High quality GaAs nanowires grown on glass substrates

We report for the first time the growth of GaAs nanowires directly on low-cost glass substrates using atmospheric pressure metal organic vapor phase epitaxy via a vapor-liquid-solid mechanism with gold as catalyst. Substrates used in this work were of float glass type typically seen in household window glasses. Growth of GaAs nanowires on glass were investigated for growth temperatures between 410 and 580 °C. Perfectly cylindrical nontapered nanowires with a growth rate of ~33 nm/s were observed at growth temperatures of 450 and 470 °C, whereas highly tapered pillar-like wires were observed at 580 °C. Nanowires grew horizontally on the glass surface at 410 °C with a tendency to grow in vertically from the substrate as the growth temperature was increased. X-ray diffraction and transmission electron microscopy revealed that the nanowires have a perfect zinc blende structure with no planar structural defects or stacking faults. Strong photoluminescence emission was observed both at low temperature and room temperature indicating a high optical quality of GaAs nanowires. Growth comparison on impurity free fused silica substrate suggests unintentional doping of the nanowires from the glass substrate.     

GaAs p-i-n structures for X-ray detectors grown on Ge and GaAs substrates

Features of the creation of gallium arsenide (GaAs) p-i-n structures on germanium substrates are considered. Optimum regimes for growth of thick GaAs layers by hydride-chloride vapor phase epitaxy (HVPE) on Ge substrates are established, which allow high-quality p-i-n structures with characteristics close to those reached by homoepitaxy to be obtained. The spectra of exciton photoluminescence have been measured for ultrahigh-purity GaAs layers of various thicknesses grown under differing HVPE conditions.     

Three-dimensional multiple-order twinning of self-catalyzed GaAs nanowires on Si substrates

In this paper we introduce a new paradigm for nanowire growth that explains the unwanted appearance of parasitic nonvertical nanowires. With a crystal structure polarization analysis of the initial stages of GaAs nanowire growth on Si substrates, we demonstrate that secondary seeds form due to a three-dimensional twinning phenomenon. We derive the geometrical rules that underlie the multiple growth directions observed experimentally. These rules help optimizing nanowire array devices such as solar or water splitting cells or of more complex hierarchical branched nanowire devices.     

Heteroepitaxial growth of vertical GaAs nanowires on Si(111) substrates by metal-organic chemical vapor deposition

Epitaxial growth of vertical GaAs nanowires on Si(111) substrates is demonstrated by metal-organic chemical vapor deposition via a vapor-liquid-solid growth mechanism. Systematic experiments indicate that substrate pretreatment, pregrowth alloying temperature, and growth temperature are all crucial to vertical epitaxial growth. Nanowire growth rate and morphology can be well controlled by the growth temperature, the metal-organic precursor molar fraction, and the molar V/III ratio. The as-grown GaAs nanowires have a predominantly zinc-blende crystal structure along a <111> direction. Crystallographic {111} stacking faults found perpendicular to the growth axis could be almost eliminated via growth at high V/III ratio and low temperature. Single nanowire field effect transistors based on unintentionally doped GaAs nanowires were fabricated and found to display a strong effect of surface states on their transport properties.     

Growth dynamics of GaAs, AlAs and (Al, Ga)As on GaAs (110) and (111)A substrates during molecular beam epitaxy

The growth dynamics of GaAs, AlAs and (Al, Ga)As films grown by molecular beam epitaxy (MBE) on GaAs(110) and (111)A substrates have been studied using reflection high energy electron diffraction (RHEED) intensity oscillations and scanning tunnelling microscopy (STM). In contrast to growth on (001) oriented substrates, the period of the RHEED intensity oscillation does not in general provide a measure of the growth rate. This is explained by the very different surface chemistry involved, since the short lifetime of arsenic molecules (As₂ or As₄) on non-(001) surfaces results in cation-stable surface conditions, which generate arsenic (anion)- induced intensity oscillations, whereas on (001) surfaces they are cationinduced under all normal growth conditions. The effects of this behaviour on surface morphology are illustrated, as are the relative influences of Ga and Al. STM images obtained during the first few monolayers of growth provide a detailed indication of the growth mode and in particular explain in a simple manner the origin of bilayer period RHEED intensity oscillations obtained during growth on GaAs (110).     

Corrugated surfaces formed on GaAs(331)A substrates: the template for laterally ordered InGaAs nanowires

Morphology evolution of high-index GaAs(331)A surfaces during molecular beam epitaxy?(MBE) growth has been investigated in order to achieve regularly distributed step-array templates and fabricate spatially ordered low-dimensional nano-structures. Atomic force microscope?(AFM) measurements have shown that the step height and terrace width of GaAs layers increase monotonically with increasing substrate temperature. By using the step arrays formed on GaAs(331)A surfaces as the templates, we have fabricated highly ordered InGaAs nanowires. The improved homogeneity and the increased density of the InGaAs nanowires are attributed to the modulated strain field caused by vertical multi-stacking, as well as the effect of corrugated surface of the template. Photoluminescence?(PL) tests confirmed remarkable polarization anisotropy.     

Vertically oriented germanium nanowires grown from gold colloids on silicon substrates and subsequent gold removal

A linker-free method to deposit citrate-stabilized Au colloids onto hydrogen-terminated Si by acidifying the Au colloid solution with HF or HCl is presented. This method prevents oxide formation and provides a model system for studying orientation control of nanowires by epitaxy. Conditions are reported that result in vertically oriented Ge nanowires of uniform diameter and length on Si(111). We then present a method to remove Au catalysts from the nanowires with aqueous triiodide and HCl.     

Facile synthesis and growth mechanism of Ni-catalyzed GaAs nanowires on non-crystalline substrates

GaAs nanowires (NWs) have been extensively explored for next generation electronics, photonics and photovoltaics due to their direct bandgap and excellent carrier mobility. Typically, these NWs are grown epitaxially on crystalline substrates, which could limit potential applications requiring high growth yield to be printable or transferable on amorphous and flexible substrates. Here, utilizing Ni as a catalytic seed, we successfully demonstrate the synthesis of highly crystalline, stoichiometric and dense GaAs NWs on amorphous SiO(2) substrates. Notably, the NWs are found to grow via the vapor-solid-solid (VSS) mechanism with non-spherical NiGa catalytic tips and low defect densities while exhibiting a narrow distribution of diameter (21.0 ± 3.9 nm) uniformly along the entire length of the NW (>10 μm). The NWs are then configured into field-effect transistors showing impressive electrical characteristics with I(ON)/I(OFF) > 10(3), which further demonstrates the purity and crystal quality of NWs obtained with this simple synthesis technique, compared to the conventional MBE or MOCVD grown GaAs NWs.     

Oxidation resistance of thin boron carbo-nitride films on Ge(100) and Ge nanowires

Chemical vapor deposition of thin (< 10 nm) films of amorphous boron carbo-nitride (BC_0.7N_0.08, or BCN) on Ge(100) and Ge nanowire (GeNW) surfaces was studied to determine the ability of BCN to prevent oxidation of Ge. X-ray photoelectron spectroscopy was used to track Ge oxidation of BCN-covered Ge(100) upon exposure to ambient, 50 °C deionized water, and a 250 °C atomic layer deposition HfO₂ process. BCN overlayers incorporate O immediately upon ambient or water exposure, but it is limited to 15% O uptake. If the BCN layer is continuous, the underlying Ge(100) surface is not oxidized despite the incorporation of O into BCN. The minimum continuous BCN film thickness that prevents Ge(100) oxidation is ~ 4 nm. Thinner films (≤ 3.2 nm) permitted Ge(100) oxidation in each of the oxidizing environments studied. GeNWs with a 5.7 nm BCN coating were resistant to oxidation for at least 5 months of ambient exposure. High resolution transmission electron microscopy images of HfO₂/BCN/Ge(100) cross-sections and BCN-coated GeNWs reveal clean, abrupt BCN-Ge(100) interfaces.     

Aligned tungsten oxide nanowires on tungsten (100) substrates

WO₃ nanowires in body center cubic structure were grown on W (100) substrates by heating in an argon atmosphere. Scanning electron microscope and transmission electron microscope characterizations show the WO₃ NWs grew along the [100] crystallographic orientation and were aligned in three directions. The diameter of WO₃ NWs is in the range of several to 20 nm and the length is up to 1 µm. Field emission measurements show that the field emission current density can reach 1.8 mA/cm² under electrical field 10 V/µm and the turn-on field can be as low as 2.6 V/µm.     

Oxide-p-InSe heterojunctions on (110)-oriented InSe crystal substrates

The photoelectric properties of the oxide-p-InSe heterojunction formed on the InSe crystal plane parallel to the crystallographic C axis were studied. The samples were prepared by thermal oxidation of a single crystal InSe substrate. The spectra of photosensitivity revealed no influence of the surface recombination effects on the heterojunction properties. The capacitance-voltage characteristics showed that the p-n junction is sharp and the corresponding energy barrier is 0.17 eV. The charge transfer through the barrier is described within the framework of the diode theory, with a diode coefficient of the current-voltage characteristic being close to unity.     

Epitaxial growth of PbTe on (100) GaAs substrates

The growth of PbTe films on GaAs by molecular beam epitaxy was studied by reflection high energy diffraction. The strains in the films were investigated by X-ray diffraction. Despite a lattice mismatch of 14.2%, oriented films can be grown up to a thickness of 4000 Å. For thicker films the thermal strain causes cracks if the samples are cooled from growth to liquid-nitrogen temperature.     

Strain accommodation in Ga-assisted GaAs nanowires grown on silicon (111)

We study the mechanism of lattice parameter accommodation and the structure of GaAs nanowires (NWs) grown on Si(111) substrates using the Ga-assisted growth mode in molecular beam epitaxy. These nanowires grow preferentially in the zincblende structure, but contain inclusions of wurtzite at the base. By means of grazing incidence x-ray diffraction and high-resolution transmission electron microscopy of the NW-substrate interface, we show that the lattice mismatch between the NW and the substrate is released immediately after the beginning of NW growth through the inclusion of misfit dislocations, and no pseudomorphic growth is obtained for NW diameters down to 10 nm. NWs with a diameter above 100 nm exhibit a rough interface towards the substrate, preventing complete plastic relaxation. Consequently, these NWs exhibit a residual compressive strain at their bottom. In contrast, NWs with a diameter of 50 nm and below are completely relaxed because the interface is smooth.     

MBE方法在GaAs(001)衬底上外延生长GaSb膜

利用分子束外延方法(MBE)在GaAs(001)衬底上外延生长了GaSb薄膜,利用高分辨透射电子显微镜(HRTEM)、原子力显微镜(AFM)、Hall效应(HallEffect)和低温光荧光谱(LTPL)等手段对薄膜的晶体质量、电学性能和光学质量进行了研究。发现直接生长的GaSb膜表面平整,空穴迁移率较高。引入GaSb/AlSb超晶格可有效阻断进入GaSb外延层的穿通位错,对应的PL谱强度增强,材料的光学质量变好。     

Ge oxidation in the remaining cores of Si(1-x)Ge(x) nanowires after prolonged oxidation

For this investigation of the Ge behavior of condensed Si(1-y)Ge(y) (y > x) cores during the oxidation of Si(1-x)Ge(x) nanowires, Si(1-x)Ge(x) nanowires were grown in a tube furnace by the vapor-liquid-solid method and thermally oxidized. The test results were characterized using several techniques of transmission electron microscopy. The two types of Ge condensation are related to the diameter and Ge content of the nanowires. The consumption of Si atoms in prolonged oxidation caused the condensed SiGe cores to become Ge-only cores; and the continuous oxidation resulted in the oxidation of the Ge cores. The oxidation of Ge atoms was confirmed by scanning transmission electron microscopy.     

Growth of high Ge content SiGe on (110) oriented Si wafers

Growth of high (above 40%) Ge content SiGe by applying silane and dichlorosilane as Si precursors on (110) Si is investigated. In the case of silane based processes Ge concentration is ~ 20% higher, whereas for dichlorosilane based processes it is ~ 30% lower on (110) Si compared to (100) Si. The morphology of the grown layers is found to be dependent on Ge concentration, layer thickness and process temperature. Use of optimized deposition parameters and adequate thickness results in high quality strained SiGe layers. Integration of high Ge content SiGe layers in multiple gate filed-effect transistor structures shows the expected differences in Ge content on the different Si planes forming Si fin. These differences can be avoided by adjusting the fin orientation on the Si wafer resulting in equal planes on the fin's top and sidewalls. When the investigated SiGe layers are incorporated in the buried channel field effect transistor structures on (110) Si wafers a significant thickening at the active windows edge is observed. It is speculated that this effect is connected with elastic SiGe relaxation caused by a non optimized process temperature.     

Diameter-dependent composition of vapor-liquid-solid grown Si(1-x)Ge(x) nanowires

Diameter-dependent compositions of Si(1-x)Ge(x) nanowires grown by a vapor-liquid-solid mechanism using SiH(4) and GeH(4) precursors are studied by transmission electron microscopy and X-ray energy dispersive spectroscopy. For the growth conditions studied, the Ge concentration in Si(1-x)Ge(x) nanowires shows a strong dependence on nanowire diameter, with the Ge concentration decreasing with decreasing nanowire diameter below approximately 50 nm. The size-dependent nature of Ge concentration in Si(1-x)Ge(x) NWs is strongly suggestive of Gibbs-Thomson effects and highlights another important phenomenon in nanowire growth.     

Molecular-beam epitaxy of (Ga,Mn)As crystal nanowires on surface GaAs(100)

Arrays of (Ga,Mn)As crystal nanowires on a GaAs (100) substrate were first obtained using molecular-beam epitaxy at 485°C. From the diffraction patterns of the reflected fast electrons, it was found that crystal nanowires are formed in this system in a cubic crystallographic phase.     

Role of confinement on carrier transport in Ge-Si(x)Ge(1-x) core-shell nanowires

We examine the impact of shell content and the associated hole confinement on carrier transport in Ge-Si(x)Ge(1-x) core-shell nanowires (NWs). Using NWs with different Si(x)Ge(1-x) shell compositions (x = 0.5 and 0.7), we fabricate NW field-effect transistors (FETs) with highly doped source/drain and examine their characteristics dependence on shell content. The results demonstrate a 2-fold higher mobility at room temperature, and a 3-fold higher mobility at 77K in the NW FETs with higher (x = 0.7) Si shell content by comparison to those with lower (x = 0.5) Si shell content. Moreover, the carrier mobility shows a stronger temperature dependence in Ge-Si(x)Ge(1-x) core-shell NWs with high Si content, indicating a reduced charge impurity scattering. The results establish that carrier confinement plays a key role in realizing high mobility core-shell NW FETs.