基于半导体可饱和吸收镜实现闪光灯抽运Nd:YAG激光器的被动调Q与锁模

基于同一块半导体可饱和吸收镜(SESAM),实现了闪光灯抽运的Nd:YAG激光器的被动调Q与锁模.实验结果表明:腔长较小时,激光器运转在调Q状态,调Q脉冲宽度为90 ns;随着腔长的增加,调Q脉冲中出现调制,而且调制深度随着腔长的增加而加深.当腔长为140 cm,全反射凹面镜曲率半径为300cm时,激光器运转在稳定的被动锁模状态,输出的锁模脉冲序列能量为27 mJ、脉宽为35 ps.实验比较了SESAM器件在平凹稳定腔和平凸非稳腔激光器中实现被动锁模的差异,并给出理论解释.SESAM有望取代有机染料成为闪光灯抽运的Nd:YAG激光器理想的被动锁模器件.     

基于半导体可饱和吸收镜实现闪光灯抽运Nd∶YAG激光器的被动调Q与锁模

基于同一块半导体可饱和吸收镜(SESAM),实现了闪光灯抽运的Nd∶YAG激光器的被动调Q与锁模。实验结果表明:腔长较小时,激光器运转在调Q状态,调Q脉冲宽度为90 ns;随着腔长的增加,调Q脉冲中出现调制,而且调制深度随着腔长的增加而加深。当腔长为140 cm,全反射凹面镜曲率半径为300 cm时,激光器运转在稳定的被动锁模状态,输出的锁模脉冲序列能量为27 mJ、脉宽为35 ps。实验比较了SESAM器件在平凹稳定腔和平凸非稳腔激光器中实现被动锁模的差异,并给出理论解释。SESAM有望取代有机染料成为闪光灯抽运的Nd∶YAG激光器理想的被动锁模器件。     

59—1-1铁黄铜筒形件热反挤压表面重皮与气泡缺陷的分析

分析了59—1-1铁黄铜热反挤压筒形件表面重皮、气泡等缺陷与工艺参数之间的关系及缺陷产生的机理,提出了选择合理的加热温度、挤压速度,减少饼料表面缺陷,合理润滑,以及严格执行工艺操作规程等预防措施,消除了制件缺陷。     

离心熔铸非球面镜镜胚面形偏差工艺参数的敏感性研究

离心熔铸技术在大口径非球面镜镜胚的制造方面具有独特优势。本文通过自行研制的缩比模型实验机进行试验,深入研究了离心熔铸工艺及成型镜胚质量,详细介绍了模具涂层的制备、离心熔铸的加热及冷却等工艺过程,制备了非球面镜镜胚模型。采用数值模拟与试验研究相结合的方法,对所得镜胚面形偏差工艺参数的敏感性进行了研究。分析了模具的热膨胀系数、镜胚冷却速率、直径及加热温度对面形偏差的影响,得到了偏差工艺参数的敏感性规律。通过对面形偏差进行两次迭代补偿,面形偏差值从-84μm降到33μm,补偿后的结果满足设计要求。采用离心熔铸技术,可以制备满足上表面垂直偏差在30~40μm范围内的非球面镜镜胚。     

A mirror electron microscope for surface analysis

The principle of mirror microscopy has been adapted to provide a relatively low resolution surface microscope (<1000 ×), a large transfer width low energy electron diffractometer and a photoelectron analyser in k_|| space. A focused electron beam of ? 10 kV is decelerated through a Johansson lens, reflected in front of the sample and reaccelerated back through the lens to produce an electron image over a field of view of a few microns. The image can be interpreted as a micrograph of work function variations on the surface if other effects (geometry, magnetic field) are uniform. In the LEED mode, diffracted beams virtually retain their positions on the screen over the whole impact energy range used (0.160 V). Secondary electrons are preferentially focused around the lens-gun electro-optic axis, thus effectively filtering them out from the diffraction pattern. The design has an inherently large coherence length, of up to 10⁴ Å. Photoelectrons can similarly be imaged in k_|| space on the detector plane. The addition of energy filtering at the screen allows the two-dimensional Fermi surface to be imaged.     

Microstructural characterization of laser surface melted AISI M2 tool steel

We describe the microstructure of Nd:YAG continuous wave laser surface melted high‐speed steel, namely AISI M2, treated with different laser scanning speeds and beam diameters on its surface. Microstructural characterization of the remelted surface layer was performed using light optical and scanning electron microscopy and X‐ray diffraction. The combination of the three techniques provided new insights into the substantial changes induced by laser surface melting of the steel surface layer. The advantage of the method is that it avoids the difficult and tedious work of preparing samples of this hard material for transmission electron microscopy, which is the technique normally used to study these fine microstructures. A melted zone with a dendritic structure and a partially melted zone with a heterogeneous cellular structure were observed. M₂C carbides with different morphologies were identified in the resolidified surface layer after laser melting.     

Investigation of high power laser coatings

1Introduction Opticalthinfilmcoatingisoneofthewea kestopticsinICFlasersystems.Totally,there aretwoaspectswhichinfluencethedevelopment ofthelasersystems.Thefirstaspectislaser damageresistanceofthecoatings,whichpuzzled coatingengineersformanyyears[1].Although muchgreatprogresshasbeenmadeintheoretical analysisofdamagemechanismsandoptimization ofdepositionprocedures,therewerestillmany sealedproblemsrestrictingthefurtherimprove mentofthelaserinduceddamagethreshold(LIDT)[27].Thelaser induceddama…     

高功率980 nm垂直外腔面发射 激光器(VECSEL)的理论研究

利用周期谐振增益结构设计了以InGaAs/GaAsP/AlGaAs为有源区的980 nm二极管泵浦垂直外腔面发射半导体激光器。根据理论模型计算了纵模限制因子、阈值增益、光增益、输出功率等特征参数,优化了激光器特征参数并设计了OPS-VECSEL结构。理论计算表明,LD泵浦的垂直外腔面发射激光器的输出功率可大于1.0 W。     

激光预处理提升DKDP晶体加工表面的抗损伤能力

针对晶体表面的损伤特性,采用小光斑扫描激光预处理技术预辐照DKDP晶体元件,并采用表面损伤自动探测系统实时分析每个脉冲辐照后晶体表面的损伤情况,比较预处理和未预处理区域的损伤点密度确定表面预处理效果,并进一步模拟分析表面各类缺陷在纳秒强激光辐照下的动态过程,解释激光预处理对精抛表面提升作用的微观机制并分析它对粗抛表面提升不明显的原因。实验结果表明,激光预处理技术对粗抛表面的提升作用并不明显,但是可以大幅度抑制精抛表面的损伤点密度。在本文的实验条件下,晶体表面的抗激光损伤能力可以提升约60%。比较体材料和精抛表面的预处理效果发现:当体材料的抗破坏能力通过预处理提升后,精抛表面的抗激光损伤能力也会提升,由此可见精抛表面的激光预处理效果与体材料性能相关。     

Effects of deep subsurface damages on surface nanostructure formation in laser recovery of grinded single-crystal silicon wafers

A nanosecond pulsed Nd:YVO₄ laser was irradiated on a boron-doped single-crystal silicon wafer after rough and fine grinding processes to recover the grinding-induced subsurface damages. The surface topography of samples was investigated by using a white-light interferometer, a scanning electron microscope, and an atomic force microscope; while the crystallinity was analyzed by a laser micro-Raman spectrometer. It was found that surface nanostructures were generated by the Mullins-Sekerka instability, which remained on the surface under recoil pressure and surface tension. The rough grinding-induced deep subsurface damages influenced the interface instability between liquid and solid silicon during recrystallization process. By increasing pulse width and decreasing laser peak irradiance, the subsurface damage was recovered and a flat surface with surface roughness of ~1 nm Sa was obtained. This study reveals important correlations among grinding-induced latent subsurface defects, laser peak irradiance and nanoscale surface topography formation in laser recovery, which contributes to high quality silicon wafer manufacturing.     

基于微球腔的回音壁模式激光的最小尺寸研究

回音壁模式(WGM)光学微球腔,因具有传播模式稳定闭合、光能量密度极高、结构简单、易于制备等特点,在微球激光的应用上受到广泛关注.不同物理尺寸的微球腔对应的模式特征也大不相同,这一特性被应用于光学传感器、非线性光学等领域.通过二维时域有限差分法(2D-FDTD)对二氧化硅微球进行理论模拟,分析了球腔在不同模式下的电场分...     

胶层厚度对三点支撑反射镜面形的影响

以45nm浸没式光刻物镜中采用的三点支撑反射镜为研究对象,建立了胶层连接的三点边缘支撑结构模型,用以确定胶层厚度对三点支撑反射镜面形变化的影响。分析了重力作用下三点支撑反射镜的面形变化情况,通过解析表达式描述了胶层厚度对反射镜受力变形的影响。建立了"支撑块-胶层-反射镜"的有限元计算模型,针对不同胶层厚度对反射镜的面形变化进行了仿真分析。仿真结果表明:随着胶层厚度的增大,反射镜的面形变化(均方根值RMS)呈现先减小后增大的趋势;当胶层厚度为280μm时,反射镜面形变化的RMS值最小,约为1.25nm。最后,通过实验测量了柔性双脚架三点边缘支撑导致的反射镜面形变化。结果显示:当胶层厚度为200,280,400μm时,反射镜面形的变化结果均与仿真结果一致,验证了本文仿真结果的正确性。     

胶层固化对反射镜面形影响的仿真与试验

研究了用厚胶层进行光学零件之间的黏结操作时,胶层固化后其收缩力对反射镜面形的影响。首先,分析了胶层固化过程中胶层对光学元件产生拉应力的原理,找到了胶层固化过程中产生收缩力的主要因素。其次,建立了反射镜胶结组件的有限元模型,采用等效热变形法仿真分析了胶层收缩对反射镜面形的影响,分析发现胶层的等效线胀系数不能直接采用收缩率代替,而将材料的收缩率转换为胶层的等效线胀系数后,分析结果与试验结果吻合较好。最后,提出了减小胶层收缩对反射镜面形影响的改进方案。试验结果表明:黏胶方案改进后,胶层固化过程中的收缩力引起反射镜中心区域鼓包的PV值从0.574λ减小为0.064λ,镜面面形均方根值从0.127λ减小为0.038λ,这些结果显示胶层固化过程中产生的收缩力对反射镜面形的影响得到了显著改善。