大口径传输反射镜的研究进展

针对我国惯性约束聚变装置(ICF)对高性能传输反射镜元件的性能要求,探索了大口径传输反射镜制备涉及的关键技术与工艺。深入开展了K9玻璃坯片研制、光学冷加工、传输反射镜镀膜和激光预处理等方面的研究工作。提出了400mm口径K9反射类坯片精密退火工艺,形成了高精度平面加工技术路线;制备了低缺陷薄膜,并且建立了大口径光学元件预处理装置。最后,综述了大口径高性能传输反射镜研制方面的主要成果。研制的400mm口径传输反射镜在1053nm处以45°入射时,其表面粗糙度优于99.8%,面形PV值小于λ/3(λ=1 053nm),损伤阈值大于30J/cm2(5ns)。基于提出的技术研制的大口径传输反射镜已成功应用于我国神光系列高功率激光装置,有力支撑了我国大型激光装置的稳定运行。     

阶段离子束辅助法制备基频减反膜

在研究阶段离子束辅助制备方式对薄膜性质影响的基础上,采用电子枪蒸发及离子束辅助沉积制备了氧化铪及氧化硅单层膜,采用阶段离子束辅助沉积及全程非离子束辅助沉积制备了基频减反膜。测量了所有样品的弱吸收、残余应力和激光损伤阈值。结果发现,相对电子枪热蒸发制备的样品,离子束辅助沉积的单层膜具有大的弱吸收、低的激光损伤阈值,且张应力减小,压应力增加;阶段离子束辅助沉积制备的减反膜剩余应力变小,弱吸收稍微增加,激光损伤阈值从10.91 J/cm²增加到18 J/cm²。分析表明,离子束辅助沉积在引入提高样品激光损伤阈值有利因素的同时,也引入 了不利因素,阶段离子束辅助沉积在引入有利因素的同时,有效减少了不利因素的引入,从而提高了样品的激光损伤阈值。     

超短脉冲激光与介质相互作用过程中光学特性的变化

根据雪崩离化模型,分析了飞秒激光脉冲与介质材料相互作用过程中光学特性的变化规律。由于多层膜光学元件的光学特性与材料的折射率密切相关,当飞秒激光照射介质材料时,折射率会随着电场强度分布呈现不同程度的减小,从而会影响光学元件的性能。文中计算了飞秒激光照射多层膜光学元件时的透射光谱曲线,结果表明薄膜材料在发生不可逆损伤之前,光学元件的光谱特性已经发生变化。     

消应力消偏振胶合棱镜二向色膜的设计与制备

根据薄膜的偏振效应,运用Essential Macleod光学薄膜设计软件,完成DVD棱镜中消偏振二向色膜的设计,并采用光控法精确控制膜层厚度,制备出了满足客户要求的消偏振分光棱镜。残余应力大的薄膜容易产生脱膜现象,使得薄膜失去所需功能。为了消除薄膜应力,从膜料之间应力匹配关系及制备工艺2个方面,提出了控制薄膜应力的设计思想,并对其影响进行了讨论,利用镀膜前后光圈变化来反映膜层应力的大小。制备过程中,通过设计制作可调工装来改变镀膜有效孔径,通过调节标准块来满足非常严格的镀膜有效孔径要求。本文给出了该棱镜的消偏振膜系的设计和试验结果。     

离子后处理对TiO2光学薄膜及损伤特性的影响

为了进一步提高TiO_2薄膜的光学特性和激光损伤阈值,采用电子束蒸发技术在K9玻璃上沉积了单层TiO_2薄膜,并用Ar/O混合等离子体对样品进行后处理。通过研究薄膜光谱特性、表面缺陷密度、薄膜表面形貌、薄膜损伤阈值以及薄膜损伤形貌,分析了等离子体后处理时间对TiO_2薄膜激光损伤特性的影响。实验结果表明,随着等离子体后处理时间的增加,薄膜折射率及致密度提高,物理厚度减少,表面粗糙度下降,表面缺陷密度先减少后增加;在1 064nm激光辐射下,TiO_2薄膜的激光损伤阈值从未经等离子后处理的5.6J/cm~2提升至后处理20min的9.65J/cm~2,提升幅度高达72.3%,因此能够更广泛更稳定地应用在激光器中。     

纳秒激光薄膜损伤机理和应用研究

根据我国强激光装置建设和工程任务对强激光薄膜元件的需求,基于对薄膜损伤机制的认识,同济大学提出了“全流程定量化”控制缺陷制备激光薄膜的思路。同济大学利用结构、性质可控人工小球制作定量化人工缺陷,系统研究了基板加工、超声清洗、电场模拟与调控、镀膜材料与工艺选择、镀后后处理、激光预处理、传递与保存等因素对薄膜元件激光损伤特性和损伤规律的影响。从损伤形貌和损伤规律上证实了节瘤缺陷电场增强理论模型的正确性,促进了研究人员对节瘤缺陷损伤机制的认知深度,提出了提升薄膜损伤性能的新途径,创建了新材料,实现了可兼顾环境稳定性、光谱特性和损伤特性的多功能强激光薄膜制备,有力支撑了我国强激光装置建设和激光技术的进一步提升。     

紫外激光单脉冲辐照损伤金属薄膜的数值模拟研究

针对不同厚度的镍膜以及金膜,利用多物理场耦合分析软件COMSOL Multiphysics研究了波长248nm、矩形脉冲宽度14ns激光辐照损伤阈值随膜厚变化的物理过程。本研究与他人的理论计算和实验测得的结果基本一致,研究表明:在高强度单脉冲激光均匀辐照下,金属薄膜表面的损伤主要是由于激光能量在其材料内部的沉积而导致的热效应引起的;当金属薄膜的厚度小于其光学吸收长度时(镍膜厚度<8nm,金膜厚度<12nm),其熔融损伤阈值随着薄膜厚度的增加而减小;当薄膜厚度大于光学吸收长度而小于其热扩散长度时(镍膜厚度8~730nm,金膜厚度12~1 050nm),其熔融损伤阈值随薄膜厚度增加而线性增加;当薄膜厚度大于其热扩散长度时(镍膜厚度>730nm,金膜厚度>1 050nm),其熔融损伤阈值随薄膜厚度的增大基本保持不变。     

大口径衍射光栅的污染损伤与清洗技术研究进展

大口径衍射光栅的污染损伤是目前限制超短超强脉冲激光系统输出能量提升的瓶颈问题。围绕光栅损伤与洁净,分析了衍射光栅的工作原理和结构特性,探究了光栅性能改进措施,得出污染是造成光栅损伤的重要原因之一。在光栅污染损伤过程中,脉冲长度和污染物种类对光栅的损伤特性产生重要影响。并对光栅表面污染物的来源和成分进行分析,认为光栅表面的污染主要分为制作运输污染和运行环境污染两类。多种清洗技术组合是未来发展的重要趋势。分析比较了大口径衍射光栅清洗技术的特点,认为等离子体在线清洗方法可以有效地去除装置运行过程中产生的有机污染物,是未来超短超强脉冲激光系统优选的在线清洗技术。在对比光栅表面污染物表征方式的基础上,综合光栅激光诱导损伤阈值、衍射效率和棱柱机械性能等指标来评价光栅的污染状态和清洗效果。旨在通过大口径衍射光栅的污染损伤特性分析与研究,突破激光系统能量输出的技术瓶颈,拓展大口径光学元件的污染物在线去除思路,为超短超强脉冲激光系统的性能提升奠定基础。     

激光薄膜缺陷研究

薄膜缺陷是影响薄膜元件抗激光损伤的重要因素之一,长期以来一直是人们关注和研究的问题。首先介绍了薄膜缺陷的种类、特点及成因。在此基础上,分析了缺陷对激光损伤阈值的影响以及激光预处理对缺陷的影响。最后,对于如何减少缺陷和提高损伤阈值作了讨论。     

激光预处理技术及其应用

回顾了国内在激光预处理技术研究方面取得的进展。综述了基于激光预处理技术提升基频介质膜、磷酸二氢钾/高掺氘磷酸二氢钾(KDP/DKDP)晶体等光学元件抗激光损伤性能的机理、效果和关键技术。针对高功率激光驱动器中关键光学元件激光负载能力的提高,建立了大口径光学元件激光预处理平台,实现了基频介质膜元件的激光预处理工程化作业。比较了纳秒和亚纳秒脉冲宽度激光对DKDP晶体损伤性能的影响。基于亚纳秒激光预处理后,纳秒激光辐照至14.4J/cm2(5ns)尚未出现"本征"损伤的实验结果,提出了用于DKDP晶体的亚纳秒激光预处理方案,并指出亚纳秒激光预处理技术将成为高功率激光三倍频晶体抗激光损伤性能达标的关键技术。     

High laser damage threshold coatings and damage testing technology

1Introduction Thelaser induceddamagethreshold(LIDT)ofopticalcoatingsisalimitedfactorfordevelop mentofahighpeakpowerlaser.Theoutput fluencesthatcanbeattainedontheNationalIg nitionFacility(NIF)whichcontains192beam linesbuiltbytheUniteStatesareultimatlylim itedbyopticalcoatingswithinthechain.These opticalcoatingsneedtosatisfythefluencere quest,22J/cm2forreflectivemirrorsand11J/cm2forpolarizers(1064nm,3nspulselength).Becausethedamagemechanismofthecoatings understronglaserirradiationisverycom…     

A high accuracy femto-/picosecond laser damage test facility dedicated to the study of optical thin films

A laser damage test facility delivering pulses from 100 fs to 3 ps and designed to operate at 1030 nm is presented. The different details of its implementation and performances are given. The originality of this system relies the online damage detection system based on Nomarski microscopy and the use of a non-conventional energy detection method based on the utilization of a cooled CCD that offers the possibility to obtain the laser induced damage threshold (LIDT) with high accuracy. Applications of this instrument to study thin films under laser irradiation are presented. Particularly the deterministic behavior of the sub-picosecond damage is investigated in the case of fused silica and oxide films. It is demonstrated that the transition of 0-1 damage probability is very sharp and the LIDT is perfectly deterministic at few hundreds of femtoseconds. The damage process in dielectric materials being the results of electronic processes, specific information such as the material bandgap is needed for the interpretation of results and applications of scaling laws. A review of the different approaches for the estimation of the absorption gap of optical dielectric coatings is conducted and the results given by the different methods are compared and discussed. The LIDT and gap of several oxide materials are then measured with the presented instrument: Al(2)O(3), Nb(2)O(5), HfO(2), SiO(2), Ta(2)O(5), and ZrO(2). The obtained relation between the LIDT and gap at 1030 nm confirms the linear evolution of the threshold with the bandgap that exists at 800 nm, and our work expands the number of tested materials.     

Investigation of high power laser coatings

1Introduction Opticalthinfilmcoatingisoneofthewea kestopticsinICFlasersystems.Totally,there aretwoaspectswhichinfluencethedevelopment ofthelasersystems.Thefirstaspectislaser damageresistanceofthecoatings,whichpuzzled coatingengineersformanyyears[1].Although muchgreatprogresshasbeenmadeintheoretical analysisofdamagemechanismsandoptimization ofdepositionprocedures,therewerestillmany sealedproblemsrestrictingthefurtherimprove mentofthelaserinduceddamagethreshold(LIDT)[27].Thelaser induceddama…     

几种新颖的光学镀膜材料

当前光学镀膜技术和应用光学的进展迅速,新的各种形式光学镀膜材料不断涌现。介绍了"预熔化"光学镀膜材料、高阈值激光膜材料、用于树脂基片的冷镀材料和光学镀膜用靶材,并对这几种新型材料的应用情况及国内外的现状进行了简要介绍。     

Effect of laser power on the microstructure and mechanical properties of TiN/Ti3Al composite coatings on Ti6Al4V

Laser nitriding is one of the effective techniques to improve the surface properties of titanium alloys and has potential application in the life extension of last-stage steam turbine blades. However, cracking of surface coating is a common problem due to heat concentration in laser nitriding process. Conventionally, the cracks can be avoided through heat treatment, which may have an important influence on the mechanical properties of coating. Crack-free TiN/Ti3Al IMC coatings on Ti6Al4V are prepared by plasma spraying and laser nitriding. The microstructures, phase constitutes and compositions of the coating are observed and analyzed with scanning electron microscopy(SEM), X-ray diffraction(XRD) and X-ray energy-dispersive spectroscopy(EDS). Microhardness, elastic modulus, fracture toughness of the coating are measured. The results show that the crackand pore-free IMC coatings can be made through the proposed method; with increasing laser power, the amount and density of TiN phase in the coating first increased and then decreased, leading to the similar trend of microhardness and elastic modulus and the reverse trend of fracture toughness of the coating. Both the average microhardness and elastic modulus of the coating increase three times higher than those of the substrate. The volume fraction of the TiN reinforced phase in composite can be controlled by varying the laser power and the cracking problem in laser nitriding process is successfully solved.     

湿法化学刻蚀技术处理抛光熔石英元件

为了提高熔石英元件的抗激光损伤能力,采用基于氢氟酸刻蚀的湿法化学技术去除元件内的激光损伤诱因。利用不同的氢氟酸溶液处理经氧化铈抛光的熔石英元件,并对元件的刻蚀速率、表面洁净度、粗糙度、透过率和激光损伤性能进行评价。研究结果表明,与传统的静态刻蚀相比,在质量分数为6%的氢氟酸刻蚀溶液中引入能量密度约为0.6 W/cm^2的兆声能量对元件的溶解速率和激光损伤性能没有明显的提升作用;化学刻蚀产生的沉积物对元件表面粗糙度和透过率均有不利影响,且沉积物比例与所用的刻蚀液成分和浓度密切相关;经质量分数6%或12%的纯氢氟酸溶液刻蚀(5±1)μm深度后,熔石英元件的激光损伤阈值相比于未刻蚀元件提升了约1.9倍;熔石英元件的激光损伤性能与表面粗糙度和透过率之间不是简单的线性关系,但激光损伤阈值较理想的元件(>20 J/cm^2@3ns)往往具有较光滑的表面,即表面粗糙度<2 nm,由此可以确定有利于熔石英元件激光损伤性能的刻蚀条件,并获得元件表面粗糙度的控制指标。     

Optical coatings for fiber lasers

1Introduction HighPowerFiberLasers(HPFLs)and HighPowerFiberAmplifers(HPFAs)promise anumberofbenefitsintermsoftheirhighopti calefficiency,degreeofintegration,beamquali ty,reliability,spatialcompactnessandthermal management.Thesebenefitsaredrivingtherap idadoptionofHPFLsinanincreasinglywide rangeofapplicationsandpowerlevelsranging fromafewWatts,forexampleinanalyticalap plications,tohigh power>1kWmaterialpro cessing(machiningandwelding)applications.Insilica,neodymium(Nd3+),ytterbium(Yb3+…     

激光熔覆工艺参数对铁基双层涂层组织和残余应力的影响

针对激光熔覆过程中剧烈的温度场变化伴随着应力、应变演化,进而导致零件具有高裂纹敏感性的问题,对不同激光扫描路径及工艺参数下残余应力演变规律进行研究。采用激光熔覆在Q345钢上制备了Fe基双层多道涂层,并以X射线衍射法结合电化学腐蚀剥层法测量沿涂层深度方向的残余应力分布,探究激光扫描路径、功率以及扫描速度对涂层显微组织和应力分布的影响。结果表明：涂层表面和内部为残余压应力,在涂层基体熔合线处残余应力发生突变,热影响区表现为残余拉应力;激光熔覆工艺对涂层残余应力的大小和分布规律有显著影响,当激光扫描路径为轮廓偏置式、激光功率为1.8 kW、扫描速度为0.02 m/s时,涂层具有最优的残余应力分布和成形质量;残余应力的产生主要与激光束对熔池的冲击作用以及熔覆层的非平衡凝固特性有关。