高g值压阻式加速度计设计与仿真

研究了一种具有高灵敏度、小尺寸的四端梁结构的压阻式加速度计。利用有限元软件对不同悬臂梁、质量块尺寸的结构建立模型,并对该结构进行了灵敏度与应力分析、模态分析,以及动态响应分析。仿真研究结果表明,在50kg量程内,传感器轴向灵敏度达到7.40μV/g,横向灵敏度为0.33%,线性度为0.06%,响应时间为20.3μs,固有频率为111.2kHz。抗冲击性能能达到334000g,可以满足高g值环境下的测试需求,同时该研究为研制高性能传感器提供了一种准确且高效的仿真方法。     

硅基MEMS梁-复合膜-岛压阻式压力传感器设计研究

针对微机电系统(MEMS)压力传感器灵敏度与非线性度难以兼顾的问题,提出了一种梁-复合膜-岛压力传感结构,运用有限元仿真软件优化整体结构尺寸以得到最大纵横应力差、挠度,并设计压阻条压敏电阻掺杂类型、掺杂浓度、结构尺寸及分布位置。将梁-复合膜-岛结构与传统结构的输出进行仿真对比,由仿真结果可知,梁-复合膜-岛结构在0～60 kPa压力范围内灵敏度较相关结构提升7%以上,较E型结构提升2倍,非线性度为0.029%FSS,满足MEMS微压压力传感器的高灵敏度、高线性度等要求,可支撑医疗领域相关应用研究。     

CO2激光熔融毛细管端面制备的光纤F-P压力传感器

提出了一种利用CO2激光熔融毛细管端面来制备光纤法布里-珀罗(F-P)压力传感器的方法。F-P结构由普通单模光纤和基于CO2激光熔融毛细管端面制备的硅薄膜组成。文章详细说明了硅薄膜的制造工艺和熔融参数,并对光纤F-P压力传感器进行了性能测试。实验结果表明:制备的光纤F-P压力传感器对气压具有良好的灵敏度和线性度,灵敏度可达到16.37pm/kPa,线性度为0.998。该光纤F-P压力传感器结构紧凑,易于生产,具有在极端恶劣环境下的应用潜力。     

基于光纤光栅的杆型二维振动传感器

为了实现两个方向的振动信号检测,提出了一种以杆为弹性结构的二维光纤光栅振动传感器。首先对该传感器进行了理论分析,并推导出其固有频率和灵敏度公式。然后对传感器结构进行了优化仿真,确定各个参数的最终值。最后通过实验研究了传感器的各项性能。实验结果表明,该传感器在x方向上的固有频率为493 Hz,灵敏度为54 pm/g,线性度为99.9%;在y方向上的固有频率为466 Hz,灵敏度为5 pm/g,线性度为97.5%。此外,采用双光纤光栅消除了温度对振动信号测量的影响,温度灵敏度为0.1 pm/°C。该传感器结构简单,可检测两个方向的振动信号,消除了温度的影响,在振动信号检测中表现良好,因此在多维振动信号检测领域具有重要研究意义。     

一种新型岛膜压力传感器的研究与设计北大核心

设计了一种量程为180 kPa的新型岛膜结构MEMS压阻式压力传感器,通过ANSYS仿真软件,得出了在岛宽为500μm、岛厚为40μm、梁宽为200μm、敏感薄膜厚为15μm的情况下,该结构具有较好的线性度及灵敏度。提出了一种基于两层SOI硅-硅直接键合的工艺加工方法,能够精确控制敏感薄膜及岛的厚度,并且全硅结构器件能够避免键合残余应力,大大提高器件性能。采用了双惠斯登电桥电路减小传感器输出的温漂效应,并设计了该电路的压敏电阻连接图。最后对该压力传感器进行了测试,结果表明,其非线性为0.64%,精度为0.74%,满足现代工业应用要求。     

基于L型悬臂梁的膜片式FBG压力传感器

为满足油气管道压力测量需求,本文提出并研究 了一种使用膜片和L型悬臂梁作为压力转换单元的 光纤布拉格光栅(FBG)压力传感器。基于传感器的结构模型,通过理论计算对传感器灵敏 度和温度自补 偿效应进行了分析,并利用有限元法分析了传感器的静态和动态特性。实验结果表明,在0－2MPa范 围内,该传感器的压力灵敏度为1185.621pm/M Pa,相关系数达到 0.999,在0－80 ℃温 度范围内温 度灵敏度相关系数达到0.999以上,能有效消除温度交叉敏感。且具 有良好的可靠性,这种FBG压力传感器可广泛用于油气管道压力的长期准分布在线监测。     

圆平膜片压力传感器线性度的计算机模拟

文章在全面考虑横向和纵向灵敏度系统对压力传感器线性度影响的基础上,给出了圆平膜片压力传感器在两种薄膜应变片基本布置方式下传感器灵敏度的实用计算公式,虽形式上比较复杂,但计算结果更接近薄膜压力传感器的实际情况,适合于用来对敏感膜片进行线性度的优化设计。     

多参量微纳集成传感器

为了满足采煤机械工作状态在线监测在线分析系统对微纳传感系统小型化和集成化的要求,设计了一种将压阻式振动传感器与铂电阻温度传感器集成的多参量微纳集成传感器。振动传感器由一个惯性质量块、八个梁和边框组成,惯性质量块通过八个梁悬挂在边框上。为了减小集成传感器的面积,铂电阻温度传感器的形状为"蛇"形。对所设计的多参量微纳传感器进行了流片加工和性能测试,铂电阻温度传感器的灵敏度为1.04 mV/℃,量程为-20～80℃,振动传感器的灵敏度为49.89 mV/g,灵敏度幅值线性度为-0.33%,量程为50g。实验结果表明,研制的多参量微纳集成传感器满足对振动和温度信号测量的需求。     

倒岛膜凹槽电容式压力传感器设计与特性分析

结合岛膜结构电容式压力传感器高灵敏度和凹槽结构电容式压力传感器较好线性度的优点,设计了一种倒岛膜凹槽电容式压力传感器,并根据其结构特点建立了倒岛膜凹槽电容式压力传感器的理论模型,使用FEA（有限元分析）法分析了传感器的电容-压力特性。结果表明,设计的倒岛膜凹槽电容式压力传感器具有较好的测量特性,其测量灵敏度和线性度分别为0.00512 fF/Pa和0.98178。与相同设计参数的岛膜或凹槽电容式压力传感器相比,该传感器较好地缓解了测量灵敏度和线性度之间的矛盾问题。     

一种组合结构光纤光栅压力传感器

针对目前能源化工领域压力监测需求,结合光纤双光栅感知原理,设计开发出一种满足实际工程应用的光纤光栅压力传感器。采用波纹管与悬臂梁相结合的传感结构,解决了温度对压力测量的交叉敏感问题,并通过详细的理论及标定试验分析了传感器的传感特性。实验结果表明,该传感器具有温度自补偿、线性度和重复性好、精度较高等优点,特别适合于石油、煤炭、化工等易燃、易爆环境的压力监测,具有良好的应用前景。     

A square-diaphragm piezoresistive pressure sensor with arectangular central boss for low-pressure ranges

Describes the theory and experimental data for a piezoresistive low-pressure sensor featuring a variety of advantages. The objective of this development was a sensor with high sensitivity, high overload range, and good linearity. In comparison to familiar sensor types, the sensor developed for the pressure range of 10 kPa exhibits an excellent sensitivity of 35 mV/V FSO (full scale output) and nonlinearity <±0.05%. The sensor's theoretical performance was confirmed by measurements on manufactured pressure sensors     

一种改进的膜片式FBG压力传感器的研究

报道了一种改进的膜片式光纤布拉格光栅(FBG)压力传感器,采用特殊的膜片结构和凸台固定光纤的方式,解决了在以往膜片式光纤压力传感器中存在的栅区应力不均匀问题。对在不同固定方式下栅区的应力状态进行了理论分析。实验结果表明,该种传感器的灵敏度为14.81nm/MPa,在0.0～0.3MPa的量程内线性度在0.99以上,未出现光谱展宽现象。     

基于进口膜片的光纤光栅压力传感器的研究

分析了光纤布喇格光栅(FBG)的压力传感特性,给出了FBG的中心波长与压力的关系以及压力灵敏度系数的表达式,并将FBG纵向粘贴在富士公司生产型号为FBC 20WB2的膜片上进行了压力实验。实验结果表明粘贴在FBC 20WB2型膜片上的FBG压力传感器的灵敏度系数为0.376 nm/MPa左右,其测量精度在满量程范围内为1%,而理论的压力灵敏度系数为0.385 nm/MPa。同时发现粘贴在该膜片上的FBG压力传感器的中心波长与压力变化有着良好的线性关系和很高的相关系数并且迟滞现象较小,说明基于该膜片的FBG压力传感器非常适合于压力测量。     

热电式MEMS微波功率传感器的封装研究

为了研究热电式MEMS微波功率传感器封装后的性能,提出了一种COB技术的封装方案。首先,采用有限元仿真软件HFSS仿真封装前后的微波特性;然后,基于GaAs MMIC技术对热电式MEMS微波功率传感器进行制备,并对制备好的芯片进行封装。最后,对封装前后传感器的微波特性及输出特性进行测试。实验结果表明,在8～12 GHz频率范围内,封装后回波损耗小于-10.50 dB,封装前的灵敏度为0.16 mV/mW@10 GHz,封装后的灵敏度为0.18 mV/mW@10 GHz。封装后的热电式微波功率传感器输出电压与输入功率仍有良好的线性度。该项研究对热电式MEMS微波功率传感器封装的研究具有一定的参考价值和指导意义。     

光纤FBG高压传感器的优化设计与实验研究

基于对FBG传感器薄壁圆筒材料和结构的优化设计,制作了FBG高压传感器,在0～50MPa压力范围,进行了加压和减压高压实验,实验结果表明:FBG的压力灵敏度为0.0374nm/MPa,其中心波长与压力变化有着良好的线性关系和重复性,且迟滞性好。模拟结果与实验结果很好吻合。     

Multi‐Layered,Hierarchical Fabric‐Based Tactile Sensors with High Sensitivity and Linearity in Ultrawide Pressure Range

Resistive tactile sensors based on changes in contact area have been extensively explored for a variety of applications due to their outstanding pressure sensitivity compared to conventional tactile sensors. However, the development of tactile sensors with high sensitivity in a wide pressure range still remains a major challenge due to the trade‐off between sensitivity and linear detection range. Here, a tactile sensor comprising stacked carbon nanotubes and Ni‐fabrics is presented. The hierarchical structure of the fabrics facilitates a significant increase in contact area between them under pressure. Additionally, a multi‐layered structure that can provide more contact area and distribute stress to each layer further improves the sensitivity and linearity. Given these advantages, the sensor presents high sensitivity (26.13 kPa^?1) over a wide pressure range (0.2–982 kPa), which is a significant enhancement compared with the results obtained in previous studies. The sensor also exhibits outstanding performances in terms of response time, repeatability, reproducibility, and flexibility. Furthermore, meaningful applications of the sensor, including wrist‐pulse‐signal analysis, flexible keyboards, and tactile interface, are successfully demonstrated. Based on the facile and scalable fabrication technique, the conceptually simple but powerful approach provides a promising strategy to realize next‐generation electronics.     

Porous Conductive Hybrid Composite with Superior Pressure Sensitivity and Dynamic Range

Porous conductive composites hold immense promise in flexible sensors and soft robotics due to their pressure-responsive electrical conductivity. Unlike non-porous composites whose pressure sensitivity is limited by relatively high elastic modulus, porous materials show improved pressure sensitivity owing to their lower stiffness. Despite this, existing porous composites still suffer from insufficient pressure sensitivity or narrow detection ranges, severely restricting their applications. This work presents a liquid metal hybrid filler porous composite to address these issues. Through experiment and simulation optimization, the composite exhibits a conductivity increase of five order-of-magnitude over 0–250 kPa, demonstrating a 900% higher pressure sensitivity than the best non-porous counterpart in this work. The composite maintains a highly linear response (R² of 0.999) over an exceptionally wide dynamic range up to 8.9 MPa, with a pressure sensitivity of 8.1 MPa^–1, surpassing the state-of-the-art in both pressure range and sensitivity. A proof-of-concept pressure sensor array further demonstrates the composite's excellent sensing performance, showing stable response under 100-cycle loading with a measured pressure deviation of only 1.4%, outperforming existing commercial pressure sensors in terms of sensitivity, detection range and cyclic stability. The porous material design strategy opens doors for high sensitivity pressure sensors in wearable devices, flexible electronics, and soft robotics.     

Self-Powered Nanofluidic Pressure Sensor with a Linear Transfer Mechanism

The transfer functions of the widely used pressure sensors do not exhibit the desired linearity, which limits their practicability in many fields, such as the Internet of Things and artificial intelligence. Herein, MXene/cellulose nanofiber composite membrane-based linear nanofluidic pressure sensors are demonstrated. The nanoscale gaps between MXene laminates restrict the movement of electrolyte and realize the selective transport of ions, based on which mechanical signals can be converted into electric energy for self-powering. In particular, the generated voltage and current are directly proportional to the applied pressure. The introduction of high-strength cellulose nanofibers not only expands the detection range of the sensor but also achieves continuous adjustment of the nano-gap between MXene laminates, which optimizes the sensitivity of the device. The feasibility of further optimization through the modulation of surface functional groups, electrolyte concentration, and device assembly method is proposed. This 2D nanofluid pressure sensor provides an important approach to manufacture portable and wearable electronic devices for applications in many fields.     

Experimental validation of PTAT for in situ temperature sensor and voltage reference

Based on the CMOS proportional to absolute temperature principle, a combined device for voltage reference and temperature sensors is successfully implemented using a fully digital process. For a temperature range from 20 to 1208C, the experimental results show that the voltage reference has a temperature stable output of 717 mV and the associated temperature sensor has the sensitivity of 2.3 mV/8C with linearity up to 95%. They are independent of the variation of supply voltage.     

一种耐高压光纤布拉格光栅压力传感器

提出了一种基于圆柱形应变筒的耐高压光纤布拉格光栅压力传感器,推导了该传感器波长与压力之间的关系,得到了其压力响应灵敏度的解析表达式。从实验上获得了0．0676nm／MPa的压力响应灵敏度,约是裸光纤布拉格光栅压力响应灵敏度的23倍,本传感器的压力响应具有很好的线性,压力测量范围可达30MPa以上。可应用于高压情况下物理量的传感测量。