Synthesis of anatase TiO2 film by reactive vacuum arc deposition method

TiO₂ in anatase crystalline structure has strong photocatalysis. In this paper, TiO₂ films are deposited on soda‐glass substrate using a Ti cathode vacuum arc with O₂ flow. Experimental conditions are as follows: arc current, 50 A; pressure, 0.3 and 1.0 Pa; O₂ flow rate, 20 ml/min; cathode–substrate distance, 250 mm; bias dc voltage to the substrate, none and –300 V. As‐deposited films are annealed for 60 min under atmosphere and vacuum. The following results were obtained. (1) Deposition rate is 0.07 μm/min. (2) As‐deposited films are amorphous. (3) Films annealed at 250 to 500 °C have an anatase crystalline structure. These results are independent of pressure, bias, and annealing environment. In another process, the films are deposited for 30 min when the substrate holding table is connected to the anode chamber. Experimental conditions are as follows: arc current, 50 A; pressure, 1.0 Pa; O₂ flow rate, 20 ml/min; cathode–substrate distance, 250 mm. Almost 30% of the arc current was observed to flow through the substrate table, and the surface temperature of the table increased up to 450 °C. The reason for this is considered to be that Joule heating occurs when the current flows through the film deposited on the table. The film deposited in this process is dominantly anatase. The above experiments show that anatase TiO₂ film can be deposited on soda‐glass by the reactive vacuum arc method. © 1999 Scripta Technica, Electr Eng Jpn, 126(4): 12–20, 1999     

恒流电泳沉积YSZ电解质薄膜的燃料电池研究

采用恒流电泳沉积(EPD)的方法,在NiO-YSZ阳极基底上制备出较为致密的氧化钇稳定的氧化锆(YSZ)固体电解质薄膜,1300℃共烧结5h后得到具有一定厚度的YSZ薄膜。利用SEM对YSZ薄膜的形貌与膜厚进行了表征。在此基础上,以La0.6Sr0.4Co0.2Fe0.8O3(LSCF)为阴极制成单电池,并对单电池的性能及阻抗谱进行了测试,在650℃时得到单电池的最大开路电压为0.84V,单电池在750℃时的最大电流密度为0.64A/cm2,最大功率密度达145mW/cm2;800℃时的短路电流密度接近0.9A/cm2,最大功率密度达200mW/cm2。阻抗谱测试结果表明,电解质部分的电阻占电池内阻的1/4~1/3;电极在-电解质界面处存在的孔洞对电池的性能产生了不利的影响。