超声微细加工中变幅杆的设计与制造

超声微细加工首先需要制造出作为工具使用的变幅杆。变幅杆的设计与制造在整个超声微细加工过程中具有十分重要的作用。本文介绍了变幅杆在超声加工中的作用,常用不同形状变幅杆的功能、特点,并重点介绍了试验使用的阶梯形变幅杆和指数形变幅杆的具体设计及制作过程。     

电泳辅助微细超声加工机床设计与实验

微细超声加工时,加工区域内的磨粒会被高频振动的工具或工件振出加工区,使加工区域出现无磨粒,导致工具与工件直接作用,影响加工质量与加工效率。为解决上述问题,提出了一种电泳辅助微细超声加工新技术。利用超微磨粒的电泳特性,通过在工具电极与辅助电极之间施加电场,溶液中的超微磨粒泳动到加工区域,甚至是附着或半附着在微细工具上,保证了加工区域磨粒的存在,从而提高微细超声加工质量、加工效率。针对新技术,设计了电泳辅助微细超声加工机床并进行了实验,机床硬件部分包括主轴设计、运动系统硬件设计、电泳辅助微细超声加工工作液槽设计及数据采集系统硬件设计;基于LabVIEW软件开发恒力控制加工控制系统,包括初始化模块、运动控制选择模块、粗对刀模块、恒力对刀模块、恒力控制加工模块以及实时显示模块。开展了微细超声加工与电泳辅助微细超声加工对比实验研究,实验结果表明,在保持其他加工参数相同的条件下,电泳辅助微细超声加工的孔边缘质量更好,微细超声加工后的孔底表面粗糙度Sa=3.008μm,而电泳辅助微细超声加工后的孔底表面粗糙度Sa=1.494μm。     

超声调制电加工振动系统研制及试验

根据超声调制电加工振动系统对换能器的要求,设计PZT陶瓷片组合的压电换能器,利用ANSYS分析换能器、变幅杆及工具电极的频率、振幅等参数变化规律;进行变幅杆与工具电极设计,利用数控车削、微细放电及微细线切割制作变幅杆与工具电极;通过超声振动系统的振动特性测试,验证超声振动系统的稳定性及工具电极设计的合理性;进行多种微结构超声调制电加工试验,验证超声电加工系统的可靠性及在微结构加工中精度好、效率高的技术优势。     

钛合金深小孔超声电火花加工工艺与实验研究

针对钛合金深小孔加工的技术难点,研制了具有四轴联动功能的微细超声电火花加工机床,在所研制的机床上,进行了钛合金深小孔超声电火花复合加工实验,就超声振动及削边电极在加工中的作用进行了系统和研究。     

微细深孔加工研究进展及关键技术分析

随着科学技术的进步和工业生产的发展,包括圆形孔和异形孔在内的微细深孔的应用日趋广泛.对微细深孔加工的研究进展进行了综述,主要包括微细钻削、激光加工、电解加工、超声加工、电火花加工及其复合加工等,对其中的一些方法特别是微细电火花加工的关键技术进行了分析.     

微细孔电解加工控制方法及试验研究

基于微细电解加工的特点，介绍了一种微细电解加工系统。该系统能够将加工间隙控制到几微米到几十微米的范围内。根据电解加工以离子形式对材料去除的特性，进行微细电极、微细群电极的制备研究，并将其用于微细孔、群孔的加工中。试验分析了各工艺参数如电压、溶液浓度、加工间隙、进给速度等对微细孔电解加工精度的影响。结果表明，微细电解加工的侧面间隙随着加工电压的降低、溶液浓度的减小、脉宽变窄和初始加工间隙的减小而减小，改善了加工的定域性，加工精度得到提高。     

微细深孔超声轴向振动钻削装置的设计

基于高频振动切削原理 ,设计了一种振频 2 0± 1KHz、振幅 2 5 μm的新型超声轴向振动钻削装置 ,该装置由数字锁相环频率自动跟踪式晶体管型超声波发生器、轴向半波长圆柱型压电陶瓷换能器、半波谐振圆锥型变幅杆以及工具系统组成 ,可在软质材料上实现微细深孔的精密、超精密加工     

超声电解复合微细加工装置与试验研究

分析微细电解复合超声频振动加工过程机理,提出一种微细加工新方法--超声电解复合微细加工;设计、构造并完善复合微细加工装置;研究微细阴极制作工艺,利用微细组合电加工技术制作各类截面形状的微细阴极;进行超声电解复合微细加工试验,验证微细电解复合超声频振动实现微细加工的可行性及其在加工速度、精度、表面质量等方面的技术优势,探讨超声电解复合微细加工制作微结构的工艺规律。     

微细深孔超声轴向振动钻削装置的设计

超声振动钻削属于脉冲式的断续切削。在深孔加工方面具有普通孔加工技术无法比拟的工艺效果。文章介绍了作者基于高频振动切削原理设计的一台超声轴向振动钻削装置的结构。并将该装置用于立式加工中心上对铝、铜等材料进行了切削加工实验。实验结果表明，超声振动加工可提高微细深孔的加工精度和表面质量。这种方法特别适合于软质材料的微细深孔的精密和超精密加工。     

微细电解加工实验研究

采用基于电化学腐蚀法制作直径80μm、长度3000μm的微细电极,分别使用微细圆柱电极和微细螺旋电极进行了加工实验,实验研究丧明微细螺旋电极在孔和槽的加工中比微细圆柱电极具有更快的加工速度以及更小的加工间隙.螺旋结构在加工中有助于排出加工间隙内电解产物,显著地提高了加工效率、加工精度及加工过程的稳定性.     

Fabrication of stepped hole on zirconia bioceramics by ultrasonic machining

Zirconia (ZrO₂) is a highly biocompatible ceramic material providing fracture strength properties that allow application as dental implants in biomedical engineering. In this present research, experimental analysis has been made for generating stepped hole on zirconia bioceramics with desired quality using ultrasonic machining (USM) process. Four independent controllable input process parameters are abrasive grain diameter, power rating, concentration of abrasive slurry, and tool feed rate. Material removal rate (MRR), overcut of larger diameter (OLD) hole, and overcut of smaller diameter (OSD) hole of stepped hole are considered as the responses. Response surface methodology (RSM) is used for modeling the performance of USM process. Multiobjective optimization has been performed to maximize the MRR and minimize the OLD hole and OSD hole of stepped holes. All the responses are improved at the optimal parametric condition and verified by confirmation test. The present research opens up the application feasibility of USM process for stepped hole generation on bioceramics and its utilization in biomedical field.     

超声波加工建筑玻璃小孔的试验研究

本文通过超声波加工建筑玻璃小孔的试验，探讨了工具振动的振幅、频率、工件材料、进给压力、工作介质等主要加工参数对去除率的影响和工具设计及加工效果。     

Analysis on profile accuracy for ultrasonic machining of alumina ceramics

Ultrasonic machining (USM) is a mechanical material removal process which has great potential for machining hard and brittle materials such as ceramics, semiconductors, glasses, etc. The accuracy of the job profile generated by USM can be improved by optimal control of the process parameters. This paper presents the study on the influences of ultrasonic machining process parameters such as abrasive grit size, slurry concentration, power rating, tool feed rate and slurry flow rate on generated hexagonal hole profile. The angular deviations at corner angles, dimensional deviations across flat surfaces and dimensional deviation across corners of the hexagonal hole profile have been studied. Based on experimental results, the influences of abrasive grit size, slurry concentration, power rating and tool feed rate were analysed. From the analysis of parametric influences based on various test results, the best parametric combination was found as grit number of 600, slurry concentration of 30 %, power rating of 50 % and feed rate of 1.08 mm/min for achieving better profile accuracy during machining of Al₂O₃ ceramics. The experimental investigations carried out for determining the influence of USM process parameters will provide effective guideline to select parametric settings for achieving desired job profile accuracy on non-circular holes during ultrasonic drilling of alumina.     

旋转超声电解复合加工小孔的仿真加工

为研究旋转超声电解复合加工小孔的成型过程,进行了旋转超声电解复合加工小孔试验,得到了不同加工时间孔的截面,并根据试验参数,进行了基于ANSYS的二维仿真加工和三维仿真加工。对小孔的入口直径、底面直径和加工深度进行了对比分析,结果表明由于三维仿真加工中采用了管电极,并考虑了电解加工中阴极超声高频振动对电解液电导率的影响,故其仿真结果更加接近试验值,间接证明了旋转超声电解复合加工小孔三维仿真加工的可靠性,展示了不同时刻的三维加工型腔,为旋转超声电解复合加工的成型过程和成型规律的研究提供了参考。     

Chipping minimization in drilling ceramic materials with rotary ultrasonic machining

Ultrasonic machining (USM) has been considered as a new cutting technology that does not rely on the conductance of the workpiece. USM presents no heating or electrochemical effects, with low surface damage and small residual stresses on workpiece material, such as glass, ceramics, and others; therefore, it is used to drill microholes in brittle materials. However, this process is very slow and tool wear dependent, so the entire process has low efficiency. Therefore, to increase microhole drilling productivity or hole quality, rotary ultrasonic machining (RUM) is considered as a strong alternative to USM. RUM, which presents ultrasonic axial vibration with tool rotation, is an effective solution for improving cutting speed, precision, tool wear, and other machining responses beyond those of the USM. This study aims to reduce the microchipping or cracking at the exit of the hole, which inevitably occurs when brittle materials are drilled, with consideration of tool wear. To this end, response surface analysis and desirability functions are used for experimental optimization. The experimental results showed that the proposed RUM scheme is suitable for microhole drilling.     

超声加工技术的应用现状及其发展趋势

根据近年来超声加工技术的发展状况,综述了超声加工技术的应用现状及其发展趋势。超声加工技术具有其极强的切削能力、极小的切削抗力、极细微的光整能力以及极高的强化能力。国内外学者对超声振动系统中的超声换能器和变幅杆进行研究,目的在于增加系统的功率与变幅杆的振幅,以及适用于特定的加工环境。超声加工技术以其工艺优势在难加工材料加工、深小孔加工、薄壁件加工、超声表面光整强化、超声焊接和磨粒冲击等加工领域获得越来越广泛的应用,并且其应用涉及半导体工业、高速列车、汽车制造、航空航天、光学元器件、医疗工业等产业领域。随着超声加工技术应用的日益普遍,超声复合加工、微细超声加工、旋转超声加工以及超声骨切削技术也将得到进一步的发展和运用。     

微晶玻璃细深孔超声加工工具有限元分析

采用普通钻削加工细深孔的质量很差,在以微晶玻璃为代表的硬脆材料上进行细深孔加工更加困难。为实现在微晶玻璃上的细深孔加工,采用了超声加工方法,完成了超声加工声学系统的设计,并用有限元分析方法对工具在不同压力下的变形和应力进行了分析。实验结果表明,该超声加工工具可以满足微晶玻璃细深孔的加工要求。     

一种新型金属材料微细槽孔结构电加工方法

在枪管、飞机叶片、弹体壳腔等的微细裂纹无损检测试验研究中,需要先在这些场合预制微细人工伤。为解决这类微细人工伤的单件或者小批量加工问题,需要研究一种加工环境质量要求相对较低、热效应及残余应力相对较小的新型加工方法。本文提出一种应对加工需求的新方法,即以普通的电火花加工原理为基本雏形,利用微细脉冲产生的电弧放电热,逐步将金属微量熔蚀,在加工间隙中,使油液及时将切屑冲走,以实现顺利加工。通过样机开发与实际加工效果分析可知,工件切口面满足要求,样机工作可靠,实现了小型化与便携功能,能够解决微细有槽孔结构的单件或者小批量快速加工问题,为金属材料的微裂纹蚀刻设备的微型化与无损检测技术奠定了基础。     

Research on ECM process of micro holes with internal features

Micro holes with internal features are widely used as spray holes and cooling holes nowadays, which are usually required to be with high aspect ratio and shape accuracy, as well as good surface quality. An electrochemical machining (ECM) process is presented to machine these micro holes with diameter <200 μm. A quantitative relation between micro-hole diameter and machining parameters including voltage, duty ratio and feedrate is obtained through orthogonal experiments. According to the designed shape of internal features, change rules of machining parameters for varied diameters in different depth are obtained, and then micro holes with internal features are shaped precisely. Taking reverse tapered hole as an example, ECM experiments by varying parameters of voltage, duty ratio and feedrate (called varying voltage machining, varying duty ratio machining and varying feedrate machining, respectively) are carried out. Micro holes with inlet diameter of 178 μm and taper angle of 1.05° are shaped on a 1.0 mm-thick workpiece of 18CrNi8. The deviation of inlet is <3 μm and the taper-angle error is <0.1° in varying voltage machining. The corresponding dimensional accuracy of taper angle is improved by 51% than that of varying duty ratio machining under the same efficiency. The machining efficiency of varying voltage machining is increased by 36% compared to the efficiency in varying feedrate machining. In addition, the micro holes with complex features of funnel shape and bamboo shape are machined.