基于LTCC的微流道制作技术研究

在微机电系统的集成制造中,无源器件与多芯片的高密度集成对其承载基板的散热性能提出了极高的要求,而在LTCC基板中制作微流道则为满足这一要求提供了一种解决途径。提出了一种应用有机牺牲材料在LTCC中形成微流道的制作方法,实验结果表明该方法可有效抑制微流道成形过程中的变形,并通过将该方法应用于其它瓷片材料的微流道制作,验证了该方法的实用性与通用性。     

可调谐二极管激光吸收光谱技术测量低温流场水汽露点温度

露点温度是表征气体状态的一个重要参数,针对低温环境的低露点温度精确、快速、连续、原位测量的迫切需要,提出了可调谐二极管激光吸收光谱(TDLAS)技术对水汽露点温度测量的方案。首先与安徽省气象局的冷镜式露点仪一起对比测量标准温湿度箱内的露点温度,验证波长为1 381nm的TDLAS系统露点温度测量的可行性及精度,然后结合一套开放式的测量装置,进行低温度环境(最低温度100K)水汽露点温度原位测量。得到了实时的露点温度值,其中TDLAS露点测量结果与冷镜式露点仪测量结果一致性较好(相差小于1K),TDLAS测量的时间分辨率为0.83s,远远快于冷镜式露点仪的时间响应速度。对于更低气体温度的露点测量,获得了与气体温度变化趋势相同的露点温度,同时得到了随着环境温度降低,水汽逐渐趋向饱和的结论。     

High temperature tribology of ceramics

The friction and wear behaviour of self-mated couples of MgO---ZrO₂, Al₂O₃ and two types of SiSiC were studied under dry sliding conditions in a special pin-on-disc high temperature tribometer. The temperature was varied between 25 and 1000°C, and the sliding speed from 0.03 m s⁻¹ to 3 m s⁻¹. The morphology of the worn surfaces was studied by means of SEM, and their phase distribution by X-ray diffraction and TEM analyses. The results show that the wear coefficients of all couples mostly increase with increasing temperature and sliding velocity. The wear of MgO---ZrO₂ is influenced by tribo-induced phase transformations while α-Al₂O₃ retains its original structure for all test conditions. For SiSiC delamination and fatigue of the interface Si/ß-SiC predominate. At higher temperatures and sliding velocities tribo-oxidation is effective. The friction coefficients lie between 0.5 and 1.0 under steady-state conditions but for short test durations lower values can occur. The couple SiSiC/SiSiC has low friction coefficients at low sliding velocities and temperatures, even if the steady-state region is reached.     

Characterization and modification of carbon nitride films deposited by laser ablation under low energy ion‐beam bombardment

Carbon nitride thin films with N‐concentration about 41% were synthesized by YAG pulsed laser ablation of graphite under a low-energy (<50 eV)nitrogen ion-beam bombardment. The results of electron diffraction (ED) and X‐ray photoelectron spectroscopy (XPS) analyses suggested the existence of β‐C₃N₄ polycrystallite grains in the amorphous carbide matrix of the deposited films. Optical emission spectra of the laser produced graphite plasma using different output wavelengths of a Nd:YAG laser, 355, 532 and 1064 nm were studied. The emission spectra showed that the plasma produced by the 355 and 1064 nm laser ablation contained a high concentration of excited C₂ radicals while in the case of 532 nm ablation, a relatively higher concentration of excited atomic carbon radicals was found in the plasma. A post‐treatment of the deposited films using low‐energy (50 eV) nitrogen ion‐beam bombardment was carried out in order to improve the concentration of β‐C₃N₄ structures in the films. This revised version was published online in July 2006 with corrections to the Cover Date.     

CO2 laser pulse shortening by laser ablation of a metal target

A repeatable and flexible technique for pulse shortening of laser pulses has been applied to transversely excited atmospheric (TEA) CO(2) laser pulses. The technique involves focusing the laser output onto a highly reflective metal target so that plasma is formed, which then operates as a shutter due to strong laser absorption and scattering. Precise control of the focused laser intensity allows for timing of the shutter so that different temporal portions of the pulse can be reflected from the target surface before plasma formation occurs. This type of shutter enables one to reduce the pulse duration down to ~2 ns and to remove the low power, long duration tails that are present in TEA CO(2) pulses. The transmitted energy is reduced as the pulse duration is decreased but the reflected power is ~10 MW for all pulse durations. A simple laser heating model verifies that the pulse shortening depends directly on the plasma formation time, which in turn is dependent on the applied laser intensity. It is envisaged that this plasma shutter will be used as a tool for pulse shaping in the search for laser pulse conditions to optimize conversion efficiency from laser energy to useable extreme ultraviolet (EUV) radiation for EUV source development.     

Parametric analysis and optimization of Nd:YAG laser micro-grooving of aluminum titanate (Al2TiO5) ceramics

Pulsed Nd:YAG Laser offers an excellent role for various micro-machining operations of a wide range of engineering materials such as ceramics, composites, diamond etc. The micro-machining of ceramics are highly demanded in the present industry because of its wide and potential uses in various field such as automobile, electronic, aero-space, and bio-medical engineering applications etc. Aluminum titanate (Al₂TiO₅) has tremendous application in automobile and aero engine industry due to its excellent thermal property. The present research paper deals with the response surface methodology based mathematical modeling and analysis on machining characteristics of pulsed Nd:YAG laser during micro-grooving operation on a work piece of aluminum titanate. In this present study, lamp current, pulse frequency, pulse width, assist air pressure and cutting speed of laser beam are considered as machining process parameters during pulsed Nd:YAG laser micro-grooving operation. The response criteria selected for analysis are deviation of taper and deviation of depth characteristics of micro-groove produced on a work piece made of aluminum titanate (Al₂TiO₅). The analysis of variance test has also been carried out to check the adequacy of the developed regression mathematical models. The optimal process parameter settings are assist air pressure of 1.3 kgf/cm², lamp current of 20.44 amp, pulse frequency of 1.0 kHz, pulse width of 10% of duty cycle, and cutting speed of 10 mm/s for achieving the predicted minimum deviation of taper and deviation of depth of laser micro-groove. From the analysis, it is evident that the deviation of taper angle and deviation of depth of the micro-groove can be reduced by a great extent by proper control of laser machining process parameters during micro-grooving on aluminum titanate (Al₂TiO₅).     

Investigation on grinding temperature in ultrasonic vibration-assisted grinding of zirconia ceramics

The feasibility of ultrasonic vibration-assisted grinding (UVAG) in machining brittle materials, such as zirconia ceramics, has been preliminarily proved. The high temperature generated in grinding processes is a main factor responsible for thermal and surface/subsurface damage. However, there are few reports about grinding temperature for zirconia ceramics by UVAG. In this study, a grinding force model is used for the analysis of grinding temperature in UVAG based on kinematic principle of ultrasonic vibration and brittle material fracture removal mechanism. Then, the heat fluxes equation during grinding process is analyzed. And the grinding temperature model is developed based on theoretical grinding force model and heat fluxes. Finally, pilot experiments are carried out to analyze influence of vibration parameters and process parameters on UVAG temperature and verify the mathematical model. The comparison results show that ultrasonic vibration has an important influence on grinding temperature with the reduction of 10.6%. In addition, there is a good consistency between mathematical model and the experimental results. The average relative error is within 10%. Therefore, the mathematical model could be used to predict the UVAG temperature.     

工程陶瓷材料激光加工原理及应用研究进展

工程陶瓷材料具有优良的综合性能。激光在工程陶瓷材料加工方面体现出强大的发展潜力。介绍陶瓷材料对激光能量的吸收、反射和热传导过程,重点描述了温度升高对陶瓷材料产生的影响,综述了激光打孔、切割、车削和铣削等应用方向的研究进展。     

工程陶瓷的激光加热辅助切削技术

激光加热辅助切削工程陶瓷技术即使用激光作为外加热源先于刀具加热软化陶瓷工件,然后再使用刀具将软化的材料去除。较高的剪切变形区温度降低了陶瓷材料的屈服应力和硬度,陶瓷变形特征从脆性转变为塑性或者准塑性,从而提高切削效率,延长刀具使用寿命,有望解决陶瓷加工中的低效率和高成本现状。从激光加热辅助切削工程陶瓷研究进展、激光束的整合,以及切削机理等方面,对激光加热辅助加工工程陶瓷做了较为全面的论述。     

Bioimaging of metals by laser ablation inductively coupled plasma mass spectrometry (LA‐ICP‐MS)

The distribution analysis of (essential, beneficial, or toxic) metals (e.g., Cu, Fe, Zn, Pb, and others), metalloids, and non‐metals in biological tissues is of key interest in life science. Over the past few years, the development and application of several imaging mass spectrometric techniques has been rapidly growing in biology and medicine. Especially, in brain research metalloproteins are in the focus of targeted therapy approaches of neurodegenerative diseases such as Alzheimer's and Parkinson's disease, or stroke, or tumor growth. Laser ablation inductively coupled plasma mass spectrometry (LA‐ICP‐MS) using double‐focusing sector field (LA‐ICP‐SFMS) or quadrupole‐based mass spectrometers (LA‐ICP‐QMS) has been successfully applied as a powerful imaging (mapping) technique to produce quantitative images of detailed regionally specific element distributions in thin tissue sections of human or rodent brain. Imaging LA‐ICP‐QMS was also applied to investigate metal distributions in plant and animal sections to study, for example, the uptake and transport of nutrient and toxic elements or environmental contamination. The combination of imaging LA‐ICP‐MS of metals with proteomic studies using biomolecular mass spectrometry identifies metal‐containing proteins and also phosphoproteins. Metal‐containing proteins were imaged in a two‐dimensional gel after electrophoretic separation of proteins (SDS or Blue Native PAGE). Recent progress in LA‐ICP‐MS imaging as a stand‐alone technique and in combination with MALDI/ESI‐MS for selected life science applications is summarized. © 2009 Wiley Periodicals, Inc., Mass Spec Rev 29:156–175, 2010     

烧结温度对ZnO压敏陶瓷电性能的影响

为了获得高电位梯度氧化锌压敏电阻片,采用了传统陶瓷烧结工艺制备ZnO压敏电阻,研究不同烧结温度(1135~1155℃)对ZnO压敏电阻器电性能的影响。实验结果表明,随着烧结温度的增加,ZnO压敏陶瓷的晶粒尺寸增大,电位梯度降低且致密度提高。烧结温度为1135℃时,压敏电阻的电位梯度高达329V/mm,漏电流为8μA,致密度为96.4%。当烧结温度为1140℃时,压敏电阻的电位梯度为301V/mm,漏电流为4μA,致密度为96.6%。通过比较烧结温度为1135℃和1140℃的实验结果,发现烧结温度为1140℃时,ZnO压敏陶瓷的综合电性能达到最佳。     

Impact of low temperature on smartphone battery consumption

Most smartphones employ Li-ion （or Li-polymer） batteries as their power sources.Though battery consumption significantly varies along with the cell temperature,which is severely affected by ambient temperature,many studies simply assume that the cell temperature is equal to room temperature.Furthermore,there has not been any study that has quantitatively analysed the impact of ambient temperature on battery consumption.In this paper,it can be shown that low ambient temperature significantly affects battery consumption of a smartphone.To show the impact of the cell temperature on battery consumption,the battery consumption at low ambient temperature （-20 ℃） is compared with that at room temperature.As a result,high power consumption results in more severe battery consumption at low ambient temperature.Real measurements show that the battery consumption increases by up to 113.1％ at low ambient temperature in comparison with the same discharge condition at room temperature.     

切向气流作用下激光辐照对尼龙材料的热烧蚀规律

为了研究切向气流对激光毁伤低慢小目标的影响,采用仿真分析和实验相结合的方法研究了在激光辐照典型低慢小目标材料尼龙66过程中切向气流对激光烧蚀作用的影响。建立了激光烧蚀尼龙的简化物理模型,利用红外热像仪分别研究了1.5s和4s两个时刻激光辐照下尼龙材料的温度场分布和烧蚀形貌,并与无气流条件下的结果进行对比。实验表明,切向气流对激光烧蚀尼龙材料过程的影响主要分两个阶段,在辐照前段时间切向气流减缓了激光辐照下尼龙66材料的温升,抑制了激光对尼龙材料的烧蚀作用;但随着温度的升高,热分解产物增多使激光屏蔽作用增强,切向气流减轻了目标材料表面热分解产物对激光的衰减,并为尼龙材料的氧化烧蚀提供更多氧气,促进了烧蚀作用。最后对切向气流下激光烧蚀尼龙的过程进行了ANSYS仿真,实验结果和仿真结果基本一致,从而验证了理论的可靠性。     

Experimental study on operating temperature in laser-assisted milling of silicon nitride ceramics

Operating temperature plays a significant role in laser-assisted milling (LAMill) of silicon nitride ceramics. Understanding the features of temperature variation can improve the performance of LAMill. Based on the analysis of operating temperature, this paper aims to provide guidelines on parameter selection for LAMill from three aspects: laser?Csilicon nitride interaction mechanism, effect of parameters on temperature, and evaluation of surface quality of the machined workpieces. First, the laser?Csilicon nitride interaction mechanism is explored via heating experiments. It is found that the formation of silica bubbles at the thin top layer of the workpiece can slightly increase the temperature of silicon nitride workpieces due to the heat energy released from the oxidation process. Then, the trends of temperature variations in LAMill are obtained through a parametric study. The key parameters such as laser power, laser beam diameter, feed rate, and preheat time are highlighted. At last, the surface quality of the machined workpieces under different operating temperatures is evaluated in terms of edge chipping, surface finish, and surface residual stress. It is shown that high operating temperature leads to low cutting force, good surface finish, small edge chipping, and low residual stress. In addition, the temperature range for brittle-to-ductile transition should be avoided since the cutting force decreases slowly due to the rapid increase of fracture toughness.     

Production and acceleration of ion beams by laser ablation

In this work, we present a new pulsed laser ablation technique to obtain energetic ion beams. The accelerator we made is a compact device able to extract and accelerate the ionic components of plasma up to 160 keV per charge state. It is composed by a generating chamber containing an expansion chamber used like first electrode. Next, a second electrode connected to ground and a third electrode connected to negative voltage are used. The third electrode is used also as Faraday cup. By the analysis of the ion signals we studied the plume parameters such as TOF accelerated signals, charge state, and divergence.     

GHz bursts in MHz burst(BiBurst) enabling high-speed femtosecond laser ablation of silicon due to prevention of air ionization

For the practical use of femtosecond laser ablation, inputs of higher laser intensity are preferred to attain high-throughput material removal. However, the use of higher laser intensities for increasing ablation rates can have detrimental effects on ablation quality due to excess heat generation and air ionization. This paper employs ablation using BiBurst femtosecond laser pulses, which consist of multiple bursts(2 and 5 bursts) at a repetition rate of 64 MHz, each containing multiple intra-pu...     

Pulsed UV laser ablation of a liquid crystal polymer

The topographical and chemical characterizations caused by irradiation of a pulsed UV laser were studied experimentally and theoretically for Vectra A950, a thermoplastic pure liquid crystal polymer (LCP). Effects of laser fluence on the crater sizes and morphologies were analyzed and discussed. Based on energy balance, an analytical model was presented to simulate the dependence of ablation rate on laser fluence. The FTIR spectroscopy was used to investigate the mechanism of 355 nm UV YAG laser ablation of LCP.     

激光消融制备纳米颗粒的研究进展

分别概述了激光消融在制备金属及其氧化物、半导体和有机化合物纳米颗粒中的应用、目前的研究现状、技术特点及其发展趋势     

激光辐照下尼龙纤维材料的热烧蚀规律

为了得到激光辐照下尼龙材料的烧蚀规律,利用红外成像的方法分析了近红外连续激光辐照尼龙材料引起的热烧蚀现象。用摄像机和红外热像仪记录了尼龙材料在烧蚀过程中的主要现象和温度变化过程,并对实验结果与ANSYS仿真结果进行了对比。使用波长为976nm,输出功率密度为1×105 W/m2、光斑高斯半径为10mm的光束对尼龙材料进行照射的结果显示:开始时尼龙材料温度迅速上升,发生膨胀,并逐渐熔融分解;随着照射时间的增加,尼龙材料温度变化变缓,熔融部分向光斑边缘退化;当达到一定温度时,材料温度不再升高。由于受光束质量、材料性能不均匀、熔融部分向边缘退化等因素影响,得到的实验烧蚀结果与理论烧蚀结果稍有差异,但基本吻合,验证了实验方法及ANSYS数值仿真方案的可行性。     

国产LTCC浆料的应用研究

为了深入研究国产低温共烧陶瓷(Low Temperature Co-fired Ceramic,LTCC)浆料的性能和工程应用前景,推动LTCC浆料国产化进程,文中从工程应用的角度出发,使用部分国产LTCC浆料和进口LTCC生料带按LTCC工艺流程制作基板并进行了相应的测试和研究.研究内容主要包括国产LTCC浆料在进口LTCC生料带上的工艺性能、匹配性能以及基于国产LTCC浆料研制的LTCC基板的性能和可靠性等.研究结果表明,实验所使用的国产LTCC浆料的工艺性能和匹配性能基本满足要求,基于国产LTCC浆料研制的基板的性能和可靠性与基于进口LTCC浆料研制的基板相当.