Microscopic surface structure of C/SiC composite mirrors for space cryogenic telescopes

We report on the microscopic surface structure of carbon-fiber-reinforced silicon carbide (C/SiC) composite mirrors that have been improved for the Space Infrared Telescope for Cosmology and Astrophysics (SPICA) and other cooled telescopes. The C/SiC composite consists of carbon fiber, silicon carbide, and residual silicon. Specific microscopic structures are found on the surface of the bare C/SiC mirrors after polishing. These structures are considered to be caused by the different hardness of those materials. The roughness obtained for the bare mirrors is 20 nm rms for flat surfaces and 100 nm rms for curved surfaces. It was confirmed that a SiSiC slurry coating is effective in reducing the roughness to 2 nm rms. The scattering properties of the mirrors were measured at room temperature and also at 95 K. No significant change was found in the scattering properties through cooling, which suggests that the microscopic surface structure is stable with changes in temperature down to cryogenic values. The C/SiC mirror with the SiSiC slurry coating is a promising candidate for the SPICA telescope.     

Effects of substrate and deposition method onto the mirror scattering

The effect of surface roughness onto the mirror scattering has been studied. Five kinds of substrates with different surface roughness were fabricated. On those substrates, dielectric multilayer coating for high reflectivity was deposited by ion-beam sputtering (IBS) and by electron-beam (EB) evaporation. Total integrated scattering (TIS) measurement setup was built for the evaluation of deposited samples. Most of the IBS mirrors showed lower scattering than the EB mirrors, which were deposited on the similar substrates in surface roughness. The ratio of substrate TIS to mirror TIS was defined for evaluation. It increased abruptly at approximately 2A in surface roughness, which indicated that to make low-loss mirrors, the substrate roughness should be less than 2A in rms.     

Ion beam sputtering coatings on large substrates: toward an improvement of the mechanical and optical performances

Large mirrors (?350 mm) having extremely low optical loss (absorption, scattering, wavefront) were coated for the VIRGO interferometer. The new generation of mirrors needs to have a better wavefront and lower mechanical loss. To improve the component wavefront, the corrective coating technique was used. By doping the tantalum pentoxide layers, we improved, for the first time to our knowledge, the multilayer mechanical loss. The first results are discussed.     

Test of opticlean strip coating material for removing surface contamination

The strip coating material, Opticlean, which has been reformulated, has been shown to remove 1-5-mum-diameter particles as well as contamination remaining from previous drag wipe cleaning on a used silicon wafer. In addition, no residue that produced scattering was found on a fresh silicon wafer when Opticlean was applied and then stripped off. The total integrated scattering technique used for the measurements could measure scattering levels of He-Ne laser light as low as a few ppm (parts in 10(6)), corresponding to a surface roughness of <1 A rms.     

Loss factors of mirrors for a gravitational wave antenna

Low-loss mirrors fabricated by ion-beam-sputtering machines for possible application in an interferometric gravitational wave antenna were evaluated by use of Nd:YAG laser light (lambda = 1064 nm) with two distinct measurements: a tabletop experiment that used a short cavity with a small beam with a beam waist of approximately 2w(0) = 0.82 mm, and an optical test that used a 20-m prototypical gravitational-wave detector with a large beam with a beam waist of approximately 2w(0) = 4.4 mm. A multilayer coating comprised 29 layers of SiO(2)/Ta(2)O(5) and one protective coating of SiO(2). The best values obtained as a result of these measurements were 16 ppm (parts in 10(6)) and 30 ppm in total loss, respectively. Also, a two-dimensional loss map generated by use of a small beam successfully revealed the existence of a loss structure within the coating surface. These results imply that a high-reflectance multilayer coating has some inhomogeneities and a loss distribution with a typical scale of a few millimeters and that the total measured losses depend on the beam spot size.     

中国古代青铜器表面鎏镀技术（二）

3鎏镀与鎏焊 3．1鎏镀工艺 鎏镀富锡铜时鎏镀件置于炉中不免相互紧靠,甚至上下叠放。若镀件之间不放置范板相隔,加热去汞时不免会有镀液流淌而导致上下两鎏镀件焊在一起。如果说商代早中期就有了鎏镀富锡铜的青铜器,则最晚在商代晚期已有少数鎏焊件。考古学者认为,两周时期青铜器已采用铜焊工艺。     

汽车防雾反光镜的硬膜性能研究

介绍了汽车防雾反光镜的膜料选择和膜系设计原理，给出了实现反光镜膜层均匀性的实用装置，叙述了汽车防雾反光镜的制备工艺和性能，符合汽车防雾照明要求。     

Beschichtungstechnik auf dem Gipfel

Coating technology on the summit – Mirror Layers for the Large Synoptic Survey Telescope in Chile This article focuses on mirror coating for the Large Synoptic Survey Telescope, which is being installed in Chile. The LSST coating system consists of a coating chamber for the deposition of highly reflective optical coatings and a cleaning and stripping station for the M1M3 and M2 mirrors. With the help of the sputtering process, bare and protected silver/aluminum coating recipes can be deposited. The cleaning and stripping station consists of a rotating washing/drying boom, perimeter platforms, and an effluent handling system within the M1M3 mirror cell. The article describes the status of the assembly work on the coating system. Furthermore, it provides information about the progress of factory testing, a about the basic design features and reflective/coating requirements and the coating results.     

Leistungsfähige Spiegel für solarthermische Kraftwerke

High efficient mirrors for Concentrating Solar Power plants Mirrors are an essential component of CSP plants. Wet chemically coated silver mirrors supplied by Flabeg GmbH achieve an average specular and solar weighted reflectivity of 94.4%. Almost 30 years of field experience prove the durability of the coating. First surface mirrors could provide higher reflectivity, but so far either the necessary durability is not met or the costs are not competitive. Another approach to increase reflectivity is to equip the mirror with an antisoiling coating. This type of mirror is currently under field testing, showing already promising results. New paint systems for silvered mirrors will expand the locations for power plants to the shore or into tropical regions.     

Measured limits to contamination of optical surfaces by elastomers in vacuum

We have monitored the reflectivity of mirrors that were exposed to a fluoroelastomer (3M-Fluorel 2176) and a room-temperature vulcanizing silicone rubber (RTV-615) in vacuum. The 95% confidence limit on the decrease of mirror reflectivities was less than 0.35 ppm/week for Fluorel and <0.29 ppm/week for RTV-615.     

椭球反射镜膜厚均匀性与工艺技术的探讨

讨论了深紫外曝光系统中椭球反射镜镀制装置在薄膜沉积中的镀制条件对膜厚和膜厚均匀性的影响,计算了椭球镜的膜厚均匀性并对如何改善椭球镜膜厚分布作了介绍,实验得到均匀性符合要求的反射镜。     

Production of 400 mirrors with high VUV reflectivity for use in the SLD Cherenkov ring imaging detector

The Stanford Large Detector for experimental particle physics detection at the SLAC Linear Collider contains a Cherenkov ring imaging detector (CRID). The barrel CRID mirrors have been successfully produced and installed. The industrial mirror production process, the quality control of the mirrors produced, and the results of the vacuum ultraviolet (VUV) reflectivity and mirror-shape accuracy are described. An average reflectivity of at least 80% for light at 160 nm and 85% for light in the 180–230 nm wavelength range has been achieved in the production of over 400 mirrors of a typical size of 30 by 30 cm. The surface roughness and optical distortion measurements imply that the light loss due to scattering is a few percent of the incident light and the angular error due to shape distortion is less than 1 mrad.     

Corrosion characterization of durable silver coatings by electrochemical impedance spectroscopy and accelerated environmental testing

Highly reflective front-surface silver mirrors are needed for many optical applications. While various protective dielectric coating schemes have been developed, the long-term durability of Ag mirrors is still of great concern in the optics community for a variety of applications under harsh environments. The corrosion protection behavior of a SiNx-coated silver-mirror coating scheme was tested with electrochemical impedance spectroscopy (EIS) and accelerated environmental testing, including humidity and salt fog tests. The EIS data obtained were fitted with different equivalent circuit models. The results suggested that the 100A thick SiNx coating produced by rf magnetron sputtering was porous and acted as a leaky capacitor on the Ag film, whereas the addition of a NiCrNx interlayer as thin as 3A between SiNx and Ag films resulted in a much denser SiNx coating with a low-frequency impedance value of 2 orders of magnitude higher than that without the interlayer. Humidity and salt fog testing of different silver coatings showed similar results. The 100A SiNx/3A-NiCrNx/Ag coating exhibited excellent corrosion resistance against the corrosive environments used in this study.     

Wolter type I x-ray focusing mirror using multilayer coatings

A multilayer coating is a useful addition to a mirror in the x-ray region and has been applied to normal incidence mirrors used with soft x rays. When a multilayer coating is used on grazing incidence optics, higher performance can be achieved than without it. Cr/Sc multilayers coated on a Wolter type I mirror substrate for a soft x-ray microscope are considered. The reflectivity and effective solid angle are calculated for Wolter type I mirrors with uniform and laterally graded multilayer coatings. The laterally graded multilayer mirror showed superior x-ray performance, and the multilayer tolerances were relaxed. This multilayer mirror could be especially useful in the soft x-ray microscope intended for biological applications.     

Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering

The morphology of buried interfaces plays a key role in high performing Mo/Si soft X-ray mirrors. We show that grazing-incidence small-angle X-ray scattering is a highly effective and non-destructive diagnostic technique for analysis of buried interfaces. The parameters of average interface autocorrelation function can be determined unambiguously. Additionally period thickness, roughness of interfaces and an effective number of vertically correlated periods can be extracted. The multilayer mirrors were prepared by e-beam evaporation on heated and unheated substrates, ion beam assisted e-beam evaporation, ion beam sputtering and RF magnetron sputtering. The latter three techniques produce multilayer mirrors with comparable interface roughness. The differences in lateral correlation length and Hurst parameter are found.     

Hochreflektierende Beschichtungen auf Kunststoffoptiken

Metallized polymer substrates offering highest reflectance are not yet state of the art. Coating organic substrate materials is still a task that is connected with multiple problems. Insufficient adhesion of coatings on polymer substrates represents one of the main difficulties. We could show by experiment that aluminium and silver layers indicate good coating adhesion on many different polymers if they are deposited by vacuum evaporation considering certain process parameters. High reflectance values and a good climatic stability of the metal coated polymer parts are other important challenges to plastic mirrors. By performing roughness measurements on the different polymer samples and by comparing reflection values obtained after coating these samples the impact of the polymers surface quality on the reflectance after metal coating has been investigated. Particularly high reflectance above 97% was realized with a protected silver mirror as well as with dielectric enhanced aluminium. Applying these layer systems excellent reflection properties has been obtained on several plastic substrates comparable to those on glass mirrors. Furthermore the dielectric layers used for reflection enhancement showed the ability to protect the aluminium coating against climatic influences.     

Generation of microstripe cylindrical and toroidal mirrors by localized laser evaporation of fused silica

We report a new technique for the rapid fabrication of microstripe cylindrical and toroidal mirrors with a high ratio (>10) of the two principal radii of curvature (RoC₁/RoC₂), and demonstrate their effectiveness as mode-selecting resonator mirrors for high-power planar waveguide lasers. In this process, the larger radius of curvature (RoC₁) is determined by the planar or cylindrical shape of the fused silica substrate selected for laser processing, whilst the other (RoC₂) is produced by controlled CO₂ laser-induced vaporization of the glass. The narrow stripe mirror aperture is achieved by applying a set of partially overlapped laser scans, with the incident laser power, the number of laser scans, and their spacing being used to control the curvature produced by laser evaporation. In this work, a 1?mm diameter laser spot is used to produce grooves of cylindrical/toroidal shape with 240?μm width and 16?mm length. After high reflectance coating, these grooves are found to provide excellent mode selectivity as resonator mirrors for a 150?μm core Yb:YAG planar waveguide laser, producing high brightness output at more than 300?W. The results show clearly that the laser-generated microstripe mirrors can improve the optical performance of high-power planar waveguide lasers when applied in a low-loss mode-selective resonator configuration.     

Extreme-ultraviolet-induced oxidation of Mo/Si multilayers

The extreme-ultraviolet (EUV)-induced oxidation of Mo/Si multilayer mirrors was characterized by several methods: EUV reflectivity, x-ray photoelectron spectroscopy, small-angle x-ray reflectometry, atomic force microscopy, and EUV scattering measurements. Based on the results of the different investigation techniques, an oxidation model was developed to explain the degradation of the mirrors under EUV radiation.     

Precision measurement of ultralow losses of an asymmetric optical microcavity

The losses of the transmission, absorption, and scattering of optical mirrors govern the extraction efficiency of a nonclassical state that is generated inside a cavity. By measuring the reflectivities and transmittances and the matching factors from both sides of a super-mirror-made microcavity at various mode-matching efficiencies, the transmission losses and the unwanted losses, including the absorption and scatter losses, of the left and right cavity mirrors were both determined at the parts-per-million level.     

Thermally invariant dielectric coatings for micromirrors

Thermal expansion-induced curvature becomes a major effect in micromirrors as the mirror diameter exceeds 100 microm. Such mirrors are used for optical switching, scanning, and many other applications. By using multilayer coatings instead of a single metal reflector, one can use the mechanical properties of the multilayer to create mirrors with zero curvature across temperature. We demonstrate the fabrication of such thermally invariant mirrors using dielectric coatings. A semianalytic model based on free-plate elastic theory is developed that uses empirical parameters in place of the true thermal expansion coefficients of the coating materials. Micromirrors are demonstrated that maintain their design curvature to within lambda/60 for lambda = 633 nm across an operating range from 21 degrees C to 58 degrees C.