氮分压对反应溅射(Ti,Al)N薄膜微结构与力学性能的影响

采用Ti-Al复合靶在不同氮分压下制备了一系列(Ti,Al)N薄膜,用EDS、XRD、TEM和微力学探针表征了薄膜的沉积速率、化学成分、微结构和力学性能.结果表明,氮分压对(Ti,Al)N薄膜影响显著:合适的氮分压可以得到化学计量比的(Ti,Al)N薄膜,薄膜为单相组织,并呈现(111)择优取向,最高硬度和弹性模量分别达到34.4GPa和392GPa;过低的氮分压不但会造成薄膜贫氮,而且薄膜中的Al含量偏低,硬度不高;过高的氮分压下,由于存在"靶中毒"现象,尽管薄膜的成分无明显变化,但会大大降低其沉积速率,并使薄膜形成纳米晶或非晶态结构,薄膜的硬度也较低.     

Si(100)衬底上激光分子束外延制备高质量TiN薄膜

采用激光分子束外延(LMBE)技术在Si(100)上制备了高质量的TiN薄膜.对N2分压和激光脉冲能量对TiN薄膜晶体结构、生长模式和表面形貌影响的研究表明,TiN单晶薄膜呈(200)择优取向,在N2分压为10-1 Pa时,薄膜的结晶度高且表面平整致密.随着N2分压的增加,TiN(200)衍射峰向低角度移动.激光脉冲能...     

氮分压对电弧离子镀CrNx薄膜结构与性能的影响

采用电弧离子镀技术,在不同n2分压下沉积Cr/CrNx薄膜.X射线衍射技术、努氏硬度计和UMT型球-盘摩擦试验机、M342-2型腐蚀测量系统分别测试了薄膜相结构、显微硬度、摩擦磨损和抗腐蚀性能.研究了N2分压对薄膜相组成、硬度、摩擦磨损和抗腐蚀性能的影响.结果表明随着N2分压的升高,薄膜由Cr2N(211)相过渡到CrN(220)相;薄膜硬度出现两个极值,对应于单相Cr2N和CrN;与钢基体相比,N2分压为0.35 Pa时制备的CrNx薄膜具有良好的耐磨性能和抗腐蚀性能.     

Nd:YAG激光辐照碳纤维复合材料的质量烧蚀

通过实验研究了连续Nd:YAG激光辐照下碳纤维环氧树脂复合材料的质量烧蚀规律.结果表明:当激光功率密度大于10 kW/cm2时,材料烧蚀质量与激光辐照能量成正比关系;在同样激光辐照能量下,半径为0.65 mm的激光辐照引起的复合材料的质量烧蚀率比半径为5.5 mm的激光辐照的结果大一倍;激光功率在燃烧阈值附近时,燃烧现象引起质量烧蚀率的波动.     

基于人工神经网络-粒子群算法激光烧蚀制备PDPhSM基纳米复合薄膜的工艺优化

为有效缩短脉冲激光烧蚀制备有机硅聚合物聚二苯基硅亚甲基硅烷(Polydiphenylsilylenemethyle,PDPhSM)基纳米复合薄膜工艺中繁琐的试验过程,本文将用径向基函数(Radial BasisFunction,RBF)人工神经网络对聚合物PDPhSM基纳米复合薄膜的制备工艺与聚合效率之间的关系进行建模;讨论了激光能量密度、环境压强、靶衬距离、沉积时间和聚合效率之间的关系.在此基础上,采用粒子群(Particle Swarm Optimiza-tion,PSO)算法对其进行工艺优化,200代以后,粒子素质明显提高,k值趋近于0,群体达到了最优,工艺参数的优化结果较为满意.从而为薄膜材料工艺优化研究探索了一条崭新的途径.     

脉冲激光沉积生长单相的Nd_(1.85)Ce_(0.15)CuO_4薄膜及其激光感生热电电压效应

采用脉冲激光沉积(PLD)技术,在SrTiO3单晶衬底表面外延生长单相的1.85 Ce0.15 CuO4(NCCO)薄膜,并首次在斜切衬底上生长的NCCO薄膜中探测到激光感生热电电压(LITV)信号.实验研究表明,在低沉积温度、高沉积氧压和较大的激光脉冲重复频率下生长的NCCO薄膜中存在Nd1-xCexO<<1.75>,(NCO)杂相,是由于衬底表面吸附粒子扩散迁移困难所致;而高温下真空退火导致杂相的产生,则与NCCO的结构相变引起的热分解有关.通过提高沉积温度、降低沉积氧压和激光脉冲重复频率、并采用低温(T≤800℃)真空退火的方式,可以抑制杂相的形成.制备得到的单相的NCCO外延薄膜是一种新型的原子层热电堆材料,能量为1mJ的紫外脉冲激光的辐照,可以在倾斜的NCCO薄膜中诱导产生0.8V的LITV信号.     

硅碳比对Si(111)表面SSMBE异质外延SiC薄膜的影响

利用固源分子束外延(SSMBE)生长技术, 在不同的硅碳蒸发速率比(Si/C)条件下, 在Si(111)衬底上生长SiC单晶薄膜. 利用反射式高能电子衍射(RHEED)、X射线衍射(XRD)、原子力显微镜(AFM)和傅立叶变换红外光谱(FTIR)等实验技术, 对生长的样品形貌和结构进行了研究. 结果表明, 在Si/C比(1.1:1.0)下生长的薄膜样品, XRDω扫描得到半高宽为2.1°; RHEED结果表明薄膜具有微弱的衍射环, 有孪晶斑点. 在Si/C比(2.3:1.0)下生长的薄膜, XRDω扫描得到的半高宽为1.5°, RHEED显示具有Si的斑点和SiC的孪晶斑点. AFM显示在这两个Si/C比下生长的样品表面都有孔洞或者凹坑, 表面比较粗糙. 从红外光谱得出 薄膜存在着比较大的应力. 但在Si/C比(1.5:1.0)下生长的薄膜样品, XRDω 扫描得到的半高宽仅为1.1°; RHEED显示出清晰的SiC的衍射条纹, 并可看到SiC的3×3表面重构, 无孪晶斑点; AFM图像表明, 没有明显的空洞, 表面比较平整. FTIR谱的位置显示, 在此Si/C比下生长的薄膜内应力比较小. 因此可以认为, 存在着一个优化的Si/C比(1.5:1.0), 在这个Si/C比下, 生长的薄膜质量较好.     

溅射时氧分压对LaNiO3-x薄膜性能的影响

在较低的衬底温度(260 0C)和不同氧分压下,采用射频溅射在(111)Si衬底上制备出了具有(100)择优取向的 LaNiO3薄膜. SEM分析表明薄膜具有光滑连续的表面和均匀的晶粒尺寸. I-V特性表明薄膜均具有金属导电性,且随着氧分压的增加,电阻率逐步降低并达到一个稳定值 10Ω@μ m.实验结果同时表明,随着氧含量的增加,Ni、 La含量比单调增大,并且当溅射气氛中的氧气分压在 20%～30%范围时,Ni、 La含量比为 1:1而且比较稳定.当氧气分压为30%时,薄膜的晶面间距达到最小值.制备 LaNiO3薄膜的最佳氧气分压应该控制在 30%左右.     

Fe/Sn共掺杂In_2O_3稀磁半导体薄膜的磁性和输运性质

采用脉冲激光沉积方法在Al_2O_3衬底上制备了Fe/Sn共掺杂的(In_(0.93)Fe_(0.05)Sn_(0.02))_2O_3薄膜,研究了沉积过程的氧气分压对薄膜结构、磁性和输运性质的影响,以揭示其铁磁性来源和机制。(In_(0.93)Fe_(0.05)Sn_(0.02))_2O_3薄膜为单相立方In2O3结构,Fe和Sn取代了In2O3中In的位置。在不同氧气分压下制备的(In_(0.93)Fe_(0.05)Sn_(0.02))_2O_3薄膜具有明显的室温铁磁性,随着氧气分压的增加,薄膜的铁磁性减小。输运测量表明,(In_(0.93)Fe_(0.05)Sn_(0.02))_2O_3薄膜为n型半导体,载流子浓度约为1020 cm-3,在低温时具有明显的磁电阻效应。研究结果表明(In_(0.93)Fe_(0.05)Sn_(0.02))_2O_3薄膜的铁磁性是本征的,载流子浓度对薄膜的铁磁性有重要影响。     

TiC薄膜的性能研究

采用磁过滤直流电弧离子镀法在不同的CH4分压下制备了一系列的TiC薄膜,利用XRD和EDX表征了薄膜的相组成和微结构,用MCMS-1摩擦磨损测试仪,研究了不同CH4分压对薄膜摩擦性能的影响,采用DURAMIN-10型丹麦全自动显微硬度仪,研究不同CH4分压对薄膜硬度的影响.结果表明,不同CH4分压对薄膜的相组成、微结构和力学性能均有明显的影响,高的CH4分压下,薄膜的摩擦系数较低,CH4分压提高到0.15 Pa左右,薄膜内形成晶粒细小的单相TiC,进一步提高CH4分压,薄膜呈现非晶态.     

Mimicking Bubble Use in Nature: Propulsion of Janus Particles due to Hydrophobic‐Hydrophilic Interactions

Bubbles are widely used by animals in nature in order to fulfill important functions. They are used by animals in order to walk underwater or to stabilize themselves at the water/air interface. The main aim of this work is to imitate such phenomena, which is the essence of biomimetics. Here, bubbles are used to propel and to control the location of Janus particles in an aqueous medium. The synthesis of Janus SiO₂‐Ag and polystyrene‐Ag (PS‐Ag) particles through embedment in Parafilm is presented. The Janus particles, partially covered with catalytically active Ag nanoparticles, are redispersed in water and placed on a glass substrate. The active Ag sites are used for the splitting of H₂O₂ into water and oxygen. As a result, an oxygen bubble is formed on one side of the particle and promotes its propulsion. Once formed, the bubble‐particle complex is stable and therefore, can be manipulated by tuning hydrophilic‐hydrophobic interactions with the surface. In this way a transition between two‐ and three‐ dimensional motion is possible by changing the hydrophobicity of the substrate. Similar principles are used in nature.     

银离子掺杂TiO2薄膜的物理性能研究

不同剂量的银离子被注入到采用反应磁控溅射(RMS)制备出的TiO2薄膜中.实验发现,薄膜的成分以二氧化钛和单质银为主,薄膜中可以看到银的纳米晶颗粒.注入的银离子在薄膜中呈近高斯分布,分布峰随注入剂量的增加而向表层移动.银离子注入后原本致密平整的TiO2薄膜表面出现了沟壑和晶粒粗化现象,且均方根粗糙度随注入剂量的增加而增加.不同的注入剂量对薄膜的表面能没有明显的影响.     

Nanogranular Fe-Cu-Ag thin films: structure, microstructure and giant magnetoresistance

Fe(x)Cu(y)Ag(z) granular thin films with several compositions were prepared by dc magnetron sputtering. These films consist of small Fe magnetic particles embedded in a nonmagnetic CuAg matrix. Structure, microstructure, morphology and magnetotransport properties were studied. The compositions of these samples were determined by energy-dispersive X-ray analysis. X-ray diffraction results showed strong Ag(111) peaks and broad Cu(111) peaks in all the samples. The variation of the (111) lattice spacings indicates a partial intermixing of Fe, Cu and Ag atoms. Microstructural studies using transmission electron microscopy (TEM) on a selected sample showed only Ag reflections and no reflection from Cu and Fe. Both XRD and TEM studies did not reveal any diffraction peak due to Fe and Cu for this sample. The fitting of the experimental grain size data obtained from TEM micrograph to the lognormal distribution function has allowed an estimation of the average grain diameter of 3.7 nm. The surface image of the Fe22Ag78 film observed using a scanning electron microscope showed the presence of droplet like Ag particles on the film surface. The Cu substitution results in smooth films without any Ag particles on the surface. Surface morphology by atomic force microscopy shows that the Fe39Cu13Ag48 film has a surface roughness of 0.75 nm. Finally, we have obtained a maximum giant magnetoresistance ratio of 3.2% in these films measured at 300 K for an in-plane magnetic field of 20 kOe.     

掺银TiO2薄膜的亲水特性

采用溶胶—凝胶法及浸渍提拉法在普通的载玻片上制得含不同掺银量的TiO2薄膜，通过对薄膜及相应粉体的XRD、XPS及薄膜致密度的测量，分析了银的掺杂量对TiO2薄膜亲水特性的影响。结果表明：TiO2薄膜中银的掺杂量≤0．635mol％时有利于TiO2薄膜亲水性能的改善；表面羟基和表面桥氧的含量对TiO2薄膜的亲水性能均有直接影响。     

Microstructural analysis and mechanical properties of TaN-Ag nanocomposite thin films

TaN-Ag nanocomposite thin films with Ag nanoparticles dispersed in TaN matrix and surface were prepared by reactive co-sputtering of Ta and Ag in a plasma of N₂ and Ar. The films were then annealed using RTA (Rapid Thermal Annealing) at various annealing times and annealing temperatures to induce the nucleation and growth of Ag particles in the TaN matrix and on the film surface. Transmission electron microscopy (TEM) and field emission scanning electron microscopy (FESEM) were applied to examine the microstructure and surface morphology of TaN-Ag thin films. It is found that Ag tends to precipitate on the columnar boundaries when Ag concentration is low. In this case, the hardness as well as the resistance-to-crack can be enhanced. When Ag concentration is high, the TaN columnar structure is disrupted which can reduce the hardness and resistance-to-crack. Overall, the results reveal that the hardness and crack resistance of these films can be controlled by varying Ag contents and annealing conditions.     

Preparation of Ag nanoparticles coated tetrapod-like ZnO whisker photocatalysts using photoreduction

Ag/tetrapod-like ZnO whisker (T-ZnOw) photocatalysts with different Ag loadings were synthesized by photoreduction of Ag⁺ on the surface of T-ZnOw. The chemical composition, morphology and photocatalytic properties of Ag/T-ZnOw photocatalysts were characterized and studied in detail. It is found that metal Ag can exist either as nanoparticles or as agglomerates through varying the Ag/ZnO molar ratio (MR). In photodegradation of methyl orange, enhanced degradation rates are achieved by all Ag/T-ZnOw photocatalysts due to increased separation efficiency of photogenerated electron and hole pairs. Specifically, the photocatalytic activities of Ag/T-ZnOw photocatalysts increase with increasing Ag/ZnO MR from 2.4 to 12%. However, further increasing the Ag/ZnO MR to 14.4% induces the formation of more agglomerates, which can act as recombination centers of photogenerated electron and hole pairs, leading to decreased photocatalytic activity of the photocatalyst.     

Tunable plasmonic coupling between silver nano-cubes and silver nano-hole arrays

A quasi-three-dimensional (quasi-3D) system composed of Ag nano-cubes and Ag nano-hole arrays was fabricated through a low cost chemical process. The coupling of localized surface plasmons (LSPs) in the cube-hole array system has been investigated through surface-enhanced Raman scattering (SERS) from Rhodamine 6G (R6G) molecules. A SERS enhancement factor as large as 1.1 × 10(8) can be achieved due to this plasmonic coupling effect, and is highly sensitive to geometrical parameters, such as cube-hole array distance, hole diameter, inter-hole spacing and Ag film thickness.     

原子氧对金属银和有机防护涂层的侵蚀

用光电子能谱（XPS）和扫描电镜（SEM）观测了在模拟原子氧（AO）环境中Ag及在其表面涂覆的有机防护层的表面，研究了表面的形貌和质量损失。结果表明，AO对Ag有较严重的侵蚀作用，使原来光亮的表面失去光泽，变得粗糙，采用环氧树脂，聚胺酯或醇酸树脂作为防护涂层，AO辐照后其表面形貌也发生了较大变化，表明腐蚀严重，采用有机硅作为涂层，被AO侵蚀后其表面形貌的变化甚小，质量损失较小，表明这种涂层具有较明显的防护效果。经AO辐照后有机硅涂层表面生成致密的氧化硅膜层，对抑制AO的进一步侵蚀具有关键作用。     

The sub-micron hole array in sapphire produced by inductively-coupled plasma reactive ion etching

The sub-micron hole array in a sapphire substrate was fabricated by using nanosphere lithography (NSL) combined with inductively-coupled-plasma reactive ion etching (ICP-RIE) technique. Polystyrene nanospheres of about 600 nm diameter were self-assembled on c-plane sapphire substrates by the spin-coating method. The diameter of polystyrene nanosphere was modified by using oxygen plasma in ICP-RIE system. The size of nanosphere modified by oxygen plasma was varied from 550 to 450 nm with different etching times from 15 to 35 s. The chromium thin film of 100 nm thick was then deposited on the shrunk nanospheres on the substrate by electron-beam evaporation system. The honeycomb type chromium mask can be obtained on the sapphire substrate after the polystyrene nanospheres were removed. The substrate was further etched in two sets of chlorine/Argon and boron trichloride/Argon mixture gases at constant pressure of 50 mTorr in ICP-RIE processes. The 400 nm hole array in diameter can be successfully produced under suitable boron trichloride/Argon gas flow ratio.     

醇辅助还原法可控制备Cu@Ag核壳颗粒及其抗氧化性能

研究了一种Ag包裹量可控制备Cu@Ag核壳颗粒的方法,其中利用乙二醇(EG)作为还原剂,AgNO3作为Ag源。探讨了不同分散剂,明胶、十六烷基三甲基溴化铵(CTAB)、聚乙烯吡咯烷酮(PVP)对Cu@Ag核壳颗粒形貌的影响,其中明胶作为分散剂时的包覆效果最佳。以明胶作为分散剂,当AgNO3浓度为0.93mol/L时,制得了包裹均匀的Cu@Ag核壳颗粒,其压实薄膜电阻仅为1.6Ω/sq,具有良好的导电性。通过表面Ag的包裹,Cu@Ag核壳颗粒在空气中放置4个月后,压实薄膜电阻为12.6Ω/sq,表现出持久的抗氧化性能。醇还原法可以实现在Cu颗粒表面快捷可控地制备Ag包裹层,包覆率高,且Cu@Ag复合颗粒抗氧化性能持久,适用于工业生产。