喷嘴型腔对光耦合胶体射流抛光能力的影响

为了实现对工件表面的超精密抛光,建立了紫外光诱导纳米颗粒胶体射流加工系统。对不同型腔结构的两种喷嘴的光耦合纳米颗粒胶体射流抛光的流体动力学特性、抛光工艺、超光滑表面形貌特性进行了研究。首先,根据光-液耦合要求设计了锥柱和余弦光液耦合喷嘴。接着,对所设计的两种光液耦合喷嘴进行了非淹没射流三相流仿真,对比分析了纳米颗粒的流动径迹及流场分布情况。然后,用TiO2纳米颗粒胶体作为抛光液,用两种喷嘴对同一单晶硅工件分别进行了光耦合射流抛光试验。最后,对抛光前后的表面进行了表征及对比分析。结果表明:相同条件下余弦喷嘴获得的流动速度(20.73m/s)和动压力(2.5MPa)均高于锥柱喷嘴的流动速度(7.12m/s)和动压力(0.2MPa),纳米颗粒在余弦喷嘴内的平均停留时间(0.005s)比锥柱喷嘴的平均停留时间(0.023s)更短。相同参数下余弦喷嘴射流抛光后的工件表面粗糙度(Rq=0.810nm,Ra=0.651nm)更低。光耦合纳米颗粒胶体射流抛光中利用余弦喷嘴可获得比锥柱喷嘴更低的表面粗糙度。     

超精密纳米胶体射流抛光试验研究

综合考虑了工件表面原子的微观状态,利用纳米颗粒特殊的高比表面能和高吸附特性,提出了一种可实现工件表面原子级去除的纳米胶体射流抛光方法.利用碱性胶体中纳米颗粒与工件的表面反应,设计了可实现超精密表面加工的纳米胶体射流抛光系统,并利用该系统对K9玻璃进行抛光.试验结果表明,纳米胶体射流抛光可实现超精密光学表面的抛光,抛光后表面粗糙度Ra小于1nm.     

MoS2/Zr复合涂层高速钢刀具的切削性能研究

综合考虑了工件表面原子的微观状态,利用纳米颗粒特殊的高比表面能和高吸附特性,提出了一种可实现工件表面原子级去除的纳米胶体射流抛光方法。利用碱性胶体中纳米颗粒与工件的表面反应,设计了可实现超精密表面加工的纳米胶体射流抛光系统,并利用该系统对K9玻璃进行抛光。试验结果表明,纳米胶体射流抛光可实现超精密光学表面的抛光,抛光后表面粗糙度Ra小于1nm。      

余弦光-液耦合喷嘴参数优化及射流抛光实验

采用流体力学模拟方法,建立了非淹没射流的计算流体动力学(Computational Fluid Dynamics,CFD)模型,研究了在紫外光诱导纳米颗粒胶体射流抛光过程中,使用参数优化前后的余弦光-液耦合喷嘴进行抛光加工的冲击动力学,对比分析了在非淹没射流下参数优化前后余弦光-液耦合喷嘴流场分布的能量特征以及压力分布情况,并使用参数优化后的余弦光-液耦合喷嘴对单晶硅材料表面进行抛光实验。仿真结果表明,胶体束在参数优化后的喷嘴内能够获得更大的出口速度,其最大值v=146. 621 m/s;抛光实验结果表明,相较于抛光前,抛光后的工件表面粗糙度降低了2. 78 nm。     

纳米胶体自激脉冲空化射流抛光技术

为了满足光学复杂曲面的精密、高效加工,提出一种利用空化效应促进射流加工效率的光学表面加工方法——纳米胶体自激脉冲空化射流抛光,并研制了加工系统。采用流体动力学对纳米胶体自激脉冲空化射流抛光中的喷射过程进行了仿真,获得了周期为0.3s的自激脉冲射流典型时刻下加工流场的流体动、静压力、速度、空化效应分布规律。进行了纳米胶体自激脉冲空化射流抛光试验,结果表明该系统能够产生效果良好的自激脉冲空化射流。采用该方法对单晶硅表面进行加工可以得到表面粗糙度为Ra0.904nm(Rms1.225nm)的超光滑表面,此加工表面粗糙度质量与相同加工条件下的普通纳米胶体射流抛光相当,但其加工效率较普通纳米胶体射流抛光能够提升20%左右,能够满足光学表面高效精密加工的需要。     

磨粒射流加工研究现状与进展

综述了不同磨粒射流加工技术国内外研究现状,重点阐述了磨料水射流加工、磁射流加工以及纳米颗粒胶体射流加工的研究进展,展望了其前景,提出了今后的重点研究方向。     

纳米粒子射流微量润滑磨削表面粗糙度预测与实验验证

随着人们环保意识的增强,微量润滑技术已经开始应用于磨削加工中,但是它的冷却效果有限,不能满足高磨削区温度强化换热的要求。而纳米粒子射流微量润滑新工艺的提出,可以有效地解决磨削区换热问题,同时又增强了砂轮与工件界面的润滑特性。针对在纳米粒子射流微量润滑磨削条件下磨削工件表面粗糙度预测,提出一种用于测量砂轮表面形貌的装置以及对磨削工件表面形貌进行模拟仿真的方法。并以两种工件材料为研究对象进行表面形貌数值模拟和实验验证,结果表明该种预测方法能够较准确地对磨削加工工件表面粗糙度进行预测,对于磨削参数的选择具有一定的指导意义。     

矩形光液耦合喷嘴的流场特性分析

设计了用于紫外光诱导纳米颗粒胶体射流技术的多种矩形光液耦合喷嘴,基于仿真结果比较了棱柱矩形喷嘴与圆锥矩形喷嘴的射流速度分布曲线,分析了矩形出口长宽比系数θ对射流特性的影响以及矩形喷嘴冲击射流在工件表面的压力分布和速度分布特性。结果表明,棱柱矩形喷嘴的射流速度分布均匀,当长宽比系数θ大于0.075小于0.3时矩形喷嘴的射流性能最为优异,冲击射流时工件材料的去除区域主要集中在矩形出口的宽度方向。     

单晶铜纳米机械加工的分子动力学模拟与实验的间接对比

以单晶铜微探针纳米刻划加工为例,提出了一种分子动力学模拟与实验的间接对比方法,依次开展了工件材料的弹性常量的定量对比、工件材料机械性能的纳米压痕测量的定量对比、已加工表面形貌的定性对比。单晶铜工件压缩、剪切、拉伸和纳米压痕的分子动力学模拟显示,分子动力学模拟体系的弹性模量与实验测得值相同,压痕后工件表面材料堆积的对称特性与实验结果相符。研究结果表明,所使用的嵌入原子势能函数可以精确地描述单晶铜工件中铜原子之间的相互作用,纳米机械加工的分子动力学模拟具有较高的精度,并且可以很好地预测纳米机械加工的实验结果。     

粘度对含纳米粒子溶液冲蚀单晶硅表面的磨损影响

利用高分辨透射电子显微镜和原子力显微镜观察了含SiO2纳米颗粒溶液冲蚀硅片的表面损伤,考察了纳米颗粒碰撞单晶硅片所导致的微观物理损伤。结果表明,硅片经历一定时间冲蚀后,表面可见纳米尺度的凹坑和划痕,并发现一定厚度的非晶损伤层。抛光液粘度从1.2m Pa.s增加到16m Pa.s时,冲蚀后硅片表面损伤逐渐变得轻微,对应的表面凹坑最大深度从4nm减小到0.5nm,表面损伤层厚度从约12nm减小到4nm。     

Interaction mechanism between nanoparticles and ultra-smooth surface under effect of cavitation

During the nanoparticle colloid jet polishing process to obtain ultra-smooth surface, cavitation is easy to occur because of the intense fluid turbulence. Cavitation interacts with nanoparticles in the colloid solution, which has a great influence on the processing quality of the ultra-smooth surface. In this paper, the collision between nanoparticles and ultra-smooth surfaces under the micro-jet effect formed by cavitation is studied. Molecular dynamics simulation result shows that the collision of nanoparticles changes the atomic position of the collision region of workpiece, resulting in lattice distortion, coordination number and atomic potential energy increased. The ultrasonic cavitation system is used to prepare the monocrystalline silicon workpiece that effected by nanoparticle colloid cavitation. After the process, the dark spots could be observed on the surface of workpiece by SEM. The dark spots are the traces of the collision between the nanoparticle and workpiece, which verify the molecular dynamics simulation results. XPS detection of the surface of monocrystalline silicon workpiece processed by nanoparticle colloid cavitation has been done and the result is slightly different from the workpiece that have not been processed by cavitation. The difference illustrates that the chemical bonding between nanoparticles and monocrystalline silicon surfaces has formed. The simulation and experimental results show that the cavitation is beneficial to the removal of the material of the workpiece by nanoparticles, but it has an adverse effect on the formation of ultra-smooth surface.     

湿式机械化学磨削单晶硅的软磨料砂轮及其磨削性能

针对干式机械化学磨削(Mechanical chemical grinding, MCG)单晶硅过程中易产生磨削烧伤、粉尘多、加工环境差等问题,研制一种可用于湿式MCG单晶硅的新型软磨料砂轮,并对砂轮的磨削性能及其磨削单晶硅的材料去除机理进行研究。根据湿式机械化学磨削单晶硅的加工原理和要求,制备出以二氧化硅为磨料、改性耐水树脂为结合剂的新型软磨料砂轮。采用研制的软磨料砂轮对单晶硅进行磨削试验,通过检测加工硅片的表面/亚表面质量对湿式MCG软磨料砂轮的磨削性能进行分析,并与传统金刚石砂轮、干式MCG软磨料砂轮的磨削性能进行对比。采用X射线光电子能谱仪对磨削前后硅片的表面成分进行检测,分析湿式MCG加工硅片过程中发生的化学反应。结果表明,采用湿式MCG软磨料砂轮加工硅片的表面粗糙度Ra值为0.98 nm,亚表面损伤层深度为15 nm,湿式MCG软磨料砂轮磨削硅片的表面/亚表面质量远优于传统金刚石砂轮,达到干式MCG软磨料砂轮的加工效果,可实现湿磨工况下硅片的低损伤磨削加工。在湿式MCG过程中,单晶硅、二氧化硅磨粒与水发生了化学反应,在硅片表面生成易于去除的硅酸化合物,硅酸化合物进一步通过砂...     

Subsurface damage pattern and formation mechanism of monocrystalline β-Ga2O3 in grinding process

Monocrystalline beta-phase gallium oxide (β-Ga₂O₃) is a promising ultrawide bandgap semiconductor material. However, the deformation mechanism in ultraprecision machining has not yet been revealed. The aim of this study is to investigate the damage pattern and formation mechanism of monocrystalline β-Ga₂O₃ in different grinding processes. Transmission electron microscopy was used to observe the subsurface damage in rough, fine, and ultrafine grinding processes. Nanocrystals and stacking faults existed in all three processes, dislocations and twins were observed in the rough and fine grinding processes, cracks were also observed in the rough grinding process, and amorphous phase were only present in the ultrafine grinding process. The subsurface damage thickness of the samples decreased with the reduction in the grit radius and the grit depth of cut. Subsurface damage models for grinding process were established on the basis of the grinding principle, revealing the mechanism of the mechanical effect of grits on the damage pattern. The formation of nanocrystals and amorphous phase was related to the grinding conditions and material characteristics. It is important to investigate the ultraprecision grinding process of monocrystalline β-Ga₂O₃. The results in this work are supposed to provide guidance for the damage control of monocrystalline β-Ga₂O₃ grinding process.     

水辅助激光加工技术的实验研究

介绍水辅助激光打孔和切割实验研究。研究表明 ,用毫秒级YAG脉冲激光对不锈钢和Al2 O3 陶瓷加工时 ,熔屑易从加工区排出 ,有助于提高加工的表面质量 ;加工单晶硅时 ,加工表面易产生微裂纹 ,使加工质量变差。激光通过水层时 ,有能量损失 ,水层深度越深 ,能量损失越大。     

颗粒微切削表面创成的分子动力学仿真研究

颗粒微切削的性能和行为直接影响工件的表面质量,从材料去除规律和能量变化规律的角度对颗粒微切削作用的表面创成机理进行研究,分别采用EAM势、Morse势、Tersoff势描述单晶铜原子间、工件与颗粒、颗粒刀具原子间的作用力。分析纳米尺度下颗粒切削方向、颗粒切削速度、系综温度对颗粒微切削作用,通过探讨体系动能、体系势能、体系总能对工件原子运动规律的影响及颗粒微切削加工前后键角的变化形态,为阐述颗粒微切削作用的表面创成机理提供理论依据。研究结果表明正交切削比斜切削能获得更好的表面质量,颗粒速度与能量不存在线性关系,颗粒温度对体系能量有直接影响。通过分子动力学数值模拟得到体系的结构信息及相关热力学性质并对分子动力学的微观统计量进行分析计算,寻找合适的加工参数,为颗粒微切削加工工艺的发展提供技术支持。     

CuO, ZrO2 and ZnO nanoparticles as antiwear additive in oil lubricants

This work presents and discusses the antiwear behaviour of nanoparticle suspensions in a polyalphaolefin (PAO 6). CuO, ZnO and ZrO₂ nanoparticles were separately dispersed at 0.5%, 1.0% and 2.0%wt. in PAO 6 using an ultrasonic probe for 2 min. AW properties were obtained using a TE53SLIM tribometer with a block-on-ring configuration. Tests were made under a load of 165 N, sliding speed of 2 m/s and a total distance of 3.066 m. Wear surfaces were analysed by scanning electron microscopy (SEM) and energy dispersive spectrometry (EDS) after wear tests. The study led to the following conclusions: all nanoparticle suspensions exhibited reductions in friction and wear compared to the base oil; the suspensions with 0.5% of ZnO and ZrO₂ had the best general tribological behaviour, exhibiting high friction and wear reduction values even at low deposition levels on the wear surface; CuO suspensions showed the highest friction coefficient and lowest wear per nanoparticle content of 2%; and the antiwear mechanism of nanoparticulate additive was produced by tribo-sintering.     

基于双正交提升小波的单晶硅表面形貌特征提取

为了提高单晶硅太阳能电池的光电转换效率,提出了在单晶硅的表面制作微结构。对微结构的提取,根据单晶硅片表面形貌的特性,选用了提升小波(采用的基小波为bior4.4)。数据处理结果表明,提升小波能将单晶硅表面的微结构很好地提取出来,可以有效地消除边界和畸变效应等问题。对提取的形貌特征进行了特征量的计算,实验数据表明单晶硅表面现有的微结构工艺方法有较大改善的可能性。     

DUCTILE-REGIME MACHINING OF PARTICLE-REINFORCED METAL MATRIX COMPOSITES

This paper presents research results on ultraprecision machining of metal matrix composite (MMC) composed of aluminum matrix and either SiC or A1₂ 0₃ particles. Ductile-regime machining of both SiC and aluminum was evaluated to improve the surface integrity of the composite. Both polycrystal-line diamond (PCD) and single crystalline diamond (SCD) tools were used to ultraprecision machine the composites at a depth of cut ranging from 0 to 1μm using a taper cut. The feedrate was normalized to the tool nose radius. A model is proposed to calculate the critical depth of cut for MMCs reinforced with either A1₂0₃ or SiC. The critical depths of cut were found to be 1 p.m and 0.2 u.m for MMCs reinforced with A1₂ 0 or SiC₃, respectively. Both depth of cut and crystallographic direction of the ceramic particles are the sufficient conditions for ductile-regime machining. Although both tools produce similar surface finish, a SCD tool removed the MMC as chips while a PCD tool simply smeared the surface. A diffusion-abrasion mechanism was suspected to cause the surprising wear of the SCD tools when machining the aluminum/SiC composite.     

Yb∶LuScO_3晶体的超精密光学加工及其激光性能

Yb∶LuScO_3晶体作为固体激光器的新型增益介质,其面形和表面质量严重影响激光器的光束质量,因此探索Yb∶LuScO_3晶体的超精度光学加工工艺参数具有重要意义。本文系统开展了Yb∶LuScO_3晶体超精密光学加工的工艺参数研究,针对Yb∶LuScO_3晶体在加工过程中容易破裂和表面质量较差的问题,提出了拼接上盘和树脂铜盘抛光垫的关键技术。首先,使用COMSOL Multiphysics有限元软件对拼接工艺中选取的不同保护垫料的应力进行仿真。接着,研磨阶段逐步减小B_4C磨料的粒径。然后,粗糙阶段使用树脂铜盘作为抛光垫,并对树脂铜盘抛光垫的作用进行了分析。最后,使用激光二极管泵浦加工好的样品进行激光输出实验。实验结果表明:基于该技术加工后的晶体表面粗糙度RMS=0.296 nm,面形精度PV=53 nm。在1 086 nm处获得了8.3 W的连续激光输出,斜效率为58%。该加工方法可以广泛应用于Yb∶LuScO_3晶体的高精度加工。