对气体静压轴承在结构不合理或者工作参数选择不恰当时容易产生气锤失稳的问题,开展基于相位致振的气体静压轴承气锤失稳机理研究。从气体静压轴承的工作气压与气膜间隙随时间变化的相位关系出发,建立基于相位致振的气体静压止推轴承自激失稳理论模型,分析气体静压止推轴承在发生气锤失稳过程中,工作气压与气膜厚度的相位变化对应情况。理论分析和实验研究结果表明,在气体静压止推轴承发生气锤失稳过程中,工作气压与气膜厚度的相位不断变化,并在相位差为180°时发生气锤失稳,进而说明可以从相位角度解释气体静压轴承发生气锤失稳的原因。该研究进一步完善了气体静压止推轴承的自激失稳作用机理分析,为气体静压轴承的气锤失稳的机理分析及其抑制提供了一种新的方法。     

Thermal sensor for in situ flying height measurements of optical flying heads

The application of flying head technology in optical recording promises a considerable increase in recording density. It may be used for both far field and near field recording. For dynamic in situ flying height and flight attitude measurements, a prototype of a thermal test head has been developed. It takes advantage of the heat transfer in sub-micrometer air bearings as well as its dependence from the air gap width. Such a test head has a slider with a similar air bearing surface as the recording head, but with thermo-resistive sensors that are energized by Joule's heat and embedded at each of the four corners. The paper describes the head design and the fabrication technology and provides first experimental test results as well.     

Design and test of a Pareto optimal flat pad aerostatic bearing

This paper discusses the design and assessment of a Pareto optimal aerostatic flat pad bearing. The design of such bearings is a multi-variable, multi-criteria problem. The criteria used were load capacity, flow rate and stiffness. The design technique does not rely on weighting the criteria at the outset but allows a final design to be selected from the Pareto set. The final design was assessed using an automated experimental rig to obtain load/deflection data, mass flow rates, and film pressure profiles for a range of gap heights. The experimental performance of the Pareto optimal bearing is shown to compare well with the theoretical prediction at lower gap heights.