电荷俘获存储器中俘获层的研究进展

随着45nm和32nm技术节点的来临,传统Si3N4作为电荷俘获存储器的俘获层已经使器件的性能受到了限制。指出采用高k材料代替Si3N4作为俘获层已成为目前微电子材料研究的热点和趋势;着重对电荷俘获存储器的俘获层,包括对Si3N4掺O的无定形氧氮化硅(α-SiOxNy)俘获层、高k介质材料俘获层、植入纳米晶材料的俘获层及其叠层结构的研究现状和存在的问题进行了综述和分析,并对其进一步的研究趋势进行了展望。     

高k介质在浮栅型非挥发性存储器中的应用

随着微电子技术节点不断向前推进,基于传统浮栅结构的非挥发性存储器(NVM)技术遇到严重的技术难点,其中最主要的问题是SiO2隧穿层已经接近厚度极限,很难继续减薄.作为改进措施,引入高k介质作为新型隧穿层材料.文章介绍了高k材料的研究现状和在NVM器件中应用所取得的进展;最后,对高k介质进一步应用的研究趋势进行了展望.     

高k棚介质中电荷俘获行为的脉冲特征分析

本文介绍了电荷俘获的原理以及直流特征分析技术对俘获电荷进行定量分析的局限性,同时介绍了脉冲I-V分析技术,其能够对具有快速瞬态充电效应(FTCE)的高k栅晶体管的本征(无俘获)性能进行特征分析.     

CTM俘获层材料选取的模拟研究

电荷陷阱存储器(CTM)由于其分离式电荷存储原理,可以使存储器件尺寸持续小尺寸化,理论上解决了传统浮栅存储器小尺寸化瓶颈的限制。基于第一性原理,从理论上对CTM材料及相关结构进行了模拟计算,采用Material Studio软件包,对多种电荷俘获材料进行改性,引入陷阱,并对其能带、状态密度、缺陷态密度等方面展开模拟研究。为CTM实验提供了非常有效的理论依据与方法,从该角度出发研究存储器是一个全新的视角,提出可以通过陷阱态密度曲线的部分积分来确定CTM的存储窗口等衡量指标。     

利用改进的电荷泵法研究SONOS存储器陷阱电荷的分布特性

在silicon-oxide-nitride-oxide-silicon(SONOS)等电荷俘获型不挥发存储器中,编程操作后注入电荷的分布会对器件的读取、擦写以及可靠性带来影响.利用电荷泵方法可以有效而准确地测量出注入电荷沿沟道方向的分布.为了提高测试精度,在进行电荷泵测试时,采用固定低电平与固定高电平相结合的方法,分别对SONOS器件源端和漏端进行注入电荷分布的测试.通过测试,最终获得SONOS存储器在沟道热电子注入编程后的电子分布.电子分布的峰值区域在漏端附近,分布宽度在50nm左右.     

EEPROM单元的电荷保持特性

利用理论推导和实验方法对电可擦除可编程只读存储器EEPROM单元在给定电压下的电荷保持特性进行了分析和研究,得出了EEPROM单元电荷保持能力的理论公式,得到了单元保持状态下的电特性曲线,发现在双对数坐标下,阈值电压的退化率与时间成线性关系.在假定电荷流失机制为Fowler-Nordheim隧穿效应的情况下,推出了EEPROM单元在给定外加电压下的电荷保持时间,并通过实验得出了简化的EEPROM单元寿命公式.     

一种新型高速嵌入式动态随机存储器

基于二维器件模拟工具,研究了一种采用栅控二极管作为写操作单元的新型平面无电容动态随机存储器.该器件由一个n型浮栅MOSFET和一个栅控二极管组成.MOSFET的p型掺杂多晶硅浮栅作为栅控二极管的p型掺杂区,同时也是电荷存储单元.写“0”操作通过正向偏置二极管实现,而写“1”操作通过反向偏置二极管,同时在控制栅上加负电压使栅控二极管工作为隧穿场效应晶体管(Tunneling FET)来实现.由于正向偏置二极管和隧穿晶体管开启时接近1μA/μm的电流密度,实现了高速写操作过程,而且该器件的制造工艺与闪烁存储器和逻辑器件的制造兼容,因此适合在片上系统(SOC)中作为嵌入式动态随机存储器使用.     

基于同步电荷提取的压电能量俘获电路设计

利用压电振动能量收集技术具有的力-电耦合效应高,无电磁干扰,机构简单等特点,该文提出了一种对称式自供电同步电荷提取电路(SSP-SECE),使用互补三极管实现同步开关控制,通过导向二极管与检测电容可实现峰值自检测。使用Multisim软件建模仿真测试了电路方案的合理性,实验验证了电路的有效性。实验结果表明,采用优化设计的SSP-SECE接口电路使负载电阻功率比标准能量采集电路高约4.23倍,相对于SECE电路整体提升了23.02%。     

陷阱俘获存储器中电荷积累过程对保持特性的影响

本文通过数值模拟的方法对陷阱俘获存储器单元在多次擦写过程中的电荷积累过程进行了分析。由于多次擦写后陷阱电荷的积累,电荷之间的复合过程成为一个重要的问题。分析结果显示擦写过程中积累的空穴会对存储器的保持特性产生影响,同时在分析器件保持特性的时候电荷之间的复合机制必须加以考虑。     

基于SiGe量子点实现增强F-N隧穿的低压闪速存储器

提出了一种用于半导体闪速存储器单元的新的Si/SiGe量子点/隧穿氧化层/多晶硅栅多层结构,该结构可以实现增强F-N隧穿的编程和擦除机制.模拟结果表明该结构具有高速和高可靠性的优点.测试结果表明该结构的工作电压比传统NAND结构的存储器单元降低了4V.采用该结构能够实现高速、低功耗和高可靠性的半导体闪速存储器.     

Nonvolatile Charge Injection Memory Based on Black Phosphorous 2D Nanosheets for Charge Trapping and Active Channel Layers

2D van der Waals atomic crystal materials have great potential for use in future nanoscale electronic and optoelectronic applications owing to their unique properties such as a tunable energy band gap according to their thickness or number of layers. Recently, black phosphorous (BP) has attracted significant interest because it is a single‐component material like graphene and has high mobility, a direct band gap, and exhibits ambipolar transition behavior. This study reports on a charge injection memory field‐effect transistor on a glass substrate, where few‐layer BPs act as the active channel and charge trapping layers, and Al₂O₃ films grown by atomic layer deposition act as the tunneling and blocking layers. Because of the ambipolar properties of BP nanosheets, both electrons and holes are involved in the charge trapping process, resulting in bilateral threshold voltage shifts with a large memory window of 22 V. Finally, a memory circuit of a resistive‐load inverter is implemented that converts analog signals (current) to digital signals (voltage). Such a memory inverter also shows a clear memory window and distinct memory on/off switching characteristics.     

Charge trapping memory devices employing multi-layered Ge/Si nanocrystals for storage fabricated with ALD and PLD methods

The Ge/Si nanocrystals on ultra thin high-k tunnel oxide Al2O3 were fabricated to form the charge trapping memory prototype with asymmetric tunnel barriers through combining the advanced atomic layer deposition (ALD) and pulse laser deposition (PLD)techniques. Charge storage characteristics in such memory structure have been investigated using capacitance-voltage (C-V) and capacitance-time (C-t) measurements. The results prove that both the two-layered and three-layered memory structures behave relatively qualified for the multi-level cell storage. The results also demonstrate that compared to electrons, holes reach a longer retention time even with an ultra thin tunnel oxide owing to the high band offset at the valence band between Ge and Si.     

Understanding Temperature‐Dependent Charge Extraction and Trapping in Perovskite Solar Cells

Understanding the factors that limit the performance of perovskite solar cells (PSCs) can be enriched by detailed temperature (T)‐dependent studies. Based on p‐i‐n type PSCs with prototype methylammonium lead triiodide (MAPbI₃) perovskite absorbers, T‐dependent photovoltaic properties are explored and negative T‐coefficients for the three device parameters (V_OC, J_SC, and FF) are observed within a wide low T‐range, leading to a maximum power conversion efficiency (PCE) of 21.4% with an impressive fill factor (FF) approaching 82% at 220 K. These T‐behaviors are explained by the enhanced interfacial charge transfer, reduced charge trapping with suppressed nonradiative recombination and narrowed optical bandgap at lower T. By comparing the T‐dependent device behaviors based on MAPbI₃ devices containing a PASP passivation layer, enhanced PCE at room temperature is observed but different tendencies showing attenuating T‐dependencies of J_SC and FF, which eventually leads to nearly T‐invariable PCEs. These results indicate that charge extraction with the utilized all‐organic charge transporting layers is not a limiting factor for low‐T device operation, meanwhile the trap passivation layer of choice can play a role in the T‐dependent photovoltaic properties and thus needs to be considered for PSCs operating in a temperature‐variable environment.     

原位XPS分析Al2O3作为势垒层的Er2O3/Si结构

在超高真空条件下,通过脉冲激光沉积(PLD)技术制作了Er2O3/Al2O3/Si多层薄膜结构,原位条件下利用X射线光电子能谱(XPS)研究了Al2O3作为势垒层的Er2O3与Si界面的电子结构.XPS结果表明,Al2O3中Al的2p芯能级峰在低、高温退火前后没有变化;Er的4d芯能级峰来自于硅酸铒中的铒,并非全是本征氧化铒薄膜中的铒;衬底硅的芯能级峰在沉积Al2O 3时没有变化,说明Al2O3薄膜从沉积到退火不参与任何反应,与Si界面很稳定;在沉积Er2O3薄膜和退火过程中,有硅化物生成,表明Er2O3与Si的界面不太稳定,但随着Al2O3薄膜厚度的增加,其硅化物中硅的峰强减弱,含量减少,说明势垒层很好地起到了阻挡扩散的作用.     

An Improved Charge Pumping Method to Study Distribution of Trapped Charges in SONOS Memory

In silicon-oxide-nitride-oxide-silicon (SONOS) memory and other charge trapping memories,the charge distribution after programming operation has great impact on the device’s characteristics,such as reading,programming/erasing,and reliability.The lateral distribution of injected charges can be measured precisely using the charge pumping method.To improve the precision of the actual measurement,a combination of a constant low voltage method and a constant high voltage method is introduced during the charge pumping testing of the drain side and the source side,respectively.Finally,the electron distribution after channel hot electron programming in SONOS memory is obtained,which is close to the drain side with a width of about 50nm.     

电子俘获得光存储材料的研究进展

电子俘获存储技术是一种新型的存储技术，有望从存储机制方面突破现有的光存储介质的限制，实现大密度稳定可重复擦写存储，文中详细报道了近年来电子俘获光存储材料的研究进展。着重介绍了电子俘获材料光存储机制，以及各种材料的存储特性，并探讨了存在的问题。     

电子俘获材料KCl:Eu2+的光存储特性研究

采用高温固相反应法制备出了粉末态的 KCl:Eu2 样品 ,研究了 Eu掺杂浓度与光激励发光的关系。测试了样品的发光性能和存储性能 ,并分析了 KCl:Eu2 的光存储的机制。