基于双绝缘层低电压n-型OFET的研制

采用顶接触结构研制了以Ta2O5/PMMA为绝缘层,有机材料PTCDI-C12为有源层的低电压n型有机场效应晶体管.其中Ta2O5薄膜采用阳极氧化方法制备,PMMA薄膜通过溶液旋涂法制备.与基于单一Ta2O5绝缘层的器件相比,双绝缘层器件的电学性能大幅提高.经测试得到器件场效应电子迁移率为0.063 cm2/Vs,开关电流比为1.7×104,阈值电压为2.3 V.     

宽带隙ZnMgO的电学特性及其透明薄膜场效应晶体管

首次提出了用六方相晶体结构的宽带隙ZnMgO作为薄膜场效应晶体管(TFT)的沟道层,用立方相ZnMgO纳米晶体薄膜作为栅绝缘层,在实验中用透明的ITO导电玻璃作为衬底,通过连续沉积六方和立方相结构的纳米ZnMgO晶体薄膜,并通过光刻、电极工艺等,研制了透明的ZnO基TFT,TFT的电流开关比达到104,场效应迁移率为0.6cm2/(V·s).在偏压2.5MV/cm下漏电流为10-8A.     

宽带隙ZnMgO的电学特性及其透明薄膜场效应晶体管

首次提出了用六方相晶体结构的宽带隙ZnMgO作为薄膜场效应晶体管(TFT)的沟道层,用立方相ZnMgO纳米晶体薄膜作为栅绝缘层,在实验中用透明的ITO导电玻璃作为衬底,通过连续沉积六方和立方相结构的纳米ZnMgO晶体薄膜,并通过光刻、电极工艺等,研制了透明的ZnO基TFT,TFT的电流开关比达到104,场效应迁移率为0.6cm2/(V·s).在偏压2.5MV/cm下漏电流为10-8A.     

SOS工艺的进度及应用

引言绝缘衬底上外延硅工艺起始于1963年。这种工艺分别简写为SIS、ESFI(绝缘层上外延硅薄膜)、SOS、SOSL(尖晶石上外延硅)等。用硅-兰宝石(SOS)工艺已制作出各种器件和电路,如二极管、二极管开关和二极管带、P沟与n沟MOS场效应晶体管及SIG场效应晶体管,用于动态逻辑和存储器的互补MOS电路,高频双极晶体管,由SOS有源元件制作的甚高频和超高频集成电     

并五苯场效应管的电学特性

介绍了用高真空中热蒸发镀膜的方法制备并五苯薄膜场效应晶体管.作为场效应管半导体层的并五苯薄膜沉积在p型Si(100)(14.0～20.0 Ω·cm)衬底上.场效应管中并五苯薄膜厚度为70nm,源极、漏极和栅极(Au)的厚度均为50nm,绝缘层SiO2的厚度为300nm,沟道宽度为190μm,沟道长度为15μm.用AFM表征了并五苯薄膜表面形貌,并研究了薄膜生长速率对并五苯场效应晶体管电学特性的影响.在薄膜生长速率为0.24和1.36 nm/min时,场效应管的载流子迁移率分别为2.7×10-4和2.2×10-6 cm2/(V·s).     

并五苯场效应管的电学特性

介绍了用高真空中热蒸发镀膜的方法制备并五苯薄膜场效应晶体管.作为场效应管半导体层的并五苯薄膜沉积在p型Si(100)(14.0～20.0 Ω·cm)衬底上.场效应管中并五苯薄膜厚度为70nm,源极、漏极和栅极(Au)的厚度均为50nm,绝缘层SiO2的厚度为300nm,沟道宽度为190μm,沟道长度为15μm.用AFM表征了并五苯薄膜表面形貌,并研究了薄膜生长速率对并五苯场效应晶体管电学特性的影响.在薄膜生长速率为0.24和1.36 nm/min时,场效应管的载流子迁移率分别为2.7×10-4和2.2×10-6 cm2/(V·s).     

并五苯场效应管的电学特性

介绍了用高真空中热蒸发镀膜的方法制备并五苯薄膜场效应晶体管. 作为场效应管半导体层的并五苯薄膜沉积在p型Si (100) (14.0～20.0Ω·cm）衬底上. 场效应管中并五苯薄膜厚度为70nm，源极、漏极和栅极（Au）的厚度均为50nm，绝缘层SiO2的厚度为300nm，沟道宽度为190μm，沟道长度为15μm. 用AFM表征了并五苯薄膜表面形貌，并研究了薄膜生长速率对并五苯场效应晶体管电学特性的影响. 在薄膜生长速率为024和136nm/min时，场效应管的载流子迁移率分别为2.7E-4和2.2E-6cm2／(V·s) .     

C60场效应晶体管的制备及修饰层对器件性能影响的研究

以重掺杂Si片作为衬底,SiOe／聚甲基丙烯酸甲酯（PMMA）为双栅绝缘层,C60为有源层,制备了不同修饰层的有机场效应晶体管（OFETs）;研究了不同修饰层的器件对于场效应性能的影响。实验表明,与未加修饰层的器件相比,经过修饰的器件性能有一定的提高,其中Alqa／LiF双修饰层器件的场效应迁移率达到最大,为1．6×1...     

宽带隙ZnMgO的电学特性及其透明薄膜场效应晶体管

首次提出了用六方相晶体结构的宽带隙ZnMgO作为薄膜场效应晶体管（TFT）的沟道层，用立方相ZnMgO纳米晶体薄膜作为栅绝缘层，在实验中用透明的ITO导电玻璃作为衬底，通过连续沉积六方和立方相结构的纳米ZnMgO晶体薄膜，并通过光刻、电极工艺等，研制了透明的ZnO基TFT, TFT的电流开关比达到1E4，场效应迁移率为0.6cm2/(V·s).在偏压2.5MV/cm下漏电流为1E-8A.     

真空气相沉积生长PTCDI C8 N型有机薄膜晶体管

在大气环境下N型有机薄膜晶体管(OFET)的性能不稳定,为提高晶体管在大气环境稳定性,该文分别制作了SiO2单绝缘层器件和SiO2/PMMA双绝缘层器件。采用N型新材料PTCDI-C8作为有源层,Ag作为源、漏电极,对制作的不同绝缘层的器件进行聚对二甲苯的封装,对有源层进行形貌和晶体结构分析。并进行电流-电压(I-V)曲线测试。在相同工作电压下,双绝缘层器件比单绝缘层器件具有更大的场效应迁移率、开关电流比和更小的阈值电压。     

Flexible AM OLED panel driven by bottom-contact OTFTs

Active matrix organic-light-emitting-diode (AM OLED) panels, driven by organic thin-film transistors (OTFT), have been successfully fabricated on a flexible plastic substrate. The pixel circuit consists of two bottom-contact pentacene OTFTs working as switching and driving transistors. The panel has 16 /spl times/ 16 pixels, each of which have an OLED using a phosphorescent material with an emission efficiency of 30 cd/A. A tantalum oxide (Ta/sub 2/O/sub 5/) film with a dielectric constant of 24, prepared by the anodization of Tantalum (Ta), was used as the gate insulator of the OTFTs. The passivation layer on the OTFTs was formed by a layer of silicon dioxide (SiO/sub 2/) and two layers of polyvinyl alcohol. Using OTFTs with a Ta/sub 2/O/sub 5/ gate insulator, the authors have realized a flexible active matrix OLED panel driven with a low voltage of -12 V.     

Organic thin film transistors with PMMA modified insulator

A double insulation layer structure organic thin films transistor (OTFT) was investigated for improving the performance of the SiO2 gate insulator. A 50 nm PMMA layer was coated on top of the SiO2 gate insulator as the organic insulator layer. The results demonstrated that using inorganic/organic compound insulator as the gate dielectric layer is an effective method to fabricate OTFTs with improved electric characteristics and decreased leakage current. Electrical parameters of carrier mobility and on/off ratio were calculated. OTFT based on Si substrate with a field-effect mobility of 4.0 × 10-3cm2/Vs and on/off ratio of 104 was obtained.     

发展容易集成加工的高功能有机薄膜晶体管

描述了近10年来开发容易集成加工的高功能有机薄膜晶体管方面所取得的成就。针对有机薄膜晶体管存在金属、氧化物和有机物三相交汇点这个明显的结构缺陷,以克服高介电绝缘栅漏电问题为基础,综合考虑器件加工的方便性与一致性、界面态和空间电场分布等因素,设计并优化出双绝缘栅和夹心型器件结构。通过引入缓冲层有效地降低了电极与半导体之间的接触电阻,使器件的性能能够满足有源矩阵显示的需要。     

Organic thin film transistors with double insulator layers

We have investigated a double-layer structured gate dielectric for the organic thin films transistor (OTFT) with the purpose of improving the performance of the SiO₂ gate insulator. A 50 nm PMMA layer was coated on top of the SiO₂ gate insulator as organic insulator layer. The results demonstrated that using inorganic/organic compound insulator as the gate dielectric layers is an effective method to fabricate OTFTs with improved electric characteristics and decreased leakage current. Electrical parameters such as carrier mobility and on/off ratio by field effect measurement have been calculated. OTFT based on highly doped Si substrate with a field-effect mobility of 0.004 cm²/V s and on/off ratio of 10⁴ have been obtained.     

具有双绝缘层的有机薄膜晶体管

为了提高SiO2单绝缘层器件的性能,在SiO2绝缘层的表面用旋涂的方法制备一层大约50 nm厚度的PMMA.实验结果表明用无机/有机双绝缘层可以有效的提高器件的性能同时降低器件的漏电流.计算出了载流子迁移率和开关电流比,基于PMMA/SiO2双绝缘层器件的载流子迁移率和开关电流比分别是4.0×10-3cm2/Vs和104.     

磁控溅射法制备复合绝缘层的薄膜晶体管

研究了磁控溅射法制备的复合绝缘层结构的有机薄膜晶体管.该器件是以酞菁铜(CuPc)作为有源层,SiO2/Si3N4/SiO2复合绝缘层和单层SiO2为绝缘层来进行对比研究的.结果显示与单层SiO2绝缘层的器件相比,具有复合绝缘层的器件结构能有效改进有机薄膜晶体管的性能.同时发现,不同厚度的SiO2/Si3N4/SiO2复合绝缘层对晶体管的性能也有影响,绝缘层太厚,感应电流小;绝缘层太薄,器件容易被击穿.     

Photocurable propyl-cinnamate-functionalized polyhedral oligomeric silsesquioxane as a gate dielectric for organic thin film transistors

A polyhedral oligomeric silsesquioxane (POSS)-based insulating material with photocurable propyl-cinnamate groups (POSS-CYNNAM) was designed and synthesized through simple single step reaction for use as a gate dielectric in organic thin-film transistors (OTFT). POSS-CYNNAM was soluble in common organic solvents and formed a smooth thin film after spin-casting. A thin film of POSS-CYNNAM was cross-linked and completely solidified under UV irradiation without the use of additives such as photoacid generators or photoradical initiators. ITO/insulator/Au devices were fabricated and characterized to measure the dielectric properties of POSS-CYNNAM thin films, such as leakage current and capacitance. A pentacene-based OTFT using the synthesized insulator as the gate dielectric layer was fabricated on the transparent indium tin oxide (ITO) electrode, and its performance was compared to OTFTs using thermally cross-linked poly(vinyl phenol) (PVP) as the insulator. The fabricated POSS-CYNNAM OTFT showed a comparable performance to devices based on the PVP insulator with 0.1 cm²/Vs of the field effect mobility and 4.2 × 10⁵ of an on/off ratio.     

Solution-processed fabrication of highly transparent mono- and tri-colored quantum dot-light-emitting diodes

Analogous to organic light-emitting diode (OLED), quantum dot-light-emitting diode (QLED) possesses a high eligibility with respect to device structure for the transformation to transparent device that may be pursued as a next-generation display. We report the fabrication of a series of highly transparent mono-colored blue, green, and red QLEDs with a standard architecture simply by replacing thermally evaporated Al with sputtered indium tin oxide (ITO) film as a top cathode. To alleviate the sputtering damage on the underlying electron transport layer while securing a reasonable sheet resistance of ITO film, a moderate sputtering power is judiciously chosen to attain high device performance. Fabrication of a transparent tri-colored white or full-color-capable QLED, comprising an emitting layer mixed with three primary colored QDs, is also demonstrated and further implemented on a flexible substrate of polyethylene naphthalate to additionally offer its feasibility toward transparent flexible device.     

An integrated organic passive pixel sensor

We demonstrate an imaging passive pixel sensor circuit consisting of a bottom-gate, top-contact pentacene organic thin-film transistor (OTFT) integrated with a top-illuminated, inverted subphthalocyanine/C₆₀ organic photodetector (OPD). The vacuum-deposited OTFT utilizes parylene as the gate insulator, achieving a drain current ON/OFF ratio of 10⁵. The transistor hole mobility is 0.09 ± 0.02 cm²/V s. The inverted OPD has a dark current of 20 pA at a reverse bias of 1.5 V. By integrating the two components, a 12-bit dynamic range passive pixel sensor is achieved, with an OFF current of 31 ± 5 pA and a pixel readout time of 0.4 ± 0.05 ms, limited by the discharge time of the OTFT channel. The integrated pixel has potential for use in large-scale focal plane array imagers.     

具有双绝缘层和修饰电极的薄膜场效应晶体管

研究了具有OTS/SiO2双绝缘层结构及MoO3/Al电极结构的有机薄膜晶体管.器件是以热生长的Si02作为有机薄膜晶体管的栅绝缘层,酞菁铜作为有源层的.OTS/SiO2双绝缘层的结构提高了器件的场效应迁移率和开关电流比,降低了阈值电压.实验表明在同样的栅极电压下,具有MoO3/Al电极的器件和金电极的器件有着相似的源漏输出电流.结果显示具有OTS/SiO2双绝缘层及MoO3/Al电极结构的器件能有效改进有机薄膜晶体管的性能.